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Defects in diamond thin films.

Defects in diamond films, produced by the filament-assisted chemical-vapor deposition of methane and hydrogen as a function of total gas pressure and substrate temperature, were investigated by electron-paramagnetic-resonance measurements. We found an isotropic g value (2.0028±0.0002) independent of growth conditions. The peak-to-peak linewidth increases with pressure from 3.5 to 5 G and the spin density decreases with increasing pressure and temperature and varies between 10 19 and 10 17 spins/cm 3