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MEMS/NEMS and Their Applications in Internet of Things, Energy Harvesting, Sensors and Actuators

Microelectromechanical Systems (also known as 'Microsysetms') has been a multidisciplinary research topic since 1960s. It has attracted interesting applications in several major areas, such in energy sector, bioscience and communication industry. They have clear advantages of very small dimensions and low power consumptions. Some successful devices have already been developed in the commercial market. In the recent 20 years, following the developing trend of CMOS industry, the size of micrometer devices has been further reduced to the range of nanometres, hence a new concept, NEMS (nanoelectromechanical systems) has been introduced, which resulted in many high-quality publications devoted in nanoscale devices. Given that more interesting phenomena of micro&nano devices were unveiled, applying MEMS/NEMS in many other areas is inevitable. For the aim of developing novel micro/nano devices, we have been working on the following topics. 1) Developing novel micro/nano energy harvesting devices (including piezoelectric energy harvesters from mechanical movements, and thermoelectric devices). 2) Multiphysical modelling of nanoscale devices and structures. 3) Exploitation of micro sensors and actuators in practical applications. This talk will introduce various applications for MEMS/NEMS and our research activities in the above mentioned directions.