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A Ceramic Plasma Torch for Determining Silicon Content in HF Solutions by Inductively Coupled Plasma Atomic Emission Spectrometry

A ceramic plasma torch has been developed for plasma spectrometers–such as an inductively coupled plasma atomic emission spectrometer (ICP-AES) or an inductively coupled plasma mass spectrometer (ICP-MS)–used to measure trace amounts of Si in HF solutions. Pyrolytic-boron nitride (PBN) and alumina are studied as ceramic torch materials. The PBN torch can be used when the HF concentration is low; however, it cannot be used when the HF concentration is high since contamination of B due to thermal decomposition is significant. When the alumina torch is used, the background spectrum of Si can be decreased to 1/65 of that obtained when using a conventional torch–this increment corresponds to less than 0.2 µg/m l of Si and a 1-µg/m l Si solution can be determined with a relative standard deviation of about 8% even at 10% (v/v) HF concentration.