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High-repetition-rate laser-induced damage of indium tin oxide films and polyimide films at a 1064 nm wavelength

Experiments and thermal modeling of indium tin oxide transparent conductive thin film and polyimide alignment thin film coated on fused silica substrates damaged with a 1064 nm high-repetition-rate laser are described. High-repetition-rate laser irradiation results in damaged morphologies of the bulge at a low laser power density and formation of a pit in the center of the bulge at higher laser power density. The damage process that is consistent with the observations as a function of laser power density and irradiation time is related to thermal effect. Simulation of the temperature-rise by exposure to high-repetition-rate laser describes the thermal effect with different pulse oscillation.