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Crystal structures of high-pressure phases formed in Si by laser irradiation.

Internal modification induced in Si by a permeable pulse laser was investigated by transmission electron microscopy. A laser induced modified volume (LIMV) was a cylindrical rod along the track of a laser beam with the head at the focus of the laser beam. In the LIMV, beside voids, dislocations, micro-cracks and what had been supposed to be an unidentified high-pressure phase (hpp) of Si were observed in LIMV. The so-called 'hpp' was identified mostly as diamond Si.