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Modeling and simulation of the effect of surface roughness on properties of silicon-on-insulator optical ring resonator coupled with a straight waveguide

Abstract. This paper describes a relatively general method based on finite-difference time-domain for modeling the scattering loss of silicon nano-optical waveguides as well as quality factor Q of the waveguide resonators. This paper explains how the surface roughness affects the performance of silicon-on-insulator optical ring resonators. Furthermore, the model we built in this paper was also employed to design and optimize the structure of an optical resonator and a good match was found between calculated and measured data. Also, our results were compared with those obtained by other approaches, again proving that the model worked well.