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High-Q MEMS Ring Resonator Design for Multi-band Filter Application

This paper presents a methodology for the design of a multi-band MEMS resonator with quality factor in the order of tens of thousands to serve as a filter in communication applications. The design was based in a three concentric ring resonator already fabricated by the group. The methodology allows designing devices for any resonating frequencies within those bounded by construction constraints of the fabrication process. The methodology is further corroborated by the design and simulation of a device with resonating frequencies at 90 kHz, 135 kHz and 180 kHz and quality factor not lower than 18,000.