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Application of the TRM self-calibration on standard silicon substrates

This paper reports the application of the: TRM self-calibration technique for the de-embedding of on-wafer measurements on bulk-silicon substrates, for the first time. Two major issues that historically prevented this, have been identified and solved. The new procedure is duly validated by comparison with the already established in-situ TRL calibration. It remedies the bandwidth limitation of TRL, still keeping the flexibility for moving reference planes.