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Evaluation of strain components in PbTiO3 thin films by micro-raman spectroscopy

We proposed a novel method to evaluate strain components in PbTiO3 thin films using Raman spectroscopy. In this method, the strain components are calculated from peak shifts of three E(TO)-modes. The coefficients to calculate the strain components were decided via least square technique using experimental values for twodimensional stress and hydrostatic pressure. The strain components that were estimated using the obtained coefficients were in good agreement with those measured by X-ray diffraction measurement (XRD). The average error between the strain components evaluated by XRD and Raman spectroscopy was about 0.05%. ©2018 The Ceramic Society of Japan. All rights reserved.