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Electrical Properties of La0.7Sr0.3CoO 3/Pb(Zr0.52Ti0.48)O 3/La0.7Sr0.3CoO 3 Thin Film Capacitors Formed on MgO Substrates Using the Sol-Gel Method

Sol-gel derived La0.7Sr0.3CoO3/Pb(Zr0.52Ti0.48)O3(PZT)/La0.7Sr0.3CoO3(LSCO) ferroelectric capacitors were fabricated on MgO(100) substrates. In order to avoid degradation of the PZT film during the high-temperature crystallization process of the top LSCO electrode, amorphous phase LSCO was used in the sol-gel method. These capacitors showed good ferroelectric hysteresis loops and no significant degradation of switchable polarization was observed after 1×109switching cycles.