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Performance Evaluation of Laser Micro-Machining Installations

Laser micro-machining is a growing field for micro manufacturing in many different materials. To obtain a better understanding of the accuracy of laser micro-machining equipment, moreover machine’s specification, a precise verification test is needed to measure the absolute performance of the machine. Available capability information is usually based on specifications given for the machine installations by machine deliverers. But in practice the absolute performances of some of the micro laser machines are way far off from their specifications. When forming the EUMINAfab infrastructure consortium it was decided that independent high precision verification tests should be made on different installations to help the micro-manufacturers to get the real capability information of their equipment and be able to improve performance to a higher EUMINAfab level. In this study a comprehensive verification test was designed and carried out by using an ultra-precision metrology method in order to establish more knowledge about the capabilities of the laser micro-machining equipment. The measurement results show the machine’s X,Y position accuracy, pseudo-repeatability and reproducibility of three different laser micro-machining installations.