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High-Q Tunable Silver Capacitors for RFIC's

This paper presents implementation and characterization of high quality factor (Q) silver (Ag) in-plane tunable capacitors on various substrates. A combination of low-loss substrate and the highest conductivity metal is used to achieve very high Q at RF frequencies. A high quality factor (Q>200 @1GHz) 0.7pF silver capacitor fabricated on a low-loss suspended Avatrel membrane achieved a tuning of 130%