{'fraction_non_alphanumeric': 0.028985507246376812, 'fraction_numerical': 0.002898550724637681, 'mean_word_length': 5.457943925233645, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
A MEMS sensor for mean shear stress measurements in high-speed turbulent flows with backside interconnects

A floating-element capacitive MEMS shear stress flow sensor was fabricated and shown to successfully measure mean-turbulent skin friction in high-speed compressible duct flow. The sensor was designed for harsh environments (e.g. high-temperature, high-shear stress) with novel through-substrate interconnects for robust packaging and remote circuitry for capacitance measurement. This paper extends our previous work on the MEMS shear stress sensor design [1] and backside interconnect process development [2] to provide complete device fabrication and testing in a high-speed flow.