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Observations and analysis of extreme ultraviolet emission between 10nm and 70nm by capillary discharge with Xe as target

Spectra have been recorded from a Xe discharge capillary discharge source in the extreme ultraviolet (EUV) region between 10nm and 70nm. The origin of the spectra have been analyzed, which have shown that the spectra between 10nm and 20nm come from the transitions of 4p-4d, 4d-4f and 4d-5p by Xe<sup>7+</sup>∼Xe<sup>12+</sup>, and the spectra between 20nm∼70nm mainly from the transitions of Xe<sup>6+</sup>∼Xe<sup>8+</sup> as well. The results which have been integrated the experimental results with the theory have shown that the spectra from Xe<sup>6+</sup>∼Xe<sup>8+</sup> formed in the time after the collapsed of the compressing of the plasma.