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System Reliability Analysis of MEMS Gyroscope with Multiple Failure Modes

Aiming at the limitation of traditional MEMS gyroscope reliability analysis method, this paper presents a reliability calculation method for MEMS gyroscope about failure mechanism, failure process and failure mode correlation. The problem which the MEMS gyroscope is easy to be affected by technology, structure, gap, material and so on, the failure mechanism is complex, the reliability data is short and the reliability is difficult to predict are solved. The system reliability of MEMS gyroscope is estimated. Through the calculation and analysis among much reliability analysis method, G-PCM method is confirmed. The reliability of the MEMS gyroscope is calculated to be 0.999169, which can meet the requirements of the reliability of the key products.