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Generation and Controlling the Trap in Absorbent Germanium Oxide Film

The nature of the anomalous positive charge present in thermally grown germanium dioxide film as well as its generation mechanism have been investigated. Flat-band voltage shift due to the positive charge, which can be generated at a given electric field, increases linearly with the maximum field in the oxide. Moreover, the density of the positive charge strongly depends on the amount of water molecules in the oxide. It was found that the positive charge is reduced by anneal process due to water desorption from the oxide film.