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Fabrication Technology Study of Thermal Isolation Structure on Chip

This paper proposes to fabricate thermal insulation structure between different regions with different temperature need for maintaining the biochemical reaction on a chip. It will reduce the heat transfer between different temperature regions, and be helpful to realize the temperature control of different regions of the chip. The fabrication experiment of the thermal isolation hole/cavity by PECVD SiC film deposition and the parylene-C film deposition experiment were performed. This kind of heat insulation structures would also ensure the strength of such devices.