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Analysis of transient electric-field emitted by atom-probe tomography electrode

An RF electromagnetic (EM) characterization of high pulsed voltage electrode is investigated in the present paper. The electrode acts as an electric-or E-field pulse generator for atom probe tomography (APT) application. The proposed electrode device is essentially comprised of a microstrip transmission line (TL) combined with via hole. The challenging prediction of the electrode signal integrity and E-field emission is elaborated. The APT pulse generator equivalent model is established. The transient response of the voltage pulse generator EM into transient electric pulse is analyzed. The excitation signal is assumed as a square wave pulse voltage with 1-kV amplitude and 2-ns full width time duration. The electrode device S-parameter responses from DC to 8-GHz is computed. The behavior of the transient E-field response in function of the position inside the substrate via hole is analysed. The delivered harmonic input current and power optimal values are assessed.