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Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas

An electron cyclotron resonance plasma source with a belt-type magnet assembly and slit antennas was developed for generating high density plasmas at low operating pressures. To enhance plasma confinement and avoid the disadvantages of quartz windows, a continuous arrangement of magnets and direct microwave injection from the slit antennas without quartz windows was used. This plasma source operated at an argon gas pressure of 0.4–1 mTorr and microwave power of 300–800 W. Electron temperature and ion density are dependent on the radial and axial position.