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Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides

Integrated silicon nitride (SiN) waveguides with anomalous dispersion have the potential to bring practical nonlinear optics to mainstream photonic integrated circuits. However, high-stress and high-processing temperatures remain an obstacle to mass adoption. We report low-stress, high-confinement, dispersion-engineered SiN waveguides utilizing low temperature grown reactive sputtered thin-films. We demonstrate a microring resonator with an intrinsic quality factor of 6.6 × 105, which enabled us to generate a native free spectral range spaced frequency comb with an estimated on-chip pump power of 850 mW. Importantly, the peak processing temperature is 400 °C making this approach fully back-end compatible for hybrid integration with preprocessed CMOS substrates and temperature sensitive photonic platforms such as lithium niobate on insulator.