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Fabrication of Solid Microneedle using Multi-slit Diffraction UV Lithography

This paper presents multi-slit diffraction lithography for fabricating legs-supported microneedles. Various micropatterns as multiple slits enable the combination of multiple distinct UV light rays to generate the leg-supported microneedle in a liquid state photosensitive resin. This paper investigates the impact of the number of slits including double, triple and quadruple patterns on the shape of the microneedle. Additionally, the effect of the microslits distance on the microneedle shape is also quantified. The investigation result leads to overall cleaner leg separations and shorter microneedle height with increasing slit distances. Mechanical testing of the fabricated microneedles revealed a tip strength of 0.5 N, confirming their functionality as a microneedle. Featuring the physical separation of the microneedle legs, a resistive heating microneedle device was fabricated and characterized. Temperatures of up to 95 °C were detected without causing substantial damage to the tip, indicating a major potential for targeted heat treatment in tissue engineering.