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Tilt sensor and servo control system for gravitational wave detection

This paper describes the design of a novel double-flexure two-axis tilt sensor with a tilt readout based on an optical walk-off sensor. The performance of the device has been investigated theoretically and experimentally. The walk-off sensor has demonstrated a sensitivity of 10−11 rad Hz−1/2 at 1 Hz. The tilt sensor has measured seismic noise ∼10−9–10−10 rad Hz−1/2 for frequency in the 2–10 Hz range.