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Single-Chip Beam Scanner with Integrated Light Source for Real-Time Light Detection and Ranging

For the first time to our knowledge, we present a single-chip solution for a solid-state 2D beam scanner achieving 10-m light detection and ranging (LIDAR) operation at 20 frames per second (fps). The beam scanner is integrated with a fully functional 32-channel optical phased array (OPA), 36 optical amplifiers, and a tunable laser, all on a 7.5×3-mm2 single chip fabricated using III-V-on-silicon processes. In addition, we created and applied an ultrafast self-evolving OPA-calibration algorithm and digital signal processing to demonstrate real-time LIDAR operation. This work presents the first demonstration of a chip-scale LIDAR solution without using an external optical source or amplifier, making an ultra-low cost and compact LIDAR technology a reality.