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Wear and Delamination Behavior of SiC Thin Film under Repeated Sliding Load

In order to improve friction and wear properties of amorphous SiC film deposited on titanium substrate specimen, Ti was added in SiC film by simultaneous sputtering of SiC and Ti targets using an RF magnetron sputtering apparatus. Wear tests were carried out on the specimens using a ball-on-disk type testing machine with SiC ball. The result shows that the addition of a certain amount of Ti decreases wear rate of SiC film and increases the number of rotation cycles to delamination. When the Ti concentration is 2.6 at.%, the friction coefficient decreases to a minimum value of 0.04, which is about a half of SiC film without Ti and DLC film. Observation of wear scar in the film and SiC ball during the wear test implies that wear debris plays an important role in reducing the friction coefficient. The wear depth at delamination is much smaller than the film thickness. The reason is that the parallel cracks are nucleated in the wear scar in an earlier stage and the delamination of film progresses from the cracks.