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Electrical and optical characterization of metal oxide/metal/polymer multilayer thin films

A new procedure for depositing three-layer structures [doped metal oxide/metal/metal oxide (In2O3/Ag/TiO2)] on a glass substrate by applying different methods of film deposition was developed. To obtain the first film -- In2O3:Sn, the spray hydrolysis method was employed and for the second, a thin Ag film, the vacuum evaporation technique was used. The third film -- TiO2 was obtained by the organic oxide compound polymerization method. The electrical and optical properties of the films and the multilayer structure thus obtained were investigated. The studies showed that the three-layer structure could be used as a broad-band infrared filter.