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Geometric and Motion Error Model and Precision Analysis of Multiaxial EDM

The precision of Multiaxial EDM is improved by a geometric and motion error model of EDM. A lower numbered body array is introduced to describe the EDM with a homogeneous coordinate transformation used to model the geometric and motion errors of a typical body in the multi-body system. Multi-body kinematics are employed to derive the structural and motion relations and the corresponding location error equation。 The motion error chain for the EDM is analyzed to develop a versatile error model. An entire Multiaxial EDM is analyzed as an example to determine its errors. The method provides a reference for Multiaxial EDM precision design.