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Fine Imaging Scanning Electron Microscope due to Secondary Electron Multiplication and Optical Configuration

We demonstrated that immediate multiplication of two-dimensional secondary electrons from a specimen and use of optical configuration provided a fine imaging scanning electron microscope yielding both low acceleration voltage and fine observation. The multiplied secondary electrons give rise to a very bright fluorescence intensity distribution due to the collision with the fluorescence-painted glass plate. Just it's center part was optically extracted using an aperture and detected by a photomultiplier. As a result, the pixel signal of the observed image achieved the highest signal-to-noise ratio. The observed image, therefore, had higher resolution and broader dynamic range. This novel method can be used to perform a fine microstructure observations of materials, using real low 1000 V primary electron acceleration.