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Experiments and Solution of Asymmetry Effect for Mems Thermal wind Sensor

For micro-electro-mechanical systems (MEMS) thermal wind sensor based on calorimetric principle, asymmetry effect, rarely reported in literature, exerts significant influence upon sensor’s performance. In this paper, for the first time, experiments are performed to investigate this phenomenon and a solution is proposed to optimize the performance of the sensor. The MEMS thermal wind sensor is fabricated packaged and tested in the wind tunnel. Experiments demonstrate that for the fixed wind speed, the voltage variation with direction can be reduced from over 20% to about 5% after improvement.