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A MEMS-based dual-axis tilt sensor using air medium

In this paper, a MEMS-based dual-axis tilt sensor, which utilizes a free-convection-based air medium, is fabricated and its operating characteristics are evaluated. The key components of the proposed tilt sensor, microheater and temperature sensors, are designed to have various patterns in order to examine an optimized geometry for achieving high sensitivity. Six different types of tilt sensors are fabricated and measured. The proposed tilt sensor operates in a wide detecting range of ±90κ on two axes. Output characteristics show excellent linearity and symmetric sensitivity. Fabrication sequence is also very simple owing to its monotonous structure and heater/sensor material, thus it fits mass production at a low cost.