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Design and Fabrication of a Novel Bimorph Micro-Opto-Mechanical Sensor

We have designed a so-called Flip-Over Bi-material (FOB) beam to increase the sensitivity of micro-mechanical structures for sensing temperature and surface stress changes. The FOB beam has a configuration such that a material layer coats the top and bottom of the second material at different regions along the beam length. By multiple interconnections of FOB beams, the deflection or sensitivity can be amplified, and the out-of-plane motion of a sensing structure can be achieved. The FOB beam has 53 % higher thermomechanical sensitivity than a conventional one. Using the FOB beam design, we have developed a micro-opto-mechanical sensor having a symmetric structure such that beam deflection is converted into a linear displacement of a reflecting surface, which is used for optical interferometry. The designed sensor has been fabricated by surface micromachining techniques using a transparent quartz substrate for optical measurement. Within a sensor area of 100μm × 100μm, the thermo-mechanical sensitivity ST = 180 nm/K was experimentally obtained.