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Mapping The Performance Of Surface-Measuring Instruments

The performance of a dimensional surface-measuring instrument is usually limited by a small number of critical components or specifications. For example, parameters such as those specifying ranges and resolutions, and probe geometry are needed to define the capabilities of the instrument. The response of the instrument to sinusoidal perturbations of varying amplitude and wavelength, can be mapped in amplitude-wavelength space to show the effect of each parameter and the overall limits of performance.