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Fully self-aligned nickel wobble micromotors fabricated at low temperature

The design and fabrication process of fully self-aligned nickel electrostatic wobble micromotors with stators overlapping above rotor are reported. The micromotors were fabricated using quasi-LIGA technology, in which the electroformed nickel as a structural material for stators, rotor and bearing, and electroformed copper as a sacrificial and self-aligned layer to obtain small gap between moveable and stationary parts were used. In addition, all the key fabrication processes were at low temperature. The experimental gap between rotor and stators, rotor and bearing is 2.5 and 1.3 micrometers, respectively. The experiments show that the micromotors wobble at a bias of 15V, and rotate continuously at bias of 30-55 V. It is found that the rotation speed and gear ratio depend on the frequency and voltage of pulse bias.