{'fraction_non_alphanumeric': 0.027563395810363836, 'fraction_numerical': 0.020948180815876516, 'mean_word_length': 5.394366197183099, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Fabrication, Characterization, and Modeling of Fully-Batch-Fabricated Piston-Type Electrodynamic Microactuators

This paper presents the fabrication, characterization, and modeling of electrodynamic microactuators. The actuators are piston-type devices, each comprising of a circular flexible polydimethylsiloxane membrane, a multi-turn Cu coil, and an integrated powder-based NdFeB permanent magnet. The devices are fully batch-fabricated in a single wafer using only three masks. Ranging in diameter from 2.5 to 5.2 mm, three different device designs are quasi-statically and dynamically characterized for their electromechanical performance. The resonant frequencies of the three actuators range from 224 to 820 Hz. The maximum displacements span from 4 to 64 μm for an input power ranging from 250 to 525 mW. The experimental results are supported by a parametric lumped element model of the transducer.