227  US 9,411,230 B2  228  Examples of this polar group include a group containing a  structure represented by N-H, such as amino group.  Examples of this polar group include a group containing a  structure represented by C  N, C=O, N=O, S=O or  C  N.  Examples of this polar group include a group having a  moiety represented by N+or s+.  The "polar group" which can be contained in the repeating  unit (3A) is, for example, at least one selected from the group  consisting of (I) a hydroxy group, (II) a cyano group, (III) a  lactone group, (IV) a carboxylic acid group or a sulfonic acid  group, (V) an amide group, a sulfonamide group or a group  corresponding to a derivative thereof, (VI) an ammonium  group or a sulfonium group, and a group formed by combin- ing two or more thereof  In particular, the polar group is preferably an alcoholic  hydroxy group, a cyano group, a lactone group, or a group  containing a cyanolactone structure.  When a repeating unit having an alcoholic hydroxy group  is further incorporated into the resin (A), the exposure latitude  (EL) of a composition containing the resin (A) can be more  enhanced.  When a repeating unit having a cyano group is further 35  incorporated into the resin (A), the sensitivity of a composi› tion containing the resin (A) can be more enhanced.  When a repeating unit having a lactone group is further  incorporated into the resin (A), the dissolution contrast for an  organic solvent-containing developer can be more enhanced.  Also, when the repeating unit is incorporated, a composition  containing the resin (A) can be more improved in the dry  etching resistance, coatability and adherence to substrate.  When a repeating unit having a group containing a cyano  group-containing lactone structure is further incorporated  into the resin (A), the dissolution contrast for an organic  solvent-containing developer can be more enhanced. Also,  when the repeating unit is incorporated, a composition con› taining the resin (A) can be more improved in the sensitivity,  dry etching resistance, coatability and adherence to substrate.  In addition, when the repeating unit is incorporated, a single  repeating unit can play functions attributable to a cyano group  and a lactone group, respectively, and the latitude in design› ing the resin (A) can be more broadened.  Specific examples of the structure which can be contained  in the "polar group" are illustrated below. In the following  specific examples,  x- indicates a counter anion.  -continued  The preferred repeating unit (3A) includes, for example, a  repeating unit where in the repeating unit (R2), "a group  capable of decomposing by the action of an acid to produce an  alcoholic hydroxy group" is replaced by "an alcoholic  hydroxy group".  This repeating unit (3A) preferably has a structure where in  each of formulae (I-1) to (I-10), "OP" is replaced by "OH".  That is, the repeating unit is preferably represented by at least  one formula selected from the group consisting of the follow› ing formulae (I-lH) to (I-l0H). In particular, the repeating  unit (3A) is more preferably represented by at least one for- mula selected from the group consisting of the following  formulae (I-lH) to (I-3H), still more preferably represented  by the following formula (I-lH).  (2) A Functional Group Containing a Structure where a Nitro› gen Atom and an Atom with the Electronegativity Differ› ence from Nitrogen Atom being 0.6 or More are Bonded  1brough a Single Bond  (3) A Functional Group Containing a Structure where Two  Atoms Differing in the Electronegativity by 0.5 or More  are Bonded Through a Double Bond or a Triple Bond  ( 4) A Functional Group Having an Ionic Moiety  -OH -COOR -C- -C-O- 11  II  0  0  I  I  -O-C-O- -CN -NC -C=N -C-N  II  0  \  II  \  0  I  I  ;  -O-C-N -N-C-N -C-N-C- II  \  0  II  \  0  11  I II  0  0  0  H  II  -N- -NO$_{2 }$ -NO -S- Ii  -S- Ii  0  0  0  II  /  0  II  0  II  II  0  -S-N  -S-O- -S-N-S- II  \  0  Ii  0  11  I  II  0  0  0  II  -S-N-C- 10  0  -N- X  11  I  II  0  0  I  [  0  -coo  (1-lH)  (I-2H)  Ra  Ra 