14  US 9,052,590 B2  13  F  F  H  F  F  F  I  I  I  I  I  I  *-C-* *-C-*  *-C-C-* I  H  F  F  I  I  *-C-C-*  I  I  F  F  I  I  I  F  H  F  F  F  F  I  I  I  I  I  H  F  H  F  I  I  *-C-C-C-*  *-C-C-*  I  I  I  I  I  F  F  F  C~ F  •*;  •*•  .6-•  F  F  R201  e  I  *-S03  S-R202  01  R203  *-S03G  0  R204-I-R2os  (Zl-lA)  Rlla  R10a  R9a  Two of R$_{201 }$ to R$_{203 }$ may be bonded with each other to  thereby form a ring structure (including a condensed ring),  and the ring within the same may contain an oxygen atom, a  sulfur atom, an ester bond, an amido bond or a carbonyl  group.As the group formed by bonding of two ofR$_{201 }$to R$_{203}$,  there can be mentioned an alkylene group (for example, a  butylene group or a pentylene group).  The number of carbon atoms of the organic group repre› sented by R$_{20}$ i,  R$_{202 }$and R$_{203 }$is generally in the range of 1 to  30, preferably 1 to 20.  In the above general formula (ZI),  each of R$_{201}$ , R $_{202 }$and R$_{203 }$ independently represents an  organic group.  As one aspect of groups of (ZI-1 ), there can be mentioned  the structure of general formula (ZI-lA) below.  It  is preferred for the moiety represented by Z$_{1 }$ to be an  onium salt. The onium salt is preferably a sulfonium salt or an  iodonium salt. The onium salt preferably has the structure of  general formula  (ZI)  or  (ZII)  below.  Z$_{1 }$represents a moiety that when exposed to actinic rays or  radiation, is converted to a sulfonate group.  The aryl group, alkyl group or monovalent aliphatic hydro› carbon ring group represented by R$_{201 }$to R$_{203 }$may have as its  substituent an alkyl group (for example, 1 to 15 carbon  atoms), a monovalent aliphatic hydrocarbon ring group (for  example, 3 to 15 carbon atoms), an aryl group (for example,  6 to 14 carbon atoms), an alkoxy group (for example, 1 to 15  carbon atoms), a halogen atom, a hydroxyl group or a phe› nylthio group. Preferred substituents are a linear or branched  alkyl group having 1 to 12 carbon atoms, monovalent ali› phatic hydrocarbon ring group having 3 to 12 carbon atoms  and a linear, branched or cyclic alkoxy group having 1 to 12  carbon atoms. More preferred substituents are an alkyl group  having 1 to 4 carbon atoms and an alkoxy group having 1 to 4  carbon atoms. The substituents may be contained in any one  of the three R$_{201 }$to R$_{203}$, or alternatively may be contained in  all three ofR$_{201 }$to R$_{203}$. When R$_{201 }$to R$_{203 }$represent an aryl  group, the substituent  The alkyl group or monovalent aliphatic hydrocarbon ring  group contained in the ary lsulfonium compound according to  necessity is preferably a linear or branched alkyl group hav› ing 1 to 15 carbon atoms or a monovalent aliphatic hydrocar› bon ring group having 3 to 15 carbon atoms. As such, there  can be mentioned, for example, a methyl group, an ethyl  group, a propyl group, an n-butyl group, a sec-butyl group, a  t-butyl group, a cyclopropyl group, a cyclobutyl group, a  cyclohexyl group or the like.  When the arylsulfonium compound has two or more aryl  groups, the two or more aryl groups may be identical to or  different from each other.  The aryl group of the arylsulfonium compounds is prefer› ably a phenyl group or a naphthyl group, more preferably a  phenyl group. The aryl group may be one having a heterocy› clic structure containing an oxygen atom, nitrogen atom,  sulfur atom or the like. As the heterocyclic structure, there can  be mentioned, for example, a pyrrole, a furan, a thiophene, an  indole, a benzofuran, a benzothiophene or the like.  As the arylsulfonium compounds, there can be mentioned,  for example, a triarylsulfonium compound, a diarylalkylsul› fonium compound, an aryldialkylsulfonium compound, a  diarylcycloalkylsulfonium compound and an aryldicy› cloalkylsulfonium compound.  In the arylsulfonium compounds, all of the R$_{201 }$ to R$_{203 }$ may be aryl groups.  It  is also appropriate that the R$_{201 }$to R$_{203 }$ are partially an aryl group and the remainder is an alkyl group  or a monovalent aliphatic hydrocarbon ring group.  The compounds (ZI-1) are arylsulfonium compounds of  the general formula  (ZI)  wherein at least one ofR$_{201 }$to R$_{203 }$ is an aryl group, namely, compounds containing an arylsul› fonium as a cation. 