US 2019/0235380 Al  12  Aug.  1,  2019  (11)  (12)  [0165]  Among the examples, R$^{605 }$preferably represents a  fluorine atom or a fluorinated alkyl group having 1 to 5  carbon atoms, more preferably a fluorine atom or a perfluo- [0155]  Since relatively strong acids are generated upon  exposure from both of the component (Il) and the compo› nent (I2), in a case where a pattern is formed using a  photosensitive composition that contains the component (I),  sufficient sensitivity is obtained so that an excellent pattern  is formed.  [0164]  The fluorinated alkyl group of R$^{605 }$preferably has  1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms,  and still more preferably 1 to 5 carbon atoms. Specific  examples thereof include a group in which part or all of the  hydrogen atoms in an alkyl group having 1 to 5 carbon  atoms have been substituted with fluorine atoms.  [0163]  In Formula (I2), R$^{605 }$represents a fluorinated alkyl  group which may have a substituent or a fluorine atom. A  plurality ofR$^{605}$’s may be the same as or different from one  another.  [0154]  As a cationic polymerization initiator (component  (I)), a component containing one or more selected from the  group consisting of a compound represented by Formula (Il)  (hereinafter, referred to as a "component (Il)") and a com› pound represented by Formula (I2) (hereinafter, referred to  as a "component (I2)") is used.  [0153]  <Cationic Polymerization Initiator (I)>  [0162]  Among these,  tetrakis(pentafluorophenyl)borate  ([B(C$_{6}$F  5 ) 4 ]-) is particularly preferable.  [0161]  Specific preferred examples of the anion moiety of  the compound represented by Formula (Il) include tetrakis  (pentafluorophenyl)borate ([B(C$_{6}$F  5 ) $_{4}$r); tetrakis [(trifluo› romethyl)phenyl]borate  ([B(C$_{6}$H$_{4}$ CF $_{3}$ ) 4 ]-);  difluorobis  (pentafluorophenyl)borate  ([(C$_{6}$F  5 ) $_{2}$BF $_{2}$ r);  trifluoro  (pentafluorophenyl)borate  ([(C$_{6}$F $_{5}$)BF$_{3}$ ]-); and tetrakis  ( difluorophenyl)borate ([B(C$_{6}$H$_{3}$ F  2 ) 4 ]-).  [0152]  In a case where the content of the component (M)  is greater than or equal to the lower limit of the above› described preferable range, the hardness of the cured film is  likely to be increased. Further, in a case where the content  thereof is lower than or equal to the upper limit of the  above-described preferable range, the transparency of the  resin film can be further improved. In addition, the fluidity  of the photosensitive composition is likely to be maintained.  [0160]  Among these, R 601  to R$^{604 }$in Formula (Il) each  preferably represent a fluorinated phenyl group and particu› larly preferably a perfluorophenyl group.  [0151]  The content of the component (M) is preferably in  a range of 10 to 30 parts by mass and more preferably in a  range of 15 to 25 parts by mass with respect to 100 parts by  mass of the component (A).  [0150]  The component (M) may be used alone or in a  combination of two or more kinds thereof.  [0159]  The aryl group of R 601  to R$^{604 }$may have a sub› stituent. The substituent is not particularly limited. As the  substituent, a halogen atom, a hydroxyl group, an alkyl  group (preferably a linear or branched alkyl group having 1  to 5 carbon atoms), or a halogenated alkyl group is prefer› able, a halogen atom or a halogenated alkyl group having 1  to 5 carbon atoms is more preferable, and a fluorine atom or  a fluorinated alkyl group having 1 to 5 carbon atoms is  particularly preferable. It is preferable that an aryl group  have a fluorine atom because the polarity of the anion moiety  is increased.  [0149]  The particle diameter of the component (M) may  be appropriately selected according to the exposure light  source. Generally, a particle having a particle diameter of  ‰o  or less of the wavelength of light is considered to be hardly  affected by light scattering. Therefore, for example, in a case  where a fine structure is formed using photolithography with  an i-line (365 nm), it is preferable that particles having a  primary particle diameter (volume average value) of 10 to  20 nm (particularly preferably the group of silica particles)  be used as the component (M).  [0158]  The aryl group as R$^{601 }$to R$^{604 }$preferably has 5 to  30 carbon atoms, more preferably 5 to 20 carbon atoms, still  more preferably 6 to 15 carbon atoms, and particularly  preferably 6 to 12 carbon atoms. Specific examples thereof  include a naphthyl group, a phenyl group, and an anthrace› nyl group. Among these, a phenyl group is preferable from  the viewpoint of availability.  [0148]  In a case where the volume average particle diam› eter of the component (M) is greater than or equal to the  lower limit of the above-described preferable range, the  hardness of the cured film is likely to be increased. Further,  in a case where the volume average particle diameter thereof  is lower than or equal to the upper limit of the above› described preferable range, residues are unlikely to be  generated during pattern formation, and a pattern with  higher resolution is easily formed. In addition, the transpar› ency of the resin film can be improved.  [0157]  In Formula (Il), R 601  to R$^{604 }$each independently  represent an aryl group which may have a substituent or a  fluorine atom.  [0156]  [In the formulae, R$^{601 }$to R$^{604 }$each independently  represent an aryl group which may have a substituent or a  fluorine atom. R 605  represents a fluorinated alkyl group  which may have a substituent or a fluorine atom. A plurality  ofR$^{605}$’s may be the same as or different from one another.  q represents an integer of 1 or greater. Qq+,s each indepen› dently represent a q-valent organic cation.]  [0147]  Such a particulate component (M) preferably con› sist of particles having a volume average particle diameter of  5 to 40 nm, more preferably particles having a volume  average particle diameter of 5 to 30 nm, and still more  preferably particles having a volume average particle diam› eter of 10 to 20 nm.  [0146]  Further, it is preferable that the component (M) be  a particulate.  [0145]  Examples of the component (M) include oxides of  metals such as silicon (metallic silicon), zirconium, and  hafnium. Among these, an oxide of silicon is preferable. In  addition, it is particularly preferable to use silica.  the present embodiment by using a metal oxide ( component  (M)) together with the compound (A) and the component (I).  Further, a pattern having an excellent shape and high reso› lution can be formed. 