Aug. 4, 2016  14  US 2016/0223905 Al  a substrate and the developer affinity are enhanced. The  repeating unit having a hydroxyl group or a cyano group is  preferably a repeating unit having an alicyclic hydrocarbon  structure substituted with a hydroxyl group or a cyano group,  and preferably has no acid-decomposable group. The alicy› clic hydrocarbon structure in the alicyclic hydrocarbon struc› ture substituted with a hydroxyl group or a cyano group is  preferably an adamantyl group, a diamantyl group, or a nor› bornane group. The alicyclic hydrocarbon structures substi› tuted with a hydroxyl group or a cyano group are preferably  partial structures represented by the following General For› mulae (VIIa) to (VIId).  an ethyl group are more preferable, and a methyl group is  most preferable. Examples of the cycloalkyl group include a  cyclopropyl group, a cyclobutyl group, a cyclopentyl group,  and a cyclohexyl group. Examples of the alkoxycarbonyl  group include a methoxycarbonyl group, an ethoxycarbonyl  group, an n-butoxycarbonyl group, and a t-butoxycarbonyl  group. Examples of the alkoxy group include a methoxy  group, an ethoxy group, a propoxy group, an isopropoxy  group, and a butoxy group. These groups may have a sub› stituent, and examples of the substituent include an alkoxy  group such as a hydroxy group, a methoxy group, and an  ethoxy group, a cyano group, and a halogen atom such as a  fluorine atom. R$_{9 }$ and R$_{9}$ ’  are each more preferably a methyl  group, a cyano group, or an alkoxycarbonyl group, and still  more preferably a cyano group.  [0137]  Examples of the alkylene group ofX andX’ include  a methylene group and an ethylene group. X and X’ are  preferably an oxygen atom or a methylene group, and more  preferably a methylene group.  [0138]  Inthecasewheremandm’ are 1 or more, at least one  ofR$_{9 }$ or R$_{9}$ ’  is preferably substituted at the a- or ~-position of  the carbonyl group of the lactone, and particularly preferably  at the a-position.  [0139]  Specific examples of the group having a lactone  structure or the repeating unit having a sultone structure,  represented by General Formula (III-1) or (III-1 ’), include the  structures described in paragraphs "0150" to "0151" of  JP2013-l 78370A.  [0140]  The content of the repeating unit represented by  General Formula (III), or the total content of the repeating  units in the case where two or more kinds of repeating units  are contained is preferably 15% by mole to 60% by mole,  more preferably 20% by mole to 60% by mole, and still more  preferably 30% by mole to 50% by mole, with respect to all  the repeating units in the resin (A).  [0141]  The resin (A) may further contain, in addition to the  unit represented by General Formula (III), the afore-men› tioned repeating unit having a lactone structure or a sultone  structure.  [0142]  The repeating unit having a lactone group or a sul› tone group usually has an optical isomer, and any optical  isomer may be used. Further, one kind of optical isomer may  be used alone or a plurality of optical isomers may be mixed  and used. In the case of mainly using one kind of optical  isomer, the optical purity ( ee) thereof is preferably 90% or  more, and more preferably 95% or more.  [0143]  The content of the repeating unit having a lactone  structure or a sultone structure, other than the repeating unit  represented by General Formula (III), or the total content of  the repeating units in the case where plural kinds of repeating  units are contained is preferably 15% by mole to 60% by  mole, more preferably 20% a by mole to 50% by mole, and  still more preferably 30% by mole to 50% by mole, with  respect to all the repeating units in the resin.  [0144]  In order to enhance the effect of the present inven› tion, it is also possible to use two or more kinds oflactone or  sultone repeating units selected from General Formula (III) in  combination. In the case of using the repeating units in com› bination, it is preferable to use two or more kinds selected  from the lactone or sultone repeating units, in which inn is 0  in General Formula (III), in combination.  [0145]  The resin (A) preferably has a repeating unit having  a hydroxyl group or a cyano group, other than General For› mulae (AI) and (III). With the repeating unit, the adhesion to  [0146]  In General Formulae (VIIa) to (Vlk),  [0147]  R$_{2}$c to R$_{4}$c each independently represent a hydrogen  atom, a hydroxyl group, or a cyano group, provided that at  least one ofR$_{2}$c, ... , or R$_{4}$ c represents a hydroxyl group or a  cyano group. A structure where one or two members out of  R$_{2}$c to R$_{4}$c are a hydroxyl group with the remainder being a  hydrogen atom is preferable. In General Formula (VIIa), it is  more preferable that two members out of R$_{2}$c to R$_{4}$c are a  hydroxyl group and the remainder is a hydrogen atom.  [0148]  Examples of the repeating unit having a partial  structure represented by General Formulae (VIIa) to (VIId)  include repeating units represented by the following General  Formulae (Alla) to (AIId).  (Vlld)  (Vile)  (Vllb)  (Vila) 