US 2015/0086912 Al  27  Mar. 26, 2015  TABLE I-continued  (a)  [0228]  In formula (a), each of Rsi, Rs$_{2 }$ and Rs$_{3 }$ indepen› dently represents a hydrogen atom, an alkyl group, a monova› lent aliphatic hydrocarbon cyclic group, a halogen atom, a  [0237]  When Rs$_{2 }$ represents an alkylene group, the alky› lene group is preferably an alkylene group having 1 to 8  carbon atoms, such as a methylene group, an ethylene group,  a propylene group, a butylene group, a hexylene group, or an  octylene group, more preferably an alkylene group having 1  to 4 carbon atoms, and especially preferably an alkylene  group having 1 or 2 carbon atoms.  [0236]  The examples of substituents for the above each  group include, e.g., an alkyl group, a monovalent aliphatic  hydrocarbon cyclic group, an aryl group, an amino group, an  amido group, a ureido group, a urethane group, a hydroxyl  group, a carboxyl group, a halogen atom, an alkoxy group, a  thioether group, an acyl group, an acyloxy group, an alkoxy› carbonyl group, a cyano group, and a nitro group, and the  carbon atom number of these substituents is preferably 8 or  less.  [0235]  The halogen atom is a fluorine atom, a chlorine  atom, a bromine atom or an iodine atom, and a fluorine atom  is especially preferred.  [0234]  The monovalent aliphatic hydrocarbon cyclic group  is a monocyclic or polycyclic monovalent aliphatic hydrocar› bon cyclic group. Preferably, a monocyclic monovalent ali› phatic hydrocarbon cyclic group having 3 to 8 carbon atoms,  such as a cyclopropyl group, a cyclopentyl group, and a  cyclohexyl group, which groups may have a substituent, can  be exemplified.  [0233]  The alkyl group contained in the alkoxycarbonyl  group is preferably the same alkyl group as in Rs$_{1 }$ to Rs$_{3}$ .  [0232]  The alkyl group of Rs$_{1 }$ to Rs$_{3 }$ in formula (a) is  preferably an alkyl group having 20 or less carbon atoms,  such as a methyl group, an ethyl group, a propyl group, an  isopropyl group, an n-butyl group, a sec-butyl group, a hexyl  group, a 2-ethylhexyl group, an octyl group, or a dodecyl  group, all of which groups may have a substituent, more  preferably an alkyl group having 8 or less carbon atoms, and  especially preferably an alkyl group having 3 or less carbon  atoms.  [0231]  Formula (a) is described in further detail.  [0230]  Rs$_{4 }$ represents an alkyl group.  Rss  and Rs$_{6 }$indepen› dently represents a hydrogen atom, an alkyl group, a monova› lent aliphatic hydrocarbon cyclic group or an aromatic cyclic  group.  Rss  and Rs$_{6 }$ may be bonded to each other to form a  ring, provided that  Rss  and Rs$_{6 }$ do not represent a hydrogen  atom at the same time.  [0229]  Ls represents a single bond or a divalent linking  group, and represents a trivalent linking group in the case of  forming a ring with Rs$_{2}$ - cyano group, or an alkoxycarbonyl group. Rs$_{2 }$ and Ls may be  bonded to each other to form a ring (preferably a 5- or 6-mem› bered ring), and Rs$_{2 }$represents an alkylene group in that case.  [0221]  The content of the repeating unit (A) in the resin (P)  is preferably in the range of0.5 mo!% to 80 mo!% to all the  repeating units in the resin (P), more preferably in the range of  1 mo! % to 60 mo! %, and still more preferably in the range of  3 mo! % to 40 mo! %.  [0222]  It is preferred that the resin (P) further contains a  repeating unit (B) having a group capable of decomposing by  an action of an acid to generate a polar group.  [0223]  The group capable of decomposing by the action of  an acid to generate a polar group (hereinafter also referred to  as "acid-decomposable group") preferably has such a struc› ture that a polar group is protected with a group capable of  decomposing and leaving by the action of an acid.  [0224]  The resin (P) is a resin whose polarity changes by  the action of an acid, specifically a resin capable of increasing  the solubility in an alkali developer or decreasing the solubil› ity in a developer containing an organic solvent by the action  ofan acid.  [0225]  The examples of the polar groups include a phenolic  hydroxyl group, a carboxyl group, a fluorinated alcohol  group, a sulfonic acid group, a sulfonamide group, a sulfo› nylimide group, a (alkylsulfonyl)(alkylcarbonyl)methylene  group, an (alkylsulfonyl)(alkylcarbonyl)imide group, a bis  (alkylcarbonyl)methylene group, a bis(alkylcarbonyl)imide  group, a bis(alkylsulfonyl)methylene group, a bis(alkylsulfo› nyl)imide group, a tris(alkylcarbonyl)methylene group, and a  tris(alkylsulfonyl)methylene group.  [0226]  As preferred polar groups, a carboxyl group, a flu› orinated alcohol group (preferably a hexafluoroisopropanol  group), and a sulfonic acid group are exemplified.  [0227]  The repeating unit (B) is preferably a repeating unit  represented by the following formula (a).  Rs1  Rs3  I  I  •  ---f C - C-,--•  I  I  R52  L5VO  I  R54  Rs6  [Repeating Unit (B)]  Repeating Cationic  Anionic  Repeating Cationic  Anionic  Repeating Cationic  Anionic  Unit(A)  Structure  Structure  Unit(A)  Structure  Structure  Unit(A)  M-042  Z-52  A-4  M-092  Z-4  A-19  M-142  M-043  Z-60  A-4  M-093  Z-32  A-19  M-143  M-044  Z-1  A-5  M-094  Z-57  A-19  M-144  M-045  Z-12  A-5  M-095  Z-1  A-20  M-145  M-046  Z-24  A-5  M-096  Z-25  A-20  M-146  M-047  Z-33  A-5  M-097  Z-5  A-21  M-147  M-048  Z-38  A-5  M-098  Z-49  A-21  M-148  M-049  Z-52  A-5  M-099  Z-8  A-22  M-149  M-050  Z-60  A-5  M-100  Z-29  A-22  M-150  Structure  Structure  Z-11  A-36  Z-45  A-36  Z-53  A-36  Z-60  A-36  Z-1  A-37  Z-20  A-37  Z-38  A-37  Z-59  A-37  Z-60  A-37 