Dec. 3, 2020  94  US 2020/0379345 Al  Synthesis Examples 1-6 to 1-11  Synthesis of Additional Acid Generators PAG-6 to  PAG-11  Synthesis Example 1-5-2  Synthesis of Intermediate 9  Synthesis Example 1-5-3  Synthesis of PAG-5  PAG-6  PAG-7  PAG-8  Sn  FF  ~O~SO;  0  [0198]  Intermediate 8 was obtained by the same procedure  as in Synthesis Examples 1-1-1 to 1-1-2 aside from using  Reactant 7 instead of Reactant 2.  [0199]  Intermediate 9 was obtained by the same procedure  as in Synthesis Example 1-1-3 aside from using Reactant 8  instead of Reactant 3.  [0200]  PAG-5 was synthesized by the same procedure as  in Synthesis Examples 1-1-4 to 1-1-6 aside from using  Intermediate 9 instead of Intermediate 3, and benzyltrim› ethy !ammonium  1, 1,3 ,3 ,3-pentafluoro-2-hydroxypropane› l -sulfonate instead of benzyltrimethylammonium 1,1-dif› luoro-2-hydroxyethane-l-sulfonate.  [0201]  PAG-5 was analyzed by IR spectroscopy and LC› MS, with the data shown below. FIG.  4  is the $^{1}$H-NMR/  DMSO-d$_{6 }$ spectrum of PAG-5.  [0202]  IR (D-ATR): v=3486, 3097, 2976, 1587, 1493,  1448, 1401, 1369, 1318, 1245, 1161, 1107, 1087, 1060,  1012, 998,913,884,834,751,741,690,642,593,553,525  cm- 1  [0203]  LC-MS: positive [M+Ht 713  Synthesis Example 1-5-1  Synthesis of Intermediate 8  [0204]  Intermediate 9  -continued  PAG-5  {"i  I,,,,  ~w’---