Dec. 3, 2020  96  US 2020/0379345 Al  Oniwn  Resist  compound Base resin  Quencher  Surfactant  composition  (pbw)  (pbw)  (pbw)  (pbw)  1-16  R-16  PAG-8  Q-1  SF-1  (40)  (40)  (0.1)  1-17  R-17  PAG-9  Q-1  (40)  (40)  1-18  R-18  PAG-10  Q-1  SF-1  (40)  (40)  (0.1)  1-19  R-19  PAG-11  Q-2  SF-1  (80)  (4.5)  (0.1)  Solvent 1  Solvent 2  (pbw)  (pbw)  PGMEA  DAA  (2,240)  (960)  PGMEA  DAA  (2,240)  (960)  PGMEA  DAA  (2,240)  (960)  PGMEA  DAA  (2,240)  (960)  Oniwn  Resist  compound Base resin  Quencher  Surfactant  composition  (pbw)  (pbw)  (pbw)  (pbw)  Comparative  1-1  R-20  PAG-A  Example  (80)  1-2  R-21  PAG-B  (80)  1-3  R-22  PAG-C  (80)  1-4  R-23  PAG-D  (80)  1-5  R-24  PAG-E  (80)  1-6  R-25  PAG-F  (80)  1-7  R-26  PAG-F  P-1  Q-1  SF-1  (10)  (80)  (3.5)  (0.1)  Solvent 1  Solvent 2  (pbw)  (pbw)  PGMEA  DAA  (2,240)  (960)  PGMEA  DAA  (2,240)  (960)  PGMEA  DAA  (2,240)  (960)  PGMEA  DAA  (2,240)  (960)  PGMEA  DAA  (2,240)  (960)  PGMEA  DAA  (2,240)  (960)  PGMEA  DAA  (2,436)  (1,044)  Onium  Resist  compound Base resin  Quencher  Surfactant  composition  (pbw)  (pbw)  (pbw)  (pbw)  Reference  1-1  R-27  PAG-2  P-1  Q-1  SF-1  Example  (10)  (80)  (3.5)  (0.1)  1-2  R-28  PAG-2  P-2  Q-2  SF-1  (10)  (80)  (4.5)  (0.1)  Solvent 1  Solvent 2  (pbw)  (pbw)  PGMEA  DAA  (2,436)  (1,044)  PGMEA  DAA  (2,436)  (1,044)  TABLE I-continued  TABLE 2  TABLE 3  [0207]  The solvents, comparative betaine type onium  compounds or onium salts PAG-A to PAG-F, base resins P-1  and P-2, quenchers Q-1 and Q-2, alkali-soluble surfactant  SF-1, and surfactant A in Tables 1 to 3 are identified below.  Solvent:  [0208]  PGMEA (propylene glycol monomethyl ether  acetate)  [0209]  DAA (diacetone alcohol)  Comparative Betaine Type Onium Compounds or Onium  Salts: PAG-A to PAG-F  -continued  PAG-B  PAG-C  Q  ~Syy  O  FF  V  lo~ $^{0}$✓so,  [0210]  PAG-A 