US 2019/0041751 Al  13  Feb. 7,2019  COMPARATIVE EXAMPLE 1  EXAMPLE 2  EXAMPLE 3  EXAMPLE 7  EXAMPLE 4  EXAMPLE 5  EXAMPLE 8  TABLE 1  [0057]  Formulations from Example 7 were spin-coated on  a bare 200 mm silicon wafers at 1500 rpm and baked at 240°  C. for 60 seconds using an ACT-8 Clean Track (Tokyo  Electron Co.). The thickness of each coated film after baking  was measured with an OptiProbe™ instrument from  Therma-wave Co. Each coated sample was then evaluated  for SC-1 wet strippability using an SC-1 solution of 1/8/50  wt/wt/wt mixture of 30% NH$_{4}$OH/30% H$_{2}$O/water. The  SC-1 solution was heated to 25°  C., and coupons of each  coated wafer were immersed into the solution for 1 min. The  coupons were removed from the SC-1 solution and rinsed  with deionized water, and the film thickness was again  measured. The film thickness loss for each sample was  calculated as the difference in film thickness before and after  contact with the SC-1 solution. A separate film prepared as  described above was optionally tested for SC-1 strippability  after etching. Etching was performed for 60 seconds using  RIE790 from Plasma-Therm Co. with oxygen gas, 25 sscm  flow, 180 W of power, and 6 mTorr of pressure. The  [0054]  A solution of hydrochloric acid (37 wt% in water,  1.08 g) in water (3.61 g) was added over 10 minutes to a  mixture of TEOS (7.38 g, 30 mo!%), phenyltrimethoxysi› lane (PTMS) (1.17 g, 5 mo! % ) and Polymer 1 from  Example 1 (10.0 g, 65 mo!%) in THF (40.5 g) and stirred  at room temperature for 1 hour. The reaction mixture was  heated to 63° C. for 6 hours and then cooled to room  temperature. PGEE (55 g) was added, the volatile species  removed under reduced pressure, and the resulting solution  was diluted with PGEE to deliver Condensed Polymer 4 (10  [0053]  A solution of hydrochloric acid (37 wt% in water,  6.56 g) in water (21.9 g) was added over 10 minutes to a  mixture ofTEOS (55.93 g, 70 mo!%) and Polymer 1 from  Example 1 (15.0 g, 30 mo!%) in THF (81 g) and stirred at  room temperature for 1 hour. The reaction mixture was  heated to 63° C. for 6 hours and then cooled to room  temperature. PGEE (107 g) was added, the volatile species  removed under reduced pressure, and the resulting solution  was diluted with PGEE to deliver Condensed Polymer 3 (10  wt % in PGEE, 342 g) as a clear solution. Mw was deter› mined by GPC relative to polystyrene standards and was  found to be 27,000 Da.  [0056]  Formulations were prepared by combining: 1.60 wt  % of the condensed polymer indicated in Table 1; 0.004 wt  % of a 0.1 wt% solution oftetrabutylammonium chloride in  PGEE; 48.95 wt % of PGEE; 49.15 wt % of 2-hydroxy› isobutyric acid methyl ester; 0.009 wt% of malonic acid;  0.085 wt % of acetic acid; and 0.2 wt % of a long chain  alcohol coating enhancer. Each formulation was filtered  through 0.2 m polytetrafluoroethylene syringe.  [0052]  A solution of hydrochloric acid (37 wt% in water,  0.92 g) in water (3.06 g) was added over 10 minutes to a  mixture ofTEOS (6.85 g, 30 mo!%) and Polymer 1 from  Example 1 (10.0 g, 70 mo!%) in THF (39 g) and stirred at  room temperature for 1 hour. The reaction mixture was  heated to 63° C. for 6 hours and then cooled to room  temperature. PGEE (52 g) was added, the volatile species  removed under reduced pressure, and the resulting solution  was diluted with PGEE to deliver Condensed Polymer 2 (10  wt% in PGEE, 125 g) as a clear solution. Mw was deter› mined by GPC relative to polystyrene standards and was  found to be 35,000 Da.  [0051]  A solution of hydrochloric acid (37 wt% in water,  2.93 g) in water (9.8 g) was added over 10 minutes to a  mixture oftetraethyl orthosilicate (TEOS) (23.97 g, 50 mo!  %) and Polymer 1 from Example 1 (15.0 g, 50 mo! %) in  tetrahydrofuran (THF) (81 g) and stirred at room tempera› ture for 1 hour. The reaction mixture was heated to 63°  C.  for 4 hours and then cooled to room temperature. PGEE (107  g) was added, the volatile species removed under reduced  pressure, and the resulting solution was diluted with PGEE  to deliver Condensed Polymer 1 (10 wt% in PGEE, 213 g)  as a clear solution. Mw was determined by GPC relative to  polystyrene standards and was found to be 29,300 Da.  [0055]  A solution oftert-butyl methacrylate (tBMA), (173  g),  gamma  butyrolactone  (GBLMA),  (166  g)  and  3-(trimethoxysilyl)propyl methacrylate (TMSPMA), (60.6  g) dissolved in 1,3-dioxolane (304 g) and a solution ofV-65  initiator (60.6 g) dissolved in 2: 1 v/v tetrahydrofurane/  acetonitrile (60.6 g) were both added dropwise over 2 hours  to 3-dioxolane (710 g) at 75°  C. under a nitrogen blanket.  After addition the reaction solution was held at 75°  C. for an  additional two hours, cooled to room temperature and pre› cipitated into heptanes:methyl tert-butyl ether (MTBE) (1: 1  v/v, 14 L). The precipitated polymer was collected by  vacuum filtration and vacuum oven dried for 24 hours to  afford Comparative Polymer 1 (tBMA/GBLMA/TMSPMA  50/40/10) as a white solid (271 g, 68%). Mw was determined  by GPC relative to polystyrene standard and was found to be  5700 Da.  wt% in PGEE, 121 g) as a clear solution. Mw was deter› mined by GPC relative to polystyrene standards and was  found to be 21,000 Da.  additional two hours, cooled to room temperature and pre› cipitated into heptanes (3.8 L). The precipitated polymer  was collected by vacuum filtration and vacuum oven dried  for 24 hours to afford Polymer 1 (tBMA/MAA/TMSPMA  50/40/10) as a white solid (99 g, 90%). Mw was determined  by GPC relative to polystyrene standards and was found to  be 7828 Da.  Condensed Polymer  Comparative Polymer 1  Condensed Polymer 1  Condensed Polymer 2  Condensed Polymer 3  Condensed Polymer 4  Formulation Sample  Comparative Formulation 1  Formulation 1  Formulation 2  Formulation 3  Formulation 4 