1111111111111111 IIIIII IIIII 1111111111 11111 111111111111111 IIIII IIIII IIIII 1111111111 11111111  US 20200319555Al  c19)  United States  c12)  Patent Application Publication  MUKHERJEE et al.  c10)  Pub. No.: US 2020/0319555 Al  (43)  Pub. Date:  Oct. 8, 2020  (54)  NEGATIVE RESIST FORMULATION FOR  PRODUCING UNDERCUT PATTERN  PROFILES  (71)  Applicant:  Merck Patent GmbH,  Darmstadt (DE)  (72)  Inventors:  Anupama MUKHERJEE,  Woodbridge, NJ (US);  Medhat A.  TOUKHY,  Flemington, NJ (US)  (21)  Appl. No.:  16/496,986  (22)  PCT Filed:  Apr. 23, 2018  (86)  PCT No.:  PCT /EP2018/060272  § 371 (c)(l),  (2) Date:  Sep. 24, 2019  (60)  Provisional application No. 62/489,634, filed on Apr.  25, 2017, provisional application No. 62/491,458,  filed on Apr. 28, 2017.  (51)  Int. Cl.  (52)  U.S. Cl.  CPC ..........  G03F  710382  (2013.01);  G03F  710045  (2013.01);  G03F  710046  (2013.01);  G03F  71168  (2013.01);  C23C  14104  (2013.01);  G03F  7138  (2013.01);  G03F  71322  (2013.01);  C23C  14134  (2013.01);  C23C  14130  (2013.01);  G03F  712004  (2013.01)  Related U.S. Application Data  Publication Classification  (57)  ABSTRACT  G03F 71038  G03F 71004  (2006.01)  (2006.01)  G03F  7116  G03F  7120  G03F  7138  G03F  7132  C23C  14134  C23C  14130  C23C  14104  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  A negative-acting, photoresist composition, imageable by  365 nm radiation that is developable in aqueous base. Apart  from solvent, this composition comprises: a) an aqueous  base soluble phenolic film-forming polymeric binder resin  having ring bonded hydroxyl groups; b) a photoacid gen› erator c) a crosslinking agent which comprises an etherified  melamine; d) a dye as described herein; e) a quencher  system consisting essentially of an amine quencher, or a  mixture of such amine quenchers, as described. This inven› tion also pertains to processes of using this composition as  a photoresist.  Dose: mJ/cm 2  200  250  300  350  400  550  Example 14  Example 15  Using Coumarin 7 Dye  Using DI Dye 