US 10,921,710 B2  123  124  0  -continued  -A-4- \(  ’f=o  0~  0  (D-1)  H  RA  71==0  0  CF3  RSI+ R53+0R54  Rs2  CF3  (D-2)  H  RA  Hv-tO  0  ,,~  F3C_..\-o  ORss  (D-3)  H  RA  Hv-tO  0  I  R57  0  0  c,c:(R,  CF3  wherein  RA  is as defined above, R 51  and R 52  are each  independently hydrogen or a C$_{1 }$-C$_{10 }$ straight, branched or  cyclic monovalent hydrocarbon group, R $^{53 }$is a single bond  or a C$_{1 }$-C$_{5 }$ straight or branched divalent hydrocarbon group,  R 54 , R 55  and R 56  are each independently hydrogen or a  2.  The resist composition of claim  1,  further comprising  (D) a fluoro-resin different from the resin as component  (A),  the fluoro-resin comprising recurring units of at least one  type selected from the formulae (D-1), (D-2) and (D-3), 