234  US 8,852,845 B2  233  Surfactants and solvents used in Examples and Compara- tive Examples are as follows.  W-1: Megaface F 17 6 (produced by Dainippon Ink & Chemi› cals, Inc.) (fluorine-containing)  W-2: Megaface ROS (produced by Dainippon Ink & Chemi- cals, Inc.) (fluorine- and silicon-containing)  W-3: polysiloxane polymer (produced by Shin-Etsu Chemi- cal Co., Ltd.) (silicon-containing)  Sl: Propylene glycol monomethyl ether acetate (PGMEA)  S2: Propylene glycol monomethyl ether (PGME)  Q  0-s0  -6  PAG-1  OH  e~s-p- (CO  #  PAG-2  TPI  TBAH  DIA  -continued  OH  OYOV  P-10  OH  0SPh3  P-11  P-12  •.~•  58  0  F  OH  ’1Q,  F  F  Mw  ~  20000 (Mw/Mn  ~  1.15)  Mw  ~  21000 (Mw/Mn  ~  1.85)  Mw  ~  38500 (Mw/Mn  ~  2.55)  Mw  ~  4000 (Mw/Mn  ~  1.69) 