US 10,007,180 B2  15  16  an amide bond and a sulfonamide bond. The connecting  group represented by E is more preferably an alkylene bond,  an ester bond or an ether bond.  Compound (A) may be a compound comprising a plural› ity of moieties each containing a nitrogen atom. For  example, compound (A) may be a compound with the  structure of general formula (N-II) in which at least one of  R/s is expressed by general formula (N-I).  Compounds (A) of general formula (N-II) in one form  thereof are expressed by general formula (N-V) below.  Particular examples and preferred examples of the aro› matic hydrocarbon groups represented by Ar are the same as  set forth above in connection with R in general formula  (N-II).  Particular examples and preferred examples of the biva› lent connecting groups represented by X$_{1 }$ are the same as set  forth above in connection with X in general formula (N-II).  Particular examples and preferred examples of the organic  groups represented by R$_{12 }$are the same as set forth above in  connection with  RA  and  RB  in general formula (N-I).  A form in which X is an alkylene group (for example, a  methylene group) and in which two R$_{12}$s are bonded to each  other to thereby form a ring is especially preferred from the  viewpoint of dependence on post-exposure bake (PEB)  temperature and post-exposure line width (PED) stability.  The anion moiety of compound (A) is not particularly  limited.  It is preferred for the anion contained in compound  (A) to be a nonnucleophilic anion. Herein, the nonnucleo› philic anion refers to an anion whose capability of inducing  a nucleophilic reaction is markedly low, which anion is  capable of suppressing any decomposition over time by an  intramolecular nucleophilic reaction. The nonnucleophilic  anion enhances the temporal stability of the composition of  the present invention.  As the nonnucleophilic anion, there can be mentioned, for  example, a sulfonate anion, a carboxylate anion, a sulfo› nylimide anion, a bis(alkylsulfonyl)imide anion, a tris(alkyl› sulfonyl)methyl anion or the like.  As the sulfonate anion, there can be mentioned, for  example, an aliphatic sulfonate anion, an aromatic sulfonate  anion, a camphor sulfonate anion or the like.  As the carboxylate anion, there can be mentioned, for  example, an aliphatic carboxylate anion, an aromatic car› boxylate anion, an aralkyl carboxylate anion or the like.  In the formula, X,  AN  and y- are as defined above in  connection with general formula (N-II). Particular examples  and preferred examples thereof are also the same as set forth  there.  R$_{14}$, R 15 , rand 1 have the same meanings as those of the  groups and indexes in general formula (ZI-4) expressing one  form of photoacid generator (B) to be described hereinbe› low. Particular examples and preferred examples thereof are  also the same as set forth there.  Compounds (A) of general formula (N-II) in one form  thereof are expressed by general formula (N-VI) below.  In general formula (N-VI),  A represents a sulfur atom or an iodine atom.  Ru, or each of Ru s independently, represents an alkyl  group, an alkenyl group, an alicyclic group, an aromatic  hydrocarbon group or a heterocyclic hydrocarbon group.  When m=2, two Ru s may be bonded to each other to  thereby form a ring.  Ar, or each of Ar’s independently, represents an aromatic  hydrocarbon group.  Xi, or each of X$_{1 }$s independently, represents a bivalent  connecting group.  R$_{12}$, or each ofR$_{12}$s independently, represents a hydrogen  atom or an organic group.  When A is a sulfur atom, m is an integer of 1 to 3 and n  is an integer satisfying the relationship m+n=3.  When A is an iodine atom, m is an integer of 1 or 2 and  n is an integer satisfying the relationship m+n=2.  y- represents an anion ( details thereof will be described  hereinafter as the anion moiety of compound (A)).  Particular examples and preferred examples of the alkyl  group, alkenyl group, alicyclic group, aromatic hydrocarbon  group and heterocyclic hydrocarbon group represented by  Ru are the same as set forth above in connection with R$_{1 }$ in  general formula (N-II).  The aliphatic moiety in the aliphatic sulfonate anion may  be an alkyl group or a cycloalkyl group, being preferably an  alkyl group having 1 to 30 carbon atoms or a cycloalkyl  group having 3 to 30 carbon atoms. As such, there can be  mentioned, for example, a methyl group, an ethyl group, a  propyl group, an isopropyl group, an n-butyl group, an  isobutyl group, a sec-butyl group, a pentyl group, a neopen› tyl group, a hexyl group, a heptyl group, an octyl group, a  nonyl group, a decyl group, an undecyl group, a dodecyl  group, a tridecyl group, a tetradecyl group, a pentadecyl  group, a hexadecyl group, a heptadecyl group, an octadecyl  group, a nonadecyl group, an eicosyl group, a cyclopropyl  group, a cyclopentyl group, a cyclohexyl group, an adaman› tyl group, a norbornyl group, a bornyl group or the like.  As a preferred aromatic group in the aromatic sulfonate  anion, there can be mentioned an aryl group having 6 to 14  carbon atoms, for example, a phenyl group, a tolyl group, a  naphthyl group or the like.  Substituents may be introduced in the alkyl group,  cycloalkyl group and aryl group in the aliphatic sulfonate  anion and aromatic sulfonate anion. As the substituents  introducible in the alkyl group, cycloalkyl group and aryl  group in the aliphatic sulfonate anion and aromatic sulfonate  anion, there can be mentioned, for example, a nitro group, a  halogen atom (fluorine atom, chlorine atom, bromine atom  or iodine atom), a carboxyl group, a hydroxyl group, an  amino group, a cyano group, an alkoxy group (preferably  having 1 to 15 carbon atoms), a cycloalkyl group (preferably  having 3 to 15 carbon atoms), an aryl group (preferably  having 6 to 14 carbon atoms), an alkoxycarbonyl group  (preferably having 2 to 7 carbon atoms), an acyl group  (preferably having 2 to 12 carbon atoms), an alkoxycarbo› nyloxy group (preferably having 2 to 7 carbon atoms), an  (N-V)  y- (N-VI)  0  y 