46  US 8,968,979 B2  45  OH  OH  OH  OH  OH  OH  -continued  Me  ~  to  ~  do  Me  ~  Oo  Me  ~  Me  ~  Me  ~  -continued  (~) (~)  /  >=o  /  >=o  O>--CF3  °>  F3C  F2C  CF2H  \  I  F2C-CF2  H  H  H  H  ,ryo ,ryo  HO  O~  OH  H  H  H  H  ,ryo,ryo  ~  )  OH  (++)(~)  i  Fo  /  >=o  0  0  o~ cc,  )-cc,  o_J  Examples of the polymer comprising the acid labile group› containing repeat units represented by formula (1) or (2)  which can afford a high resolution capability and a high  sensitivity are shown below, but not limited thereto. 