[Chemical Formula 21]  -continued  US 9,097,971 B2  39  40  0 y-tCH3  N=NtyCH3  O  M'-0- CN  CN  -o-M:  8 ~soo  ooso;  ’=6 3 s  f  ’  o  \  ;(  CH3  CH3  F  F  OyfN-N~O  M'  CN  CN  0  03S  0  0  F  F  F  F  F  F  F  M'  0  S03  F  F  F 