28  US 8,906,600 B2  27  (ZI) is more preferred, and the compounds represented by  (ZI-1) to (ZI-3) are most preferred.  Specific examples of the acid generator (B) are illustrated  below, but the present invention is not limited thereto.  Among the compounds capable of decomposing upon irra› diation with an actinic ray or radiation to generate an acid  except for a carboxylic acid, which are used as the acid  generator (B), the compounds represented by formulae  (ZI)  to  (ZIII)  are preferred, the compound represented by formula  (B15)  -t-0-s  C16H33SO3- (B16)  Buo--0-s+  C16H33SO3- (B14)  0-0-s+  C16H33SO3- (B13)  (  -t-0-ts C,oH;;SO;  3  (B12)  p  --0-s+  C16H33SO3- (Bll)  (ots o,s5?  (BIO)  (ots  3  (Qtsw-0-- (B9)  (BS)  (  otS C,oH;;SO;  3  (ots  C12H2sSO3- 3  (B7)  (B6)  (ots  C6H13SO3- 3  (ots  C3H7SO3- 3  (B5)  (B4)  (ots  C2HsSO3- 3  (ots  CsH17SO3- 3  (B3)  (B2)  (ots  C4H9SO3- 3  (ots  CH3SO3- 3  (Bl) 