Jul.  30,  2020  31  US 2020/0241418 Al  [0083]  In formula (AL-3)-22,  RA  is as defined above.  RLc1 2  and  RLc1 3  are each independently a C$_{1 }$-C$_{10 }$monova› lent hydrocarbon group, or  RLc1 2  and  RLc 13 ,  taken together,  may form an aliphatic ring with the carbon atom to which  they are attached.  RLc1 4  is furandiyl, tetrahydrofurandiyl or  oxanorbornanediyl.  RLc1s  is hydrogen or a C$_{1 }$-C$_{10 }$monova› lent hydrocarbon group which may contain a heteroatom.  The monovalent hydrocarbon group may be straight,  branched or cyclic, and examples thereof include C$_{1 }$-C$_{10 }$ alkyl groups.  [0084]  Examples of the monomer from which the recur› ring units having formula (AL-3)-22 are derived are shown  below, but not limited thereto. Herein  RA  is as defined above.  [0082]  Examples of the monomer from which the recur› ring units having an acid labile group of formula (AL-3) are  derived include (meth)acrylates having a furandiyl, tetrahy› drofurandiyl or oxanorbomanediyl group as represented by  the following formula (AL-3)-22.  (AL-3)-22  -continued 