132  US 9,221,742 B2  131  -continued  (A-49)  ~o $^{F }$ F  0  (A-50)  F  F  (A-52)  }Qyo  F  F  CO2- 0  (A-53)  F  F  CO2-- 3.  The sulfonium salt of claim  1  wherein the cation moiety  of the formula:  is selected from the following formulae:  -continued  OH  ¢  usuusu  +  0  ¢  y  usuusu  ¢  frs’Q 