US 9,612,535 B2  114  113  by -(WY). Here, Y is an alkyl group substituted by a  hydroxyl group and Wis a single bond or a divalent linking  group.  Examples of the alkyl group represented by Y may  include an ethyl group, a propyl group and an isopropyl  group. Y includes particularly preferably a structure repre› sented by ----CH$_{2}$CH$_{2}$OH.  A divalent linking group represented by Wis not particu› larly limited, but preferably includes a single bond, an  alkoxy group, an acyloxy group, an acylamino group, an  alkyl and a arylsulfonylamino group, an alkylthio group, an  alkylsulfonyl group, an acyl group, an alkoxycarboxyl group  or a divalent group in which any hydrogen atom in a  carbamoyl group is substituted by a single bond, and more  preferably, a single bond, an acyloxy group, an alkylsulfonyl  group, an acyl group or a divalent group in which arbitrary  hydrogen atom in an alkoxycarboxyl group is substituted by  a single bond.  When Ri to R$_{13 }$are a substituent containing, an alcoholic  hydroxyl group, the carbon number contained is preferably  2 to 10, more preferably 2 to 6, and particularly preferably  2 to 4.  A substituent containing an alcoholic hydroxyl group of  Ri to  R$_{13 }$ may have two or more alcoholic hydroxyl groups.  The number of an alcoholic hydroxyl group possessed by the  substituent containing an alcoholic hydroxyl group as Ri to  R$_{13 }$ is 1 to 6, preferably 1 to 3, and more preferably  1.  The number of an alcoholic hydroxyl group that  (ZI-4)  group contains is preferably 1 to 10, more preferably 1 to 6,  and still more preferably 1 to 3 after all of Ri to R$_{13 }$ are  combined.  When Ri to R$_{13 }$ do not contain an alcoholic hydroxyl  group, examples ofRi to R$_{13 }$may include a hydrogen atom,  a halogen atom, an alkyl group, a cycloalkyl group, an  alkenyl group, a cycloalkenyl group, an alkynyl group, an  aryl group, heterocyclic ring group, a cyano group, a nitro  group, a carboxyl group, an alkoxy group, an aryloxy group,  a silyl oxy group, a heterocyclic oxy group, an acyloxy  group, a carbamoyl oxy group, an alkoxycarbonyloxy group,  an aryloxycarbonyloxy group, an amino group (including an  anilyno group), an ammonia group, an acylamino group, an  aminocarbonylamino  group,  an  alkoxycarbonylamino  group, an aryloxycarbonylamino group, a sulfamoylamino  group, an alkyl and an arylsulfonylamino group, a mercapto  group, an alkylthio group, an arylthio group, a polycyclic› thio group, a sulfamoyl group, a sulfa group, an alkyl and  arylsulfinyl group, an alkyl and arylsulfonyl group, an acyl  group, an aryloxycarbonyl group, an alkoxycarboxyl group,  a carbamoyl group, an aryl and heterocyclic azo group, an  imide group, a phophino group, a phophinyl group, a pho› phinyloxy group, a phophinylamino group, a phosphono  group, a silyl group, a hydrazino group, a ureido group, a  boronic acid group [-B(OH)$_{2}$ ],  a phosphate group [---OPO  (OH)$_{2}$], a sulfate group (-OSO $_{3}$H), and other known sub› stituent.  When Ri to R$_{13 }$ do not contain an alcoholic hydroxyl  group, examples of Ri to R$_{13 }$ may include preferably a  hydrogen atom, a halogen atom, an alkyl group, a cycloalkyl  group, a cyano group, an alkoxy group, an acyloxy group, an  acylamino group, an aminocarbonyl amino group, an  alkoxycarbonylamino  group,  an alkyl  and arylsulfo› nylamino group, an alkylthio group, a sulfamoyl group, an  alkyl and arylsulfonyl group, an alkoxycarboxyl group or a  carbamoyl group.  When Ri to R$_{13 }$ do not contain an alcoholic hydroxyl  group, examples of Ri to R$_{13 }$ may include particularly  In Formula (ZI-4), each of Ri to R$_{13 }$ independently  represents a hydrogen atom or a substituent.  At least one of Ri to R$_{13 }$ is preferably a substituent  containing an alcoholic hydroxyl group. Further, here "an  alcoholic hydroxyl group" means a hydroxyl group in which  bonded to a carbon atom of an alkyl group.  Z  is a single bond or a divalent linking group.  zc- represents a non-nucleophilic anion;  examples  thereof include the same as z- in Formula  (ZI).  When Ri to R$_{13 }$ are a substituent including an alcoholic  hydroxyl group, Ri to R$_{13 }$are preferably a group represented  The (ZI-4) group is a group represented by the following  Formula (ZI-4). The group is effective in the suppression of  outgas.  Subsequently, a (ZI-4) group will be described.  As for the specific structure of a cation moiety of Formula  (ZI-3),  reference may be made to the structure of a cation  moiety of an acid-generating agent described in [0047] and  [0048] of Patent Application Laid-Open No. 2004-233661  and [0040] to [0046] of Patent Application Laid-Open No.  2003-35948.  zc- represents a non-nucleophilic anion, and examples  thereof may include the non-nucleophilic anion which is the  same as z- in Formula  (ZI).  Any two or more of Ric to R$_{5}$c, R$_{6}$c and R$_{7}$c, and  Rx  and  RY  may combine with each other to form a ring structure,  respectively. This ring structure may include an oxygen  atom, a sulfur atom, a ketone group, an ester bond and/or an  amide bond. Examples of the group formed by combining  them may include a butylene group, a pentylene group and  the like.  Each of  Rx  and  RY  independently represents an alkyl  group, a cycloalkyl group, an ally! group or a vinyl group.  Each ofR$_{6}$c and R$_{7}$c independently represents a hydrogen  atom, an alkyl group or a cycloalkyl group.  In Formula  (ZI-3),  each of Ric to R$_{5}$c independently  represents a hydrogen atom, an alkyl group, a cycloalkyl  group, an alkoxy group or a halogen atom.  0  El  Rx  Ze- le  s......_  Ry  ZI-3  ZI-4 