Jul. 4, 2019  42  US 2019/0204738 Al  component (E), a component (F), and a component (S)  described below are exemplified.  [0400]  <<Acid Generator Component (B)>>  [0401]  The resist composition of the present embodiment  may further contain an acid generator component (herein› after, referred to as a "component (B)") in addition to the  component (A).  [0402]  The component (B) is not particularly limited, and  those which have been proposed as an acid generator for a  chemically amplified resist in the related art can be used.  [0403]  Examples of these acid generators are numerous  and include onium salt acid generators such as iodonium  salts and sulfonium salts; oxime sulfonate-based acid gen› erators;  diazomethane-based acid  generators  such as  bisalkyl or bisaryl sulfonyl diazomethanes and poly(bis› sulfonyl)diazomethanes; nitrobenzylsulfonate-based acid  generators; iminosulfonate-based acid generators; and dis› ulfone-based acid generators. Among these examples, it is  preferable to use an onium salt acid generator.  [0404]  As the onium salt acid generator, a compound  represented by Formula (b-1) (hereinafter, also referred to as  "component (b-1)"), a compound represented by Formula  (b-2) (hereinafter, also referred to as "component (b-2)") or  a compound represented by Formula (b-3) (hereinafter, also  referred to as "component (b-3)") can be used.  [0405]  [In the formulae, R$^{101 }$and R$^{104 }$to R$^{108 }$each inde› pendently represent a cyclic group which may have a  substituent, a chain-like alkyl group which may have a  substituent, or a chain-like alkenyl group which may have a  substituent, provided that R $^{104 }$and R $^{105 }$may be bonded to  each other to form a ring.  [0406]  R 102  represents a fluorine atom or a fluorinated  alkyl group having 1 to 5 carbon atoms. Y 101  represents a  single bond or a divalent linking group containing an oxygen  atom. V 101  to V 103  each independently represent a single  bond, an alkylene group, or a fluorinated alkylene group.  L $^{101 }$and L $^{102 }$each independently represent a single bond or  an oxygen atom. L $^{103 }$to L $^{105 }$each independently represent  a single bond, --CO- or -SO$_{2}$ -.  m represents an integer  of 1 or greater, and  M’m+  represents an m-valent onium  cation.]  [0407]  {Anion Moiety}  [0408]  Anion Moiety of Component (B-1)  [0409]  In Formula (b-1), R 101  represents a cyclic group  which may have a substituent, a chain-like alkyl group  which may have a substituent, or a chain-like alkenyl group  which may have a substituent.  [0410]  Cyclic group which may have substituent:  [0411]  The cyclic group is preferably a cyclic hydrocarbon  group, and the cyclic hydrocarbon group may be an aromatic  hydrocarbon group or an aliphatic hydrocarbon group. The  aliphatic hydrocarbon group indicates a hydrocarbon group  that has no aromaticity. The aliphatic hydrocarbon group  may be saturated or unsaturated, but in general, the aliphatic  hydrocarbon group is preferably saturated.  [0412]  The aromatic hydrocarbon group as R 101  is a  hydrocarbon group having an aromatic ring. The aromatic  hydrocarbon group has preferably 3 to 30 carbon atoms,  more preferably 5 to 30, still more preferably 5 to 20,  particularly preferably 6 to 15, and most preferably 6 to 10.  Here, the number of carbon atoms in a substituent is not  included in the number of carbon atoms.  [0413]  Specific examples of the aromatic ring contained in  the aromatic hydrocarbon group as R 101  include benzene,  fluorene, naphthalene, anthracene, phenanthrene, biphenyl,  or an aromatic hetero ring in which some carbon atoms  constituting any of these aromatic rings have been substi› tuted with hetero atoms. Examples of the hetero atom in the  aromatic hetero rings include an oxygen atom, a sulfur atom,  and a nitrogen atom.  [0414]  Specific examples of the aromatic hydrocarbon  group as R$^{101 }$include a group in which one hydrogen atom  has been removed from the above-described aromatic ring  (an aryl group such as a phenyl group or a naphthyl group),  and a group in which one hydrogen atom in the aromatic ring  has been substituted with an alkylene group (an arylalkyl  group such as a benzyl group, a phenethyl group, a 1-naph› thylmethyl group, a 2-naphthylmethyl group, 1-naphthyl› ethyl group, or a 2-naphthylethyl group). The alkylene group  (an alkyl chain in the arylalkyl group) has preferably 1 to 4  carbon atom, more preferably 1 or 2 carbon atoms, and  particularly preferably 1 carbon atom.  [0415]  Examples of the cyclic aliphatic hydrocarbon  group as R $^{101 }$include aliphatic hydrocarbon groups contain› ing a ring in the structure thereof.  [0416]  Examples of the aliphatic hydrocarbon group con› taining a ring in the structure thereof include an alicyclic  hydrocarbon group (a group in which one hydrogen atom  has been removed from an aliphatic hydrocarbon ring), a  group in which the alicyclic hydrocarbon group is bonded to  the terminal of a linear or branched aliphatic hydrocarbon  group, and a group in which the alicyclic hydrocarbon group  is interposed in a linear or branched aliphatic hydrocarbon  group.  [0417]  The alicyclic hydrocarbon group has preferably 3  to 20 carbon atoms and more preferably 3 to 12 carbon  atoms.  [0418]  The alicyclic hydrocarbon group may be a poly› cyclic group or a monocyclic group. As the monocyclic  alicyclic hydrocarbon group, a group in which one or more  hydrogen atoms have been removed from a monocycloal› kane is preferable. The monocycloalkane has preferably 3 to  6 carbon atoms, and specific examples thereof include  cyclopentane and cyclohexane. As the polycyclic alicyclic  hydrocarbon group, a group in which one or more hydrogen  atoms have been removed from a polycycloalkane is pref› erable, and the number of carbon atoms of the polycycloal› kane is preferably in a range of 7 to 30. Among polycy› cloalkanes, a polycycloalkane having a bridged ring  polycyclic skeleton, such as adamantane, norbomane,  isobomane, tricyclodecane, or tetracyclododecane, and a  (b-1)  (b-2)  (b-3) 