158  US 9,170,489 B2  157  The hydrogen atom of each of the alkyl group, cycloalkyl  group, aryl group or aralkyl group represented by R$_{651 }$may be  substituted with a substituent. As the substituents, an alkyl  group, a cycloalkyl group, an aryl group, an aralkyl group, a  hydroxyl group, a carboxyl group, an alkoxy group, an ary› loxy group, an alkylcarbonyloxy group and an alkyloxycar› bonyl group are exemplified.  As the solvent having a hydroxyl group, alkylene glycol  monoalkyl ether is preferred, and as the solvent not having a  hydroxyl group, alkylene glycol monoalkyl ether carboxylate  is preferred.  [ 4] Basic Compounds  It  is preferred that the electron beam sensitive or extreme  ultraviolet radiation-sensitive resin composition in the inven› tion contains a basic compound.  The basic compound is preferably a nitrogen-containing  organic basic compound.  Usable compounds are not especially limited and, for  example, compounds classified into the following (1) to (4)  are preferably used.  ( 1) Compound Represented by the Fallowing Formula (BS-1)  It  is preferred that, in the compound represented by for› mula (BS-1 ), one alone of three R$_{651 }$ represents a hydrogen  atom, or not all R$_{6}$ s $_{1 }$represent a hydrogen atom.  As the specific examples of the compound represented by  formula (BS-1), tri-n-butylamine, tri-n-pentylamine, tri-n› octylamine, tri-n-decylamine, triisodecyl-amine, dicyclo- hexylmethylamine, tetradecylamine, pentadecylamine, hexa› decylamine,  octadecylamine,  didecylamine,  methyloctadecylamine, dimethylundecylamine, N,N-dim› ethy ldodecy !amine, methy ldioctadecy !amine, N,N-dibuty !a› niline, and N,N-dihexylaniline are exemplified.  Further, in formula (BS-1 ), a compound in which at least  one R$_{651 }$is an alkyl group substituted with a hydroxyl group  is exemplified as a preferred embodiment. As the specific  compounds, triethanolamine and N,N-dihydroxyethylaniline  are exemplified.  In formula (BS-1 ), each of R$_{651 }$ independently represents  any of a hydrogen atom, an alkyl group (straight chain or  branched), a cycloalkyl group (monocyclic or polycyclic), an  aryl group and an aralkyl group. However, not all R$_{651 }$repre› sent a hydrogen atom.  Further, the alkyl group represented by R$_{651 }$ may have an  oxygen atom in the alkyl chain to form an oxyalkylene chain.  As the oxyalky lene chain, -CH$_{2}$CH$_{2 }$0-is preferred. As the  specific examples, tris(methoxyethoxyethyl)amine and the  compounds disclosed in U.S. Pat. No. 6,040,112, column 3,  line 60 and after, are exemplified.  The carbon atom number of the alky I group represented by  R$_{651 }$ is not especially restricted and is generally 1 to 20, and  preferably 1 to 12.  The carbon atom number of the cycloalkyl group repre› sented by R$_{651 }$is not especially restricted and is generally 3 to  20, and preferably 5 to 15.  The carbon atom number of the aryl group represented by  R$_{651 }$ is not especially restricted and is generally 6 to 20, and  preferably 6 to 10. Specifically a phenyl group and a naphthyl  group are exemplified.  Further, as a preferred basic compound represented by  formula (BS-1 ), a compound having an alkyl group in which  at least one R is substituted with a hydroxyl group is exem› plified. Specifically, for example, triethanolamine and N,N- dihydroxyethylaniline are exemplified.  The carbon atom number of the aralkyl group represented  by R$_{651 }$is not especially restricted and is generally 7 to 20, and  preferably 7 to 11. Specifically a benzyl group is exemplified.  As the basic compounds represented by formula (BS-1 ),  for example, the following compounds are exemplified.  (BS-1)  rO~OH  /0~  N ~ 0 ~0H  rO~OH  HO~O~N~ 0 ~0H  rO~OH  /O~N~O~OH  rO~OH  ~O~N~O~  rO~OH  /O~N~O~OH  ro~  /O~N~O~  rO~OH  /O~N~ 0 rO~OH  ........__o~N~o~OH  rO~O~OH  /O~N~o~o~OH  rs~s-......__  /s~N~ 8 ~s-......__  rs~SH  /S~N~S~SH  rs~SH  HO~S~N~S~SH 