-continued  108  US 8,900,791 B2  107  As preferred cycloalkylene groups, there can be mentioned  cycloalkylene groups having 5 to  8  carbon atoms, such as a  cyclopentylene group and a cyclohexylene group.  As preferred arylene groups, there can be mentioned  arylene groups having  6  to 15 carbon atoms, such as a phe- nylene group, a tolylene group and a naphthylene group.  These groups may have a substituent. As the substituent,  there can be mentioned, for example, one having an active  hydrogen, such as an alkyl group, a cycloalkyl group, an aryl  group, an amino group, an amido group, a ureido group, a  urethane group, a hydroxyl group or a carboxyl group as well  as a halogen atom ( a fluorine atom, a chlorine atom, a bromine  atom or an iodine atom), an alkoxy group (a methoxy group,  anethoxy group, a propoxy group, a butoxy group or the like),  a thioether group, an acyl group (an acetyl group, a propanoyl  group, a benzoyl group or the like), an acyloxy group (an  acetoxy group, a propanoyloxy group, a benzoyloxy group or  the like), an alkoxycarbonyl group (a methoxycarbonyl  group, an ethoxycarbonyl group, a propoxycarbonyl group or  the like), a cyano group, a nitro group or the like.  The above-mentioned alkyl group, cycloalkyl group and  aryl group are the same as described hereinbefore. Further,  the alkyl group may be substituted with a fluorine atom or a  cycloalkyl group.  As the group that is contained in the fluorinated acid› decomposable resin according to the present invention and  decomposed by the action of an acid to thereby exhibit alkali  solubility, there can be mentioned, for example, -O----C  (R36)(R37)(R3s), -O----C(R36)(R37)(OR39), ---O-COO› C(R36)(R37)(R3s),  -O----C(Ro1)(Ro2)COO----C(R36)(R37)  (R 38 ), -COO----C(R 36 )(R 37  )(R 38 ), ----COO----C(R 36 )(R 37 )  (OR 39 ) or the like.  In the formulae, each of R 36  to R 39  represents an alkyl  group, a cycloalkyl group, an aryl group, an aralkyl group or  an alkenyl group. Each ofR 01  and R 02  represents a hydrogen  atom, an alkyl group, a cycloalkyl group, an alkenyl group (a  vinyl group, an ally! group, a butenyl group, a cyclohexenyl  group or the like), an aralkyl group (a benzyl group, a phen› ethyl group, a naphthylmethyl group or the like) or an aryl  group.  As preferred specific examples, there can be mentioned an  ether or ester group of a tertiary alkyl such as at-butyl group,  a t-amyl group, a l-alkyl-1-cycloalkyl group, a 2-alkyl-2- adamantyl group, a 2-adamantyl-2-propyl group or a 2-(4- methylcyclohexyl)-2-propyl group, an acetal or acetal ester  group of, for example, a l-alkoxy-1-ethoxy group or a tet- rahydropyranyl group, at-alkyl carbonate group, a t-alkylcar› bonylmethoxy group and the like.  Specific examples of the repeating structural units of the  general formulae (FA) to (FG) will be shown below, which  however in no way limit the scope of the present invention.  F  F  \  I  ---fC-C-t› /  \  F  F  (F-1)  (F-2)  (F-14)  ---fCH2-CH-t- l  CF3  CH2  I  ’C-OH  I  CF3  (F-13)  F  F  \  I  ---fC-C-t- /  \  o........_ ,,,,o  C  I\  F  F  (F-12)  (F-11)  (F-10)  (F-8)  (F-9)  (F-7)  (F-6)  F  F  \  I  ---f C - C -t› /  \  F  CsF11  (F-5)  (F-4)  (F-3) 