(IO)  Patent No.:  US 10,175,578 B2  (45)  Date of Patent:  Jan.8,2019  c12)  United States Patent  Inoue et al.  (54)  PATTERN FORMING METHOD,  COMPOSITION FOR FORMING  PROTECTIVE FILM, METHOD FOR  MANUFACTURING ELECTRONIC DEVICE,  AND ELECTRONIC DEVICE  US010175578B2  (58)  Field of Classification Search  CPC ... G03F 7/004; G03F 7/11; G03F 7/26; G03F  7/38; G03F 7/40; H0lL 21/0274; H01L  21/3114; H01L 21/02112  USPC .... 430/271.1, 434, 435, 322, 325, 329, 330,  430/331; 438/699  See application file for complete search history.  (71)  Applicant:  FUJIFILM Corporation,  Tokyo (JP)  (72)  Inventors:  Naoki Inoue,  Haibara-gun (JP);  Naohiro Tango,  Haibara-gun (JP);  Kei  Yamamoto,  Haibara-gun (JP);  Michihiro Shirakawa,  Haibara-gun  (JP);  Akiyoshi Goto,  Haibara-gun (JP)  (73)  Assignee:  FUJIFILM Corporation,  Minato-kn,  Tokyo (JP)  ( *)  Notice:  Subject to any disclaimer, the term ofthis  patent is extended or adjusted under 35  U.S.C. 154(b) by 0 days.  (21)  Appl. No.:  15/446,695  (22)  Filed:  Mar. 1, 2017  (65)  Prior Publication Data  Related U.S. Application Data  (30)  Foreign Application Priority Data  15 Claims, No Drawings  (57)  ABSTRACT  OTHER PUBLICATIONS  FOREIGN PATENT DOCUMENTS  U.S. PATENT DOCUMENTS  (56)  References Cited  2009/0042147 Al  2/2009 Tsubaki  2013/0089820 Al *  4/2013 Hatakeyama ......... G03F 7/0045  430/296  2013/0189620 Al  7/2013 Suka et al.  2014/0080064 Al *  3/2014 Hatakeyama ............. G03F 7/11  430/296  2014/0113223 Al  4/2014 Kato et al.  2014/0227637 Al  8/2014 Kato et al.  2014/0234761 Al  8/2014 Shirakawa et al.  2015/0030983 Al *  1/2015 Hatakeyama ......... C08F 212/14  430/287.1  2015/0338943 Al *  11/2015 Donnelly ................ G06F 3/041  2016/0349619 Al  12/2016 Tsubaki  345/173  JP  JP  JP  JP  JP  JP  2005-109146 A  2008111102 A  *  2008-292975  A  2008-309878  A  2011-141494 A  2013-033227  A  4/2005  5/2008  12/2008  12/2008  7/2011  2/2013  (Continued)  Machine translation of JP 2014-056194 (no date).*  Machine translation of JP 2008-111102 (no date).*  International Search Report for PCT/JP2015/076189 dated Dec. 22,  2015.  Foreign Written Opinion for PCT/JP2015/076189 dated Dec. 22,  2015.  Connnunication dated Jan. 9, 2018 from the Korean Intellectual  Property Office in counterpart Application No. 10-2017-7005993.  (Continued)  A pattern forming method includes coating an actinic ray› sensitive or radiation-sensitive resin composition onto a  substrate to form an actinic ray-sensitive or radiation-sen› sitive film, coating a composition for forming a protective  film onto the actinic ray-sensitive or radiation-sensitive film  to form a protective film, exposing the actinic ray-sensitive  or radiation-sensitive film covered with the protective film,  and developing the exposed actinic ray-sensitive or radia› tion-sensitive film using a developer containing an organic  solvent, in which the protective film contains a compound  (A) including at least one group or bond selected from the  group consisting of an ether bond, a thioether bond, a  hydroxyl group, a thiol group, a carbonyl bond, and an ester  bond, and a resin (X).  Primary Examiner  - Amanda C. Walke  (74)  Attorney, Agent, or Firm  - Sughrue Mion, PLLC  US 2017/0176862 Al  Jun. 22, 2017  (63)  Continuation  of  application  No.  PCT/JP2015/076189, filed on Sep. 15, 2015.  Sep. 30, 2014  (JP) ................................. 2014-202362  (51)  Int. Cl.  G03F  7111  G03F  71038  G03F  71039  C09D 133/08  G03F  7109  G03F  7116  G03F  7120  G03F  7132  G03F  7138  G03F  7140  C08F  2148  C08F  220118  C09D 133/10  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (52)  U.S. Cl.  CPC ..................  G03F  7111  (2013.01);  C08F  2148  (2013.01);  C08F  220118  (2013.01);  C09D  133/08  (2013.01);  C09D 133/10  (2013.01);  G03F  71038  (2013.01);  G03F  71039  (2013.01);  G03F  710397  (2013.01);  G03F  71091  (2013.01);  G03F  7116  (2013.01);  G03F  71168  (2013.01);  G03F  712041  (2013.01);  G03F  71325  (2013.01);  G03F  71327  (2013.01);  G03F  7138  (2013.01);  G03F  7140  (2013.01) 