US 10,005,868 B2  40  39  (7)  wherein  R $^{35 }$and  R $^{37 }$represent a hydrogen atom or a methyl  group;  R $^{36 }$and  R $^{38 }$represent an acid-labile group other than  the groups shown by the general formulae (1-1) to (1-5); Z 4  represents a single bond, a phenylene group, a naphthylene  group, or ----C(=0)---0-R 39 -, where R 39  represents a  linear, branched, or cyclic alkylene group having 1 to 10  carbon atoms and optionally containing an ester group, an  ether group, or a lactone ring; Z 5  represents a single bond,  an ester group, or an amido group; "r" represents 1 or 2; and  "e" and  "f’  satisfy 0ses0.5 and 0sfs0.5.  Examples of repeating unit g that can be copolymerized  other than the repeating units a, b, c, d, e, and f include  repeating units derived from styrene, vinylnaphthalene,  vinylanthracene, vinylpyrene, and methyleneindane (The  content ratio of the repeating unit g is 0sgs0.5)  The acid-labile groups other than the groups shown by the  general formulae (1-1) to (1-5) (the acid-labile groups  shown by R 36  and R 38  in the general formula (7)) are  variously selected and may be the same or different from  each other. In particular, there may be mentioned the fol› lowing groups shown by the general formulae (A-1) to  (A-3).  In the formula (A-1),  RL 30  represents a tertiary alkyl  group having 4 to 20, preferably 4 to 15 carbon atoms, a  trialkylsilyl group containing alkyl groups having 1 to 6  carbon atoms, an oxoalkyl group having 4 to 20 carbon  atoms, or a group shown by the formula (A-3). Illustrative  examples of the tertiary alkyl group include a tert-butyl  group, a tert-amyl group, a 1,1-diethylpropyl group, a 1-eth- ylcyclopentyl group, a 1-butylcyclopentyl group, a 1-ethyl› cyclohexyl group, a 1-butylcyclohexyl group, a l-ethyl-2- cyclopentenyl group, a l-ethyl-2-cyclohexenyl group, and a  2-methyl-2-adamantyl group; illustrative examples of the  trialkylsilyl group include a trimethylsilyl group, a triethyl- silyl group, and a dimethyl-tert-butylsilyl group; and illus› trative examples of the oxoalkyl group include a 3-oxocy- Other examples thereof include substituents shown by the  formulae (A-1 )-1 to (A-1)-10.  clohexyl group, a 4-methyl-2-oxooxan-4-yl group, and a  5-methyl-2-oxooxolan-5-yl group. Al is an integer of0 to 6.  Illustrative examples of the acid-labile group of the for› mula (A-1) include a tert-butoxycarbonyl group, a tert- butoxycarbonylmethyl  group,  a  tert-amyloxycarbonyl  group, a tert-amyloxycarbonylmethyl group, a 1,1-diethyl› propyloxycarbonyl group, a 1, 1-diethylpropyloxycarbonyl› methyl group, a 1-ethylcyclopentyloxycarbonyl group, a  1-ethylcyclopentyloxycarbonylmethyl group, a l-ethyl-2- cyclopentenyloxycarbonyl group, a l-ethyl-2-cyclopenteny› loxycarbonylmethyl group, a 1-ethoxyethoxycarbonylm› ethyl  group,  a  2-tetrahydropyranyloxycarbonylmethyl  group, and a 2-tetrahydrofuranyloxycarbonylmethyl group.  (A-1)-1  (A-1)-2  { (CH2)A1yO’{L~: 37 ]  0  RL3 7  (A-1)-3  i’m,i,Yotf s  1  (A-1)-4  t(CH,),y0%?I  (A-1)-5  i’m,1,Yotf s  1  (A-1)-6  (A-1)-7  (A-1)-8  (A-1)  (A-2)  (A-3)  0  II  -(CH2)A1-C-O-Rno  Rn1  I  -c-o-Rn 3  I  Rn2  RL34  I  -C-RL3 6  I  Rns 