Nov.  22, 2018  US 2018/0335696 Al  29  [0049]  Herein  RA  is each independently hydrogen or  methyl. Y$^{1 }$is a single bond, phenylene group or naphthylene  group, or C$_{1 }$-C$_{12 }$ linking group containing ester moiety  and/or lactone ring. Y 2  is a single bond or ester group. R 11  and R$^{12 }$are each independently an acid labile group. R$^{13 }$is  halogen, trifluoromethyl, cyano, a C$_{1 }$-C$_{6 }$ straight, branched  or cyclic alkyl or alkoxy group, or a C$_{2}$-C$_{7 }$ straight, branched  or cyclic acyl, acyloxy or alkoxycarbonyl group. R$^{14 }$is a  single bond or C$_{1 }$-C$_{6 }$ straight or branched alkylene group in  which one or more carbon atoms may be substituted by an  ether or ester moiety, p is 1 or 2, and q is an integer of O to  4.  [0050]  Examples of the recurring units (bl) are shown  below, but not limited thereto.  RA  and R 11  are as defined  above.  [0047]  The monomer from which recurring units (al) or  (a2) are derived may be synthesized, for example, by the  same method as the synthesis of a sulfonium salt having a  polymerizable anion described in U.S. Pat. No. 8,057,985  (JP 5201363).  [0048]  The polymer-bound acid generator can also func› tion as a base polymer. In this regard, where the resist  composition is a chemically amplified positive tone resist  composition, the polymer-bound acid generator is a polymer  further comprising recurring units containing an acid labile  group, preferably recurring units having the formula (bl) or  recurring units having the formula (b2). These units are  simply referred to as recurring units (bl) and (b2).  Q Q  V’  (bl)  (b2)  -continued 