Oct. 8, 2020  69  US 2020/0319551 Al  [0656]  In addition, for Q-10, the pka could not be calcu› lated.  [0657]  <Photoacid Generator>  [0658]  As the photoacid generator, a photoacid generator  formed of a combination of a cation and an anion shown  below was used.  It should be noted that in the following list,  PAG-Cation 10 is an amphoteric ion having a cation moiety  and an anion moiety in one molecule, and acts alone as a  photoacid generator.  [0659]  (Cation)  [0654]  In the list, the pka of each of Q-1 to Q-10 and Q-14  is a pka for a conjugate acid (an acid generated upon  exposure), which was calculated using "Software Vll.02  (1994-2013 ACD/Labs)" (trade name, Advanced Chemistry  Development).  [0655]  In the list, the pka of each ofQ-11 to Q-13 is a pka  of the whole compounds calculated by the same method.  -continued  (Q-10)  (Q-11)  ~N~  pKa~ 10.08  P AG-Cation!  P AG-Cation2  P AG-Cation3  P AG-Cation4  0  0  pKa~4.20  (J)  indicates text missing or illegible when filed  (Q-14)  pKa  ~  (Q-13)  0)---0  H  pKa  ~  5.35  (Q-12) 