Feb. 18,2021  36  US 2021/0048748 Al  Exemplary PAGs are described in JP-A 2008-111103, para› graphs [0122]-[0142](U.S. Pat. No. 7,537,880).  [0098]  As the PAG used herein, sulfonium salts having the  formula (1-1) and iodonium salts having the formula (1-2)  are also preferred.  [0101]  Herein the broken line designates an attachment to  R103_  [0102]  Examples of the cation in the sulfonium salt having  formula (1-1) are shown below, but not limited thereto.  101  102 R103 R104  [0099]  In formulae (1-1) and (1-2) R  , R  ,  ,  and R $^{105 }$are each independently a C$_{1 }$-C$_{20 }$hydrocarbyl group  which may contain a heteroatom. The hydrocarbyl group  may be saturated or unsaturated and straight, ~ranched or  cyclic. Examples thereof include those exemplified above  for  R $^{21 }$to R $^{28 }$in formulae (fl) to (f3).  [0100]  R 101  and R $^{102 }$may bond together to form a ring  with the sulfur atom to which they are attached. Preferred  examples of the ring are shown by the following structure  i;+  CX)O  I  ~s~  ~  :  S+  CXSX)CX)O  s  II  0  -continued  R104  I  1+  x- i  RIOS  (1-1)  (1-2) 