162  161  US 8,900,791 B2  pure water for 30 seconds and dried. The thus obtained line  and space patterns were evaluated in the same manner as in  Example E ( electron beam negative exposure).  The evaluation results are given in Table 6.  ately after the exposure, the resist film was heated on a hot  plate at 110°  C. for 90 seconds. Thereafter, the resist film was  developed with a 2.38 mass  % aqueous tetramethylammo- nium hydroxide solution at 23 °  C. for 60 seconds, rinsed with  TABLE6  *based on the total solid content of the resist composition  Electron beam ne ative ex osure  (D)  (A2)  Cross- (F)  (G)  (H)  (Al)  Acid  (C)  linking  Basic  Surfactant  Solvent  Acid  generator  Resin  agent  compound  (0.1  (mass  Sensitivity Resolving Roughness  Outgas  generator  (0.1 g)  (10 g)  (3.0 g)  (0.02 g)  mass%)*  ratio)  (µC/cm 2 )  powery  (nm)  (%)  Ex. lF  Al-1  P-3  CL-1  C-1  W-1  Al/Bl  3.8  6.0  9.5  5.5  (0.3 g)  (6/4)  Ex.2F  Al-2  P-3  CL-1  C-1  W-2  A2/B2  3.8  6.0  10.5  1.8  (0.3 g)  (6/4)  Ex.3F  Al-3  P-3  CL-1  C-1  W-3  A3/Bl  3.0  6.5  9.5  1.5  (0.3 g)  (6/4)  Ex. 4F  Al-4  P-3  CL-1  C-1  W-1  A4/Bl  3.8  5.5  9.5  6.0  (0.3 g)  (6/4)  Ex.SF  Al-5  P-3  CL-1  C-1  W-3  Al/B2  3.8  6.0  10.0  5.5  (0.3 g)  (6/4)  Ex. 6F  Al-6  P-3  CL-1  C-1  W-2  Al/Bl  3.8  5.5  9.5  5.5  (0.3 g)  (6/4)  Ex. 7F  Al-7  P-3  CL-1  C-1  W-4  Al/Bl  3.8  6.0  9.0  5.0  (0.3 g)  (6/4)  Ex. SF  Al-8  P-3  CL-1  C-1  W-2  Al/Bl  3.8  6.0  9.0  5.0  (0.3 g)  (6/4)  Ex.9F  Al-9  P-3  CL-1  C-1  W-1  Al/Bl  3.5  6.3  9.0  4.5  (0.3 g)  (6/4)  Ex. !OF  Al-1  P-2  CL-1  C-1  W-1  Al/Bl  4.0  5.8  10.0  5.0  (0.3 g)  (6/4)  Ex. llF  Al-1  P-1  CL-1  C-1  W-1  Al/Bl  4.2  5.5  10.0  5.0  (0.3 g)  (6/4)  Ex. 12F  Al-1  P-3  CL-3  C-1  W-1  Al/Bl  3.5  5.6  4.1  5.8  (0.3 g)  (6/4)  Ex. 13F  Al-1  P-23  CL-2  C-1  W-1  Al/Bl  3.5  5.6  4.1  5.8  (0.3 g)  (6/4)  Ex. 14F  Al-1  P-3  CL-1  C-2  W-1  Al/Bl  3.0  5.6  4.1  5.8  (0.3 g)  (6/4)  Ex. 15F  Al-1  Z2  P-3  CL-1  C-1  W-1  Al/Bl  3.5  5.6  4.1  5.8  (0.2 g)  (6/4)  Ex. 16F  Al-10  P-3  CL-1  C-1  W-1  Al/Bl  3.9  6.2  9.5  5.4  (0.2 g)  (6/4)  Ex. 17F  Al-11  P-3  CL-1  C-1  W-1  Al/Bl  3.8  5.8  10.5  5.5  (0.2 g)  (6/4)  Ex. 18F  Al-12  P-3  CL-1  C-1  W-1  Al/Bl  3.7  5.5  11.5  5.2  (0.2 g)  (6/4)  Ex. 19F  Al-13  P-3  CL-1  C-1  W-1  Al/Bl  3.8  5.7  10.9  5.2  (0.2 g)  (6/4)  Ex.20F  Al-14  P-3  CL-1  C-1  W-1  Al/Bl  3.8  6.2  9.3  5.5  (0.2 g)  (6/4)  Ex.21F  Al-15  P-3  CL-1  C-1  W-1  Al/Bl  3.7  6.2  9.4  2.5  (0.2 g)  (6/4)  Ex.22F  Al-16  P-3  CL-1  C-1  W-1  Al/Bl  3.8  6.4  9.5  2.2  (0.2 g)  (6/4)  Ex.23F  Al-17  P-3  CL-1  C-1  W-1  Al/Bl  3.7  6.3  9.6  5.5  (0.2 g)  (6/4)  Ex.24F  Al-18  P-3  CL-1  C-1  W-1  Al/Bl  3.8  6.1  9.5  2.5  (0.2 g)  (6/4)  Ex.25F  Al-19  P-3  CL-1  C-1  W-1  Al/Bl  3.8  6.2  9.7  3.5  (0.2 g)  (6/4)  Comp. lF  Comp.  P-1  CL-1  C-1  W-1  Al/Bl  7.0  4.1  15.8  7.2  compound!  (6/4)  (0.3 g)  Comp. 2F  Comp.  P-1  CL-1  C-1  W-1  Al/Bl  7.0  4.1  15.9  7.3  compound2  (6/4)  (0.3 g)  Comp. 3F  Comp.  P-3  CL-1  C-1  W-1  Al/Bl  6.5  4.8  14.5  7.0  compound3  (6/4)  (0.3 g)  Comp. 4F  Comp.  P-3  CL-1  C-1  W-1  Al/Bl  6.5  4.8  14.2  7.0  compound4  (6/4)  (0.3 g) 