US009437431B2  c12)  United States Patent  Trefonas, III et al.  (54)  ELECTRONIC DEVICE MANUFACTURE  (IO)  Patent No.:  US 9,437,431 B2  Sep.6,2016  (45)  Date of Patent:  (75)  Inventors:  Peter Trefonas, III,  Medway, MA  (US);  Dong Won Chung,  Sturbridge,  MA (US)  (73)  Assignee:  Rohm and Haas Electronic Materials  LLC,  Marlborough, MA (US)  ( *)  Notice:  Subject to any disclaimer, the term ofthis  patent is extended or adjusted under 35  U.S.C. 154(b) by 487 days.  (21)  Appl. No.:  12/069,857  (22)  Filed:  Feb. 13, 2008  (60)  Provisional application No. 60/901,600, filed on Feb.  13, 2007.  (51)  Int. Cl.  (52)  U.S. Cl.  CPC .............  H0JL  2110274  (2013.01);  G03F  7140  (2013.01);  H0JL 2110338  (2013.01);  G03F  7/0035  (2013.01)  (58)  Field of Classification Search  CPC .......... G03F 7/20; G03F 7/40; G03F 7/0035;  H01L 21/0338; H0lL 21/0274  USPC .......................................... 430/311, 322, 330  See application file for complete search history.  (65)  Prior Publication Data  Related U.S. Application Data  (57)  ABSTRACT  (56)  References Cited  U.S. PATENT DOCUMENTS  8 Claims, 2 Drawing Sheets  US 2008/0292990 Al  Nov. 27, 2008  New methods are provided for manufacturing a semicon› ductor device. Preferred methods of the invention include  depositing a photoresist on a semiconductor substrate sur› face followed by imaging and development of resist coating  layer; applying a curable organic or inorganic composition  over the resist relief image; etching to provide a relief image  of the resist encased by the curable composition; and remov› ing the resist material whereby the curable organic or  inorganic composition remains in a relief image of increased  pitch relative to the previously developed resist image.  * cited by examiner  Primary Examiner  - Brittany Raymond  (74)  Attorney, Agent, or Firm  -Mintz Levin Cohn Ferris  Glovsky and Popeo, P.C.; Peter  F.  Corless  G03F  7120  H0JL  211027  G03F  7140  H0JL  211033  G03F 7/00  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  6,579,657 Bl  *  2005/0164133 Al*  2008/0008969 Al  *  6/2003 Ishibashi et al. .......... 430/270.1  7/2005 Rangarajan et al .......... 430/322  1/2008 Zhou et al. ................... 430/313  50  10 