47  US 2016/0223905 Al  Aug. 4, 2016  preferably 3% by mole to 98% by mole, and still more pref› erably 5% by mole to 95% by mole, with respect to all the  repeating units in the hydrophobic resin.  [0437]  With respect to the hydrophobic resin, examples of  the repeating unit having a group (z) capable of decomposing  by the action of an acid include the same ones as the repeating  units having an acid-decomposable group, as mentioned with  respect to the resin (A). The repeating unit having a group (z)  capable of decomposing by the action of an acid may have at  least one of a fluorine atom or a silicon atom. With respect to  the hydrophobic resin, the content of the repeating units hav› ing a group (z) capable of decomposing by the action of an  acid is preferably 1 % by mole to 80% by mole, more prefer› ably 10% by mole to 80% by mole, and still more preferably  20% by mole to 60% by mole, with respect to all the repeating  units in the hydrophobic resin.  [0438]  The hydrophobic resin may further have a repeating  unit represented by the following General Formula (III).  preferably 30% by mole to 70% by mole, with respect to all  the repeating units in the hydrophobic resin.  [0451]  It is also preferable that the hydrophobic resin fur› ther has a repeating unit represented by the following General  Formula (CII-AB).  (CII-AB)  [0452]  In Formula (CII-AB),  [0453]  Rc$_{11}$’ and Rc1 2 ’  each independently represent a  hydrogen atom, a cyano group, a halogen atom, or an alkyl  group, and  [0454]  Zc’ represents an atomic group for forming an alicy› clic structure containing two carbon atoms (C----C) to which  Zc’ is bonded.  [0455]  The content of the repeating units represented by  General Formula (CII-AB) is preferably 1 % by mole to 100%  by mole, more preferably 10% by mole to 90% by mole, and  still more preferably 30% by mole to 70% by mole, with  respect to all the repeating units in the hydrophobic resin.  [0456]  Specific examples of the repeating units represented  by General Formulae (III) and (CII-AB) are set forth below,  but the present invention is not limited thereto. In the formu› lae, Ra represents H, CH$_{3}$ ,  CH$_{2}$OH, CF$_{3}$ ,  or CN.  [0439]  In General Formula (III),  [0440]  Rc3$_{1 }$ represents a hydrogen atom, an alkyl group  (which may be substituted with a fluorine atom or the like), a  cyano group, or a  -CH$_{2}$-0-Rac$_{2 }$ group, in which Rac$_{2 }$ represents a hydrogen atom, an alkyl group, or an acyl group,  and Rc3$_{1 }$ is preferably a hydrogen atom, a methyl group, a  hydroxymethyl group, or a trifluoromethyl group, and more  preferably a hydrogen atom or a methyl group,  [0441]  Rc3$_{2 }$ represents a group having an alkyl group, a  cycloalkyl group, an alkenyl group, a cycloalkenyl group, or  an aryl group, each of which may be substituted with a group  containing a fluorine atom or a silicon atom, and  [0442]  Lc3 represents a single bond or a divalent linking  group.  [0443]  In General Formula (III), the alkyl group ofRc3$_{2 }$ is  preferably a linear or branched alkyl group having 3 to 20  carbon atoms.  [0444]  The cycloalkyl group is preferably a cycloalkyl  group having 3 to 20 carbon atoms.  [0445]  The alkenyl group is preferably an alkenyl group  having 3 to 20 carbon atoms.  [0446]  The cycloalkenyl group is preferably a cycloalkenyl  group having 3 to 20 carbon atoms.  [0447]  The aryl group is preferably an aryl group having 6  to 20 carbon atoms, and more preferably a phenyl group or a  naphthyl group, and these groups may have a substituent.  [0448]  Rc3$_{2 }$is preferably an unsubstituted alkyl group or an  alkyl group substituted with a fluorine atom.  [0449]  The divalent linking group of Lc3 is preferably an  alkylene group (preferably having 1 to 5 carbon atoms), an  ether bond, a phenylene group, or an ester bond (a group  represented by----COO-).  [0450]  The content of the repeating units represented by  Formula (III) is preferably 1 % by mole to 100% by mole,  more preferably 10% by mole to 90% by mole, and still more  (III)  Ra  Ra  ~  v::t  6  CO  Ra  Ra  ~  $^{~ }$Ct)  Ra  Ra  Ra  ~~o~  l  ◊ 