US 2019/0204738 Al  22  Jul. 4, 2019  -continued  -continued  ~o  ~o  0  0  (al-r2-11)  (al-r2-21)  [0222]  The constitutional unit (al) included in the com› ponent (Al) may be used alone or two or more kinds thereof.  [0223]  Since the lithography characteristics (the sensitiv› ity, the shape, and the like) are easily improved using  electron beams or EUV, a constitutional unit represented by  Formula (al-1) is preferable as the constitutional unit (al).  [0224]  Further, from the viewpoint of reducing the rough› ness, an acid dissociable group represented by Formula  (al-r2-11) or (al-r2-21) is preferable as the acid dissociable  group as Ra 1  in Formula (al-1).  [0221]  Specific examples of the constitutional unit repre› sented by Formula (al-2) are shown below. 