Mar. 26, 2015  40  US 2015/0086912 Al  a hydrogen atom, or an alkyl group (for example, an alkyl  group having 1 to 8 carbon atoms, specifically a methyl  group, an ethyl group, a propyl group, an n-butyl group, a  sec-butyl group, a hexyl group, or an octyl group).  [0281]  M$^{41 }$is preferably a single bond, an alkylene group,  or a divalent linking group comprising a combination of an  alkylene group and at least one of ---0-, --CO-, -CS-,  and-N (Ro)-, and more preferably a single bond, an alky lene  group, or a divalent linking group comprising a combination  of an alkylene group and ---0-. Ro has the same meaning  with the above Ro.  [0282]  The alkyl group as Q is the same with the alkyl group  as R$^{41 }$described above.  [0283]  As the alicyclic group and aromatic cyclic group as  Q, the cycloalkyl group andaryl group as R$^{41 }$described above  are exemplified. The carbon atom number is preferably 3 to  18. Incidentally, in the invention, a group obtained by linking  a plurality of aromatic rings via a single bond ( e.g., a biphenyl  group and a terphenyl group) is also included in the aromatic  group as Q.  [0284]  As the alicyclic group containing a hetero atom and  the aromatic cyclic group containing a heteroatom, for  example, thiirane, cyclothiolane, thiophene, furan, pyrrole,  benzothiophene, benzofuran, benzopyrrole, triazine, imida› zole, benzimidazole, triazole thiadiazole, thiazole, and pyr› rolidone are exemplified. Incidentally, in the invention, a  group obtained by linking "a plurality of aromatic rings con› taining hetero-atoms" via a single bond ( e.g., a viologen  group) is also included in the aromatic group as Q.  [0285]  The alicyclic group and aromatic cyclic group as Q  may have a substituent, for example, an alkyl group, a  cycloalkyl group, a cyano group, a halogen atom, a hydroxyl  group, an alkoxy group, a carboxyl group, and an alkoxycar› bonyl group are exemplified.  [0286]  (-M $^{41}$-Q) is especially preferably a methyl group, an  ethyl group, a cyclohexyl group, a norbomyl group, an ary› loxyethyl group, a cyclohexylethyl group, or an arylethyl  group.  [  0287]  As the case of forming a ring by bonding at least two  of R 41 , M 41  and Q to each other, for example, a case of  bonding either M$^{41 }$or Q to R$^{41 }$to form a propylene group or  a butylene group and to form a 5- or 6-membered ring con› taining an oxygen atom is exemplified.  [0288]  Taking the sum total of the carbon atom number of  R 41 , M 41  and Q as Ne, in the case where Ne is large, the  change of the solubility of the resin (P) in an alkali becomes  large before and after leaving of the group represented by  formula ( c ), and so the dissolution contrast is preferably  improved. The range of Ne is preferably 4 to 30, more pref› erably 7 to 25, and especially preferably 7 to 20. When Ne is  30 or less, the reduction of the glass transition temperature of  the resin (P) is suppressed, the exposure latitude (EL) of the  resist is prevented from lowering, and the residue after leav› ing of the group represented by formula (c) is inhibited from  remaining on the resist pattern as a defect, and so preferred.  [0289]  It is preferred from the viewpoint of  dry  etching  resistance that at least one ofR 41 , M $^{41 }$and Q has an alicyclic  ring or an aromatic ring. The alicyclic group and the aromatic  cyclic group here are the same with the alicyclic group and the  aromatic cyclic group as Q described above.  [0290]  The specific examples of the repeating unit (B) are  shown below, but the invention is not restricted thereto.  oyo~ 0 