US 2020/0401045 Al  6  Dec. 24, 2020  [0113]  z 11 +  represents an actinic ray-sensitive decompos› able or radiation-sensitive decomposable cation.  (Y6)  [0103]  Moreover, R 17 , R 18 , and R 19  may be bonded to  each other to form a ring. Further, R 17 , R 18 , and R $^{19 }$may be  each independently bonded to L $^{13 }$to form a ring. In addition,  R 17 , R 18 , and R $^{19 }$may be each independently bonded to L11  in General Formula (Xl) to form a ring. * represents a  bonding position to L  11 .  [0112]  Moreover, R 23 , R 24 , and R 25  may be bonded to  each other to form a ring. Furthermore, R 23 , R 24 , and R 25  may be each independently bonded to  L1 4 ,  R 21 , and R $^{22 }$to  form a ring. Incidentally, R 21 , R 22 , and L $^{14 }$may be bonded  to each other to form a ring. In addition, R 23 , R 24 , and R 25  may be each independently bonded to L  11  in General For› mula (Xl) to form a ring.  [0110]  R 21 , R 22 , R 23 , R 24 , and R 25  each independently  represent a hydrogen atom or a monovalent organic group.  [0102]  It should be noted that two or more of R 17 , R 18 , or  R$^{19 }$each represent a fluorine atom or a fluoroalkyl group,  and a group adjacent to a sulfonamido group (intended to  mean a sulfonamido group linked to  L1 3 ,  which is specified  in General Formula (Y5)) in L $^{13 }$is a carbon atom, the carbon  atom does not have two or more fluorine atoms and fluo› roalkyl groups as a substituent.  [0108]  In General Formula (YS), L $^{14 }$represents a single  bond or a divalent linking group.  (YS)  (Y7)  [0107]  In General Formula (Y7), * represents a bonding  position to L  11 . It should be noted that the atom bonded to  * in L  $^{11 }$is a carbon atom which is not a carbonyl group.  [0098]  In General Formula (Y5), L $^{13 }$represents a single  bond or a divalent linking group.  (Y5)  * represents a bonding position to L  11 .  [0104]  In General Formula (Y6), R$^{20 }$represents a mon› ovalent organic group.  one of R 14 , R 15 , and R 16  represents a hydrogen atom or  represents a monovalent organic group different from the  fluorine atom and the fluoroalkyl group. In addition, in a  case where two ofR  14 , R  15 , and R  $^{16 }$each represent a fluorine  atom or a fluoroalkyl group, and a group adjacent to an  amido group (intended to mean an amido group linked to  L 12 , which is specified in General Formula (Y4)) in L $^{12 }$is a  carbon atom, the carbon atom does not have two or more  fluorine atoms and fluoroalkyl groups as the substituent.  [0105]  Examples of the monovalent organic group rep› resented by R $^{20 }$include the same ones as those of the  monovalent organic group represented by each of R  11  and R$^{12 }$in General Formula (Y2), and among these, an  alkyl group (which may be in any of linear, branched,  and cyclic forms, and preferably has 1 to 20 carbon  atoms, more preferably has 1 to 10 carbon atoms, and  still more preferably has 1 to 6 carbon atoms) is  preferable.  [0106]  In addition, R$^{20 }$may be bonded to L $^{11 }$in General  Formula (Xl) to form a ring. * represents a bonding  position to L  11 .  [0097]  In addition, R 14 , R 15 , and R $^{16 }$may be bonded to  each other to form a ring. Further, R 14 , R 15 , and R 16  may be each independently bonded to L $^{12 }$to form a  ring. In addition, R 14 , R 15 , and R 16  may be each  independently bond to L$^{11 }$in General Formula (Xl) to  form a ring.  [0099]  Examples of the divalent linking group repre› sented by L  13  include the same ones as those of the  divalent linking group represented by L $^{12 }$in General  Formula (Y4). Among these, as the divalent linking  group represented by L  13 , a ----CO---0-alkylene group  is preferable.  [0100]  R 17 , R 18 , and R $^{19 }$each independently represent a  hydrogen atom or a monovalent organic group.  [0109]  Examples of the divalent linking group repre› sented by L $^{14 }$include the same ones as those of the  divalent linking groups represented by L $^{12 }$in General  Formula (Y 4). Among those, the divalent linking group  represented by L $^{14 }$is preferably a ----CO-O-alkylene  group.  [0101]  Examples of the monovalent organic group rep› resented by each ofR 17 , R 18 , and R $^{19 }$include the same  ones as those of the monovalent organic group repre› sented by each ofR $^{11 }$and R $^{12 }$in General Formula (Y2),  and among these, an alkyl group (which may be in any  of linear, branched, and cyclic forms, and preferably  has 1 to 20 carbon atoms, more preferably has 1 to 10  carbon atoms, and still more preferably has 1 to 6  carbon atoms) is preferable.  [0111]  Examples of the monovalent organic group rep› resented by each ofR 21 , R 22 , R 23 , R 24 , and R $^{25 }$include  the same ones as those of the monovalent organic group  represented by each ofR$^{11 }$and R$^{12 }$in General Formula  (Y2), and among these, an alkyl group (which may be  in any of linear, branched, and cyclic forms, and  preferably has 1 to 20 carbon atoms, more preferably  has 1 to 10 carbon atoms, and still more preferably has  1 to 6 carbon atoms) is preferable.  [0114]  The actinic my-sensitive decomposable or radia› tion-sensitive decomposable cation is not particularly  limited as long as it can convert the salt structure in the  repeating unit A into the above-mentioned acid struc› ture upon irradiation with actinic rays or radiation.  0  0  O  *  ~,  ~  17  ........_  ,s......_$_{8 }$ R  Ll3  N  Rl9 RIS 