US 10,394,127 B2  32  31  -continued  0  II  -S-0  II  0  R1  R3  Ri  I  I  I  o-r  R2  H  O  Ph  I  Ph-Si-Ph  -continued  At least some of the repeating units (a) are preferably  repeating units represented by General Formula (II-AC).  That is, at least some of the repeating units (a) preferably  include the structure represented by General Formula (I-AC)  in a form represented by General Formula (II-AC).  In General Formula (II-AC), Ra and Rb each indepen› dently represent a hydrogen atom, an alkyl group, or a cyano  group.  Re represents a hydrogen atom or a substituent. L repre- sents a single bond or a linking group. Further, in a case  where Re is the substituent and L is the linking group, Re  and L may be bonded to each other to form a ring structure.  R$_{1 }$ to R$_{4}$ ,  R$_{7}$ ,  and R$_{8 }$ each have the same definitions as  those described above for General Formula (I-AC).  In a case where at least some of the repeating units (a) are  the repeating units represented by General Formula (II-AC),  sulfonic acid can be generated in the form bonded to a resin.  Accordingly, in this case, it is difficult for the generated  sulfonic acid to be diffused in the composition. Therefore, in  this case, it is possible to further improve the resolving  power, the roughness characteristics, and the like of the  actinic ray-sensitive or radiation-sensitive resin composi› tion.  Each of Ra and Rb represent a hydrogen atom, an alkyl  group, or a cyano group, as described above. This alkyl  group may further have a substituent. Examples of this  substituent include for example, a halogen atom such as a  fluorine atom and a chlorine atom, and a hydroxy group.  Examples of the alkyl group of Ra or Rb include a methyl  group, a chloromethyl group, a trifluoromethyl group, and a  hydroxymethyl group. Each of Ra and Rb is preferably a  hydrogen atom or a methyl group, and more preferably a  hydrogen atom.  Re represents a hydrogen atom or a substituent, as  described above. Examples of this substituent include a  hydrogen atom, an alkyl group, a cycloalkyl group, an  alkenyl group, an alkynyl group, an aryl group, an alkanolyl  0  II  -S-0  II  0  R1  R3  Ri  I  I  I  0-Si+  R2  H  O  I  I  -Si- ~  0  II  -S-0  II  0  Ir l;Yo  0  0  II  -S-0  II  0  0  II  -S-0  II  0  0  Ph  II  I  -S-0  0-Si-Ph  II  I  0  Ph  0  0  II  -S-0  o_JL_  II  0  0  II  -S-0  II  0  0  II  I  -S-0  0-Si- II  0  l  (II-AC)  Ra  Rb  I  I  --+C-Cr  I  I  Re  L  I  O=S=O  I  0  R2$R1  H  R3  R70  Ri  ORs 