Jul.  18,  2019  8  US 2019/0219920 Al  [0116]  The cyclic hydrocarbon group for Ra 01  and Ra 02  may be an aliphatic hydrocarbon group or an aromatic  hydrocarbon group, and may be polycyclic or monocyclic.  [0117]  As the monocyclic aliphatic hydrocarbon group, a  group in which 1 hydrogen atom has been removed from a  monocycloalkane is preferable. The monocycloalkane pref› erably has 3 to 6 carbon atoms, and specific examples  thereof include cyclopentane and cyclohexane.  [0118]  As the polycyclic aliphatic hydrocarbon group, a  group in which 1 hydrogen atom has been removed from a  polycycloalkane is preferable, and the polycyclic group  preferably has 7 to 12 carbon atoms. Examples of the  polycycloalkane include adamantane, norbomane, isob› omane, tricyclodecane and tetracyclododecane.  [0119]  The aromatic hydrocarbon group for Ra$^{01 }$and Ra 02  is a hydrocarbon group having at least one aromatic ring.  The aromatic ring is not particularly limited, as long as it is  a cyclic conjugated compound having (4n+2) it electrons,  and may be either monocyclic or polycyclic. The aromatic  ring preferably has 5 to 30 carbon atoms, more preferably 5  to 20, still more preferably 6 to 15, and most preferably 6 to  12. Examples of the aromatic ring include aromatic hydro› carbon rings, such as benzene, naphthalene, anthracene and  phenanthrene; and aromatic hetero rings in which part of the  carbon atoms constituting the aforementioned aromatic  hydrocarbon rings has been substituted with a hetero atom.  Examples of the hetero atom within the aromatic hetero  rings include an oxygen atom, a sulfur atom and a nitrogen  atom. Specific examples of the aromatic hetero ring include  a pyridine ring and a thiophene ring. Specific examples of  the aromatic hydrocarbon group include a group in which  one hydrogen atom has been removed from the aforemen› tioned aromatic hydrocarbon ring or aromatic hetero ring  (aryl group or heteroaryl group); a group in which one  hydrogen atom has been removed from an aromatic com› pound having two or more aromatic rings (biphenyl, fluo› rene or the like); and a group in which one hydrogen atom  of the aforementioned aromatic hydrocarbon ring or aro› matic hetero ring has been substituted with an alkylene  group (an arylalkyl group such as a benzyl group, a phen› ethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl  group, a 1-naphthylethyl group, or a 2-naphthylethyl group).  The alkylene group bonded to the aforementioned aromatic  hydrocarbon ring or the aromatic hetero ring preferably has  1 to 4 carbon atoms, more preferably 1 or 2 carbon atoms,  and most preferably 1 carbon atom.  [0120]  In the case where the hydrocarbon group for Ra 01  and Ra$^{02 }$is substituted, examples of the substituent include  a hydroxy group, a carboxy group, a halogen atom (such as  a fluorine atom, a chlorine atom or a chlorine atom), an  alkoxy group (such as a methoxy group, an ethoxy group, a  propoxy group or a butoxy group), and an alkyloxycarbonyl  group.  [0121]  In formula (a0-rl-1), Ra$^{01 }$and Ra$^{02 }$may be mutu› ally bonded to form a ring.  [0122]  Examples of the ring structure formed by Ra$^{01 }$and  Ra 02  include an alicyclic hydrocarbon group, and a con› densed ring of an alicyclic group and an aromatic hydro› carbon group. The ring structure formed by Ra$^{01 }$and Ra 02  may have a hetero atom.  [0123]  The alicyclic hydrocarbon group formed by Ra 01  and Ra$^{02 }$may be either a polycyclic group or a monocyclic  group.  [0133]  However, at least one of Ra  0 31 , Ra $^{032 }$and Ra$^{033 }$is  a hydrocarbon group having a polar group.  [0132]  The hydrocarbon group (which may have a sub› stituent) for Ra 031 , Ra $^{032 }$and Ra$^{033 }$is the same as defined for  the hydrocarbon group (which may have a substituent) for  Ra 01  and Ra 02  in the aforementioned formula (a0-rl-1).  Among these examples, as the hydrocarbon group (which  may have a substituent) for Ra 031 , Ra $^{032 }$and Ra033 , a linear  or branched alkyl group which may have a substituent is  preferable, and a linear alkyl group is more preferable.  [0131]  In formula (a0-rl-1), Ra 031 , Ra $^{032 }$and Ra$^{033 }$each  independently represents a hydrocarbon group which may  have a substituent.  [0130]  In formula (a0-rl-1), Ya $^{0 }$represents a quaternary  carbon atom. That is, the number of carbon atoms bonded to  Ya $^{0 }$(carbon atom) is 4.  [0129]  In formula (a0-rl-1), in terms of improving the  etching resistance, it is preferable that Ra 01  and Ra 02  are  mutually bonded to form a ring, and it is more preferable that  Ra 01  and Ra 02  are mutually bonded to form an alicyclic  hydrocarbon group.  [0128]  Specific examples of the condensed ring formed by  Ra$^{01 }$and Ra$^{02 }$are shown below.  [0127]  The condensed ring may have a substituent.  Examples of the substituent include a methyl group, an ethyl  group, a propyl group, a hydroxy group, a hydroxyalkyl  group, a carboxy group, a halogen atom (such as a fluorine  atom, a chlorine atom or bromine atom), an alkoxy group  (such as a methoxy group, an ethoxy group, a propoxy group  or a butoxy group), an acyl group, an alkyloxycarbonyl  group, and an alkylcarbonyloxy group.  [0126]  In the condensed ring formed by Ra$^{01 }$and Ra 0 2 , the  alicyclic hydrocarbon portion may be monocyclic or poly› cyclic, and the aromatic hydrocarbon portion may be mono› cyclic or polycyclic.  [0125]  As the polycyclic aliphatic hydrocarbon group, a  group in which 1 hydrogen atom has been removed from a  polycycloalkane is preferable, and the polycyclic group  preferably has 7 to 12 carbon atoms. Examples of the  polycycloalkane include adamantane, norbomane, isob› omane, tricyclodecane and tetracyclododecane.  [0124]  As the monocyclic aliphatic hydrocarbon group, a  group in which 1 hydrogen atom has been removed from a  monocycloalkane is preferable. The monocycloalkane pref› erably has 3 to 6 carbon atoms, and specific examples  thereof include cyclopentane and cyclohexane.  [Chemical Formula 7]  CX)(X)  cco 