164  US 9,869,931 B2  163  TABLE I-continued  Polymer  (pbw)  Metal complex  (pbw)  Acid  generator  (pbw)  Quencher  (pbw)  7 Polymer 1 scandium(III) trifluoromethanesulfonate  (100)  (10.1)  8 Polymer 1 yttrium(III) trifluoromethanesulfonate  (100)  (11.2)  9 Polymer 1 lanthanum(III) trifluoromethanesulfonate  (100)  (10.2)  10 Polymer 1 neodymium(III) trifluoromethanesulfonate  (100)  (10.3)  11 Polymer 1 thulium(III) trifluoromethanesulfonate  (100)  (10.2)  12 Polymer 1 silver trifluoromethanesulfonate  (100)  (1.2)  13 Polymer 1 indium(III)  (100)  tris(trifluoromethanesulfonimide)  (12.2)  14 Polymer 1 barium(II)  (100)  bis(trifluoromethanesulfonimide)  (14.2)  15 Polymer 1 scandium(III)  (100)  tris(trifluoromethanesulfonimide)  (15.2)  16 Polymer 1 copper(II)  (100)  bis(trifluoromethanesulfonimide)  (8.5)  17 Polymer 1 hafnium(IV)  (100)  tetra(trifluoromethanesulfonimide)  (7.8)  18 Polymer 1 zirconium(IV)  (100)  tetra(trifluoromethanesulfonimide)  (8.6)  19 Polymer 1 zirconium(IV)  (100)  tetra(trifluoromethanesulfonimide)  (8.6)  20 Polymer 1 zirconium(IV)  (100)  tetra(trifluoromethanesulfonimide)  (8.6)  PAGl  (5.5)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  hafnium  carboxyethyl› acrylate  (1.0)  cesiwn  pivalate  (0.8)  Organic  solvent  (pbw)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  PGME (300)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  Resist  Polymer  Metal complex  (pbw)  (pbw)  21 Polymer 1 rubidium(!) 1,1,2,2,3,3- (100)  hexafluoropropane-1,3-disulfonimide  (8.6)  22 Polymer 1 strontium(II) bis(l ,1,2,2,3,3- (100)  hexafluoropropane-1,3-disulfonimide)  (8.6)  23 Polymer 1 barium(II) nonafluorobutanesulfonate  (100)  (6.0)  24 Polymer 1 barium(II) trifluoromethanesulfonate  (100)  (3.2)  25 Polymer 1 barium(II) bis(l ,1,2,2,3,3- (100)  hexafluoropropane-1,3-disulfonimide)  (6.5)  26 Polymer 1 barium(II)  (100)  bis (trifluoromethanesulfonemethide)  (7.0)  27 Polymer 1  barium pentafluorobenzenesulfonate  (100)  (6.5)  Acid  generator  Quencher  (pbw)  (pbw)  PAGl  Amine!  (5.5)  (1.3)  PAGl  Amine!  (5.5)  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Amine!  (1.3)  Organic  solvent  (pbw)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  PGMEA (1,000)  CyH (1,000)  GBL (200)  TABLE 2 