Jul.  18,  2019  9  US 2019/0219920 Al  [0134]  The "hydrocarbon group having a polar group"  includes a group in which a polar group is present between  carbon chains (carbon atoms) and a group in which at least  one hydrogen atom constituting the hydrocarbon group has  been substituted with a polar group.  [0135]  Examples of the "hydrocarbon group having a  polar group" include a functional group represented by  general formula (a0-pl) shown below.  [0146]  Examples of the hydrocarbon group for Ra 06  include a chain hydrocarbon group, a cyclic hydrocarbon  group, and a combination of a chain hydrocarbon group and  a cyclic hydrocarbon group.  [0147]  Examples of the chain hydrocarbon group include  a methyl group, an ethyl group, an n-propyl group, an  isopropyl group, an n-butyl group, a sec-butyl group, a  tert-butyl group, an n-pentyl group, an n-hexyl group, an  n-heptyl group, a 2-ethylhexyl group, an n-octyl group, an  n-nonyl group, an n-decyl group, an n-undecyl group and an  n-dodecyl group.  [0148]  The cyclic hydrocarbon group may be an alicyclic  hydrocarbon group or an aromatic hydrocarbon group.  [0149]  The alicyclic hydrocarbon group may be monocy› clic or polycyclic. Examples of monocyclic alicyclic hydro› carbon groups include cycloalkyl groups, such as a cyclo› propyl group, a cyclobutyl group, a cyclopentyl group, a  cyclohexyl group, a dimethylcyclohexyl group, a cyclohep› tyl group, a cyclooctyl group, a cycloheptyl group, and a  cyclodecyl group. Examples of polycyclic alicyclic hydro› carbon groups include a decahydronaphthyl group, an ada› mantyl group, a 2-alkyladamantan-2-yl group, a l-(adaman› tan-1-yl)alkan-l-yl  group,  a  norbomyl  group,  a  methylnorbomyl group, and an isonorbomyl group.  [0150]  Examples of aromatic hydrocarbon groups include  a phenyl group, a naphthyl group, an anthryl group, a  p-methylphenyl group, a p-tert-butylphenyl group, a p-ada› mantylphenyl group, a tolyl group, a xylyl group, a cumenyl  group, a mesityl group, a biphenyl group, a phenanthryl  group, 2,6-diethylphenyl group, and 2-methyl-6-ethyl phe› nyl group.  [0151]  In terms of solubility in a developing solution, Ra 06  is preferably a chain hydrocarbon group, more preferably an  alkyl group, and still more preferably a linear alkyl group.  [0152]  In formula (a0-pl), npo is an integer of 1 to 6,  preferably an integer of 1 to 3, more preferably 1 or 2, and  still more preferably 1.  [0153]  Specific examples of the hydrocarbon group hav› ing a polar group are shown below.  [0154]  In the following formulae,  * represents a valence  bond which is bonded to the quaternary carbon atom (Ya 0 ).  [0155]  In formula (a0-rl-1), at least one of Ra 031 , Ra 032  and Ra 033  is a hydrocarbon group having a polar group.  [0145]  Ra$^{06 }$has 1 to 12 carbon atoms. In terms of solu› bility in a developing solution, Ra$^{06 }$preferably has 1 to 8  carbon atoms, more preferably 1 to 5 carbon atoms, still  more preferably 1 to 3 carbon atoms, still more preferably 1  or 2 carbon atoms, and most preferably 1 carbon atoms.  [0144]  In formula (a0-pl), Ra$^{06 }$represents a monovalent  hydrocarbon group having 1 to 12 carbon atoms.  [0143]  Among these examples, in terms of solubility in a  developing  solution,  -0-,  -C(=O)---0-,  -C(=O)-, or ---O-C(=O)---0- are preferable, and  -0- or ----C(=O)- is most preferable.  [0142]  Examples of Ra 05  include -0-, ----C(=O)-,  -C(=O)-,  ---O-C(=O)---0-,  -C(=O)-NH-,  -NH-, -NH-C(=NH)- (H may be substituted with a  substituent such as an alkyl group or an acyl group), -S-,  -S(=O)$_{2}$-, and -S(=O)$_{2}$---0-.  [0141]  In formula (a0-p 1), Ra 05  represents a divalent  linking group containing a hetero atom.  [0140]  Among these examples, an alkanediyl group is  preferable, and a linear alkanediyl group is more preferable.  [0139]  Examples of Ra 04  include a linear alkanediyl  group, such as an ethylene group, a propane-1,3-diyl group,  butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane- 1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl  group, a nonane-1,9-diyl group, a decane-1,10-diyl group,  an undecane-1,11-diyl group, and a dodecane-1,12-diyl  group; a branched alkanediyl group, such as a propane-1,2- diyl group, a l-methylbutane-1,3-diyl group, a 2-methylpro› pane-1,3-diyl group, a pentane-1,4-diyl group, and a 2-meth› ylbutane-1,4-diyl group; a cycloalkanediyl group, such as a  cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group,  a cyclohexane-1,4-diyl group, and a cyclooctane-1,5-diyl  group; and a polycyclic divalent alicyclic hydrocarbon  group, such as a norbomane-1,4-diyl group, a norbomane- 2,5-diyl group, an adamantane-1,5-diyl group, and an ada› mantane-2,6-diyl group.  [0138]  The hydrocarbon group for Ra 04  is preferably a  chain or cyclic aliphatic hydrocarbon group, and more  preferably a chain hydrocarbon group.  [0137]  Ra$^{04 }$has 2 to 12 carbon atoms, preferably 2 to 8  carbon atoms, more preferably 2 to 6 carbon atoms, still  more preferably 2 to 4 carbon atoms, and most preferably 2  carbon atoms.  [0136]  In formula (a0-p 1), Ra 04  represents a divalent  hydrocarbon group having 2 to 12 carbon atoms.  In the formula, Ra 04  represents a divalent hydrocarbon  group having 2 to 12 carbon atoms; Ra 05  represents a  divalent linking group containing a hetero atom; Ra$^{06 }$rep› resents a monovalent hydrocarbon group having 1 to 12  carbon atoms; and npo represents an integer of 1 to 6.  [Chemical Formula 8]  (aO-pl)  [Chemical Formula 9]  ’---o_,,,,,,-.......• ~o_,,,,,,-....... •  / $^{0}$~o_,,,,,,-.......  *  ’---o~•  ~o~•  /o~o~•  uo~•  lr’o~• 