US 8,574,814 B2  220  219  As shown in Table 3, the compositions  of  the present inven- tion according to Examples 1 to 8 were superior in the  IL  resolution, the  IL  pattern shape, and the LER, compared to the  compositions according to Comparative Examples 1 to 5.  Positive resist solutions were prepared, resist films were  formed, and resist evaluation was performed in the same  manner as in Examples 1 to 8, except that (1) the silicon  substrate treated with hexamethyl disilazane was changed to  a glass substrate on which a chromium oxide film (light  shielding film) having a thickness  of  100 nm was provided by  chemical vapor-deposition, (2) the baking conditions after the  resist solution coating were changed from 130°  C. and 90  seconds to 130°  C. and 600 seconds, and (3) the baking  conditions after the electron beam irradiation were changed  from 120°  C. and 90 seconds to 120°  C. and 600 seconds, so  as to confirm the performance  of  the resist film in mask  blanks. The results are shown in Table 4.  Examples  9  to 30 and Comparative Examples  6  to  9  Total solid  Photoacid  Basic  Solvent  content  L&S  IL  Compound (P)  generator  compound  (mass  Surfactant  concentration  resolution  resolution  IL  LER  Example  (% by mass)  (% by mass)  (% by mass)  ratio)  (% by mass)  (% by mass)  (nm)  (nm)  shape  (nm)  Example 9  P-2  PAG-1  BASE-2  Sl/S2  W-3  4  37.5  37.5  A  4.8  (93.35)  (5.5)  (1.1)  (80/20)  (0.05)  Example 10  P-2  PAG-6  BASE-!  Sl/S2  W-2  4  37.5  37.5  A  4.9  (91.95)  (7.4)  (0.6)  (80/20)  (0.05)  Example 11  P-2  PAG-1  BASE-3  Sl/S2  W-1  4  37.5  37.5  B  4.5  (93.55)  (5.5)  (0.9)  (80/20)  (0.05)  Example 12  P-2  PAG-5  BASE-!  Sl/S2  W-3  4  37.5  50  A  4.1  (92.75)  (6.6)  (0.6)  (80/20)  (0.05)  Example 13  P-3  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  5.1  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Example 14  P-4  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  50  A  3.9  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Example 15  P-5  PAG-8  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  3.6  (87.55)  (11.2)  (1.2)  (80/20)  (0.05)  Example 16  P-6  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  4.4  (46.90)  (5.5)  (0.6)  (80/20)  (0.05)  P-7  (46.95)  Example 17  R-8  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  3.9  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Example 18  R-10  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  4.0  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Example 19  P-11  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  3.9  (93.15)  (6.2)  (0.6)  (80/20)  (0.05)  Example 20  P-12  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  50  A  4.4  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Example 21  P-13  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  4.7  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Example 22  P-14  PAG-4  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  3.9  (92.95)  (6.4)  (0.6)  (80/20)  (0.05)  Example 23  P-16  PAG-8  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  4.2  (93.75)  (5.6)  (0.6)  (80/20)  (0.05)  Example 24  P-17  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  3.8  (99.35)  (0.6)  (80/20)  (0.05)  Example 25  P-19  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  4.0  (99.35)  (0.6)  (80/20)  (0.05)  Example 26  P-20  BASE-!  Sl/S2  W-3  4  37.5  37.5  B  4.3  (99.35)  (0.6)  (80/20)  (0.05)  Example 27  P-21  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  4.4  (99.35)  (0.6)  (80/20)  (0.05)  Example 28  P-22  PAG-8  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  4.3  (93.75)  (5.6)  (0.6)  (80/20)  (0.05)  Example 29  P-25  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  3.9  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Example 30  P-26  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  37.5  A  4.0  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Comparative  R-2  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  50  C  5.4  Example 6  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Comparative  R-3  BASE-!  Sl/S2  W-3  4  37.5  50  B  5.2  Example 7  (99.35)  (0.6)  (80/20)  (0.05)  Comparative  R-4  PAG-1  BASE-!  Sl/S2  W-3  4  62.5  62.5  C  5.8  Example 8  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  Comparative  R-5  PAG-1  BASE-!  Sl/S2  W-3  4  37.5  50  C  5.0  Example 9  (93.85)  (5.5)  (0.6)  (80/20)  (0.05)  TABLE4 