Jul. 21, 2016  19  US 2016/0209749 Al  [0340]  In General Formula (ZI-4), R$_{13 }$represents a group  having a hydrogen atom, a fluorine atom, a hydroxyl group,  an alkyl group, a cycloalkyl group, an alkoxy group, an  alkoxycarbonyl group, or a cycloalkyl group. These groups  may have a substituent.  [0341]  Ina case where a plurality ofR 14 ’s are present, each  ofR 14 ’s independently represents a group having a hydroxyl  group, an alkyl group, a cycloalkyl group, analkoxy group, an  alkoxycarbonyl group, an alkylcarbonyl group, an alkylsul› fonyl group, a cycloalkylsulfonyl group, or a cycloalkyl  group. These groups may have a substituent.  [0342]  Each of R 15 ’s independently represents an alkyl  group, a cycloalkyl group, or a naphthyl group. These groups  may have a substituent. Two R 15 ’s may be bonded to each  otherto form a ring. When two R 15 ’s are bonded to each other  to form a ring, a heteroatom such as an oxygen atom or a  nitrogen atom may be included in the ring skeleton. In one  aspect, it is preferable that two R 15 ’s are alkylene groups, and  these alkylene groups are bonded to each other to form a ring  structure.  [0343]  1 is an integer ofO to 2.  [0344]  r is an integer ofO to 8.  [0345]  z- represents a non-nucleophilic anion, and as  z-,  the same as the non-nucleophilic anion represented by z- in  General Formula  (ZI)  can be exemplified.  [0346]  In General Formula (ZI-4), the alkyl group repre› sented by R$_{13}$, R 14 , or R 15  is linear or branched, and prefer› ably has 1 to 10 carbon atoms, and is preferably a methyl  group, an ethyl group, an n-butyl group, or at-butyl group.  [0347]  Examples of the cation of the compound repre› sented by General Formula (ZI-4) in the present invention  include the cations described in paragraph "O 121 ", "O 123 ", or  "0124" of JP201O-256842A, and paragraph "0127", "0129",  or "0130" of JP2011-76O56A.  [0348]  Next, General Formulas  (ZII)  and  (ZIII)  will be  described.  [0349]  In General Formulas  (ZII)  and  (ZIII),  each ofR 204  to  R 207  independently represents an aryl group, an alkyl group,  or a cycloalkyl group.  [0350]  The aryl group represented by each ofR 204  to R 207  is preferably a phenyl group or a naphthyl group, and more  preferably a phenyl group. The aryl group represented by  each ofR 204  and R 207  may be an aryl group having a hetero› cyclic structure which contains an oxygen atom, a nitrogen  atom, a sulfur atom, or the like. Examples of the skeleton of  the ary 1 group having a heterocyclic structure include pyrrole,  furan, thiophene, indole, benzofuran, and benzothiophene.  [0351]  Preferable examples of the alkyl group and the  cycloalkyl group represented by each ofR 204  to R 207  include  a linear or branched alkyl group having 1 to 10 carbon atoms  (for example, a methyl group, an ethyl group, a propyl group,  a butyl group, or a pentyl group) and a cycloalkyl group  having 3 to 10 carbon atoms (a cyclopentyl group, a cyclo› hexyl group, or a norbomyl group).  [0352]  The aryl group, the alkyl group, and the cycloalkyl  group represented by each of R 204  to R 207  may have a sub› stituent. Examples of the substituent which each of the aryl  group, the alkyl group, and the cycloalkyl group represented  by each of R 204  to R 207  may have include an alkyl group  (having 1 to 15 carbon atoms, for example), a cycloalkyl  group (having 3 to 15 carbon atoms, for example), an aryl  group (having 6 to 15 carbon atoms, for example), an alkoxy  group (having 1 to 15 carbon atoms, for example), a halogen  atom, a hydroxyl group, or a phenylthio group.  [0353]  z- represents a non-nucleophilic anion, and as  z-,  the same as the non-nucleophilic anion in General Formula  (ZI)  can be exemplified.  [0354]  In addition, in one aspect of the present invention, as  a preferable acid generator, a compound represented by the  following General Formula (IIIB-2) can be exemplified.  (IIIB-2)  [0355]  In the formula,  x+  represents an organic cation.  [0356]  Q 61  represents a group having an alicyclic group, a  group having a lactone structure, a group having a sultone  structure, or a group having a cyclic carbonate structure.  [0357]  Examples of the alicyclic group in Q 61  include the  same as the alicyclic groups exemplified as Cy in General  Formulas (IIIB) and (IVB) above. The alicyclic group is  particularly preferably an adamantyl group.  [0358]  Examples of the lactone structure or the sultone  structure in Q 61  include the same as the lactone structure or  the sultone structure in the repeating unit having a lactone  structure or a sultone structure described in the section of the  resin (A) above. Specifically, a lactone structure represented  by any one of General Formulas (LCl-1) to (LCl-17) or a  sultone structure represented by any one of General Formulas  (SLl-1) to (SLl-3) is exemplified.  [0359]  The cyclic carbonate structure in Q 61  is preferably a  5- to 7-membered carbonate structure, and examples thereof  include 1,3-dioxolan-2-one and 1,3-dioxan-2-one.  [0360]  Each of the alicyclic group, the lactone structure, the  sultone structure, and the cyclic carbonate structure may be  directly bonded to the oxygen atom of the ester group in  General Formula (IBB-2). In addition, each of the alicyclic  group, the lactone structure, the sultone structure, and the  cyclic carbonate structure may be bonded to the oxygen atom  of the ester group through an alkyene group (for example, a  methylene group or an ethylene group). In this case, the group  having an alicyclic group, a lactone structure, a sultone struc› ture, or a cyclic carbonate structure can be an alkyl group  which has an alicyclic group, a lactone structure, a sultone  structure, or a cyclic carbonate structure as a substituent.  [0361]  Examples of the organic cation represented by  x+  include a sulfonium cation or an iodonium cation.  [0362]  The sulfonium cation is, for example, preferably  -S(R201)(R202)(R $_{203}$t in General Formula  (ZI),  and the  iodonium cation is, for example, preferably-I(R 204 )(R $_{205}$t  in General Formula  (ZII).  [0363]  Specific examples of the anion structure in the com› pound represented by General Formula (IIIB-2) will be  described below, but the present invention is not limited  thereto.  0 ITI  0-S~  II  F  0  0  F  @  0  IT  I  OYQb1  X  0-S~  II  F  0  0 