28  US 7,410,747 B2  27  -continued  Among these alicyclic moieties, preferred in the present  invention are an adamantyl group, a noradamantyl group, a  decalin residue, a tricyclodecanyl group, a tetracyclododeca› nyl group, a norbomyl group, a cedrol group, a cyclohexyl  group, a cycloheptyl group, a cyclooctyl group, a cyclodeca› nyl group and a cyclododecanyl group, more preferred are an  adamantyl group, a decalin residue, a norbornyl group, a  cedrol group, a cyclohexyl group, a cycloheptyl group, a  cyclooctyl group, a cyclodecanyl group and a cyclododecanyl  group.  Examples of the substituent which the alicyclic hydrocar- bon group may have include an alkyl group, a halogen atom,  a hydroxyl group, an alkoxy group, a carboxyl group and an  alkoxycarbonyl group. The alkyl group is preferably a lower  alkyl group such as methyl group, ethyl group, propyl group,  isopropyl group and butyl group, more preferably a substitu- ent selected from the group consisting of a methyl group, an  ethyl group, a propyl group and an isopropyl group. The  alkoxy group includes an alkoxy group having a carbon num› ber of 1 to 4, such as methoxy group, ethoxy group, propoxy  group and butoxy group.  The alkyl group, alkoxy group and alkoxycarbonyl group  each may further have a substituent, and examples of the  substituent include an alkoxy group having a carbon number  of 1 to 4 ( e.g., methoxy, ethoxy, butoxy ), a hydroxy group, an  oxo group, an alkylcarbonyl group (preferably having a car- bon number of2 to 5), an alkylcarbonyloxy group (preferably  having a carbonnumberof2 to 5), an alkyloxycarbonyl group  (preferably having a carbon number of 2 to 5) and a halogen  atom (e.g., chlorine, bromine, fluorine).  In the resin (A) of the present invention, at least any one of  X in formula  (I)  and/or X$_{1 }$ or X$_{2 }$ in formula (II) and X$_{1 }$ in  formula (III) preferably contains an alicyclic structure and/or  an aromatic ring structure.  In the resin (A), for maintaining good developability in an  alkali developer, another appropriate polymerizable mono› mer may be copolymerized so that an alkali-soluble group  such as phenolic hydroxyl group, carboxyl group, sulfonic  acid group and hexafluoroisopropanol group  (-C(  CF $_{3}$ ) $_{2 }$0 H)  can be introduced, or for enhancing the film property, another  @  (45)  (46)  (47)  (48)  (49)  (50)  (33)  (34)  (35) (36) -continued  (37)  (38) (39) (40) (41)  (42)  (43)  (44) 