US 2019/0219920 Al  78  Jul. 18, 2019  -continued  (A2’-6)  (B)-2  [Chemical Formula 78]  [0765]  <Production of resist composition>  [0766]  The components shown in Table 4 were mixed  together and dissolved to obtain each resist composition  (solid content: 2.0 wt%).  [0772]  (S)-2: a mixed solvent of propylene glycol monom› ethyl ether acetate/propylene glycol monomethyl ether=60/  40 (weight ratio).  [0771]  (D)-1: acid diffusion control agent of a compound  represented by chemical formula (D)-1 below  [0770]  (B)-2: An acid generator of the compound repre› sented by (B)-2 below  [0769]  (A’)-6 to (A’)-11: The above copolymers (A2’-1) to  (A2’-6).  [0768]  (A’)-1 to (A’)-5: The above copolymers (Al’-1-1)  to (Al ’-1-5).  [0767]  In Table 4, the reference characters indicate the  following. The values in brackets [ ] indicate the amount (in  terms of parts by weight) of the component added.  [0762]  With respect to the obtained copolymer (A2’-6), the  weight average molecular weight (Mw) and the polydisper› sity (Mw/Mn) were determined by the polystyrene equiva› lent value as measured by gel permeation chromatography  (GPC). As a result, it was found that the weight average  molecular weight was 7,000, and the polydispersity was 1.6.  The composition of the copolymer (ratio (molar ratio) of the  respective structural units within the structural formula) as  determined by $^{13}$C-NMR was l/m=50/50.  [0763]  With respect to each copolymer, the compositional  ratio of the polymers (the molar ratio of the respective  structural units in the polymeric compound) as determined  by $^{13}$C-NMR, the weight average molecular weight (Mw)  and the polydispersity (Mw/Mn) determined by the poly› styrene equivalent value as measured by GPC are also  shown in Table 3.  [0764]  In Table 3, (al0l) indicates p-hydroxystyrene. By  the deprotection reaction, the structural unit derived from  p-ethoxyethoystyrene (EESt) is converted to a structural unit  derived from p-hydroxystyrene (a structural unit formed by  cleavage of the ethylenic double bond of p-hydroxystyrene ).  TABLE 3  TABLE 4  Component  Component  Component  Component  (A)  (B)  (D)  (S)  Example 2  (A’)-1  (B)-1  (D)-1  (S)-1  [100]  [14]  [3]  [5700]  Example 3  (A’)-2  (B)-1  (D)-1  (S)-1  [100]  [14]  [3]  [5700]  Example 4  (A’)-3  (B)-1  (D)-1  (S)-1  [100]  [14]  [3]  [5700]  Example 5  (A’)-4  (B)-1  (D)-1  (S)-1  [100]  [14]  [3]  [5700]  Example 6  (A’)-5  (B)-1  (D)-1  (S)-1  [100]  [14]  [3]  [5700]  Comparative  (A’)-6  (B)-1  (D)-1  (S)-1  Example 5  [100]  [14]  [3]  [5700]  Comparative  (A’)-7  (B)-1  (D)-1  (S)-1  Example 6  [100]  [14]  [3]  [5700]  Comparative  (A’)-8  (B)-1  (D)-1  (S)-1  Example 7  [100]  [14]  [3]  [5700]  Comparative  (A’)-9  (B)-1  (D)-1  (S)-1  Example 8  [100]  [14]  [3]  [5700]  Comparative  (A’)-10  (B)-1  (D)-1  (S)-1  Example 9  [100]  [14]  [3]  [5700]  Comparative  (A’)-11  (B)-1  (D)-1  (S)-1  Example 10  [100]  [14]  [3]  [5700]  Ratio of structural unit derived  from each monomer  Copolymer  (molar ratio)  (Al’-1-1)  (a101)/(a01) - 50/50  (Al’-1-2)  (a101)/(a01) - 45/55  (Al’-1-3)  (a101)/(a01) - 40/60  (Al’-1-4)  (a101)/(a02) - 40/60  (Al’-1-5)  (a21)/(a101)/(a01) - 20/30/50  (A2’-1)  (al0l)/(all) - 50/50  (A2’-2)  (a101)/(a12) - 50/50  (A2’-3)  (a101)/(a13) - 50/50  (A2’-4)  (a101)/(a14) - 50/50  (A2’-5)  (a101)/(a15) - 50/50  (A2’-6)  (a21)/(a01) - 50/50  Weight average  molecular weight  (Mw)  7000  7000  7000  7000  7000  7000  7000  7000  7000  7000  7000  Poly› dispersity  (Mw/Mn)  1.6  1.6  1.6  1.6  1.6  1.6  1.6  1.6  1.6  1.6  1.6  Examples 2 to 6, Comparative Examples 5 to 10 