Jul. 17, 2014  83  US 2014/0199617 Al  e.g., a methyl group, an ethyl group, a propyl group, a butyl  group, a pentyl group, a hexyl group, a heptyl group, an octyl  group, a dodecyl group, a 2-ethylhexyl group, an isopropyl  group, a sec-butyl group, at-butyl group, or anisoamyl group,  a hydroxyl group, a halogen atom ( e.g., a fluorine atom, a  chlorine atom, a bromine atom, an iodine atom), a nitro group,  a cyano group, an amido group, a sulfonamido group, a an  alkoxy group, e.g., a methoxy group, an ethoxy group, a  hydroxyethoxy group, a propoxy group, a hydroxypropoxy  group or a butoxy group, an alkoxycarbonyl group, e.g., a  methoxycarbonyl group or an ethoxycarbonyl group, an acyl  group, e.g., a formyl group, an acetyl group, or a benzoyl  group, an acyloxy group, e.g., an acetoxy group or a butyry› loxy group, or a carboxyl group. The total carbon atom num› ber including arbitrary substituents on the cycloalkyl group is  7 or more.  [0668]  Further, as the polycyclic cycloalkyloxy group hav› ing total carbon atom number of 7 or more, a norbornyloxy  group, a tricyclodecanyloxy group, a tetracyclodecanyloxy  group, and an adamantyloxy group are exemplified.  [0669]  As the alkoxy group having a monocyclic or poly› cyclic cycloalkyl group represented by R$_{13 }$and R$_{14}$ , the total  carbon atom number is preferably 7 or more, more preferably  7 or more and 15 or less, and the alkoxy group is preferably an  alkoxy group having a monocyclic cycloalkyl group. The  alkoxy group having the total carbon atom number of 7 or  more and having a monocyclic cycloalkyl group is an alkoxy  group, such as methoxy, ethoxy, propoxy, butoxy, pentyloxy,  hexyloxy, heptoxy, octyloxy, dodecyloxy, 2-ethylhexyloxy,  isopropoxy, sec-butoxy, t-butoxy, or isoamyloxy, substituted  with the above-described monocyclic cycloalkyl group which  may have a substituent, the carbon atom number of which is  7 or more including the substituent. For example, a cyclo› hexylmethoxy group, a cyclopentylethoxy group and a cyclo› hexylethoxy group are exemplified, and a cyclohexyl› methoxy group is preferred.  [0670]  As the alkoxy group having the total carbon atom  number of 7 or more and having a polycyclic cycloalkyl  group, a norbornylmethoxy group, a norbornylethoxy group,  a tricyclodecanylmethoxy group, a tricyclodecanylethoxy  group, a tetracyclodecanylmethoxy group, a tetracyclodeca› nylethoxy group, an adamantylmethoxy group and an ada› mantylethoxy group are exemplified, and a norbornyl› methoxy group and a norbornylethoxy group are preferred.  [0671]  As the alkyl group of the alkylcarbonyl group rep› resented by R$_{14}$ , the same specific examples as described in  the alkyl group ofR$_{13 }$to R$_{15 }$are exemplified.  [0672]  The alkylsulfonyl group and the cycloalkylsulfonyl  group represented by R$_{14 }$ is preferably straight chain,  branched or cyclic and having  1  to  10  carbon atoms and, for  example, a methanesulfonyl group, an ethanesulfonyl group,  an n-propanesulfonyl group, an n-butanesulfonyl group, a  tert-butanesulfonyl group, an n-pentanesulfonyl group, a  neopentanesulfonyl group, an n-hexanesulfonyl group, an  n-heptanesulfonyl group, an n-octanesulfonyl group, a 2-eth› ylhexanesulfonyl group, ann-nonanesulfonyl group, ann-de› canesulfonyl group, a cyclopentanesulfonyl group, and a  cyclohexanesulfonyl group can be exemplified. Of these  alkylsulfonyl group and cycloalkylsulfonyl group, a meth› anesulfonyl group, an ethanesulfonyl group, an n-propane› sulfonyl group, an n-butanesulfonyl group, a cyclopentane› sulfonyl group  and a cyclohexanesulfonyl group  are  preferred.  [0673]  The examples of the substituents that each of the  above groups may have include a halogen atom ( e.g., a fluo› rine atom), a hydroxyl group, a carboxyl group, a cyano  group, a nitro group, an alkoxy group, an alkoxyalkyl group,  an alkoxycarbonyl group and an alkoxycarbonyloxy group.  [0674]  As the alkoxy group, a straight chain, branched or  cyclic alkoxy group having  1  to 20 carbon atoms, e.g., a  methoxy group, an ethoxy group, an n-propoxy group, an  i-propoxy group, an n-butoxy group, a 2-methylpropoxy  group, a 1-methylpropoxy group, a t-butoxy group, a cyclo› pentyloxy group and a cyclohexyloxy group can be exempli› fied.  [0675]  As the alkoxyalkyl group, a straight chain, branched  or cyclic alkoxyalkyl group having 2 to 21 carbon atoms, e.g.,  a methoxymethyl group, an ethoxymethyl group, a 1-meth› oxyethyl group, a 2-methoxyethyl group, a 1-ethoxyethyl  group and a 2-ethoxyethyl group can be exemplified.  [0676]  As the alkoxycarbonyl group, a straight chain,  branched or cyclic alkoxycarbonyl group having 2 to 21 car› bon atoms, e.g., a methoxycarbonyl group, an ethoxycarbo› nyl group, an n-propoxycarbonyl group, an i-propoxycarbo› nyl  group,  an  n-butoxycarbonyl  group,  a  2-methylpropoxycarbonyl group, a 1-methylpropoxycarbo› nyl group, a t-butoxycarbonyl group, a cyclopentyloxycarbo› nyl group and a cyclohexyloxycarbonyl group can be exem› plified.  [0677]  As the alkoxycarbonyloxy group, a straight chain,  branched or cyclic alkoxycarbonyloxy group having 2 to 21  carbon atoms, e.g., a methoxycarbonyloxy group, an ethoxy› carbonyloxy group, an n-propoxycarbonyloxy group, an  i-propoxycarbonyloxy  group,  an  n-butoxycarbonyloxy  group, a t-butoxycarbonyloxy group, a cyclopentyloxycarbo› nyloxy group and a cyclohexyloxycarbonyloxy group can be  exemplified.  [0678]  As the cyclic structure which may be formed by  bonding two R$_{15}$’s to each other, a 5- or 6-membered ring  formed by two divalent R$_{15}$’s together with the sulfur atom in  formula (ZI-4), particularly preferably a 5-membered ring  (that is, a tetrahydrothiophene ring) is exemplified, which  ring may be condensed with an aryl group or a cycloalkyl  group. The divalent R$_{15 }$may have a substituent, and as the  substituents, a hydroxyl group, a carboxyl group, a cyano  group, a nitro group, an alkyl group, a cycloalkyl group, an  alkoxy group, an alkoxyalkyl group, an alkoxycarbonyl  group, and an alkoxycarbonyloxy group can be exemplified.  The cyclic structure may be substituted with two or more  substituents, and these substituents may be bonded to each  other to form a ring ( e.g., an aromatic or non-aromatic hydro› carbon ring, an aromatic or non-aromatic heterocyclic ring, or  a polycyclic condensed ring formed by combining two or  more of these rings).  [0681]  As the substituents that R$_{13}$, R$_{14 }$and R$_{15 }$may have  other than an acid-decomposable group, a hydroxyl group an  alkoxy group, an alkoxycarbonyl group and a halogen atom  ( especially a fluorine atom) are preferred.  [0682]  1  preferably represents  O  or  1,  and more preferably I.  [0683]  r preferably represents  O  to 2.  [0679]  In formula (ZI-4), R$_{15 }$ preferably represents a  methyl group, an ethyl group, a naphthyl group, and a divalent  group forming a tetrahydrothiophene ring structure together  with the sulfur atom by bonding two R$_{15}$’s to each other.  [0680]  It is preferred that at least one of R$_{13}$, R$_{14 }$and R$_{15 }$ has an acid-decomposable group. The preferred embodiment  of the acid-decomposable group is as described above. 