271  US 9,323,153 B2  272  butylidenebis-(3-methyl-6-tert-butylphenol),  1, 1-bis-( 4- hydroxyphenyl)-cyclohexane,  2,2’-dihydroxy-3,3"-di-(  a› methylcyclohexyl)-5,5’-dimethyl  diphenyl  methane,  alkylated bisphenol, hindered bisphenol, 1,3,5-trimethyl-2,4,  6-tris(3,5-di-tert-butyl-4-hydroxybenzyl)benzene,  tris-(2- methyl-4-hydroxy-5-tert-butylphenyl)butane, and tetrakis› [methylene-3-(3’,5’-di-tert-butyl-4’-hydroxyphenyl)  propionate ]methane.  Preferred examples of the antioxidants include 2,6-di-t› butyl-4-methylphenol, 4-hydroxymethyl-2,6-di-t-butylphe- no!, 2,2’-methylene bis( 4-methyl-6-t-butylphenol), butylhy› droxyanisole,  t-butylhydroquinone,  2,4,5- trihydroxybutyrophenone, nordihydroguaiaretic acid, propyl  gallate, octyl gallate, lauryl gallate, and isopropyl citrate.  Among these, 2,6-di-t-butyl-4-methylphenol, 4-hydroxym- ethyl-2,6-di-t-butylphenol, butylhydroxyanisole and t-butyl› hydroquinone are preferred, and 2,6-di-t-butyl-4-methylphe› nol and 4-hydroxymethyl-2,6-di-t-butylphenol are more  preferred.  These antioxidants may be used alone or in combination of  two or more kinds thereof.  In the case where the composition according to the present  invention contains an antioxidant, the addition amount of  antioxidant is preferably 1 ppm or more, more preferably 5  ppm or more, still more preferably 10 ppm or more, even still  more preferably 50 ppm or more, particularly preferably 100  ppm or more, and most preferably 100 to 1,000 ppm.  The composition according to the present invention may  further contain a solvent. As the solvent, an organic solvent is  typically used. Examples of the organic solvent include alky› lene glycol monoalkyl ether carboxylate, alkylene glycol  monoalkyl ether, alkyl lactate, alkyl alkoxypropionate, cyclic  lactone (preferably having 4 to 10 carbon atoms), a monoke› tone compound (preferably having 4 to 10 carbon atoms)  which may contain a ring, alkylene carbonate, alkyl alkoxy› acetate, and alkyl pyruvate.  Preferred examples of the alkylene glycol monoalkyl ether  carboxylate include propylene glycol monomethyl ether  acetate (PGMEA; also called l-methoxy-2-acetoxypropane ),  propylene glycol monoethyl ether acetate, propylene glycol  monopropyl ether acetate, propylene glycol monobutyl ether  acetate, propylene glycol monomethyl ether propionate, pro› pylene glycol monoethyl ether propionate, ethylene glycol  monomethyl ether acetate, and ethylene glycol monoethyl  ether acetate.  Examples of the alkylene glycol monoalkyl ether include  propylene glycol monomethyl ether (PGME; also called  l-methoxy-2-propanol), propylene glycol monoethyl ether,  propylene glycol monopropyl ether,  propylene glycol  monobutyl ether, ethylene glycol monomethyl ether, and eth› ylene glycol monoethyl ether.  Examples of the alkyl lactate include methyl lactate, ethyl  lactate, propyl lactate, and butyl lactate.  Examples of the alkyl alkoxypropionate include ethyl  3-ethoxypropionate, methyl 3-methoxypropionate, methyl  3-ethoxypropionate, and ethyl 3-methoxypropionate.  Examples of the cyclic lactone include ~-propiolactone,  ~-butyrolactone, y-butyrolactone, a-methyl-y-butyrolactone,  ~-methyl-y-butyrolactone, y-valerolactone, y-caprolactone,  y-octanoic lactone, and a-hydroxy-y-butyrolactone.  Examples of the monoketone compound which may con› tain a ring include 2-butanon, 3-methylbutanon, pinacolone,  2-pentanone, 3-pentanone, 3-methly-2-pentanone, 4-methly- 2-pentanone, 2-methly-3-pentanone, 4,4-dimethly-2-pen- tanone,  2,4-dimethly-3-pentanone,  2,2,4,4-tetramethly-3- pentanone, 2-hexanone, 3-hexanone, 5-methly-3-hexanone,  [10] Solvent  2-heptanone, 3-heptanone, 4-heptanone, 2-methly-3-hep› tanone, 5-methly-3-heptanone, 2,6-dimethly-4-heptanone,  2-octanone,  3-octanone,  2-nonanone,  3-nonanone,  5-nonanone,2-decanone,3-decanone,4-decanone, 5-hexen- 2-one, 3-penten-2-one, cyclopentanone, 2-methlycyclopen› tanone,  3-methlycyclopentanone,  2,2-dimethlycyclopen- tanone,  2,4,4-trimethlycyclopentanone,  cyclohexanone,  3-methlycyclohexanone, 4-methlycyclohexanone, 4-ethly› cyclohexanone, 2,2-dimethlycyclohexanone, 2,6-dimethly› cyclohexanone,  2,2,6-trimethlycyclohexanone, cyclohep› tanone,  2-methlycycloheptanone,  and  3-methlycycloheptanone.  Examples of the alkylene carbonate include propylene car› bonate, vinylene carbonate, ethylene carbonate, and butylene  carbonate.  Examples of the alkyl alkoxyacetate include 2-methoxy› ethyl acetate, 2-ethoxyethyl acetate, 2-(2-ethoxyethoxy)ethyl  acetate, 3-methoxy-3-methylbutyl acetate, and l-methoxy-2- propyl acetate.  Examples of the alkyl pyruvate include methyl pyruvate,  ethyl pyruvate, and propyl pyruvate.  As the solvent, a solvent having a boiling point of 130°  C.  or higher at ordinary temperature under atmospheric pressure  is preferably used. Specific examples thereof include cyclo- pentanone, y-butyrolactone, cyclohexanone, ethyl lactate,  ethylene glycol monoethyl ether acetate, PGMEA, ethyl  3-ethoxypropionate, ethyl pyruvate, 2-ethoxyethyl acetate,  2-(2-ethoxyethoxy)ethyl acetate, and propylene carbonate.  These solvents may be used alone or in a mixture of two or  more kinds thereof. In the latter case, a mixed solvent of a  solvent containing a hydroxyl group and a solvent not con› taining a hydroxyl group are preferably used.  Examples of the solvent containing a hydroxyl group  include ethylene glycol, ethylene glycol monomethyl ether,  ethylene glycol monoethyl ether, propylene glycol, PGME,  propylene glycol monoethyl ether, and ethyl lactate. Among  these, PGME and ethyl lactate are particularly preferred.  Examples of the solvent not containing a hydroxyl group  include PGMEA, ethyl ethoxypropionate, 2-heptanone, y-bu- tyrolactone, cyclohexanone, butyl acetate, N-methylpyrroli› done,  N,N-dimethylacetamide  and  dimethylsulfoxide.  Among these, propylene glycol monomethyl ether acetate,  ethyl ethoxypropionate, 2-heptanone, y-butyrolactone, cyclo› hexanone and butyl acetate are preferred. Among these,  PGMEA, ethyl ethoxypropionate and 2-heptanone are par› ticularly preferred.  In the case of using a mixed solvent of a solvent containing  a hydroxyl group and a solvent not containing a hydroxyl  group, the mass ratio therebetween is preferably from 1/99 to  99/1, more preferably from 10/90 to 90/10, and still more  preferably from 20/80 to 60/40.  Incidentally, when a mixed solvent containing 50% by  mass or more of a hydroxyl group-free solvent is used, par› ticularly excellent coating uniformity can be achieved. Inci- dentally, the solvent is particularly preferably a mixed solvent  of PGMEA and one or more kinds of other solvents.  The content of the solvent in the composition of the present  invention may be appropriately adjusted according to the  desired film thickness or the like, but the composition is  usually prepared such that the entire solid content concentra› tion of the composition becomes from 0.5 to 30% by mass,  preferably from 1.0 to 20% by mass, and more preferably  from 1.5 to 10% by mass.  The present invention relates to an actinic ray-sensitive or  radiation-sensitive film formed using the above-described  composition of the present invention. In addition, a pattern  <Pattern Forming Method> 