US 9,904,167 B2  160  159  B4:  B5:  ’-...0  lo  ~  ’-...o/"-,....o~N~o/"-,....o/  0  [Basic Compound]  Bl: tetrabutyl ammonium hydroxide  B2: tri(n-octyl) amine  B3: 2,4,5-triphenyl imidazole  Mw  ~  5700, Mw/Mn  ~  1.3  -continued  Mw  ~  6500, Mw/Mn  ~  1.3  Mw  ~  7500, Mw/Mn  ~  1.3  OH  P-11  OH  P-10  OH  0  +  P-12  B6:  Q  0  0  F F F  0  8 ~  V  V  II_  II  11111  /\  F3C-ri-N -ri---+-----,f--+--ri-N\__/N  0  0  F F F  0  [Surfactant]  [Solvent]  W-1: PF6320 (produced by Onmova Solutions Inc.)  W-2: Megafac Fl 76 (produced by DIC Corporation;  fluorine-based)  W-3: Polysiloxane polymer KP-341 (produced by Shin› Etsu Chemical Co., Ltd.; silicon-based)  Sl:  Propylene  glycol  monomethyl  ether  acetate  (l -methoxy-2-acetoxypropane)  S2: Propylene glycol monomethyl ether (l-methoxy-2- propanol)  S3: 2-heptanone  S4: Ethyl lactate  S6: y-butyrolactone  S5: Cyclohexanone  S7: Propylene carbonate 