US 2020/0401045 Al  40  Dec. 24, 2020  [0490]  <Crosslinking Agent (F)>  [0483]  <Solvent (E)>  [0480]  The hydrophobic resin (D) may be used singly or  in combination of two or more kinds thereof.  erably having 4 to 10 carbon atoms) which may have a  ring, alkylene carbonate, alkyl alkoxyacetate, and alkyl  pyruvate.  [0481]  It is preferable to use a mixture of two or more  kinds of hydrophobic resins (D) having different levels  of surface energy from the viewpoint of satisfying both  the immersion liquid tracking properties and the devel› opment characteristics upon liquid immersion expo› sure.  [0482]  A content of the hydrophobic resin (D) in the  composition is preferably 0.01 % to 10.0% by mass, and  more preferably 0.05% to 8.0% by mass, with respect  to the total solid content in the composition.  [0484]  The composition of the embodiment of the pres› ent invention may include a solvent.  [0485]  In the composition of the embodiment of the  present invention, a known resist solvent can be appro› priately used. For example, the known solvents dis› closed in paragraphs [0665] to [0670] of the specifica› tion of US2016/0070167Al, paragraphs [0210] to  [0235] of the specification of US2015/0004544Al,  paragraphs [0424] to [0426] of the specification of  US2016/0237190Al, and paragraphs [0357] to [0366]  of the specification of US2016/0274458Al can be  suitably used.  [0486]  Examples of the solvent which can be used in  preparation of the composition include organic solvents  such as alkylene glycol monoalkyl ether carboxylate,  alkylene glycol monoalkyl ether, alkyl lactate, alkyl  alkoxypropionate, a cyclic lactone (preferably having 4  to 10 carbon atoms), a monoketone compound (pref- [0495]  The crosslinking agent (F) is more preferably a  phenol derivative having a hydroxymethyl group or an  [0494]  The crosslinking agent (F) is preferably a com› pound (also including a resin) having two or more  crosslinking groups.  [0493]  The  crosslinkable  group  is  preferably  a  hydroxymethyl group, an alkoxymethyl group, an oxi› rane ring, or an oxetane ring.  [0492]  The crosslinking agent (F) is a compound having  a crosslinkable group capable of crosslinking a resin,  and examples of the crosslinkable group include a  hydroxymethyl group, an alkoxymethyl group, an acy› loxymethyl group, an alkoxymethyl ether group, an  oxirane ring, and an oxetane ring.  [0491]  The composition of the embodiment of the pres› ent invention may include a compound (hereinafter also  referred to as a crosslinking agent (F)) which crosslinks  a resin by the action of an acid. As the crosslinking  agent (F), a known compound can be appropriately  used. For example, the known compounds disclosed in  paragraphs [0379] to [0431] of the specification of  US2016/0147154Al and paragraphs [0064] to [0141]  of the specification of US2016/0282720Al can be  suitably used as the crosslinking agent (F).  [0489]  The solvent preferably includes propylene gly› col monomethyl ether acetate, and may be a single  solvent of propylene glycol monomethyl ether acetate  or a mixed solvent of two or more kinds including  propylene glycol monomethyl ether acetate.  [0488]  A mixing ratio (mass ratio) of the solvent having  a hydroxyl group to the solvent having no hydroxyl  group is 1/99 to 99/1, preferably 10/90 to 90/10, and  more preferably 20/80 to 60/40. A mixed solvent  including 50% by mass or more of the solvent having  no hydroxyl group is preferable from the viewpoint of  coating evenness.  [0487]  As the organic solvent, a mixed solvent obtained  by mixing a solvent having a hydroxyl group in the  structure and a solvent having no hydroxyl group may  be used. As the solvent having a hydroxyl group and the  solvent having no hydroxyl group, the above-exempli› fied compounds can be appropriately selected, but as  the solvent having a hydroxyl group, alkylene glycol  monoalkyl ether or alkyl lactate is preferable, and  propylene glycol monomethyl ether (PGME), propyl› ene glycol monoethyl ether (PGEE), methyl 2-hy› droxyisobutyrate, or ethyl lactate is more preferable.  Further, as the solvent having no hydroxyl group,  alkylene glycol monoalkyl ether acetate, alkylalkoxy› propionate, a monoketone compound which may have  a ring, a cyclic lactone, alkyl acetate, or the like is  preferable, and among these, propylene glycol monom› ethyl ether acetate (PGMEA), ethyl ethoxypropionate,  2-heptanone, y-butyrolactone, cyclohexanone, cyclo› pentanone, or butyl acetate is more preferable, and  propylene glycol monomethyl ether acetate, y-butyro› lactone, ethyl ethoxypropionate, cyclohexanone, cyclo› pentanone, or 2-heptanone are more preferable. As a  solvent having no hydroxyl group, propylene carbonate  is also preferable. 