US 2020/0050104 Al  70  Feb. 13, 2020  [0101]  R 403 , R 404 , R 405 , R $^{406 }$and R$^{407 }$are each indepen› dently a C$_{1 }$-C$_{20 }$monovalent hydrocarbon group which may  contain a heteroatom. Any two ofR 403 , R $^{404 }$and R$^{405 }$may  bond together to form a ring with the sulfur atom to which  they are attached. The monovalent hydrocarbon group may  be straight, branched or cyclic, and examples thereof include  C$_{1 }$-C$_{12 }$alkyl, C$_{2}$ -C$_{12 }$alkenyl, C$_{2}$ -C$_{12 }$alkynyl,  CcC$_{20 }$ aryl,  and C$_{7}$-C$_{12 }$ aralkyl groups. In these groups, some or all of  the hydrogen atoms may be substituted by hydroxyl, car› boxyl, halogen, cyano, amide, nitro, mercapto, sultone,  sulfone, or sulfonium salt-containing moieties, and some  carbon may be replaced by an ether bond, ester bond,  carbonyl moiety, carbonate moiety or sulfonic acid ester  bond.  [0102]  In formulae (3-1) and (3-2), pis an integer of  1  to  3, q is an integer of  1  to 5, and r is an integer of Oto 3, and  lsq+rs5. Preferably, q is an integer of  1  to 3, more prefer› ably 2 or 3, and r is an integer of O to 2.  [0103]  Examples of the cation in the sulfonium salt having  formula (5-1) include those exemplified above as the cation  in the sulfonium salt having formula (3). Examples of the  cation in the iodonium salt having formula (5-2) are shown  below, but not limited thereto.  -continued  Br  c,yc,  ly1yo, ly1yo,  y  y  /0  /0 