75  US 9,285,679 B2  76  -continued  -continued  In the case of irradiating the composition of the present  invention with ArF excimer laser light, the resin preferably  has a monocyclic or polycyclic alicyclic hydrocarbon struc- ture. Hereinafter, this resin is referred to as "alicyclic hydro- carbon-based acid-decomposable resin".  The alicyclic hydrocarbon-based acid-decomposable resin  is preferably a resin containing at least one repeating unit  selected from the group consisting of a repeating unit having  an alicyclic hydrocarbon-containing partial structure repre- sented by the following formulae (pl) to (p V), and a repeating  unit represented by the following formula (II-AB):  •7rOH  OH  OH  OH  OH  OH  0  OH  0  OH  OH  OH  OH  OH  OH  0  OH  OH  F  OH  OH  OH  0  OA  OH  OH  0  0  II  s  0""" 11 ’--- F  F  0  OH  OH  Cl  OH  OH  OMe  OH  (pl)  R11  I  -c----- .  $_{’ }$, ___ z  (pll)  R12  I  -C-R13  I  R14  (pIII)  R16  I  -CH-O-R1s  (p!V)  R1s  -t-tRa  R21  Rn  [Chem.42] 