Oct. 8, 2020  9  US 2020/0319551 Al  [0112]  From the viewpoint of miniaturization of the pat› tern, L$_{2 }$ is preferably a secondary or tertiary alkyl group, and  more preferably the tertiary alkyl group. Examples of the  secondary alkyl group include an isopropyl group, a cyclo› hexyl group, and a norbornyl group, and examples of the  tertiary alkyl group include a tert-butyl group and an ada› mantane group. In these aspects, since the glass transition  temperature (Tg) and the activation energy increase, fogging  can be suppressed, in addition to ensuring film hardness.  [0113]  In Formula (Y4), Ar represents an aromatic ring  group.  Rn represents an alkyl group, a cycloalkyl group, or  an aryl group. Rn and Ar may be bonded to each other to  form a non-aromatic ring. Ar is more preferably an aryl  group.  [0114]  Among those, the leaving group is preferably  bonded to another group to form a group having a group  represented by any of General Formulae (B-a) to (B-c). In  other words, the repeating unit B preferably has a group  represented by any of General Formulae (B-a) to (B-c). In  addition, the resin X preferably has the repeating unit B  having a group represented by any of General Formulae  (B-a) to (B-c).  [0125]  Rc3 is preferably, for example, a group represented  by Formula (Yl).  [0126]  Lf represents an aromatic ring group (preferably an  arylene group having 6 to 15 carbon atoms, and more  preferably a phenylene group) or a perfluoroalkylene group  (preferably a perfluoroalkylene group having 2 to 5 carbon  atoms, and more preferably a group represented by  ----C(CF $_{3}$ ) 2 -).  [0127]  * represents a bonding position.  [0128]  As the repeating unit A, a repeating unit repre› sented by Formula (XA) is preferable.  [0129]  In General Formula (XA),  RXA  represents a hydro› gen atom, a methyl group, or a trifluoromethyl group.  [0130]  LxA  represents a single bond or a divalent linking  group. Examples of the divalent linking group include an  ester group (-COO-), an ether group (-0-), a carbonyl  group (-CO-), a thioether group (-S-), -SO$_{2}$ -,  -NRN  - (RN  represents a hydrogen atom or an alkyl  group), a divalent hydrocarbon group (preferably having 1  to 10 carbon atoms, with examples thereof including an  alkylene  group,  an alkenylene  group  (for example,  ----CH=CH-), and an alkynylene group (for example,  ----C=C-)), an arylene group (preferably having 6 to 16  carbon atoms), and a group formed by combining these  groups.  [0131]  Among those,  LxA  is preferably the single bond, a  carbonyl group, an arylene group (preferably a phenylene  group), or an ester group.  [0132]  XxA  represents an acid-decomposable group. As  the acid-decomposable group, for example, a group in which  a carboxyl group whose hydrogen atom is substituted with  any of the above-mentioned groups represented by Formulae  (Y) to (Y 4), a group in which a phenolic hydroxyl group (for  example, a hydroxyl group directly linked to  LxA  which is an  arylene group) whose hydrogen atom is substituted with any  of the above-mentioned groups represented by Formulae  (Yl) to (Y 4 ), or a group in which a fluorinated alcohol group  (preferably a hexafluoro-2-propanol group) whose hydrogen  atom in the hydroxyl group is substituted with any of the  above-mentioned groups represented by Formulae (Yl) to  (Y4) is preferable.  [0133]  Among those,  XXA  is preferably a group having the  group represented by General Formula (B-a) or the group  represented by General Formula (B-b) as mentioned above.  [0134]  Specific aspects in a case where  XxA  is a group  having the group represented by General Formula (B-b)  include a carboxyl group, a phenolic hydroxyl group, and a  fluorinated alcohol group (preferably a hexafluoro-2-propa› nol group), in which a hydrogen atom of a group selected  from the group consisting of the hydroxyl groups included  is substituted with the above-mentioned group represented  by Formula (Y3).  It should be noted that in this case, it is  preferable that in Formula (Y3), R$_{36 }$has a group represented  by Formula (Yl), a 1-adamantyl group, or an aryl group (a  fluoroalkyl group (preferably a perfluoroalkyl group having  1 or 2 carbon atoms) as a substituent, and R$_{37 }$is a hydrogen  atom.  [0115]  In General Formula (B-a),  OX  represents an oxygen  atom.  [0116]  Rel represents a substituent in which the atom  directly bonded to  OX  is a tertiary carbon atom.  [0117]  Rel is preferably, for example, a group represented  by Formula (Yl).  [0118]  * represents a bonding position.  [0119]  In General Formula (B-b ),  ex  represents a carbon  atom.  [0120]  Rc 2  represents a substituent in which the atom  directly bonded to  ex  is a tertiary carbon atom.  [0121]  Rc 2  is, for example, a monovalent organic group  represented by R$_{36 }$ in Formula (Y3), examples thereof  include the group in which the atom directly bonded to  ex  is a tertiary carbon atom, and specific examples of the group  include a group represented by Formula (Yl ), a 1-adamantyl  group, and an aryl group (preferably having a fluoroalkyl  group (preferably a perfluoroalkyl group having 1 or 2  carbon atoms) as a substituent).  [0122]  * represents a bonding position.  [0123]  In General Formula (B-c ),  OX  represents an oxygen  atom.  [0124]  Rc3 represents a substituent in which the atom  directly bonded to OX is a tertiary carbon atom.  (XA)  ~  LxA  I  Xx-i  (B-a)  *  I  H  0,1..,..0,  ex  *  I  Rc2  (B-b)  *  I  Lf’-..,_  ax  I  Rc3  (B-c) 