us  10,031,419 B2  322  321  TABLE 4-continued  Comparative  P-9  94.95  None  N-10  2  HR- 3  Sl/S2  40/60  Example  40  109  Out  gas  (shrink  Top  Top  Resolving  film  coat  coat  Sensitivity  power  LWR Pattern  Blob  tbickness  Surfactant  Concentration  polymer  solvent  (µC/cm 2 )  (nm)  (nm)  form  defects  (nm))  Example 101  W-1  0.05  TT-1  TS-4  27.0  45  3.7  Rectangular  B  2  Example  W-2  0.05  TT-3  TS-2  27.5  45  3.7  Rectangular  B  2  102  Example  W-1  0.05  TT-2  TS-5  27.0  45  3.8  Rectangular  C  3  103  Example  W-1  0.05  TT-5  TS-4  28.0  50  3.9  Rectangular  C  3  104  Example  W-2  0.05  TT-6  TS-4  28.0  50  3.9  Rectangular  C  3  105  Example  None  TT-2  TS-5  29.0  50  4.0  Rectangular  C  3  106  Example  W-1  0.05  T-4  TS-2  26.0  40  3.5  Rectangular  A  107  Example  W-4  0.05  T-12  TS-1  26.5  40  3.6  Rectangular  B  2  108  Example  W-1  0.05  T-2/T-4 - TS-3  26.0  40  3.5  Rectangular  A  109  1:1  (mass  ratio)  Example  W-1  0.05  T-2  TS-3  26.5  40  3.6  Rectangular  A  2  110  Example  W-2  0.05  T-4  TS-2  26.0  40  3.5  Rectangular  A  111  Example  W-1/W-2  0.05  T-2  TS-3  26.5  40  3.6  Rectangular  A  2  112  (mass  ratio  1/1)  Example  W-3  0.05  TT-4  TS-4  28.0  45  3.7  Rectangular  B  2  113  Example  W-1  0.05  TT-6  TS-4  28.5  45  3.8  Rectangular  C  3  114  Example  W-1  0.05  T-12  TS-3  25.0  35  3.4 Rectangular  A  115  Example  W-1  0.05  TT-1/TT-3 - TS-2  26.0  40  3.6  Rectangular  C  2  116  1:1  (mass  ratio)  Example  W-1  0.05  T-2  TS-3  25.5  35  3.4 Rectangular  A  117  Example  W-1  0.05  T-4  TS-2  25.5  35  3.4 Rectangular  A  118  Example  W-1  0.05  TT-4  TS-4  27.5  45  3.8  Rectangular  C  3  119  Comparative  W-1  0.05  None  None  32.0  55  4.6  Reverse  E  7  Example  taper  101  Comparative  W-1  0.05  TT-1  TS-5  31.0  55  4.4 Rectangular  E  4  Example  102  Comparative  W-1  0.05  None  None  31.0  55  4.3  Rectangular  D  6  Example  103  Comparative  W-1  0.05  None  None  31.0  55  4.4  Reverse  E  9  Example  taper  104  Comparative  W-1  0.05  T-4  TS-2  30.5  55  4.2  Rectangular  E  4  Example  105  Comparative  W-1  0.05  None  None  30.5  55  4.1  Rectangular  D  8  Example  106  Comparative  W-1  0.05  None  None  31.0  55  4.5  Reverse  E  7  Example  taper  107 