US 2020/0401045 Al  56  Dec. 24, 2020  (Xl)  (Yl)  (Y2)  (Y3)  (Y4)  2.  The act1mc ray-sens1t1ve or radiation-sensitive resin  composition according to claim  1,  wherein the monomer having the salt structure 1s a  monomer represented by General Formula (Xl),  in the formula, P$^{11 }$represents a polymerizable group,  y 11 - represents a group selected from the group consist› ing of anionic functional groups represented by General  Formulae (Yl) to (YS),  z 11 +  represents an actinic ray-sensitive decomposable or  radiation-sensitive decomposable cation,  m represents an integer of 1 or more,  L 11  represents a single bond or an m+l-valent linking  group,  provided that in a case where y 11 - is the anionic func› tional group represented by General Formula (Yl ), L  11  represents * $^{1}$-CO---O-Ls$^{1}$-* 2 ,  Ls 1  represents a divalent linking group not including  ---0-CO-,  * $^{1 }$represents a bonding position to P$^{11 }$and  * 2  represents  a bonding position to  y 11 -, and  in a case where  y 11 - is an anionic functional group  represented by General Formula (Y2), L  11  includes  neither a phenylene group nor a lactone structure,  in General Formula (Yl), * represents a bonding position  to L 11  in General Formula (Xl),  in General Formula (Y2), R $^{11 }$and R $^{12 }$each independently  represent a hydrogen atom or a monovalent organic  group,  provided that in a case where one of R $^{11 }$and R $^{12 }$repre› sents a fluorine atom or a fluoroalkyl group, the other  of R $^{11 }$and R $^{12 }$represents a hydrogen atom or a mon› ovalent organic group different from the fluorine atom  and the fluoroalkyl group,  R$^{11 }$and R$^{12 }$may be each independently bonded to L$^{11 }$in  General Formula (Xl) to form a ring,  R$^{11 }$and R$^{12 }$may be bonded to each other to form a ring,  provided that the ring formed by the bonding of R  11  and  L $^{11 }$in General Formula (X 1) and the ring formed by the  bonding ofR $^{12 }$and L $^{11 }$in General Formula (X) include  no benzene ring, and  * represents a bonding position to L  11 ,  in General Formula (Y3), R$^{13 }$represents a monovalent  organic group,  provided that in a case where a group adjacent to a sulfur  atom in R$^{13 }$is a carbon atom, the carbon atom has no  fluorine atom as a substituent,  R$^{13 }$may be bonded to L 11  in General Formula (Xl) to  form a ring, and  * represents a bonding position to L11,  in General Formula (Y4), L$^{12 }$represents a single bond or  a divalent linking group,  R 14 , R 15 , and R $^{16 }$each independently represent a hydro› gen atom or a monovalent organic group,  provided that in a case where two of R 14 , R 15 , and R 16  represent a fluorine atom or a fluoroalkyl group, one of  R 14 , R 15 , and R 16  represents a hydrogen atom or a  monovalent organic group different from the fluorine  atom and the fluoroalkyl group,  R 14 , R 15 , and R $^{16 }$may be bonded to each other to form a  ring,  R 14 , R 15 , and R $^{16 }$may be each independently bonded to  L $^{12 }$to form a ring,  in a case where two of R 14 , R 15 , and R $^{16 }$each represent  a fluorine atom or a fluoroalkyl group, and a group  adjacent to an amido group in L $^{12 }$is a carbon atom, the  carbon atom does not have two or more fluorine atoms  and fluoroalkyl groups as a substituent,  R  14 , R  15 , and R  $^{16 }$may be each independently bond to L 11  in General Formula (Xl) to form a ring, and  * represents a bonding position to L  11 ,  in General Formula (Y5), L $^{13 }$represents a single bond or  a divalent linking group,  R 17 , R 18 , and R $^{19 }$each independently represent a hydro› gen atom or a monovalent organic group,  provided that in a case where two or more ofR 17 , R 18 , or  R 19  each represent a fluorine atom or a fluoroalkyl  group, and a group adjacent to a sulfonamido group in  L  13  is a carbon atom, the carbon atom does not have  two or more fluorine atoms and fluoroalkyl groups as a  substituent,  R 17 , R 18 , and R $^{19 }$may be bonded to each other to form a  ring, 