114  US 8,962,233 B2  113  Specific examples of the repeating units of the general  formula (III) and general formula (CII-AB) will be shown  below, which however in no way limit the scope of the present  invention. In the formulae, Ra represents H, CH$_{3}$ ,  CH$_{2}$OH,  CF$_{3 }$ orCN.  can be mentioned those similar to the repeating units having  an acid decomposable group set forth with respect to the resin  (B). The content ofrepeating units having a group (z) that is  decomposed by the action of an acid in the hydrophobic resin  (HR) is preferably in the range of 1 to 80 mo! %, more  preferably 10 to 80 mo!% and still more preferably 20 to 60  mo!% based on all the repeating units of the polymer.  The hydrophobic resin (HR) may further have any of the  repeating units of general formula (III) below.  In general formula (III),  Rc3$_{1 }$ represents a hydrogen atom, an alkyl group, an alkyl  group substituted with a fluorine atom, a cyano group or  -CH$_{2}$---0-Rac$_{2 }$ group, wherein Rac$_{2 }$ represents a hydrogen  atom, an alkyl group or an acyl group. Rc3$_{1 }$ is preferably a  hydrogen atom, a methyl group, a hydroxymethyl group or a  trifluoromethyl group, especially preferably a hydrogen atom  or a methyl group.  Rc3$_{2 }$ represents a group having any of an alkyl group, a  cycloalkyl group, an alkenyl group, a cycloalkenyl group and  an aryl group. These groups may optionally be substituted  with a fluorine atom or a silicon atom.  Lc3 represents a single bond or a bivalent connecting group.  In general formula (III), the alkyl group represented by  Rc3$_{2 }$is preferably a linear or branched alkyl group having 3 to  20 carbon atoms.  The cycloalkyl group is preferably a cycloalkyl group hav› ing 3 to 20 carbon atoms.  The alkenyl group is preferably an alkenyl group having 3  to 20 carbon atoms.  The cycloalkenyl group is preferably a cycloalkenyl group  having 3 to 20 carbon atoms.  The aryl group is preferably a phenyl group or a naphthyl  group having 6 to 20 carbon atoms. These groups may have a  substituent.  Preferably, Rc3$_{2 }$represents an unsubstituted alkyl group or  an alkyl group substituted with a fluorine atom.  The bivalent connecting group represented by Lc3 is pref› erably an alkylene group (preferably having 1 to 5 carbon  atoms), an oxy group, a phenylene group or an ester bond  (group of the formula -COO-).  Further, the hydrophobic resin (HR) may preferably have  any of the repeating units of general formula (CII-AB) below.  In the general formula (CII-AB),  each of Rell’ and Rc1$_{2}$ ,  independently represents a hydro› gen atom, a cyano group, a halogen atom or an alkyl group.  Zc’ represents an atomic group for forming an alicyclic  structure which contains two bonded carbon atoms (C-C).  (III)  (CII-AB)  Ra  Ra  ~ ~  6 CO  Ra  Ra  ~  ~  to  Ra  Ra  ~~  ¢  Ra  Ra  ~~  CY  Q 