256  US 9,557,643 B2  255  TABLE 2-continued  Resin  Composition  Mw  Mw/Mn  HR-74  100  13000  1.4  HR-75  70/30  8000  1.3  HR-76  50/40/10  9500  1.5  HR-77  100  9000  1.6  HR-78  80/20  3500  1.4  HR-79  90/8/2  13000  1.5  HR-80  85/10/5  5000  1.5  HR-81  80/18/2  6000  1.5  HR-82  50/20/30  5000  1.3  HR-83  90/10  8000  1.4  HR-84  100  9000  1.6  HR-85  80/20  15000  1.6  HR-86  70/30  4000  1.42  HR-87  60/40  8000  1.32  HR-88  100  3800  1.29  HR-89  100  6300  1.35  HR-90  50/40/10  8500  1.51  Specific examples of the compound represented by for› mula (BS-1) include tri-n-butylamine, tri-n-pentylamine,  tri-n-octylamine, tri-n-decylamine, triisodecylamine, dicy› clohexylmethylamine, tetradecylamine, pentadecylamine,  hexadecylamine, octadecylamine, didecylamine, methyloc› tadecy !amine,  dimethy lundecy !amine,  N,N-dimethy ldo› decy lamine, methyldioctadecylamine, N,N-dibutylaniline,  and N,N-dihexylaniline.  Also, one preferred embodiment is a compound where in  formula (BS-1), at least one R$_{651 }$ is an alkyl group substi› tuted with a hydroxyl group. Specific examples of the  compound include triethanolamine and N,N-dihydroxyeth› ylaniline.  The alkyl group as R$_{651 }$ may have an oxygen atom in the  alkyl chain to form an oxyalkylene chain. The oxyalkylene  chain is preferably ----CH$_{2}$CH$_{2}$ 0-. Specific examples  thereof include tris(methoxyethoxyethyl)amine and com› pounds exemplified in colunm 3, line 60 et seq. of U.S. Pat.  No. 6,040,112.  (2) Compound Having a Nitrogen-Containing Heterocyclic  Structure  The heterocyclic structure may or may not have aroma› ticity. Also, the heterocyclic structure may contain a plural- ity of nitrogen atoms and may further contain a heteroatom  other than nitrogen. Specific examples of the compound  include a compound having an imidazole structure (e.g.,  2-phenylbenzimidazole, 2,4,5-triphenylimidazole), a com› pound having a piperidine structure (e.g., N-hydroxyethyl- piperidine, bis(l ,2,2,6,6-pentamethyl-4-piperidyl)sebacate ),  a compound having a pyridine structure (e.g., 4-dimethyl› aminopyridine ), and a compound having an antipyrine struc› ture ( e.g., antipyrine, hydroxyantipyrine ).  A compound having two or more ring structures is also  suitably used. Specific examples thereof include 1,5-diaz› abicyclo[4.3.0]non-5-ene and 1,8-diazabicyclo[5.4.0]-un› dec-7-ene.  (3) Amine Compound Having a Phenoxy Group  The amine compound having a phenoxy group is a  compound where the alkyl group in an amine compound has  a phenoxy group at the terminal opposite the nitrogen atom.  The phenoxy group may have a substituent such as alkyl  group, alkoxy group, halogen atom, cyano group, nitro  group, carboxyl group, carboxylic acid ester group, sulfonic  acid ester group, aryl group, aralkyl group, acyloxy group  and aryloxy group.  A compound having at least one alkyleneoxy chain  between the phenoxy group and the nitrogen atom is pre› ferred. The number of alkyleneoxy chains per molecule is  preferably from 3 to 9, more preferably from 4 to 6. Among  alkyleneoxy chains, ----CH$_{2}$CH$_{2}$0- is preferred.  Specific examples of the compound include 2-[2-{2-(2,  2-dimethoxy-phenoxyethoxy )ethyl }-bis-(2-methoxyethyl) ]› amine and Compounds (Cl-1) to (C3-3) exemplified in  paragraph [0066] of U.S. Patent Application Publication No.  2007 /0224539Al.  ( 4) Ammonium Salt  An armnonium salt is also appropriately used. The salt is  preferably a hydroxide or a carboxylate. More specifically,  a tetraalkylammonium hydroxide typified by tetrabutylam› monium hydroxide is preferred. In addition, an armnonium  salt derived from amines of (1) to (3) above can be used.  Other examples of the basic compound which can be used  include compounds described in JP-A-2011-85926, com- pounds synthesized in Examples of JP-A-2002-363146, and  compounds described in paragraph 0108 of JP-A-2007- 298569.  The compound represented by formula (BS-1) is prefer› ably a compound where only one of three R$_{651 }$s 1s a  hydrogen atom or all R$_{651 }$s are not a hydrogen atom.  In the alkyl group, cycloalkyl group, aryl group or aralkyl  group as R$_{6}$su a hydrogen atom may be substituted for by a  substituent. Examples of the substituent include an alkyl  group, a cycloalkyl group, an aryl group, an aralkyl group,  a hydroxyl group, a carboxyl group, an alkoxy group, an  aryloxy group, an alkylcarbonyloxy group, and an alkyloxy› carbonyl group.  The carbon number of the aralkyl group as R$_{651 }$ is not  particularly limited but is usually from 7 to 20, preferably  from 7 to 11. Specific examples thereof include a benzyl  group.  The carbon number of the aryl group as R$_{651 }$ is not  particularly limited but is usually from 6 to 20, preferably  from 6 to 10. Specific examples thereof include a phenyl  group and a naphthyl group.  The carbon number of the cycloalkyl group as R$_{651 }$ is not  particularly limited but is usually from 3 to 20, preferably  from 5 to 15.  The carbon number of the alkyl group as R$_{651 }$ is not  particularly limited but is usually from 1 to 20, preferably  from 1 to 12.  In formula (BS-1 ), each R$_{651 }$ independently represents  any one of a hydrogen atom, an alkyl group (linear or  branched), a cycloalkyl group (monocyclic or polycyclic),  an aryl group and an aralkyl group. However, it does not  occur that three R$_{651 }$s all are a hydrogen atom.  [ 6] Basic Compound  The actinic ray-sensitive or radiation-sensitive resin com› position of the present invention preferably contains a basic  compound.  The basic compound is preferably a nitrogen-containing  organic basic compound.  The compound which can be used is not particularly  limited but, for example, compounds classified into the  following (1) to (4) are preferably used.  (1) Compound Represented by the Following Formula (BS- 1)  (BS-1) 