4  US 7,410,747 B2  3  (II)  (Ilb)  (Ild)  (Ile)  wherein  RII-l  and  RII_$_{2 }$ each independently represents an alkyl  group, a cycloalkyl group, a halogen atom, an aryl group, an  aralkyl group, an alkoxy group or an acyloxy group, and said  alkyl group and said aralkyl group each may have an inter- vening linking group represented by  -0-, -S-,  --CO$_{2}$-, --CO-, -S0 2 - or -SO-, and when p’ or t’  each represents an integer of 2 to 6 or 2 to 4, respectively, a  plurality ofRII-l s may be the same or difference, and whens’  or t’ represents an integer of 2 to 5 or 2 to 4, respectively, a  plurality  ofRII- 2 s  may be the same or difference, and a plu- rality  ofRII-I  s or a plurality ofRII_$_{2}$s may combine with each  other to form a ring structure,  L$_{1 }$ and L $_{2 }$each independently represents a single bond or a  divalent linking group,  X  1 , X 2  and X 3  each independently represents a hydrogen  atom or an organic group, and when r’ represents an integer of  2 to 5, a plurality ofX$^{1}$s may be the same or difference, and  when q’ represents an integer of 2 to 4, a plurality ofX $^{2}$s may  be the same or difference, and when q’ represents an integer of  2 to 4, a plurality ofX $^{3}$s may be the same or difference,  Y $_{2 }$ represents a divalent linking group, and  RII_$_{2 }$ and  Y $_{2 }$ may combine to form a ring structure,  Y $_{3 }$ and  Y $_{4 }$ each independently represents a linking group  represented by  ----CH$_{2}$ -,  ---0- or  -CH$_{2}$CH$_{2}$ -,  Y$_{5 }$ represents a linking group represented by ---0-,  -S-or  ----C(Rm)(Rn)-,  and  Rm  and  Rn  each independently  represents an alkyl group, a cycloalkyl group, a halogen atom,  an ary  1  group, an aralky  1  group, an alkoxy group or an acy loxy  group, and said alkyl group and said aralkyl group each may  have an intervening linking group represented by ---0-,  -S-, -CO$_{2}$-,  -CO-, -S0$_{2}$ - or -SO-,  u represents O or 1,  p’ represents an integer of O to 6,  (Ila)  wherein  X $^{1 }$and X$^{2 }$each independently represents a hydrogen atom  or an organic group, and when r represents an integer of 2 to  5, a plurality ofX$^{1}$s may be the same or difference, and when  q represents an integer of 2 to 4, a plurality ofX $^{2}$s may be the  same or difference,  A represents an atomic group of forming a ring structure by  combining with a carbon atom in the main chain,  L$_{0 }$each independently represents a single bond or a linking  group represented by  -CH$_{2}$ - or  ----CH$_{2}$CH$_{2}$ -,  L$_{1 }$and L$_{2 }$ each independently represents a single bond or a  divalent linking group, and when t represents an integer of 2  to 4, a plurality of L$_{1 }$s may be the same or difference, and  when q represents an integer of 2 to 4, a plurality ofL$_{2}$s may 40  be the same or difference,  p represents an integer of  O to 6,  q represents an integer of O to 4,  r represents an integer of O to 5,  s represents an integer of O to 5, provided that r+s is 5 or  less, and whenr ands each exists in a plural number, r’s or s’s  may be the same or different, and  t represents an integer of O to 4.  3. The positive resist composition as described in the item  2, wherein the repeating unit represented by formula (II) is a  repeating unit represented by any one of formulae (Ila) to  (Ile):  -continued  RII-l  and  RII_$_{2 }$ each independently represents an alkyl  group, a cycloalkyl group, a halogen atom, an aryl group, an  aralkyl group, an alkoxy group or an acyloxy group, and said  alkyl group and said aralkyl group each may have an inter› vening linking group represented by  -0-, -S-, 30  -CO$_{2}$-,  -CO-, -S0$_{2}$ - or -SO-, and when p repre› sents an integer of2 to 6, a plurality ofRII-l s maybe the same  or difference, and when s represents an integer of 2 to 5, a  plurality of RII_$_{2}$s may be the same or difference, and a plu› rality ofRII-l s or a plurality ofRII_$_{2}$s may combine with each  other to form a ring structure,  35