US 2015/0086912 Al  142  Mar. 26, 2015  (I)  RI  I  *---f-CH2-Ct-*  I  Ari  I  xi  I  LI  I  x2  I  r  z  2.  The actinic ray-sensitive or radiation-sensitive resm  composition as claimed in claim  1,  wherein each ofX$^{1 }$and X$^{2 }$is -0-.  3.  The actinic ray-sensitive or radiation-sensitive resm  composition as claimed in claim  1,  4.  The actinic ray-sensitive or radiation-sensitive resin  composition as claimed in claim  1,  5.  The actinic ray-sensitive or radiation-sensitive resin  composition as claimed in claim  4,  (c)  (II)  (b)  R41  I  -c-o-M $^{41}$-Q  H  wherein Ar$_{2 }$ represents a (p+l)-valent aromatic cyclic  group,  Y represents a hydrogen atom or a group capable ofleaving  by an action of an acid, and when a plurality ofY are  present, the plurality of Y may be the same with or  different from every other Y, provided that at least one of  Y’s represents a group capable ofleaving by the action  of an acid, and  p represents an integer of 1 or more.  6.  The actinic ray-sensitive or radiation-sensitive resin  composition as claimed in claim  5,  wherein Y in formula (b) is a group represented by the  following formula ( c ):  wherein R$^{1 }$represents a hydrogen atom, an alkyl group, a  monovalent aliphatic hydrocarbon cyclic group, a halo› gen atom, a cyano group, or an alkoxycarbonyl group,  each of Ar 1  and Ar 2  independently represents a divalent  aromatic cyclic group, or a group formed by combining  a divalent aromatic cyclic group and an alkylene group,  each of X 1  and X 2  independently represents -0- or  -S-,  L 1  represents an alkylene group, an alkenylene group, a  divalent aliphatic hydrocarbon cyclic group, a divalent  aromatic cyclic group, or a group formed by combining  two or more of these groups, two or more groups com› bined in the group formed by combining two or more of  these groups may be the same with or different from  each other, and two or more groups combined may be  linked via ---0- or -S- as a linking group; and  Z represents a site capable of becoming a sulfonic acid  group, an imidic acid group or a methide acid group  upon irradiation with an actinic ray or radiation.  wherein in formula (I), the number of atoms for constitut› ing the main structure of the alkylene group, the anke› nylene group, the divalent aliphatic hydrocarbon cyclic  group, the divalent aromatic cyclic group, or the group  formed by combining two or more of these groups rep› resented by L$_{1 }$ in formula (I) is 2 to 7.  wherein the resin (P) is a resin further having (B) a repeat› ing unit having a group capable of decomposing by an  action of an acid to generate a polar group.  wherein the repeating unit (B) is a repeating unit repre› sented by the following formula (b ):  wherein each ofRs$_{1}$ ,  Rs$_{2 }$ and Rs$_{3 }$ independently represents  a hydrogen atom, an alkyl group, a cycloalkyl group, a  halogen atom, a cyano group, or an alkoxycarbonyl  group,  Rs$_{2 }$and Ls may be bonded to each other to form a ring, and  Rs$_{2 }$ represents an alkylene group in that case,  Ls represents a single bond or a divalent linking group, and  Ls represents a trivalent linking group when Ls is  bonded to Rs$_{2 }$ to form a ring,  R$_{111 }$represents a hydrogen atom or an alkyl group,  R$_{112 }$ represents a hydrogen atom, an alkyl group, a  cycloalkyl group, an aryl group, an aralkyl group, an  alkoxy group, an acyl group, or a heterocyclic group,  M$^{1 }$represents a single bond or a divalent linking group,  Q$^{1 }$represents an alkyl group, a cycloalkyl group, an aryl  group, or a heterocyclic group,  Q1,  M$^{1 }$and R$_{112 }$may be  bonded to each other to form a ring,  when M$^{1 }$represents a divalent linking group, Q$^{1 }$may be  bonded to M 1  via a single bond or a different linking  group to form a ring.  wherein R$^{41 }$represents a hydrogen atom, an alkyl group, a  cycloalkyl group, an aryl group, or an aralkyl group,  M$^{41 }$represents a single bond or a divalent linking group,  Q represents an alkyl group, an alicyclic group, or an  aromatic cyclic group which may contain a heteroatom,  and at least two ofR 41 , M $^{41 }$and Q may be bonded to each  other to form a ring.  wherein the repeating unit (B) is a repeating unit repre› sented by the following formula (II):  7.  The actinic ray-sensitive or radiation-sensitive resin  composition as claimed in claim  4, 