US 9,291,896 B2  241  242  -continued  TABLE I-continued  [Hydrophobic Resin (HR)]  [Photoacid Generator]  [Basic Compound]  As the hydrophobic resin (HR), Resins (HR-1), (HR-24)  and (HR-29) were used. Polymer structures of respective  hydrophobic resins (HR) are illustrated above as specific  examples. Also, the compositional ratio in Table 2 below  corresponds to the compositional ratio (mo! % ) of respective  repeating units starting from the left in each of polymer struc› tures illustrated above.  As the photoacid generator, the compounds illustrated  above as specific examples were appropriately selected and  used.  As the basic compound, any one of the following com- pounds (N-1) to (N-12) was used.  TABLE2  Weight  Average  Molecular  Poly- Resin  Weight  Compositional Ratio  dispersity  P-19  8000  72  P-20  16500  72  P-21  9000  40  P-22  5000  30  P-23  10000  50  P-24  5000  30  P-26  15000  20  P-29  10000  45  P-31  18000  40  P-34  8000  35  P-35  12000  25  P-38  9000  40  Ab’-1  6400  25  Ab’-2  6300  25  Ab’-3  7500  72  Ab’-4  16100  72  13  14  60  70  50  55  70  52  40  55  60  10  45  45  13  14  15  14  15  10  3  20  10  15  50  30  30  15  14  1.59  1.65  1.42  1.48  1.46  1.52  1.65  1.58  1.54  1.55  1.60  1.62  1.55  1.50  1.58  1.63  Weight Average  Compositional  Poly- Molecular Weight  Ratio  dispersity  HR-1  10000  85  15  1.51  HR-24  5000  50  50  1.60  HR-29  12000  5  95  1.55  N-1  HO~N~OH  ¢  N-2  N-3  N-4  N-5  N-6  N-7  [o/’-.-..../OH  /O~N~ O /’-.-..../0H  N-8  Q  rN,1_ND  0~  H  N-9 