US 9,612,535 B2  130  129  -continued  0  F  O=~~  I  F  0N  \  F  O=S  II  F  O  F  CH3  I  ~C:x  ~CH¢c;H~  ¢  ~  102  S02  S02  ~I  OCH3  ~CH9  0  I  :$s:  F  F  F  F  O=S=O  I  0  I  O"’  -continued 