US 2020/0401045 Al  23  Dec. 24, 2020  -continued  X  OH  X  X  $  CN  [0256]  In addition to these, specific examples of the  repeating unit D include the repeating units disclosed in  paragraphs [0415] to [0433] of the specification ofUS2016/  0070167Al.  [0257]  The resin (AXl) may have the repeating unit D  singly or in combination or two or more kinds thereof.  [0258]  A content of the repeating unit D (in a case where  the repeating units D are present in a plural number, a total  content thereof) is preferably 5% to 60% by mole with  respect to all the repeating units in the resin (AXl).  [0259]  •  Repeating Unit E  [0260]  The resin (AXl) preferably further includes a  repeating unit (hereinafter also referred to as a "repeat› ing unit E") having a fluorine atom or an iodine atom.  Further, the repeating unit E does not include the  above-mentioned repeating unit A, repeating unit B,  repeating unit C, and repeating unit D. Particularly, in  a case of pattern formation by EUV exposure, it is  preferable that the resin (AXl) includes the repeating  unit E.  [0261]  Specific examples of a monomer corresponding to  the repeating unit E are shown below, but the present  invention is not limited to these specific examples.  F  F  F  -continued  F  [0262]  •  Repeating Unit F  [0263]  The resin (AXl) further contains a repeating unit  (hereinafter also referred to as a "repeating unit F")  other than the above-described repeating unit A, repeat› ing unit B, repeating unit C, repeating unit D, and  repeating unit E.  [0264]  The repeating unit F preferably has an alicyclic  hydrocarbon structure. Examples of the repeating unit  F include the repeating units described in paragraphs  [0236] and [0237] of the specification of US2016/  0026083Al.  [0265]  Preferred examples of a monomer corresponding  to the repeating unit F are shown below. 