US 9,612,535 B2  328  327  -continued  ~j)i  (PA-99)  (PA-100)  (PA-101)  (PA-102)  In addition, in the present invention, the compound (PA)  may be appropriately selected other than the compound that  generates the compound represented by Formula (PA-1 ). For  example, as an ionic compound, the compound having a  proton acceptor moiety may be used in a cation moiety.  More specifically, the compound represented by the follow› ing Formula (7) will be exemplified.  preferably 0.1 to 10% by mass, and more preferably 1 to 8%  by mass, based on the total solid content of the composition.  (6) Guanidine Compound  The composition of the present invention may further  have the guanidine compound having the structure repre› sented by the following Formula.  Since the guanidine compound in which a positive charge  of a conjugate acid is dispersed and stabilized by three kinds  of nitrogen, it shows a strong basicity.  As the basicity of the guanidine compound (A) of the  present invention, pKa of the conjugate acid is preferably  6.0 or more, and more preferably 7 .0 to 20.0 in the view that  the neutralizing reactivity with an acid is high and the  roughness characteristics are excellent, and more preferably  8.0 to 16.0.  Because of such a strong basicity, the diffusion of an acid  is suppressed, which can contribute to the formation of good  pattern shape.  In addition, here "pKa" indicates pKa in an aqueous  solution, and, for example, indicates those described in  chemical handbook (II) (Revised Fourth Edition, 1993, the  Chemical Society of Japan, Maruzen Co. Ltd.). The lower  the value indicates, the larger the acid strength is. pKa in an  aqueous solution can be specifically measured by measuring  In the composition of the present invention, the blending  ratio of the compound (PA) in the entire composition is  Specific examples of the proton-accepting functional  group that  RN  has are the same as the proton-accepting  functional group described in Formula (PA-1).  Specific examples of the aryl group of R and  RN  prefer› ably include a phenyl group.  Specific examples of  x- may include the same as x- in t  Formula (ZI).  x- represents a counter anion.  RN  represents an aryl group substituted with proton› accepting functional group.  R represents an aryl group.  M represents 1 or 2, and n represents 1 or 2. However,  when A is a sulfur atom, m+n=3, and when A is an iodine  atom, m+n=2.  In the formula, A represents a sulfur atom or an iodine 50  atom.  (7) 