US 10,054,853 B2  Aug. 21, 2018  U.S. Patent  FIG.1A  FIG.1B  FIG.1C  RESIST COATING  -----40  -----30  ..,.__,__-.,,_,.__.......,_........,_,.__,....,.,_,_...-,-,..._,_.__..._.,.,......_,,  -~-20  -- ------10  EXPOSURE  t +  +  ♦  f-----50  -~40  -30  -~20  -- --10  ORGANIC SOLVENT DEVELOPMENT 