US 20190041751Al  c19)  United States  c12)  Patent Application Publication  Cui et al.  c10)  Pub. No.: US 2019/0041751 Al  (43)  Pub. Date:  Feb. 7, 2019  (54)  SILICON-CONTAINING UNDERLAYERS  (71)  Applicant:  Rohm and Haas Electronic Materials  LLC,  Marlborough, MA (US)  (72)  Inventors:  Li Cui,  Westborough, MA (US);  Paul  J. LaBeaume,  Auburn, MA (US);  James  F.  Cameron,  Brookline, MA  (US);  Charlotte A. Cutler,  Hopkinton,  MA (US);  Shintaro Yamada,  Shrewsbury, MA (US);  Suzanne M.  Coley,  Mansfield, MA (US);  Iou-Sheng  Ke,  Andover, MA (US)  (51)  Int. Cl.  (52)  U.S. Cl.  CPC ..............  G03F  7111  (2013.01);  C08F 230/08  (2013.01);  C09D  143104  (2013.01);  G03F  71162  (2013.01);  G03F  7140  (2013.01);  G03F  71322  (2013.01);  G03F  71422  (2013.01);  G03F  71168  (2013.01);  G03F  712002  (2013.01)  (21)  Appl. No.:  16/022,874  (22)  Filed:  Jun. 29, 2018  (60)  Provisional application No. 62/541,139, filed on Aug.  4, 2017.  (57)  ABSTRACT  Related U.S. Application Data  Publication Classification  G03F  7111  C08F 230/08  C09D  143104  G03F  7116  G03F  7120  G03F  7132  G03F  7142  G03F  7140  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  Methods of manufacturing electronic devices employing  wet-strippable underlayer compositions comprising one or  more condensed polymers having an organic polymer chain  having pendently-bound moieties having an acidic proton  and a pKa in water from -5 to 13 and having pendently› bound siloxane moieties are provided. 