Mar. 26, 2015  139  US 2015/0086912 Al  TABLE 3-continued  Results of evaluations ofEUV exposure/alkali development  Acid  Resin  Concen- Concen- Generator  Concen- Concen- Example  of the  tration  Hydrophobic  tration  for Use in  tration  Basic  tration  Organic  Mass  No.  Invention  (wt%)  Resin (HR)  (wt%)  Combination  (wt%)  Compound  (wt%)  Solvent  Ratio  Example48  P-1  97.95  None  None  TBAB  2  Sl/S2  40/60  Example49  P-1  92.95  HHR-4  5  None  TBAH  2  Sl/S2  40/60  Example 50  P-2  97.95  None  None  TBAH  2  Sl/S2  40/60  Example 51  P-2  92.95  HHR-1  5  None  TPI  2  Sl/S2  40/60  Example 52  P-20  97.95  None  None  TBAB  2  Sl/S2  40/60  Example 53  P-20  94.95  HHR-4  3  None  TBAB  2  Sl/S2  40/60  Example 54  P-21  97.95  None  None  TBAH  2  Sl/S2  40/60  Example 55  P-21  92.95  HHR-1  5  None  TBAH  2  Sl/S2  40/60  Example 56  P-22  96.95  None  None  TBAB  3  Sl/S2  40/60  Example 57  P-22  93.95  HHR-2  4  None  TBAH  2  Sl/S2  40/60  Example 58  P-23  97.95  None  None  TPI  2  Sl/S2  40/60  Example 59  P-24  82.95  HHR-3  3  PAG-2  10  TPI  4  Sl/S2  40/60  Example 60  P-25  96.95  None  None  TBAB  3  Sl/S2  40/60  Concentration  Concen- of All the  Example  tration  Solid Content  Resolution  Senstivity  LER  Pattern  Outgas  No.  Surfactant  (wt%)  (wt%)  (nm)  (mJ/cm 2 )  (nm)  Form  Collapse Performance  Example 48  W-1  0.05  4.0  25  25.5  5.0  Rectangle  A  3.5  Example 49  W-1  0.05  4.0  30  26.0  5.5  Rectangle  A  2.5  Example 50  W-2  0.05  4.0  30  28.5  6.5  Rectangle  A  4.0  Example 51  W-1  0.05  4.0  35  28.3  5.0  Rectangle  A  3.5  Example 52  W-2  0.05  4.0  25  24.5  6.5  Rectangle  A  3.0  Example 53  W-1  0.05  4.0  30  25.5  7.0  Rectangle  A  2.2  Example 54  W-1  0.05  4.0  25  25.0  6.5  Rectangle  A  2.1  Example 55  W-1  0.05  4.0  30  25.0  5.5  Rectangle  A  2.0  Example 56  None  0.05  4.0  35  24.5  6.0  Rectangle  A  3.5  Example 57  W-1  0.05  4.0  35  25.5  8.0  Rectangle  A  3.3  Example 58  W-1  0.05  4.0  35  25.3  8.0  Rectangle  A  1.5  Example 59  W-1  0.05  4.0  40  27.0  7.5  Rectangle  A  4.5  Example 60  W-1  0.05  4.0  35  27.5  7.5  Rectangle  A  4.8  Hydro- Acid  Concen- phobic  Concen- Generator  Concen- Concen- Example  tration  Resin  tration  for Use in  tration  Basic  tration  Organic  Mass  No.  Resin  (wt%)  (HR)  (wt%)  Combination  (wt%)  Compound  (wt%)  Solvent  Ratio  Example 61  P-1  97.95  None  None  TBAH  2  Sl/S2  40/60  Example 62  P-1  87.95  HHR-4  3  PAG-2  5  TBAH  4  Sl/S2  40/60  Example 63  P-2  97.95  None  None  TBAB  2  Sl/S2  40/60  Example 64  P-3  97.95  None  None  TBAB  2  Sl/S2  40/60  Example 65  P-3  91.95  HHR-1  5  None  TPI  3  Sl/S2  40/60  Example 66  P-11  95.95  None  None  TBAH  4  Sl/S2  40/60  Example 67  P-13  97.95  None  None  TBAB  2  Sl/S3  40/60  Example 68  P-20  97.95  None  None  TBAH  2  Sl/S2  40/60  Example 69  P-21  97.95  None  None  TPI  2  Sl/S2  40/60  Example 70  P-22  87.95  HHR-2  10  None  TBAB  2  Sl/S2/S4  30/60/10  Example 71  P-24  97.95  None  None  TPI  2  Sl/S2  40/60  Example 72  P-25  97.95  None  None  TBAB  2  Sl/S2  40/60  Example 73  P-26  97.95  None  None  TBAH  2  Sl/S2  40/60  Example 74  P-27  90.95  HHR-4  5  None  TPI  4  Sl/S2  40/60  Example 75  P-28  97.95  None  None  TBAH  2  Sl/S2  40/60  Example 76  P-29  87.95  HHR-4  5  PAG-1  5  TBAB  2  Sl/S2  40/60  Comparative  P-15  77.95  None  PAG-2  20  TBAH  2  Sl/S2  40/60  Example 9  Comparative  P-16  97.95  None  None  TBAH  2  Sl/S2  40/60  Example 10  Comparative  P-17  97.95  None  None  TPI  2  Sl/S2  40/60  Example 11  Comparative  P-18  97.95  None  None  TBAB  2  Sl/S2  40/60  Example 12  TABLE4  Results of evaluations of EB exposure/organic solvent development  The concentration of each component shows the concentration(% by mass) in concentration of the entire solid content. 