US 2019/0235380 Al  24  Aug. 1, 2019  (bl-2)  (bl-1)  [0255]  In a case where an ether bond or an ester bond is  included as a substituent, the substituent may be bonded via  an alkylene group, and a linking group represented by any  of Formulae (y-al-1) to (y-al-7) is preferable as the sub› stituent in this case.  [0247]  As the component (IO), a cationic polymerization  initiator that generates an acid with a pKa of preferably -3  or greater, more preferably  O  or greater, and still more  preferably 1 or greater is exemplified. Among the examples,  an onium salt compound that does not have a halogen atom  in the anion moiety thereof is preferable. By using the  compound (IO) that does not have a halogen atom in the  anion moiety thereof, the amount of gas to be generated  [0246]  By using a combination with the component (IO),  the sensitivity during pattern formation does not become  extremely high and a pattern having high resolution can be  formed.  [0254]  Among these, it is preferable that R$^{611 }$represent an  aromatic hydrocarbon group which may have a substituent  other than a halogen atom, an aliphatic cyclic group which  may have a substituent other than a halogen atom, and a  chain alkyl group which may have a substituent other than  a halogen atom. Examples of the substituents which may be  included in these groups include a hydroxyl group, an oxo  group, an alkyl group, an aryl group, a lactone-containing  cyclic group, an ether bond, an ester bond, and a combina› tion of these.  [0253]  The expression "may have a substituent other than  a halogen atom" here excludes not only a case of having a  substituent formed of only a halogen atom but also a case of  having a substituent having even one halogen atom (for  example, a case where the substituent is a fluorinated alkyl  group).  [0245]  The photosensitive composition of the embodiment  may contain a cationic polymerization initiator (hereinafter,  referred to as a component (IO)) that does not correspond to  the component  (I).  [0244]  <<Cationic Polymerization Initiator (IO)>>  [0243]  In a case where the content of the silane coupling  agent is in the above-described preferable range, the hard› ness of the cured film is further increased. In addition, the  adhesiveness between the cured film and the support 1s  further improved.  [0242]  The content of the silane coupling agent is prefer› ably in a range of 2.5 to 20 parts by mass, more preferably  in a range of3 to 15 parts by mass, and still more preferably  in a range of3 to 10 parts by mass with respect to 100 parts  by mass of the component (A).  [0241]  The silane coupling agent may be used alone or in  a combination of two or more kinds thereof.  [0252]  In Formula (bl-1), R$^{611 }$represents a cyclic group  which may have a substituent other than a halogen atom, a  cyclic alkyl group which may have a substituent other than  a halogen atom, or a cyclic alkenyl group which may have  a substituent other than a halogen atom, and examples  thereof include those that do not have substituents and those  having substituents other than halogen atoms, among the  cyclic group, the cyclic alkyl group, and the cyclic alkenyl  group in the description of R 1201  above.  [0240]  Examples of the silane coupling agent include  silane coupling agents having reactive substituents such as a  carboxy group, a methacryloyl group, an isocyanate group,  and an epoxy group. Specific examples thereof include  trimethoxysilylbenzoic  acid,  y-methacryloxypropylt› rimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysi› lane, y-glycidoxypropyltrimethoxysilane, and ~-(3,4-epoxy› cyclohexyl)ethyltrimethoxysilane.  [0249]  [In the formulae, R$^{611 }$and R$^{612 }$represent a cyclic  group which may have a substituent other than a halogen  atom, a cyclic alkyl group which may have a substituent  other than a halogen atom, or a cyclic alkenyl group which  may have a substituent other than a halogen atom. m  represents an integer of 1 or greater, and Mm+,s each  independently represent an m-valent organic cation.]  [0250]  {  Component (b 1-1)}  [0251]  Anion Moiety  [0239]  The photosensitive composition of the embodiment  may further contain an adhesion assistant in order to  improve the adhesiveness to the support. As this adhesion  assistant, a silane coupling agent is preferable.  [0238]  <<Silane Coupling Agent>>  [0237]  As desired, other miscible additives such as addi› tive resins, dissolution inhibitors, basic compounds, plasti› cizers, stabilizers, colorants, and halation preventing agents  used to improve the performance of the film can be added to  the photosensitive composition of the embodiment as appro› priate.  [0236]  The photosensitive composition of the present  embodiment may contain components other than the com› ponent (A), the component  (I), and the component (M) as  necessary.  [0235]  <Other Components>  [0234]  In a case where the content of the component (A)  is in the above-described preferable range, the sensitivity is  further increased, and a pattern having an excellent shape  and high resolution is easily obtained.  [0248]  As the component (IO), one or more compounds  selected from the group consisting of a compound repre› sented by Formula (bl-1) (hereinafter, referred to as a  "component (bl-1)") and a compound represented by For› mula (bl-2) (hereinafter, referred to as a "component (bl- 2)") are preferable.  ( degassing) is more likely to be reduced. The upper limit of  the pKa of the acid generated from the compound (IO) is  preferably 5 or less.  of70% to 85% by mass, and still more preferably in a range  of 7 5% to 85% by mass with respect to the total content of  the component (A), the component (I), and the component  (M) in the photosensitive composition of the present  embodiment.  Rbl2_so’r  (MmfiJ11m 