19  US 7,649,118 B2  20  In this preparation process, X $^{3 }$in the starting material of the  formula (3) is a moiety of ketone structure and may be a  fluorine-containing ketone:  In the norbomene backbone, one X may be present or a  plurality of the same or different X bonded to each other may  be present.  Y may be replaced with H, F, Cl, an alkyl group or a  fluorine-containing alkyl group, and it is particularly prefer- able that Y is replaced with F or a fluorine-containing alkyl  group because transparency can be enhanced in case of use  for a resist.  Examples of preferred norbomene derivative to be used as  a starting material (formula  (1))  are as follows.  obtained by the above-mentioned first preparation process, or  may be a fluorine-containing ketone:  obtained by other preparation process. Also X $^{3 }$may be a  hydrocarbon type ketone structure:  having no fluorine or may be aldehyde:  The second preparation process of the present invention  relates to the process for preparing the fluorine-containing  norbornene 20 derivative having a fluorine-containing ter› tiary alcohol structure represented by the formula (  4):  Y is selected from H or the above-mentioned substituent Y  and there are preferably the same examples as those of the  above-mentioned  Y.  Examples of preferred derivative having a fluorine-con- taining ketone structure:  which is used as the starting material (formula (3)) are the  same as those of the norbomene derivative having a fluorine- containing ketone structure obtained by the above-mentioned  preparation process.  According to the preparation process of the present inven› tion, a moiety of fluorine-containing tertiary alcohol:  by reacting the norbornene derivative having a ketone struc› ture represented by the formula (3):  corresponding to the reacted fluoroalkylation agent (Rf 2 )  can  be introduced to the norbomene derivative of a starting mate- rial.  Concretely there can be obtained the following norbornene  derivatives:  with a fluoroalkylation agent (Rf2).  0  II  Rf-C- 0  II  H-C- H  H  H  H  n  R  Y\..__/~  R  (Y)m  (Z$^{1}$)nl  H  H  H  H  n  R  Y\..__/~  R  (Y)m  (X $^{3}$)nl 