US 2019/0235380 Al  23  Aug. 1, 2019  -continued  (11-2)  (12-1)  [0228]  The component  (I)  may be used alone or in a  combination of two or more kinds thereof.  [0229]  The content of the component  (I)  is preferably in a  range of 1.2 to 6.0 parts by mass, more preferably in a range  of 1.3 to 4.8 parts by mass, and still more preferably in a  range of 1.4 to 3.6 parts by mass with respect to 100 parts  by mass of the component (A).  (11-3)  [0230]  In a case where the content of the component (A)  is greater than or equal to the lower limit of the above› described preferable range, sufficient sensitivity is obtained,  and lithography characteristics of the pattern are further  improved. In addition, the hardness of the cured film is  further increased. Further, in a case where the content of the  component (A) is lower than or equal to the upper limit of  the above-described preferable range, the sensitivity is  appropriately controlled, and a pattern having an excellent  shape is easily obtained.  [0231]  Further, the content of the component  (I)  is pref› erably in a range of 1 to 5 parts by mass, more preferably in  a range of 1.1 to 4 parts by mass, and still more preferably  in a range of 1.2 to 3 parts by mass with respect to 100 parts  by mass which is the total amount of the component (A) and  the component (M).  [0232]  In a case where the content of the component  (I)  is  in the above-described preferable range, the hardness of the  cured film is further improved, and a pattern having an  excellent shape and high resolution is easily formed.  [0233]  The content of the component (A) is preferably in  a range of 70% to 90% by mass, more preferably in a range  F  F  F  F  F  F  F  II  ’\\  F  F  - F  ’/-~  Be  \_  j  F  F  F  F  F  F  F  F  F  -continued  F  F  F  F  F  F  F  II  ’\\  F  F  - F  ’/- ~  Be  \_  j  F  F  F  F  F  F  F  F  F  0  F  F  F  F  F  F  F  II  ’\\  F  F  - F  ’/- ~  Be  \_  j  F  F  F  F  F  F  F  F  F 