4  US 9,829,796 B2  3  composition, (2) exposing the film to active light or radiation  and (3) developing the exposed film using a developer  including an organic solvent, in which the active light› sensitive or radiation-sensitive resin composition contains a  resin (A) having a repeating unit represented by General  Formula (I), a repeating unit represented by any one of  General Formulas (II) to (IV), and a repeating unit repre› sented by General Formula (V).  group, a halogen atom, a cyano group, or an alkoxycarbonyl  group. Here, R$_{62 }$may be bonded to Ar$_{6 }$ to form a ring, and  R$_{62 }$ in this case represents a single bond or an alkylene  group.  X$_{6 }$ represents  a  single  bond,  --COO-, or  ----CONR$_{64}$-. R$_{64 }$represents a hydrogen atom or an alkyl  group. L$_{6 }$ represents a single bond or an alkylene group. Ar$_{6 }$ represents a divalent aromatic ring group, and, in the case of  being bonded to R$_{62 }$ to form a ring, represents a trivalent  aromatic ring group. Y $_{2 }$represents a group leaving due to the  action of an acid.  In Formula (III), each ofR$_{51}$, R 52 , and R $_{53 }$independently  represents a hydrogen atom, an alkyl group, a cycloalkyl  group, a halogen atom, a cyano group, or an alkoxycarbonyl  group. R$_{52 }$may be bonded to L$_{4 }$ to form a ring, and R$_{52 }$in  this case represents an alkylene group. L$_{5 }$ represents a single  bond or a divalent connecting group, and in the case of being  bonded to R$_{52 }$to form a ring, represents a trivalent connect› ing group. R$_{54 }$represents an alkyl group, and each ofR$_{55 }$and  R$_{56 }$ independently represents a hydrogen atom, an alkyl  group, a cycloalkyl group, an aryl group, or an aralkyl group.  R 55  to R$^{56 }$may be bonded to each other to form a ring.  However, R$_{55 }$ and R$_{56 }$do not represent a hydrogen atom at  the same time in any case.  In General Formula (I), each of R$_{41}$ , R 42 , and R $_{43 }$inde› pendently represents a hydrogen atom, an alkyl group, a  halogen atom, a cyano group, or an alkoxycarbonyl group.  Here, R$_{42 }$may be bonded to Ar$_{4 }$ to form a ring, and R$_{42 }$in 25  this case represents a single bond or an alkylene group. X$_{4 }$ represents a single bond, -COO-, or ----CONR$_{44}$-, and,  in the case of forming a ring with R$_{42}$, represents a trivalent  connecting group. R$_{44 }$ represents a hydrogen atom or an  alkyl group. L$_{4 }$ represents a single bond or an alkylene  group. Ar$_{4 }$ represents an (n+l) valent aromatic ring group,  and, in the case of being bonded to R$_{42 }$ to form a ring,  represents an (n+2) valent aromatic ring group. n represents  an integer of 1 to 4.  In Formula (IV), each of Rm R$_{72}$, and R$_{73 }$independently  represents a hydrogen atom, an alkyl group, a cycloalkyl  group, a halogen atom, a cyano group, or an alkoxycarbonyl  group. R$_{72 }$may be bonded to L$_{4 }$ to form a ring, and R$_{72 }$in  this case represents an alkylene group. L$_{7 }$ represents a single  bond or a divalent connecting group, and in the case of  forming a ring with R$_{72}$, represents a trivalent connecting  group. R$_{74 }$ represents a hydrogen atom, an alkyl group, a  cycloalkyl group, an aryl group, an aralkyl group, an alkoxy  group, an acyl group, or a heterocyclic group. M$_{4 }$ represents  a single bond or a divalent connecting group. Q$_{4 }$ represents  an alkyl group, a cycloalkyl group, an aryl group, or a  heterocyclic group. At least two of Q$_{4}$ ,  M$_{4}$ ,  and R$_{74 }$may be  bonded to each other to form a ring.  In Formula (V), each of Rgi, Rg$_{2}$ ,  and Rg$_{3 }$ independently  represents a hydrogen atom, an alkyl group, a cycloalkyl  group, a halogen atom, a cyano group, or an alkoxycarbonyl  group. Here, Rg$_{2 }$ may be bonded to Lg to form a ring, and  Rg$_{2 }$ in this case represents a single bond or an alkylene  group. Xg represents a single bond or a divalent connecting  group. Lg represents a single bond or an (s+l) valent  connecting group, and in the case of being bonded to Rg$_{2 }$ to  form a ring, represents a trivalent connecting group. s  represents an integer of 1 to 5. Here, in a case where Lg is  a single bond, s is 1. Bg represents a group containing a  cross-linking group.  [2]  The pattern formation method according to [1], in which  the cross-linking group included in Bg in General Formula  (V) is a hydroxymethyl group, an alkoxymethyl group, an  oxirane ring, or an oxetane ring.  In Formula (II), each of R$_{6}$ i, R$_{62}$, and R$_{63 }$independently  represents a hydrogen atom, an alkyl group, a cycloalkyl  (IV)  (III)  (II)  ~I ~3  I  I  --+c-c.,---- 1  I  ~2  Xi  I  L4  I  Ar4  I  (OH)n  (I)  (V)  Rs1  Rs3  I  I  --+c-c.,---- 1  I  Rs2 Xs  I  Ls  I  (Bs), 