Jul.  18,  2019  74  US 2019/0219920 Al  [Chemical Formula 69]  [0729]  (B)-1: A compound (acid generator) represented by  chemical formula (B-1) shown below.  [0730]  (D)-1: A compound (diffusion control agent) rep› resented by chemical formula (D-1) shown below.  [0728]  (A2)-4:  Polymeric  compound represented by  chemical formula (A2-4) shown below. The weight average  molecular weight (Mw) and the dispersity (Mw/Mn) in  terms of the polystyrene equivalent value measured by gel  permeation chromatography (GPC) were 6,500 and 1.52,  respectively. The composition of the copolymer (ratio (mo› lar ratio) of the respective structural units within the struc› tural formula) as determined by $^{13}$C-NMR was l/rn/n/o=3/  1/5/1.  [0731]  (F)-1: fluorine-containing polymeric compound  represented by chemical formula (F-1) below. The weight  average molecular weight (Mw) and the dispersity (Mw/Mn)  in terms of the polystyrene equivalent value measured by gel  permeation chromatography (GPC) were 15,500 and 1.67,  respectively. The composition of the copolymer (ratio (mo› lar ratio) of the respective structural units within the struc› tural formula) as determined by $^{13}$C-NMR was l/m=5/5.  [0732]  (S)-1: a mixed solvent of propylene glycol monom› ethyl ether acetate/propylene glycol monomethyl ether/cy› clohexanone=45/30/25 (weight ratio)  [Chemical Formula 70]  [Chemical Formula 71]  (B-1)  (D-1)  (A2-4)  (A2-3)  -continued 