(IO)  Patent No.:  US 7,511,179 B2  (45)  Date of Patent:  Mar.31,2009  c12)  United States Patent  Araki et al.  (54)  FLUORINE-CONTAINING POLYMER,  RESIST COMPOSITION PREPARED FROM  SAME AND NOVEL  FLUORINE-CONTAINING MONOMER  (75)  Inventors:  TakayukiAraki,  Settsu (JP);  Takuji  Ishikawa,  Settsu (JP);  Meiten Koh,  Settsu (JP)  (73)  Assignee:  Daikin Industries, Ltd.,  Osaka (JP)  ( *)  Notice:  Subject to any disclaimer, the term ofthis  patent is extended or adjusted under 35  U.S.C. 154(b) by 255 days.  (21)  Appl. No.:  11/438,669  (22)  Filed:  May 17, 2006  (51)  Int. Cl.  (52)  U.S. Cl.  .......................  570/123;  570/124; 570/126;  430/270.1; 430/907  (58)  Field of Classification Search  ....................... None  See application file for complete search history.  U.S. PATENT DOCUMENTS  (56)  References Cited  FOREIGN PATENT DOCUMENTS  OTHER PUBLICATIONS  (57)  ABSTRACT  5 Claims, 1 Drawing Sheet  (30)  Foreign Application Priority Data  Related U.S. Application Data  (65)  Prior Publication Data  US 2006/0251991 Al  Nov. 9, 2006  (60)  Division of application No. 10/815,801, filed on Apr.  2, 2004, now Pat. No. 7,115,690, which is a continua› tion-in-part of application No. PCT/JP02/10242, filed  on Oct. 2, 2002.  Oct. 3, 2001  Feb.28,2002  (JP)  ............................. 2001-307823  (JP)  ............................... 2002-54964  C07C 23108  (2006.01)  G03C 11675  (2006.01)  G03F 71028  (2006.01)  G03F 71038  (2006.01)  JP  JP  10-231329 A  2001-356480 A  9/1998  12/2001  wherein  Z $^{3 }$are the same or different and each is  -R:F-Z 4 , in  which Z 4  is at least one functional group selected from the  group consisting of OH group, COOH group, a derivative of  carboxylic acid group and a functional group protected by a  protective group which can convert the functional group to  OH group by reaction with an acid; Rf $^{3 }$is a fluorine-contain› ing alkylene group which has 1 to 30 carbon atoms and may  have ether bond;  nll  is an integer of from 1 to 4.  A fluorine-containing unsaturated cyclic compound repre› sented by the formula (l)(a):  Primary Examiner-Sin  J. Lee  (74)  Attorney, Agent, or Firm-Sughrue  Mion, PLLC  * cited by examiner  International Search Report for PCT/JP02/10242 dated Jan. 21, 2003.  English translation of JP 10-231239.  3,393,993 A  *  7/1968 Gilbert et al. ............... 504/353  (!)(a)  US007511179B2 