US 10,175,578 B2  132  131  TABLE 2  -continued  <Photoacid Generator>  Bl  B2  B3  B7  B6  BS  B4  Acid-decomposable  Compositional  resin  ratio (% by mole)  Mw  Mw/Mn  Resin (1)  40  50  10  9,500  1.62  Resin (2)  40  40  20  17,000  1.70  Resin (3)  45  5  50  11,000  1.63  Resin (4)  40  60  15,000  1.66  Resin (5)  40  40  10  10  10,500  1.62  Resin (6)  40  50  10  15,500  1.68  Resin (7)  40  60  11,000  1.65  Resin (8)  40  40  20  10,000  1.64  Resin (9)  40  50  10  9,000  1.60  Resin (10)  40  60  10,000  1.61  Resin (11)  40  40  10  10  8,500  1.60  Resin (12)  40  40  20  9,500  1.61  Q  usu  cc  w~o  F  0  ¢  usu  I#  cc  w~o  F  Q  usu  cc  -03S~O  ¢  usu  cc  -03S~O  usu  cc  -03S~O  Q  usu  o,s>yo  0  0  cc  ‰G  -03S~O 