286  US 9,557,643 B2  285  TABLE 3-continued  EB  ex osure  Acid  Acid-Increasing Solvent  Generator  Agent  (mass ratio)  Basic  Surfactant Developer  Rinsing  Resin  (A)  (B)  (compound (C)) (40 g)  Compound (5 mg)  (mass ratio)  Solution  Example 7  Al-5  z114  PA-12  S-1/S-2  D-3  W-1  S-5  S-8  (0.666 g)  (0.260 g)  (0.065 g)  (80/20)  (4mg)  Example 8  Al-5  z114  PA-16  S-1/S-2  D-3  W-1  S-5  S-8  (0.723 g)  (0.210 g)  (0.058 g)  (80/20)  (4mg)  Example 9  Al-5  z114  PA-16  S-1/S-2  D-3  W-1  S-5  S-8  (0.665 g)  (0.210 g)  (0.116 g)  (80/20)  (4mg)  Example 10  Al-6  z115  PA-6  S-1/S-4  D-1  W-4  S-7  S-9  (0.629 g)  (0.300 g)  (0.063 g)  (80/20)  (3 mg)  Example 11  Al-7  z69  PA-15  S-3  D-1  W-2  S-5/S-6  S-11  (0.588 g)  (0.260 g)  (0.045 g)  (2 mg)  (80/20)  Al-5  (0.100 g)  Example 12  Al-8  z116  PA-4  S-1  D-3  W-1  S-13  S-10  (0.600 g)  (0.200 g)  (0.090 g)  (5 mg)  z115  (0.100 g)  Example 13  Al-9  z18  PA-14  S-1/S-2  D-4  W-2  S-14  S-8  (0.724 g)  (0.200 g)  (0.069 g)  (70/30)  (2 mg)  Example 14  Al-10  Z108  PA-5  S-1/S-2  D-3  W-1  S-5  S-8  (0.757 g)  (0.180 g)  (0.055 g)  (60/40)  (3 mg)  Example 15  Al-10  Z108  PA-13  S-1/S-2  D-3  W-1  S-5  S-8  (0.700 g)  (0.210 g)  (0.082 g)  (60/40)  (3 mg)  Example 16  Al-10  Z108  PA-13  S-1/S-2  D-3  W-1  S-5  S-8  (0.670 g)  (0.158 g)  (0.164 g)  (60/40)  (3 mg)  Example 17  Al-10  Z108  PA-17  S-1/S-2  D-3  W-1  S-5  S-8  (0.669 g)  (0.260 g)  (0.063 g)  (60/40)  (3 mg)  Example 18  Al-11  z45  PA-8  S-1  D-2  W-3  S-6  S-12  (0.747 g)  (0.200 g)  (0.042 g)  (6 mg)  Example 19  Al-12  z45  PA-1  S-1/S-4  D-1  W-4  S-5  S-11  (0.724 g)  (0.180 g)  (0.088 g)  (80/20)  (3 mg)  Example 20  Al-13  z39  PA-9  S-1/S-4  D-3  none  S-5  S-8  (0.811 g)  (0.150 g)  (0.034 g)  (70/30)  (5 mg)  Example 21  Al-14  z19  PA-10  S-1  D-4  W-2  S-6  S-10  (0.728 g)  (0.200 g)  (0.061 g)  (6 mg)  Example 22  Al-15  z2  PA-11  S-1  D-3  W-1  S-7  S-8  (0.631 g)  (0.310 g)  (0.050 g)  (4mg)  Example 23  A2-1  z4  PA-13  S-1  D-1  W-1  S-5  S-8  (0.622 g)  (0.150 g)  (0.111 g)  (12 mg)  zl0  (0.100 g)  Example 24  A2-2  z99  PA-12  S-1  D-1  none  S-7  S-10  (0.595 g)  (0.310 g)  (0.075 g)  (20 mg)  Example 25  A2-3  z118  PA-3  S-1/S-2  D-1  W-1  S-5  S-8  (0.769 g)  (0.180 g)  (0.036 g)  (80/20)  (10 mg)  Example 26  A2-3  z118  PA-14  S-1/S-2  D-1  W-1  S-5  S-8  (0.602 g)  (0.300 g)  (0.083 g)  (80/20)  (10 mg)  Example 27  A2-3  z118  PA-18  S-1/S-2  D-1  W-1  S-5  S-8  (0.736 g)  (0.200 g)  (0.049 g)  (80/20)  (10 mg)  Example 28  A2-4  z113  PA-17  S-1  D-2  W-4  S-6  S-10  (0.615 g)  (0.310 g)  (0.057 g)  (8 mg)  Comparative  Al-1-1  z45  S-1/S-2  D-3  W-1  S-5  S-8  Example 1  (0.829 g)  (0.160 g)  (80/20)  (6 mg)  Comparative  Al-10  z108  S-1/S-2  D-3  W-1  S-5  S-8  Example 2  (0.812 g)  (0.180 g)  (60/40)  (3 mg)  Comparative  Al-12  z45  S-1/S-4  D-1  W-4  S-5  S-11  Example 3  (0.812 g)  (0.180 g)  (80/20)  (3 mg)  Comparative  A2-3  z118  S-1/S-2  D-1  W-1  S-5  S-8  Example 4  (0.785 g)  (0.200 g)  (80/20)  (10 mg)  Comparative  Al-5  z114  PA-5  S-1/S-2  D-3  W-1  TMAH  water  Example 5  (0.728 g)  (0.210 g)  (0.053 g)  (80/20)  (4mg)  (positive  development)  Comparative  Al-10  z108  PA-13  S-1/S-2  D-3  W-1  TMAH  water  Example 6  (0.700 g)  (0.210 g)  (0.082 g)  (60/40)  (3 mg)  (positive  development)  Sensitivity  (µC/cm 2 )  11.2  10.9  10.6  12.2  12.2  11.5  12.2  12.3  11.7  11.5  11.6  12.2  12.3  12.8  13.0  12.9  12.7  12.6  13.0  12.6  12.3  12.3  17.4  17.0  15.9  14.7  45.4  28.7  Resolution LWR  (nm)  (nm)  31.0  3.6  30.5  3.5  31.5  3.5  31.5  3.9  32.0  3.8  31.0  3.6  31.0  3.6  30.5  3.6  30.0  3.5  30.5  3.6  30.5  3.5  31.0  3.8  30.5  3.6  31.5  4.0  31.5  3.8  32.0  3.8  33.5  3.9  33.5  3.9  34.0  4.2  33.5  4.0  33.0  3.8  33.0  3.9  35.5  5.0  35.5  4.9  35.5  4.9  37.0  5.0  65.0  5.9  46.0  4.9  In the Table, abbreviations stand for specific examples  above or the followings.  D-4: Tridodecylamine  D-3: 2,4,5-Triphenylimidazole  <Basic Compound>  D-1: Tetra-(n-butyl)ammonium hydroxide  D-2: 1,8-Diazabicyclo[5.4.0]-7-undecene  <Surfactant>  W-1: Megaface F 17 6 (produced by Dainippon Ink & Chemi› cals, Inc.) (fluorine-containing)  65 