US 20080188162Al  c19)  United States  c12)  Patent Application Publication  Kobata et al.  c10)  Pub. No.: US 2008/0188162 Al  (43)  Pub. Date:  Aug. 7, 2008  (54)  ELECTROCHEMICAL MECHANICAL  POLISHING APPARATUS CONDITIONING  METHOD, AND CONDITIONING SOLUTION  An electrochemical mechanical polishing apparatus is for use  in polishing of a conductive material ( e.g., metal) on a surface  of a substrate by combination of electrochemical action and  mechanical action. This apparatus includes a polishing table  having divided electrodes and adapted to hold a polishing pad  having a polishing surface, a polishing head adapted to hold a  workpiece having a conductive film and to press the work› piece against the polishing surface, a second electrode for  supplying an electric current to the conductive film, an elec› trolytic-solution supply section for supplying an electrolytic  solution to the polishing surface, a detecting section adapted  to detect a signal corresponding to a thickness of the conduc› tive film, a variable resistance unit having the same number of  variable resistors as the number of divided electrodes, a mov› ing mechanism for providing relative movement between the  workpiece and the polishing surface, and a control section  adapted to control each of the variable resistors based on the  signal from the detecting section.  Correspondence Address:  WENDEROTH, LIND & PONACK, L.L.P.  2033 K STREET N. W., SUITE 800  WASHINGTON, DC 20006-1021  Feb.6,2007  Feb.9,2007  Mar. 8, 2007  Mar. 8, 2007  (JP) ................................. 2007-026900  (JP) ................................. 2007-029898  (JP) ................................. 2007-058261  (JP) ................................. 2007-058601  (30)  Foreign Application Priority Data  (57)  ABSTRACT  (52)  U.S. Cl.  ............................................................  451/8  (51)  Int. Cl.  B24B 49100  (2006.01)  (76)  Inventors:  Itsuki Kobata,  Tokyo (JP);  Yasushi  Toma,  Kanagawa-ken (JP);  Akira  Kodera,  Kanagawa-ken (JP);  Tsukuru Suzuki,  Kanagawa-ken  (JP);  Yuji Makita,  Kanagawa-ken  (JP);  Takayuki Saito,  Kanagawa-ken (JP)  (21)  Appl. No.:  12/068,300  (22)  Filed:  Feb.5,2008  117  31  120  121  6  1~2  )  I~  654  3 6  ITM  101  100  310  CONTROL  SECTION  Publication Classification 