Aug. 4, 2016  75  US 2016/0223905 Al  -continued  K-3  -continued  PAG-2  PAG-3  K-4  PAG-4  PAG-5  [0743]  In Table 5, the structures of the acid generator (B)  are as follows.  [0744]  In Table 5, the structures of the compound (C) are as  described in Examples of "ArF" as described above.  PAG-1  [0745]  In Table 5, the structures of the acid diffusion con› trol agent (D) which is a basic compound are as follows.  N-1  5/25/70  Mw ~30k  OH  OH  25/75  Mw ~20k  0-s+  - b  -0-s+ 