Nov. 22, 2018  52  US 2018/0335696 Al  -continued  -continued  Rf 11  S03- x11  ,  Rfl3  Rf 14  (3-2)  (3-3)  R42  I  +s-R45  I  R46  (3-4)  Rf 11  S03- x11  ’  Rfl3  Rfl4  (3-1)  R32  I  +s-R33  I  R34  [0095]  Also sulfonium and iodonium salts of iodized  benzoyloxy-containing fluorinated sulfonic acid having the  formulae (3-1) and (3-2) are useful as the other acid gen› erator.  [0094]  Of the foregoing PAGs, those compounds having  an anion of formula (IA’) or (ID) are especially preferred  because of reduced acid diffusion and high solubility in  resist solvent, and those compounds having an anion of  formula (2’) are especially preferred because of minimized  acid diffusion.  [0097]  Further, sulfonium and iodonium salts of iodized  phenoxy or iodized to phenylalkoxy-containing fluorinated  sulfonic acid having the formulae (3-3) and (3-4) are useful  as the other acid generator.  [0096]  In formulae (3-1) and (3-2), R 31  is hydrogen,  hydroxyl, carboxyl, nitro, cyano, fluorine, chlorine, bro› mine, amino group, or a straight, branched or cyclic, C$_{1 }$-C$_{20 }$ alkyl,  C$_{1 }$-C$_{20 }$ alkoxy.  C$_{2}$ -C$_{20 }$ alkoxycarbonyl,  C$_{2}$ -C$_{2 }$ acyloxy  or C$_{1 }$-C$_{4 }$ alkylsulfonyloxy group, which may contain fluo› rine, chlorine, bromine, hydroxy, amino or alkoxy moiety, or  -NR$^{37}$-C(O)-R$^{38 }$or -NR$^{37}$-C(O)-O-R$^{38 }$wherein  R$^{37 }$is hydrogen, or a straight, branched or cyclic C$_{1 }$-C$_{6 }$ alkyl  group which may contain halogen, hydroxy, alkoxy, acyl or  acyloxy moiety, R$^{38 }$is a straight, branched or cyclic, C$_{1 }$-C$_{16 }$ alkyl or  C$_{2}$-C$_{16 }$ alkenyl group, or  CcC$_{12 }$ aryl group, which  may contain halogen, hydroxy, alkoxy, acyl or acyloxy  moiety. X 11  is a single bond or a C$_{1}$-C$_{2 }$ divalent linking  group when r= 1, or a C$_{1 }$-C$_{20 }$tri- or tetravalent linking group  when r=2 or 3, the linking group optionally containing an  oxygen, sulfur or nitrogen atom. Rf 14  to Rf 14  are each  independently hydrogen, fluorine or trifluoromethyl, at least  one of Rf$^{11 }$to R $^{14 }$being fluorine or trifluoromethyl, or Rf 11  and Rf 12 , taken together, may form a carbonyl group. R 32 ,  R 33 , R 34 , R 35  and R 36  are each independently a C$_{1}$-C$_{12 }$ straight, branched or cyclic alkyl group, C$_{2}$-C$_{12 }$ straight,  branched or cyclic alkenyl group, C$_{1 }$-C$_{2 }$ straight, branched  or cyclic alkynyl group,  C$_{1 }$-C$_{20 }$ aryl group,  C$_{1 }$-C$_{12 }$ aralkyl  group or C$_{1 }$-C$_{12 }$ aryloxyalkyl group, in which at least one  hydrogen ( one or more or even all hydrogen atoms) may be  substituted by a hydroxy, carboxy, halogen, cyano, oxo,  amide, nitro, sultone, sulfone or sulfonium salt-containing  moiety, or in which an ether, ester, carbonyl, carbonate or  sulfonic acid ester moiety may intervene between carbon  atoms, or R$^{32 }$and R$^{33 }$may bond together to form a ring with  the sulfur atom to which they are attached, r is an integer of  1 to 3, sis an integer of 1 to 5, and tis an integer of Oto 3. 