US 10,921,710 B2  102  101  -continued  tto  a~0.45, b~0.10  C  ~  0.45  ,  Mw~ 8,300  Mw/Mn~ 1.55  a~ 0.55, b  0.10  C  ~  0.35  ,  Mw~9,200  Mw/Mn~ 1.70  a~ 0.40, b  ~  0.10,  C  ~  0.50  Mw~ 10,100  Mw/Mn~ 1.60  a~ 0.30, b  ~  0.15  c  ~  0.05, d  ~  0.30,  e  ~  0.20  ’  Mw~ 8,200  Mw/Mn~ 1.65  2) Preparation of Resist Com  ..  pos1t10n  Examples 1-1 to 1-24 and C  .  1 1  omparatJve Examples  - to 1-29  Resis! ~ompositions (R-1 to R-24  compos1t10ns (R-25 to R-53).  )_ and comparative resist  m solut10n form were prepared 