US 2020/0401045 Al  51  Dec. 24, 2020  [0612]  Furthermore,  the  weight-average  molecular  weight (Mw) and the dispersity (Mw/Mn) of the resins  A-12 to A-15 and B4 were measured by GPC (carrier:  THF (tetrahydrofuran)) (amount converted in terms of  polystyrene). In addition, the compositional ratio (ratio  % by mole) of the resin was measured by  $^{13}$C-nuclear  magnetic resonance (NMR).  [0611]  The resins (A-12 to A-15 and B4) shown in Table  8 are shown below.  [0605]  The results are shown in Table 4.  [0604]  The  1:1  line-and-space pattern with a line width  of 44 nm was observed from the top of the pattern with  a critical dimension scanning electron microscope  (SEM (S-8840, Hitachi High-Technologies Corpora› tion), the line width was measured at 50 points in the  edge range of 2 µm  in the longitudinal direction of the  line pattern, a standard deviation was determined for  the measurement dispersion, and  3a  was calculated. A  smaller value thereof indicates better performance.  [0609]  The various components included in the actinic  ray-sensitive or radiation-sensitive resin composition  shown in Table 8 are shown below.  [0607]  On the other hand, it is clear that a pattern  obtained with the  compositions  of Comparative  Examples has LWR not satisfying the desired require› ments.  sigma: 0.812, XY deflection). Ultrapure water was used  as the immersion liquid. Then, the wafer was heated at  105°  C. for 60 second (PEB: post-exposure baking).  Thereafter, the wafer was developed by puddling with  a negative tone developer (butyl acetate) or a positive  developer (aqueous tetramethylammonium hydroxide  (TMAH) solution) for 30 seconds, and the wafer was  rotated at a rotation speed of 4,000 rpm for 30 seconds  to form a  1:  1 line-and-space pattern with a line thick› ness of 44 nm.  [0602]  <Performance Evaluation>  [0603]  (LWR Performance Evaluation)  [0606]  From the results in Table 4, it is clear that in a case  where the composition of Examples is used, a pattern thus  formed has excellent LWR in the ArF exposure evaluation.  [0608]  [Preparation of Actinic Ray-Sensitive or Radiation› Sensitive Resin Composition (for EUV Exposure)]  [0610]  <Resin (AXl)>  TABLE 4  Actinic-sensitive or radiation-sensitive resin composition (formulation)  Acid  Basic  Hydrophobic  Evaluation  Resin  generator  compound resin  Surfactant Solvent  LWR  (10 g)  (g)  (g)  (0.05 g)  (0.03 g)  (mass ratio)  Developer  (nm)  Example 1  A-1  PAG-1 (2.2)  lb  SL-1/SL-2 (80/20) Butyl acetate  3.71  Example 2  A-2  PAG-2 (2.5)  lb  SL-1/SL-2 (80/20) Butyl acetate  3.66  Example 3  A-3  PAG-7 (2.3)  N-2 (0.05)  lb  SL-1/SL-2 (80/20) Butyl acetate  3.97  Example 4  A-4  PAG-4 (3.0)  2b  SL-1/SL-2 (80/20) Butyl acetate  4.21  Example 5  A-5  PAG-5 (2.0)  N-1 (0.08)  lb  SL-1/SL-2 (90/10) Butyl acetate  4.32  Example 6  A-6  PAG-6 (2.7)  lb  SL-1/SL-3 (80/20) Butyl acetate  3.77  Example 7  A-7  PAG-1 (2.0)  lb  SL-1/SL-2 (80/20) Butyl acetate  4.01  Example 8  A-8  PAG-1 (2.2)  lb  SL-1/SL-2 (80/20) Butyl acetate  3.77  Example 9  A-9  PAG-6 (2.7)  lb  SL-1/SL-3 (80/20) Butyl acetate  3.63  Example 10  A-10  PAG-6 (2.7)  lb  SL-1/SL-3 (80/20) Butyl acetate  3.81  Example 11  A-11  PAG-5 (2.0)  lb  SL-1/SL-2 (90/10) Butyl acetate  3.79  Example 12  A-1  PAG-1 (2.0)  lb  SL-1/SL-2 (80/20) Aqueous TMAH  3.61  solution  Example 13  A-2  PAG-8 (2.3)  N-3 (0.06)  2b  W-1  SL-1/SL-4 (80/20) Aqueous TMAH  3.58  solution  Example 14  A-3  PAG-2 (2.3)  lb  SL-1/SL-2 (75/25) Aqueous TMAH  3.76  solution  Example 15  A-4  PAG-4 (2.3)  N-4 (0.05)  lb  SL-1  Aqueous TMAH  3.92  solution  Example 16  A-5  PAG-3 (2.5)  lb  SL-1/SL-2 (80/20) Aqueous TMAH  4.21  solution  Example 17  A-6  PAG-3 (2.2)  lb  SL-1/SL-2 (80/20) Aqueous TMAH  3.86  solution  Example 18  A-7  PAG-2/PAG-3  lb  SL-1/SL-2 (80/20) Aqueous TMAH  4.05  (1.0/1.0)  solution  Example 19  A-8  PAG-7 (2.3)  N-2 (0.05)  lb  SL-1/SL-2 (80/20) Aqueous TMAH  3.83  solution  Example 20  A-9  PAG-7 (2.3)  N-2 (0.05)  lb  SL-1/SL-2 (80/20) Aqueous TMAH  3.99  solution  Example 21  A-10  PAG-2 (2.5)  lb  SL-1/SL-2 (80/20) Aqueous TMAH  4.01  solution  Example 22  A-11  PAG-5 (2.0)  lb  SL-1/SL-2 (90/10) Aqueous TMAH  3.81  solution  Example 23  A-1/A-4  PAG-7 (2.3)  lb  SL-1/SL-2/SL-4  Butyl acetate  3.88  (5 g/5 g)  (80/10/10)  Comparative  B-1  PAG-3 (2.0)  N-4 (0.40)  lb  SL-1/SL-2 (80/20) Butyl acetate  6.55  Example 1  Comparative  B-2  PAG-3 (2.0)  N-3 (0.40)  lb  SL-1/SL-2 (80/20) Aqueous TMAH  6.48  Example 2  solution  Comparative  B-3  PAG-3 (2.0)  lb  SL-1/SL-2 (80/20) Butyl acetate  6.55  Example 3 