US 2020/0192221 Al  19  Jun.  18,2020  -continued  -continued  [0086]  Also included in the recurring units having an acid  labile group of formula (AL-3) are recurring units of (meth)  acrylate having a furandiyl, tetrahydrofurandiyl or oxanor› bomauediyl group as represented by the following formula  (AL-3)-22.  [0087]  In formula (AL-3)-22,  RA  is as defined above.  RLc1 2  and  RLc1 3  are each independently a C$_{1 }$-C$_{10 }$monova› lent hydrocarbon group, or  RLc1 2  and  RLc1 3 ,  taken together,  may form an aliphatic ring with the carbon atom to which  they are attached.  RLc1 4  is furandiyl, tetrahydrofurandiyl or  oxanorbornanediyl.  RLc1s  is hydrogen or a C$_{1 }$-C$_{10 }$monova› lent hydrocarbon group which may contain a heteroatom.  The monovalent hydrocarbon group may be straight,  branched or cyclic, and examples thereof include C$_{1 }$-C$_{10 }$ alkyl groups.  [0088]  Examples of the monomer from which the recur› ring units having formula (AL-3)-22 are derived are shown  below, but not limited thereto. Herein  RA  is as defined above.  (AL-3)-22 