Jul. 30, 2020  100  US 2020/0241417 Al  TABLE I-continued  Acid  Organic  Polymer  generator  Quencher  solvent  PEB temp. Sensitivity CDU  (pbw)  (pbw)  (pbw)  (pbw)  (" C.)  (mJ/cm 2 )  (nm)  11 Polymer 1 PAG 2  Quencher 11  PGMEA (400)  100  25  2.7  (100)  (30)  (5.97)  CyH (2,000)  PGME (100)  12 Polymer 1 PAG 2  Quencher 12  PGMEA (400)  100  25  2.3  (100)  (30)  (6.39)  CyH (2,000)  PGME (100)  13 Polymer 1 PAG 2  Quencher 13  PGMEA (400)  100  25  2.7  (100)  (30)  (6.10)  CyH (2,000)  PGME (100)  14 Polymer 1 PAG 2  Quencher 14 PGMEA (400)  100  25  2.6  (100)  (30)  (5.82)  CyH (2,000)  PGME (100)  15 Polymer 1 PAG 2  Quencher 15  PGMEA (400)  100  25  2.6  (100)  (30)  (5.97)  CyH (2,000)  PGME (100)  16 Polymer 1 PAG 2  Quencher 16  PGMEA (400)  100  24  2.6  (100)  (30)  (5.97)  CyH (2,000)  PGME (100)  17 Polymer 1 PAG 2  Quencher 17  PGMEA (400)  100  24  2.4  (100)  (30)  (6.11)  CyH (2,000)  PGME (100)  Acid  Organic  PEB  Polymer  generator  Quencher  solvent  temp. Sensitivity CDU  (pbw)  (pbw)  (pbw)  (pbw)  (" C.)  (mJ/cm 2 )  (nm)  Example  18  Polymer 1  PAGl  Quencher 18  PGMEA (400)  100  24  2.6  (100)  (30)  (6.11)  CyH (2,000)  PGME (100)  19  Polymer 1  PAGl  Quencher 19  PGMEA (400)  100  25  2.6  (100)  (30)  (6.09)  CyH (2,000)  PGME (100)  20  Polymer 1  PAGl  Quencher 20  PGMEA (400)  100  25  2.6  (100)  (30)  (6.07)  CyH (2,000)  PGME (100)  21  Polymer 2  Quencher 7 PGMEA (2,000)  100  25  2.1  (100)  (7.11)  DAA (500)  22  Polymer 3  Quencher 7 PGMEA (2,000)  100  20  2.0  (100)  (7.11)  DAA (500)  23  Polymer 3  PAG3  Quencher 7 PGMEA (2,000)  95  21  2.4  (100)  (15)  (7.11)  DAA (500)  24 Polymer 3  PAG4  Quencher 7 PGMEA (2,000)  95  22  2.3  (100)  (15)  (7.11)  DAA (500)  25  Polymer 4  PAGl  Quencher 7  PGMEA (400)  120  29  3.3  (100)  (20)  (7.11)  CyH (2,000)  PGME (100)  26  Polymer 2  Quencher 21 PGMEA (2,000)  100  23  2.3  (100)  (10.22)  DAA (500)  27  Polymer 2  Quencher 22 PGMEA (2,000)  100  22  2.4  (100)  (12.37)  DAA (500)  28  Polymer 2  Quencher 23 PGMEA (2,000)  100  26  2.3  (100)  (6.15)  DAA (500)  29  Polymer 2  Quencher 24 PGMEA (2,000)  100  25  2.4  (100)  (7.15)  DAA (500)  30  Polymer 2  Quencher 25 PGMEA (2,000)  100  26  2.4  (100)  (6.59)  DAA (500)  Acid  Organic  PEB  Polymer  generator  Quencher  solvent  temp. Sensitivity CDU  (pbw)  (pbw)  (pbw)  (pbw)  (" C.)  (mJ/cm 2 )  (nm)  Comparative  Polymer 1  PAG2  Comparative  PGMEA (400)  100  28  3.5  Example  (100)  (30)  Quencher 1  CyH (2,000)  (1.20)  PGME (100)  TABLE 3  TABLE 2 