4  US 7,217,493 B2  3  wherein, J1 represents an alkylene group;  12  represents an  arylene group or a cycloalkylene group; J3 represents a  divalent connecting group;  14  represents a divalent, trivalent  or tetravalent connecting group;  JS  represents a group  capable of being decomposed by the action of an acid; k,  1,  m and n each independently represent 0 or 1, provided that  k,  1, m and n are not O at the same time; and p represents an  integer of from 1 to 3.  Further, the following construction 1s illustrated as a  preferred embodiment.  [1]  Acid-decomposable Polysiloxane or Polysilsesquioxane  (Component (A))  The polysiloxane or polysilsesquioxane of Component  (A) is a polysiloxane or polysilsesquioxane that has a  property of increasing solubility in an alkali developing  solution by the action of an acid and contains a group (an  acid-decomposable group) capable of being decomposed  with an acid to generate an alkali-soluble group.  The alkali-soluble group include, for example, a hydroxy  group or a carboxy group.  As Component (A), a polymer having an acid-decompos› able group in the side chain thereof is exemplified, and a  polymer having a structure represented by formula  (1)  described above in the side chain thereof is preferred.  In formula  (1), the alkylene group represented by J1 may  have a substituent and is preferably an alkylene group  having from 1 to 10 carbon atoms. Examples of the sub› stituent include a halogen atom, for example, Cl, Br or F, a  -CN group, an -OH group, an amino group, an alkyl  group having from  1 to 4 carbon atoms, a cycloalkyl group  having from 3 to 8 carbon atoms, an alkoxy group having  from 1 to  4 carbon atoms, an aryl group having from 6 to 12  carbon atoms and an aralkyl group having from 7 to 14  carbon atoms.  J1 is more preferably an alkylene group having from 1 to  6  carbon atoms, and still more preferably an alkylene group  having from  1 to 4 carbon atoms (for example, a methylene  group, an ethylene group or a propylene group).  k represents  O  or  1.  The arylene group represented by  12  may have a substitu› ent and is preferably an arylene group having from  6  to 14  carbon atoms. Examples of the substituent include those  described for the alkylene group represented by J1.  The cycloalkylene group represented by  12  may have a  substituent and is preferably a cycloalkylene group having  from  4  to 10 carbon atoms. Examples of the substituent  include those described for the alkylene group represented  by Jl.  J2 is more preferably an arylene group having from 6 to  10 carbon atoms (for example, a phenylene group or a  naphthylene group) or a cycloalkylene group having from 5  to  8  carbon atoms (for example, a cyclohexylene group or a  cyclooctylene group).  1 represents 0 or 1.  J3 represents a divalent connecting group. Examples of  the divalent connecting group include -0-, -N(R$_{1}$)-,  -COO-, ---OC(=O)-, -O(C=O)O-, -CON(R$_{1}$)-,  -N(R$_{1}$)CO- or -NH-CO-NH-.  R$_{1 }$ represents a hydrogen atom or an alkyl group having  from 1 to 6 carbon atoms, preferably a hydrogen atom or an  alkyl group having from 1 to 3 carbon atoms.  J3  preferably represents  -COO-, ---OC(=O)-,  ---0-, ----CON(R$_{1}$)- or -N(R$_{1}$)CO-.  m represents 0 or 1.  14  represents a divalent, trivalent or tetravalent connect› ing group. Preferred examples of the connecting group  include an alkylene group having from 1 to 8 carbon atoms,  which may have a substituent, a cycloalkylene group having  from 4 to 10 carbon atoms, which may have a substituent, a  bicycloalkylene group having from  5 to 10 carbon atoms,  which may have a substituent, a tricycloalkylene group  having from  5 to 10 carbon atoms, which may have a  substituent, an arylene group having from  6  to 12 carbon  atoms, which may have a substituent, and trivalent or  tetravalent groups formed by eliminating one or two hydro› gen atoms from these connecting groups.  Two or more of the above connecting groups are com› bined with each other to form one connecting group.  The above substituent includes, for example, an alkyl  group having from 1 to 4 carbon atoms and an aryl group  having from  6  to 12 carbon atoms, which may have a  substituent. The substituent for the aryl group includes a  group capable of being decomposed by the action of an acid,  that is, an acid-decomposable group as described hereinafter.  More preferred examples of the connecting group include  an alkylene group having from 1 to 5 carbon atoms, which  may have a substituent, a trivalent group formed by elimi› nating one hydrogen atom from the alkylene group, a  bicycloalkylene group having from  5 to 8 carbon atoms,  which may have a substituent, a tricycloalkylene group  having from  5 to 8 carbon atoms, which may have a  substituent, a phenylene group, which may have a substitu› ent and a trivalent or tetravalent group formed by eliminat- ing one or two hydrogen atoms from the phenylene group.  n represents  0 or 1.  Two or more of the above connecting groups are com› bined with each other to form one connecting group.  The above substituent include, for example, an alkyl  group having from  1 to 4 carbon atoms and an aryl group  having from  6  to 12 carbon atoms, which may have a  substituent. The substituent for the aryl group includes a  group capable of being decomposed by the action of an acid,  that is, an acid-decomposable group as described hereinafter.  J  5 represents a group ( an acid-decomposable group)  capable of being decomposed by the action of an acid to  generate an alkali-soluble group. Preferred examples of the  acid-decomposable group include ----COO-R 2 , -OCO› R2, -O----CH(CH$_{3}$)---0-R$_{3 }$ and -COOCH(CH$_{3}$)-0- R3.  R 2  represents a tertiary alkyl group and preferably a  tertiary alkyl group having from  4 to 8 carbon atoms (for  example, a tert-butyl group or a tert-amyl group). R$_{3 }$ repre› sents an alkyl group having from 2 to 12 carbon atoms,  which may have a substituent or an aralkyl group having  from 7 to 14 carbon atoms, which may have a substituent.  Examples of the substituent include a halogen atom, for  example, Cl, Br or F, a -CN group, an -OH group, an  (5) The positive resist composition as described in any one  of (1) to (4) above, which further comprises a fluorine› based and/or silicon-based surfactant.  The invention will be described in greater detail below.  (3) The positive resist composition as described in (1) or (2)  above, wherein an amount of the organic basic compound 10  (C) is from 0.05 to 1.0% by weight based on the total solid  content of the positive resist composition.  DETAILED DESCRIPTION OF THE  INVENTION  ( 4) The positive resist composition as described in any one  of (1) to (3) above, wherein a light source for exposure is  any one of an electron beam, an  X ray and an EUV beam. 15 