Jul.  17,  2014  105  US 2014/0199617 Al  preferred examples are also the same, provided that R’$_{201 }$to  R’$_{207 }$ in formulae  (ZI’), (ZII’)  and  (ZIII’)  do not have the  acid-decomposable group.  [0753]  Further in formulae  (ZI’)  and  (ZII’), Z  represents a  non-nucleophilic anion (an anion which is extremely low in  capability of causing nucleophilic reaction), and has the same  meaning with z- described in formulae  (ZI)  and  (ZII),  pro› vided that  z- in formulae  (ZI’)  and  (ZII’)  does not have the  acid-decomposable group.  [0754]  As more preferred  (ZI’)  component, the following  compounds (ZI’-1), (ZI’-2), (ZI’-3) and (ZI’-4) can be exem› plified.  -continued  [0755]  Compound (ZI’-1) is an arylsulfonium compound in  the case where at least one ofR’$_{201}$ , R’ $_{202 }$and R’$_{203 }$in formula  (ZI’)  represents an aryl group, that is, a compound having  arylsulfonium as the cation.  [0756]  All ofR’$_{201 }$to R’$_{203 }$may be aryl groups in the aryl› sulfonium compound, or a part ofR$_{201 }$to R$_{203 }$is an aryl group  and the remainder may be an alkyl group or a cycloalkyl  group.  [0757]  The specific and preferred examples of the arylsul› fonium compounds are the same with those described in  compound (ZI-1), except for not having the acid-decompos› able group.  [0758]  Compound (ZI’-2) is a compound in the case where  each of R’$_{201 }$ to R’$_{203 }$ in formula  (ZI’)  independently repre› sents an organic group not having an aromatic ring.  [0759]  As the organic group not having an aromatic ring as  R’$_{201 }$to R’$_{203}$, the same groups with the groups as described in  compound (ZI-2) can be exemplified, except for not having  the acid-decomposable group.  [  07 60]  Compound (ZI’-3) is a compound represented by the  following formula (ZI’-3) and having a phenacylsulfonium  salt structure.  [0761]  In formula (ZI’-3), each ofR$_{1}$c’ to R$_{7}$c’, Rx’ and Ry’  independently has the same meaning as described in R$_{1}$ c  to  R$_{7}$c,  Rx  and  RY  in formula (ZI-3), provided that any ofR$_{1 }$c’ to  R$_{7}$c’, Rx’ and Ry’ does not have the acid-decomposable group.  [0762]  Zc’- represents a non-nucleophilic anion, and the  same non-nucleophilic anions as described in  z- in formula  (ZI)  can be exemplified, provided that  Zc’- does not have the  acid-decomposable group.  [0763]  The specific examples of the cations of the com› pounds represented by formula (ZI’-2) or (ZI’-3) are shown  below.  #  o  O  &o  0  I  aLO  0  -Ro  (ZI’-3) 