US  10,031,419 B2  84  83  -continued  an annnonium group, a sulfonium group, a carbonate group  (---0----CO-O-) (for example, a cyclic carbonic ester  structure and the like), and a group formed by combining  two or more thereof, and particularly preferably an alcoholic  hydroxy group, a cyano group, a lactone group, a sultone  group, or a group which includes a cyanolactone structure.  When a repeating unit which is provided with an alcoholic  hydroxy group is further contained in the resin, it is possible  to further improve the exposure latitude (EL) of the com- position which includes a resin.  When a repeating unit which is provided with a cyano  group is further contained in the resin, it is possible to further  improve the sensitivity of a composition which includes a  resm.  When a repeating unit which is provided with a lactone  group is further contained in a resin, it is possible to further  improve the dissolution contrast with respect to the devel› oper which includes an organic solvent. In addition, by  doing this, it is also possible to further improve the dry  etching resistance, the coating property, and the adhesion  with a substrate of the composition which includes a resin.  When a repeating unit which is provided with a group  which includes a lactone structure which has a cyano group  is further contained in the resin, it is possible to further  improve the dissolution contrast with respect to a developer  which includes an organic solvent. In addition, by doing this,  it is also possible to further improve the sensitivity, the dry  etching resistance, the coating property, and the adhesion  with a substrate of the composition which includes a resin.  In addition, by doing this, it is possible to place the functions  which are respectively provided by a cyano group and a  lactone group on a single repeating unit and it is also  possible to further increase the degree of freedom in terms  of the design of the resin.  In a case where the polar group which the repeating unit  ( c) has is an alcoholic hydroxy group, it is preferably  represented by at least one selected from a group formed of  General Formulas (I-lH) to (I-l0H) below. In particular, the  polar group is more preferably represented by at least one  selected from a group consisting of General Formulas (I-1 H)  to (I-3H) below and it is even more preferably represented  by General Formula (I-lH) below.  (1-lH)  (I-2H)  (I-3H)  Rs each independently represents a hydrogen atom or an  alkyl group.  R$_{0 }$ represents a hydrogen atom or an organic group.  L$_{3 }$ represents an (m+2)valent linking group.  1 represents an integer of 0 or more.  L$_{1 }$ represents a linking group which is represented by  --COO-,  ---OCO-,  ----CONH-,  -0-,  -Ar-,  -SO$_{3}$-, or -SO$_{2}$NH-. Here,  Ar  represents a divalent  aromatic ring group.  n and m represent an integer of 1 or more. Here, in a case  where R$_{2 }$ represents a single bond in General Formula  (I-2H), (I-3H), or (I-SH), n is  1.  W represents a methylene group, an oxygen atom, or a  sulfur atom.  R$_{1 }$ represents an (n+l)valent organic group.  R$_{2 }$ each independently represents a single bond or an  (n+l)valent organic group in a case where m2:2.  In the formula, Ras each independently represents a  hydrogen atom, an alkyl group, or a group which is repre› sented by ----CH$_{2}$---0-Ra$_{2}$ . Here, Ra$_{2 }$ represents a hydro› gen atom, an alkyl group, or an acyl group.  (!-!OH)  (I-9H)  (I-SH)  (I-7H)  (I-6H)  (I-4H)  (I-5H)  Ra  Ra  ~ $_{OH }$ ~  OH  OH 