Jul.  30,  2020  23  US 2020/0241418 Al  [0062]  In formula (AL-1),  RL 1  is a C$_{4}$ -C$_{20}$, preferably  C$_{4}$ -C$_{15 }$ tertiary hydrocarbon group, a trialkylsilyl group in  which each alkyl moiety has 1 to 6 carbon atoms, a C$_{4}$ -C$_{20 }$ alkyl group containing a carbonyl moiety or ester bond, or  a group of formula (AL-3). Al is an integer of Oto 6.  [0063]  The tertiary hydrocarbon group may be branched  or cyclic, and examples thereof include tert-butyl, tert› pentyl, 1,1-diethylpropyl, 1-ethylcyclopentyl, 1-butylcyclo› penty I, 1-ethy lcyclohexy I, 1-buty lcyclohexy I, l -ethyl-2-cy› clopenteny I,  1-ethy 1-2-cyclohexeny I,  2-methy 1-2- adamantyl, 2-tetrahydropyranyl, and 2-tetrahydrofuranyl.  Examples of the trialkylsilyl group include trimethylsilyl,  triethylsilyl, and dimethyl-tert-butylsilyl. The alkyl group  containing a carbonyl moiety or ester bond may be straight,  branched or cyclic, preferably cyclic and examples thereof  include 3-oxocyclohexyl, 4-methyl-2-oxooxan-4-yl, and  5-methyl-2-oxooxolan-5-yl.  [0064]  Examples of the acid labile group having formula  (AL-1) include tert-butoxycarbonyl, tert-butoxycarbonylm› ethyl,  tert-pentyloxycarbonyl,  tert-pentyloxycarbonylm› ethyl, 1, 1-diethylpropyloxycarbonyl, 1, 1-diethylpropyloxy› carbonylmethyl,  1-ethylcyclopentyloxycarbonyl,  1-ethy lcyclopenty loxycarbony lmethy I, 1-ethy 1-2-cyclopen› tenyloxycarbonyl,  1-ethy 1-2-cyclopenteny loxycarbony !m› ethyl, 1-ethoxyethoxycarbonylmethyl, 2-tetrahydropyrany› loxycarbonylmethyl,  and  2-tetrahydrofuranyloxycarbonylmethyl.  [0065]  Other examples of the acid labile group having  formula (AL-1) include groups having the formulae (AL› I )-1 to (AL-1 )-10.  [0061]  The acid labile groups represented by R$^{11 }$and R 12  may be selected from a variety of such groups, for example,  groups of the following formulae (AL-1) to (AL-3).  (AL-1)  "’’’YobR’°  1  (AL-1)-3  J(cH,),-yO’{’.:,]  l  O  RLS  (AL-1)-2  i’cH,,,.rotY"  (AL-1)-1  (AL-3)  (AL-2)  RL2  I  L4  -C-0-R  I  RL3  -continued  RA  F  OR12  OR12  -continued 