us  10,921,710 B2  113  114  TABLE 5-continued  TABLE 6  Resist  PEB temp.  Eop  DOF  CDU  composition  (" c.)  Developer  (mJ/cm 2 )  (nm)  (nm)  2-7  R-31  90  n-butyl acetate  34.8  60  5.0  2-8  R-32  95  metbyl benzoate  34.1  60  4.7  2-9  R-33  90  n-butyl acetate  35.5  50  5.0  2-10  R-34  95  n-butyl acetate  34.4  60  4.9  2-11  R-35  90  n-butyl acetate  33.0  70  5.4  2-12  R-36  90  n-butyl acetate  34.0  60  5.8  2-13  R-37  95  n-butyl acetate  35.2  50  6.2  2-14  R-38  95  n-butyl acetate  37.5  70  5.1  2-15  R-39  95  n-butyl acetate  32.1  70  4.8  2-16  R-40  90  n-butyl acetate  35.6  60  4.7  2-17  R-41  95  n-butyl acetate  31.5  50  5.4  2-18  R-42  95  n-butyl acetate  32.0  60  6.0  2-19  R-43  90  n-butyl acetate  34.5  60  5.1  2-20  R-44  90  n-butyl acetate  36.0  50  4.9  2-21  R-45  90  n-butyl acetate  30.5  60  5.8  2-22  R-46  95  n-butyl acetate  31.2  60  4.9  2-23  R-47  95  n-butyl acetate  28.5  60  6.8  2-24  R-48  90  n-butyl acetate  30.5  50  6.5  2-25  R-49  95  n-butyl acetate  30.6  70  5.2  2-26  R-50  90  n-butyl acetate  33.5  60  5.8  2-27  R-51  90  n-butyl acetate  34.6  60  4.7  2-28  R-52  95  n-butyl acetate  35.8  50  4.8  2-29  R-53  100  2-heptanone  36.3  60  4.6  CD  CDU  CD  CDU  L\.PPD  Resist  (nm)  (30, nm)  nm)  (30, nm)  CD  composition  @PPD Oh  @PPD Oh @PPD 6h  @PPD 6h  (nm)  Example 2-1  R-1  50.2  6.1  47.8  6.2  2.4  2-2  R-2  48.2  6.2  46.9  5.9  1.3  2-3  R-3  52.3  6.7  50.1  6.5  2.2  2-4  R-4  51.4  5.9  48.1  6.3  3.3  2-5  R-5  51.5  6.8  49.8  6.9  1.7  2-6  R-6  50.7  5.7  49.1  5.9  1.6  2-7  R-7  50.9  5.9  47.9  6.1  3.0  2-8  R-8  48.7  6.1  46.2  6.3  2.5  2-9  R-9  50.1  6.5  48.2  6.4  1.9  2-10  R-10  47.9  6.7  45.6  6.8  2.3  2-11  R-11  51.6  5.6  48.5  5.9  3.1  2-12  R-12  52.8  6.1  49.1  6.4  3.7  2-13  R-13  51.2  6.0  49.5  6.5  1.7  2-14  R-14  51.5  5.8  49.0  6.1  2.5  2-15  R-15  49.5  5.9  47.9  6.2  1.6  2-16  R-16  49.8  6.3  47.2  6.5  2.6  2-17  R-17  50.7  6.4  48.1  6.6  2.6  2-18  R-18  51.1  6.6  47.8  6.8  3.3  2-19  R-19  51.9  5.8  48.9  6.1  3.0  2-20  R-20  52.8  6.1  50.1  6.3  2.7  2-21  R-21  50.3  6.8  48.6  6.5  1.7  2-22  R-22  48.4  6.5  46.9  6.7  1.5  2-23  R-23  50.3  6.1  48.1  6.3  2.2  2-24  R-24  49.6  6.1  47.3  6.4  2.3  CD  CDU  CD  CDU  L\.PPD  Resist  (nm)  (30, nm)  (nm)  (30, nm)  CD  composition  @PPD Oh  @PPD Oh @PPD 6h  @PPD 6h  (nm)  Comparative  2-1  R-25  50.1  6.2  45.1  6.3  5.0  Example  2-2  R-26  50.5  6.3  44.6  6.1  5.9  2-3  R-27  51.6  6.4  46.8  6.6  4.8  2-4  R-28  52.1  6.5  47.8  6.7  4.3  2-5  R-29  48.7  5.8  43.8  6.1  4.9  2-6  R-30  49.7  5.5  44.1  5.7  5.6  TABLE 7  25  The results of PPD evaluation are shown in Tables 6 and  7. 