Mar. 26, 2015  117  US 2015/0086912 Al  -continued  other additives, such as a dye, a plasticizer, a photo-decom› posable basic compound, and a photo-base generator, if nec› essary. As for these compounds, respective compounds  described in JP-A-2002-6500 can be exemplified.  [0473]  The examples of the solvents which are used in the  actinic ray-sensitive or radiation-sensitive resin composition  of the invention preferably include, for example, ethylene  glycol monoethyl ether acetate, cyclohexanone, 2-heptanone,  propylene glycol monomethyl ether (PGME, l-methoxy-2- propanol by another name), propylene glycol monomethyl  ether acetate (PGMEA, l-methoxy-2-acetoxypropane by  another name), propylene glycol monomethyl ether propi› onate, propylene glycol monoethyl ether acetate, methyl  3-methoxypropionate, ethyl 3-ethoxypropionate, methyl  ~-methoxyisobutyrate,  ethyl  butyrate,  propyl butyrate,  methyl isobutyl ketone, ethyl acetate, isoamyl acetate, ethyl  lactate, toluene, xylene, cyclohexyl acetate, diacetone alco› hol, N-methylpyrrolidone, N,N-dimethylformamide, y-buty› rolactone, N,N-dimethylacetamide, propylene carbonate,  and ethylene carbonate. These solvents are used alone or in  combination.  [0474]  The solid content of the actinic ray-sensitive or  radiation-sensitive resin composition according to the inven› tion is preferably dissolved in the above solvents in the solid  content concentration of  1  % by mass to  40%  by mass, more  preferably  1  % by mass to 30% by mass, and still more pref› erably 3% by mass to 20% by mass.  [0475]  The actinic ray-sensitive or radiation-sensitive resin  composition in the invention may contain one or two or more  kinds of compounds capable of decomposing by the action of  an acid to generate an acid. The acid generated by the com› pound capable of decomposing by the action of an acid to  generate an acid is preferably a sulfonic acid, a methide acid,  or an imidic acid.  [0476]  The specific examples of the compounds capable of  decomposing by the action of an acid to generate an acid are  shown below, but the invention is not restricted thereto.  [6] Solvent  [7] Compound Capable of Decomposing by the Action of an  Acid to Generate an Acid  (PA-1)  /’o~:)(  0 -....../ycF 3  J  I  #  CF3  (PA-6)  (PA-5)  (PA-4)  (PA-3)  (PA-2) 