269  US 9,323,153 B2  270  compound is preferably 0.01 to 8.0% by mass, more prefer› ably 0.1 to 5.0% by mass, and particularly preferably 0.2 to  4.0% by mass, based on the total solid contents of the com› position.  The molar ratio of the basic compound to the photo-acid 5  generator is preferably from 0.01 to 10, more preferably from  0.05 to 5, and still more preferably from 0.1 to 3. When this  molar ratio is excessively high, the sensitivity and/or resolu› tion may decrease in some cases. When this molar ratio is  excessively small, there is a possibility that tapering in the  pattern occurs between the exposure and the heating (post› bake ). The molar ratio is more preferably from 0.05 to 5, and  still more preferably from 0.1 to 3. The photo-acid generator  as used in the molar ratio is based on the total amount of the  repeating unit (B) of the resin and the photo-acid generator 15  which the resin may further contain.  Preferred examples of the basic compound include guani› dine, aminopyridine, aminoalkylpyridine, aminopyrrolidine,  indazole, imidazole, pyrazole, pyrazine, pyrimidine, purine,  imidazoline, pyrazoline, piperazine, aminomorpholine, and  aminoalkylmorpholine. These may further have a substituent.  Preferred examples of the substituent include an amino  group, an aminoalkyl group, an alkylamino group, an ami› noaryl group, an arylamino group, an alkyl group, an alkoxy  group, an acyl group, an acyloxy group, an aryl group, an  aryloxy group, a nitro group, a hydroxyl group, and a cyano  group.  Particularly preferred examples of the basic compound  include guanidine, 1,1-dimethyl guanidine, 1,1,3,3-tetram› ethyl guanidine, imidazole, 2-methylimidazole, 4-meth- ylimidazole, N-methylimidazole, 2-phenylimidazole, 4,5- diphenylimidazole,  2,4,5-triphenylimidazole,  2-aminopyridine, 3-aminopyridine, 4-aminopyridine, 2-dim› ethylaminopyridine,  4-dimethylaminopyridine,  2-diethy› laminopyridine, 2-(aminomethyl)pyridine, 2-amino-3-meth- ylpyridine,  2-amino-4-methylpyridine,  2-amino-5- methylpyridine,  2-amino-6-methylpyridine,  3-aminoethylpyridine, 4-aminoethylpyridine, 3-aminopyrro› lidine, piperazine, N-(2-aminoethyl)piperazine, N-(2-amino- ethyl)piperidine,  4-amino-2,2,6,6-tetramethylpiperidine,  4-piperidinopiperidine, 2-iminopiperidine, 1-(2-aminoethyl)  pyrrolidine, pyrazole, 3-amino-5-methylpyrazole, 5-amino- 3-methyl-1-p-tolylpyrazole, pyrazine, 2-(aminomethyl)-5- methylpyrazine, pyrimidine, 2,4-diaminopyrimidine, 4,6- dihydroxypyrimidine,  2-pyrazoline,  3-pyrazoline,  N-aminomorpholine and N-(2-aminoethyl) morpholine.  The composition of the present invention may further con› tain a surfactant. The surfactant is particularly preferably a  fluorine-based and/or silicon-based surfactant.  [6] Surfactant  Examples of the fluorine-based and/or silicone-based sur› factant include Megaface Fl 76 or Megaface ROS manufac› tured by DIC Corporation, PF656 and PF6320 manufactured  by OMNOVA SOLUTIONS, INC., Troy Sol S-366 manufac› tured by Troy Chemical Co., Ltd., Fluorad FC430 manufac› tured by Sumitomo 3M Ltd., and polysiloxane polymer  KP-341 manufactured by Shin-Etsu Chemical Co., Ltd.  Surfactants other than these fluorine-based and/or silicone› based surfactants may also be used. Examples of such other  surfactants include nonionic surfactants such as polyoxyeth› ylene alkyl ethers and polyoxyethylene alkylaryl ethers.  Moreover, other generally known surfactants may also be  appropriately used. Examples of the useful surfactants  include those described in 0273 et seq. of US 2008/0248425  Al.  These surfactants may be used alone or in combination of  two or more kinds thereof.  In the case where the composition according to the present  invention further contains a surfactant, the amount of surfac› tant used is preferably in the range of0.0001 to 2% by mass,  and more preferably 0.001 to 1 % by mass, based on the total  solid contents of the composition.  [7] Dye  The composition according to the present invention may  further include a dye. Examples of suitable dyes include oil  dyes and basic dyes. Specific examples thereof include Oil  Yellow #101, Oil Yellow #103, Oil Pink#312, Oil Green BG,  Oil Blue BOS, Oil Blue #603, Oil Black BY, Oil Black BS and  Oil Black T-505 ( all manufactured by Orient Chemical Indus› tries,  Ltd.),  Crystal Violet (CI42555),  Methyl Violet  (CI42535), Rhodamine B (CI45170B), Malachite Green  (CI42000), and Methylene Blue (CI52015).  [8] Photo-Base Generator  The composition according to the present invention may  further contain a photo-base generator. When a photo-base  generator is contained, a more excellent pattern can be  formed.  Examples of the photo-base generator include compounds  described in JP1992-151156A (JP-H04-151156A), JP1992- 162040A (JP-H04-162040A), JP1993-197148A (JP-H05- 197148A),  JP1993-5995A  (JP-805-5995),  JP1994- 194834A (JP-H06-194834), JP1996-146608A (JP-H08- 146608A),  and JP1998-83079  (JP-H10-83079A),  and  EP622,682B.  Specific preferred examples of the photo-base generator  include  2-nitrobenzylcarbamate,  2,5-dinitrobenzylcyclo› hexylcarbamate, N-cyclohexyl-4-methylphenylsulfonamide,  and 1, 1-dimethy 1-2-pheny lethy 1-N-isopropy lcarbamate.  [9] Antioxidant  The composition according to the present invention may  further contain an antioxidant. When an antioxidant is con› tained, the organic material can be prevented from oxidation  in the presence of oxygen.  Examples of the antioxidant include a phenol-based anti- oxidant, an antioxidant composed of an organic acid deriva› tive, a sulfur-containing antioxidant, a phosphorus-based  antioxidant, an amine-based antioxidant, an antioxidant com› posed of an amine-aldehyde condensate, and an antioxidant  composed of an amine-ketone condensate. Among these anti› oxidants, a phenol-based antioxidant or an antioxidant com› posed of an organic acid derivative is particularly preferably  used. When such an antioxidant is used, the function as an  antioxidant can be brought out without deteriorating the per- formance of the composition.  As the phenol-based antioxidant, for example, substituted  phenols, and bis-, tris-, and poly-phenols may be used.  Examples of the substituted phenols include l-oxy-3-me- thy 1-4-isopropylbenzene,  2, 6-di-tert-buty !phenol,  2,6-di› tert-buty l-4-ethylphenol,  2,6-di-tert-butyl-4-methylphenol,  4-hydroxymethyl-2,6-di-tert-butylphenol, butylhydroxyani› sole, 2-(l-methylcyclohexyl)-4,6-dimethylphenol, 2,4-dim- ethyl6-tert-butylphenol, 2-methyl-4,6-dinonylphenol, 2,6- di-tert-butyl-dimethylamino-p-cresol, 6-(4-hydroxy-3,5-di› tert-butylanilino )2,4-bis-octyl-thio-1,3,5  tnazme,  n-octadecyl-3-(4’-hydroxy-3’,5’-di-tert-butylphenyl)propi› onate, octylated phenol, aralkyl-substituted phenols, alky- lated-p-cresol, and hindered phenol.  Examples of the bis, tris or polyphenols include 4,4’-dihy› droxydiphenly,  methylenebis( dimethyl-4,6-phenol),  2,2’› methylene-bis-( 4-methyl-6-tert-butylphenol),  2,2’-methyl› ene-bis-( 4-methyl-6-cyclohexylphenol), 2,2’-methylene-bis- ( 4-ethyl-6-tert-butylphenol), 4,4’-methylene-bis-(2,6-di-tert› butylphenol),  2,2’-methylene-bis-(6-a-methyl-benzyl-p› cresol),  methylene-bridged  polyalkyl  phenol,  4,4’-