Sep. 10,2020  70  US 2020/0285149 Al  TABLE I-continued  TABLE 2  Acid  Polymer  generator  Quencher  Organic solvent  PEB temp. Sensitivity CDU  (pbw)  (pbw)  (pbw)  (pbw)  (" C.)  (mJ/cm 2 )  (nm)  Comparative  1 Polymer 2  Comparative  PGMEA (400)  80  52  5.7  Example  (100)  Quencher 1  CyH (2,000)  (1.91)  PGME (100)  2 Polymer 2  Comparative  PGMEA (400)  80  53  5.9  (100)  Quencher 2  CyH (2,000)  (3.13)  PGME (100)  3 Polymer 2  Comparative  PGMEA (400)  80  52  4.9  (100)  Quencher 3  CyH (2,000)  (4.42)  PGME (100)  4 Polymer 2  Comparative  PGMEA (400)  80  51  4.6  (100)  Quencher 4  CyH (2,000)  (4.21)  PGME (100)  Acid  Polymer  generator  Quencher  Organic solvent  PEB temp. Sensitivity CDU  (pbw)  (pbw)  (pbw)  (pbw)  (" C.)  (mJ/cm 2 )  (nm)  2 Polymer 2  Quencher 2  PGMEA (400)  80  35  3.2  (100)  (7.36)  CyH (2,000)  PGME (100)  3 Polymer 2  Quencher 3  PGMEA (400)  80  35  3.0  (100)  (7.88)  CyH (2,000)  PGME (100)  4 Polymer 2  Quencher 4  PGMEA (400)  80  35  3.3  (100)  (6.92)  CyH (2,000)  PGME (100)  5 Polymer 2  Quencher 5  PGMEA (400)  80  34  3.0  (100)  (8.26)  CyH (2,000)  PGME (100)  6 Polymer 2  Quencher 6  PGMEA (400)  80  30  3.4  (100)  (7.48)  CyH (2,000)  PGME (100)  7 Polymer 2  Quencher 7  PGMEA (400)  80  30  3.3  (100)  (8.22)  CyH (2,000)  PGME (100)  8 Polymer 2  Quencher 8  PGMEA (400)  80  31  3.4  (100)  (9.29)  CyH (2,000)  PGME (100)  9 Polymer 2  Quencher 9  PGMEA (400)  80  29  3.5  (100)  (10.20)  CyH (2,000)  PGME (100)  10 Polymer 2  Quencher 10  PGMEA (400)  80  34  3.2  (100)  (7.95)  CyH (2,000)  PGME (100)  11 Polymer 2  Quencher 11  PGMEA (400)  80  36  3.0  (100)  (13.93)  CyH (2,000)  PGME (100)  12 Polymer 2  Quencher 12  PGMEA (400)  80  28  3.2  (100)  (9.57)  CyH (2,000)  PGME (100)  13 Polymer 2  Quencher 13  PGMEA (400)  80  27  3.3  (100)  (9.81)  CyH (2,000)  PGME (100)  14 Polymer 3  Quencher 7  PGMEA (400)  80  29  3.2  (100)  (8.22)  CyH (2,000)  PGME (100)  15 Polymer 1 PAGl  Quencher 7  PGMEA (2,000)  90  38  4.2  (100)  (30)  (8.22)  DAA (500)  16 Polymer 1 PAG2  Quencher 7  PGMEA (2,000)  90  31  4.1  (100)  (30)  (8.22)  DAA (500)  17 Polymer 1 PAG3  Quencher 7  PGMEA (2,000)  90  34  4.2  (100)  (30)  (8.22)  DAA (500)  18 Polymer 1 PAG4  Quencher 7  PGMEA (2,000)  90  30  4.2  (100)  (30)  (8.22)  DAA (500)  19 Polymer 4 PAGl  Quencher 7  PGMEA (2,000)  120  48  5.1  (100)  (12)  (4.22)  DAA (500) 