152  US 8,900,791 B2  151  TABLE 2-continued  *based on the total solid content of the resist composition  KrF positive exposure  (A2)  (F)  (G)  (H)  (Al)  Acid  (B)  Basic  Surfactant  Solvent  Resolving  Acid  generator Resin  compound  (0.1  (mass  Sensitivity  power  Roughness Pattern  generator  (0.1 g)  (10 g)  (0.02 g)  mass%)*  ratio)  (mJ/cm 2 )  (y)  (nm)  profile  Ex. llC  Al-1  z  R-8  C-1  W-1  Al/Bl  22.0  6.0  4.5  Rectangle  (0.2 g)  (6/4)  Ex. 12C  Al-1  z  R-14  C-1  W-1  Al/Bl  22.0  6.0  4.5  Rectangle  (0.2 g)  (6/4)  Ex. 13C  Al-1  z  R-17  C-1  W-2  Al/Bl  22.0  6.0  4.5  Rectangle  (0.2 g)  (6/4)  Ex.14C  Al-1  R-18  C-2  W-3  Al/Bl  18.0  6.5  4.0  Rectangle  (0.3 g)  (6/4)  Ex. 15C  Al-1  z  R-2  C-1  W-4  Al/Bl  20.0  6.3  4.5  Rectangle  (0.2 g)  (6/4)  Ex. 16C  Al-1  Z33  R-2  C-1  W-1  Al/Bl  20.0  6.3  4.0  Rectangle  (0.2 g)  (6/4)  Ex. 17C  Al-10  R-18 (H)  C-1  W-1  A2/B2  20.0  6.1  4.0  Rectangle  (0.3 g)  (6/4)  Ex. 18C  Al-11  R-18 (H)  C-1  W-1  A2/B2  21.0  5.2  5.0  Rectangle  (0.3 g)  (6/4)  Ex. 19C  Al-12  R-18 (H)  C-1  W-1  A3/Bl  21.0  5.5  5.5  Rectangle  (0.3 g)  (6/4)  Ex.20C  Al-13  R-18 (H)  C-1  W-1  A4/Bl  22.0  5.3  5.2  Rectangle  (0.3 g)  (6/4)  Ex.21C  Al-14  R-18 (H)  C-1  W-1  Al/B2  18.0  6.1  4.5  Rectangle  (0.3 g)  (6/4)  Ex.22C  Al-15  R-18 (H)  C-1  W-1  Al/Bl  22.0  6.0  4.5  Rectangle  (0.3 g)  (6/4)  Ex.23C  Al-16  R-18 (H)  C-1  W-1  Al/Bl  22.0  6.0  4.5  Rectangle  (0.3 g)  (6/4)  Ex.24C  Al-17  R-18 (H)  C-1  W-1  Al/Bl  22.0  6.0  4.5  Rectangle  (0.3 g)  (6/4)  Ex.25C  Al-18  R-18 (H)  C-1  W-1  Al/Bl  22.0  6.0  4.5  Rectangle  (0.3 g)  (6/4)  Ex.26C  Al-19  R-18 (H)  C-1  W-1  Al/Bl  20.0  6.0  4.5  Rectangle  (0.3 g)  (6/4)  Ex. 27C  Al-1  R-18 (L)  C-2  W-1  Al/Bl  18.0  7.0  3.5  Rectangle  (0.3 g)  (6/4)  Ex.28C  Al-1  R-10 (H)  C-1  W-1  Al/Bl  18.0  6.0  4.0  Rectangle  (0.3 g)  (6/4)  Ex.29C  Al-1  R-10 (L)  C-1  W-1  Al/Bl  18.0  7.0  3.5  Rectangle  (0.3 g)  (6/4)  Ex.30C  Al-1  R-19  C-1  W-1  Al/Bl  18.0  6.0  4.0  Rectangle  (0.3 g)  (6/4)  Ex.31C  Al-1  R-20  C-1  W-1  Al/Bl  18.0  6.1  4.0  Rectangle  (0.3 g)  (6/4)  Ex.32C  Al-1  R-21  C-1  W-1  Al/Bl  18.0  6.5  3.5  Rectangle  (0.3 g)  (6/4)  Comp. lC  Comp.  R-2  C-1  W-1  Al/Bl  23.5  3.5  7.8  Taper  Compound 1  (6/4)  (0.3 g)  Comp. 2C  Comp.  R-2  C-1  W-1  Al/Bl  23.0  3.5  7.8  Taper  Compound 2  (6/4)  (0.3 g)  Comp. 3C  Comp.  R-2  C-1  W-1  Al/Bl  20.0  4.5  7.0  Taper  Compound 3  (6/4)  (0.3 g)  Comp. 4C  Comp.  R-2  C-1  W-1  Al/Bl  20.0  4.5  7.0  Taper  Compound4  (6/4)  (0.3 g) 