US 2020/0319555 Al  20  Oct. 8, 2020  5.  The photoresist composition of claim  1,  wherein said  solid component d), said dye, is soluble in aqueous base;  wherein further said solid component b ), said photoacid  generator, is a photoacid generator based on a trihalomethyl  derivative (halo=Cl or Br) that forms an acid upon exposure  to radiation at 365 nm, in an amount sufficient to initiate  crosslinking of the film-forming binder resin, wherein the  halo moiety is chlorine or bromine; and further wherein said  solid component e) is one wherein, further, said amine  quencher or a mixture of such amine quenchers are ones  having structure (1), wherein Ri, and Ria may be individu› ally selected from H, a Cl to  CS,  alkyl, or an aryl, where  further at least one of Ri, and Ria, is Cl0 to C25 alkyl  substituent, or a -(CH$_{2}$)nOH substituent, wherein n is an  integer ranging from 2 to 4, and further wherein position 3  and 2 are connected by either a single bond or a double bond;  (1)  (1)  2.  The photoresist composition of claim  1,  wherein said  solid component e) is one wherein, further, said amine  quencher or a mixture of such amine quenchers are ones  having structure (1), wherein Ri, and Ria may be individu› ally selected from H, a Cl to  CS,  alkyl, or an aryl, where  further at least one of Ri, and Ria, is Cl0 to C25 alkyl  substituent, or a -(CH$_{2}$)nOH substituent, wherein n is an  integer ranging from 2 to 4, and further wherein position 3  and 2 are connected by either a single bond or a double bond.  f) a photoresist solvent.  4.  The photoresist composition of claim  1,  wherein said  solid component b ), said photoacid generator, is a photoacid  generator based on a trihalomethyl derivative (halo=Cl or  Br) that forms an acid upon exposure to radiation at 365 nm,  in an amount sufficient to initiate crosslinking of the film› forming binder resin, wherein the halo moiety is chlorine or  bromine; and further wherein said solid component e) is one  wherein, further, said amine quencher or a mixture of such  amine quenchers are ones having structure (1), wherein Ri,  and Ria may be individually selected from H, a Cl to  CS,  alkyl, or an aryl, where further at least one of Ri, and Ria,  is Cl0 to C25 alkyl substituent, or a -(CH$_{2}$)nOH substitu› ent, wherein n is an integer ranging from 2 to 4, and further  wherein position 3 and 2 are connected by either a single  bond or a double bond.  1.  A chemically-amplified, negative-acting, photoresist  composition, imageable by 365 nm radiation that is devel› opable in aqueous base, the photoresist composition com› prising solids components a), b ), c) d) and e) and solvent  component f);  3.  The photoresist composition of claim  1,  wherein said  solid component d), said dye, is soluble in aqueous base; and  further wherein said solid component e) is one wherein,  further, said amine quencher or a mixture of such amine  quenchers are ones having structure (1 ), wherein Ri, and Ria  may be individually selected from H, a Cl to  CS,  alkyl, or  an aryl, where further at least one ofRi, and Ria, is Cl0 to  C25 alkyl substituent, or a -(CH$_{2}$)nOH  substituent,  wherein n is an integer ranging from 2 to 4, and further  wherein position 3 and 2 are connected by either a single  bond or a double bond.  (1)  TABLE 9  Quencher’s pKa values  Quencher  Hydroxyethylimidazole (AI)  Ethy-limidazole (2EI)  Triphenylamine (TPA)  2-(2-methoxyethoxy)-N,N-bis [2-(2- methoxyethoxy)ethyl]-Ethanamine (MNNE)  N-Methyldipropylamine  N-Methyldiethanolamine (2EI)  N,N  diisopropylethylamine  Tris-isobutylamine  Diisopropylaniline (DIPA)  pKa  6.78  8.22  -3.04  6.92  9.91  8.81  10.98  9.5  4.25  a) an aqueous base soluble phenolic film-forming poly› meric binder resin having ring bonded hydroxyl  groups;  b) a photoacid generator that forms an acid upon exposure  to radiation at 365 nm, in an amount sufficient to  initiate crosslinking of the film-forming binder resin;  c) a crosslinking agent that forms a carbonium ion upon  exposure to the acid from step b) generated by exposure  to  radiation, and which comprises an etherified  melamine;  d) a dye having a molar attenuation coefficient at 365 nm  ranging from about 1.74xl0 $^{4 }$to about 0.94xl0$^{4 }$mole-i  L cm-i as measured in PGMEA  e) a quencher system consisting essentially of an amine  quencher, or a mixture of such amine quenchers, having  a pKa in water from about 6.0 to about 12, where the  amine quencher has a boiling point of at least 100°  C.,  at 1 atmosphere pressure, and comprises at least one  C2-C25 alkyl substituent, a -(CH$_{2}$)nOH substituent,  or a -(CH$_{2}$)n,---O-(CH$_{2}$)n,---O-R’ substituent or  comprises a mixture of these substituents, where n and  n’ are independently an integer ranging from 2 to 4 and  R’ is a Cl-C4 alkyl or H; 