US 10,915,021 B2  113  114  (3-1)  c~••  Rf 11  R.(JyO  x;  R402  I  +s-R403  XII  SO 3 - I  0  Rf 13  Rfl4  R404  (3-2)  -continued  (3-4)  Iv  OR.,,,o  Rf21  ~  R4!7_i+-R418  R411w  R413  SO3- Rf23  Rf24  X 11  is a single bond or a C$_{1}$-C$_{20 }$ divalent linking group  when r=l, or a C$_{1}$-C$_{20 }$tri- or tetravalent linking group when  r=2 or 3, the linking group optionally containing an oxygen,  sulfur or nitrogen atom. Rf$^{11 }$to Rf$^{14 }$are each independently  hydrogen, fluorine or trifluoromethyl, at least one of Rf$^{11 }$to  Rf 14  being fluorine or trifluoromethyl, or Rf 11  and Rf 12 ,  taken together, may form a carbonyl group.  R 402 , R 403 , R 404 , R $^{405 }$and R$^{406 }$are each independently a  C$_{1 }$-C$_{12 }$ alkyl group, C$_{2}$-C$_{12 }$ alkenyl group, C$_{2}$ -C$_{12 }$ alkynyl  group,  CcC$_{20 }$ aryl group, C$_{7}$-C$_{12 }$ aralkyl group or C$_{7}$ -C$_{12 }$ aryloxyalkyl group, in which at least one hydrogen (one or  more or even all hydrogen atoms) may be substituted by a  hydroxy, carboxy, halogen, cyano, oxo, amide, nitro, sul› tone, sulfone or sulfonium salt-containing moiety, or in  which at least one carbon may be substituted by an ether,  ester, carbonyl, carbonate or sulfonic acid ester moiety. R 402  and R$^{403 }$may bond together to form a ring with the sulfur  atom to which they are attached. The subscript r is an integer  of 1 to 3, s is an integer of 1 to 5, and t is an integer of Oto  3.  The foregoing alkyl, alkoxy, alkoxycarbonyl,  alkylsulfonyloxy, alkenyl and alkynyl groups  straight, branched or cyclic.  acyloxy,  may be  Further, sulfonium and iodonium salts of iodized ben› zene-containing fluorinated sulfonic acid having the formu- lae (3-3) and (3-4) are useful as the PAG.  In formulae (3-3) and (3-4). R$^{411 }$is each independently a  hydroxyl, C$_{1 }$-C$_{20 }$ alkyl or alkoxy group, C$_{2}$-C$_{20 }$ acyl or  acyloxy group, fluorine, chlorine, bromine, amino, or  alkoxycarbonyl-substituted amino group. R $^{412 }$is each inde› pendently a single bond or C$_{1 }$-C$_{4 }$ alkylene group. R$^{413 }$is a  single bond or C$_{1}$-C$_{20 }$divalent linking group when u=l, or  a C$_{1}$-C$_{20 }$tri- or tetravalent linking group when u=2 or 3, the  linking group optionally containing an oxygen, sulfur or  nitrogen atom.  Rf$^{21 }$to Rf$^{24 }$are each independently hydrogen, fluorine or  trifluoromethyl, at least one ofR:f2$^{1 }$to Rf$^{24 }$being fluorine or  trifluoromethyl, or Rf2 $^{1 }$and Rf2 2 , taken together, may form  a carbonyl group.  R 414 , R 415 , R 416 , R $^{417 }$and R$^{418 }$are each independently a  C$_{1 }$-C$_{12 }$alkyl group, C$_{2}$-C$_{12 }$alkenyl group,  CcC$_{20 }$ aryl group  or C$_{7}$-C$_{12 }$ aralkyl or aryloxoalkyl group, in which at least  one hydrogen ( one or more or even all hydrogen atoms) may  be substituted by a hydroxyl, carboxyl, halogen, cyano, oxo,  amide, nitro, sultone, sulfone, or sulfonium salt-containing  moiety, or in which at least one carbon may be substituted  by an ether, ester, carbonyl, carbonate or sulfonic acid ester  moiety. R$^{414 }$and R$^{415 }$may bond together to form a ring to  with the sulfur atom to which they are attached. The  subscript u is an integer of 1 to 3, v is an integer of 1 to 5,  and w is an integer of 0 to 3.  The foregoing alkyl, alkoxy, acyl, acyloxy and alkenyl  groups may be straight, branched or cyclic.  The cation moiety in the sulfonium salt having formula  (3-1) or (3-3) is as exemplified above for the cation moiety  in formula (d4). The cation moiety in the iodonium salt  having formula (3-2) or (3-4) is as exemplified above for the  cation moiety in formula ( d5).  Examples of the anion moiety in the onium salts having  formulae (3-1) to (3-4) are given below, but not limited  thereto.  In formulae (3-1) and (3-2), R$^{401 }$is hydrogen, hydroxyl,  carboxyl, nitro, cyano, fluorine, chlorine, bromine, amino  group, or a C$_{1 }$-C$_{20 }$alkyl, C$_{1 }$-C$_{20 }$alkoxy, C$_{2}$-C$_{20 }$alkoxycar› bonyl, C$_{2}$ -C$_{20 }$ acyloxy or C$_{1 }$-C$_{4 }$ alkylsulfonyloxy group,  which may contain fluorine, chlorine, bromine, hydroxy,  amino or alkoxy moiety, or -NR 407  -C(=O)-R 408  or 25  -NR$^{407}$C(=O)-O-R 408 , wherein R $^{407 }$is hydrogen, or a  C$_{1 }$-C$_{6 }$ alkyl group which may contain halogen, hydroxy,  alkoxy, acyl or acyloxy moiety, R$^{408 }$is a C$_{1 }$-C$_{16 }$ alkyl or  C$_{2}$-C$_{16 }$ alkenyl group, or CcC$_{12 }$ aryl group, which may  contain halogen, hydroxy, alkoxy, acyl or acyloxy moiety.  (3-3)  Iv  OR.,,,o  Rf21  ~  R414  I  +s-R415  R411w  R413  so 3 - I  Rf23  Rf24  R416  b--<-t  F2C-SO3- F2C-SO3-