313  US 9,285,679 B2  314  TABLE4  TABLES  *The content (0.1 mass%) of surfactant is the content based on the total amount of solid matters in the resist  composition.  In  the following Tables, the same applies.  [Electron Beam Exeosure; eositive  l  Acid- Basic  Compo- Acid  Increasing  Compound Surfactant  Solvent  sition  Generator  Agent  Resin  (y)  (0.02 g)  (0.1 mass%)*  (mass ratio)  Pl  z5  al  Pol-4  Bl  W-1  Sl  (0.3 g)  (0.3 g)  (9.7 g)  P2  z5  a2  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P3  z5  a3  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P4  z5  a4  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  PS  z5  a5  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P6  z5  a6  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P7  z5  a7  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  PS  z5  a8  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P9  z5  a9  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  PIO  z5  alO  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  Pll  z5  all  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P12  z5  a12  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P13  z67  al  Pol-5  Bl  W-1  Sl/S4  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P14  z68  al  Pol-6  BS  W-1  Sl/S3  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P15  z61  al  Pol-9  B2  W-1  Sl/S5  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  Cont. of Table 4  Acid- Basic  Solvent  Compo- Acid  Increasing  Compound Surfactant  (mass  sition  Generator  Agent  Resin  (y)  (0.02 g)  (0.1 mass%) ratio)  P16  z63  al  Pol-11  B2  W-1  Sl/S2/S6  (0.3 g)  (0.3 g)  (9.7 g)  (6/3/1)  P17  z42  al  Pol-10  B2  W-2  Sl/S7  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P18  z67  al  Pol-2  B3  W-2  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P19  z67  al  Pol-3  B4  W-3  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P20  z67  al  Pol-7  BS  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P21  z67  al  Pol-8  B3  W-3  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P22  z37  a4  Pol-11  B4  none  Sl/S2  (0.5 g)  (0.3 g)  (9.7 g)  (6/4)  P23  z45  a4  Pol-10  BS  none  Sl/S2  (0.5 g)  (0.3 g)  (9.7 g)  (6/4)  P24  z66  a4  Pol-9  B6  none  Sl/S2  (0.5 g)  (0.3 g)  (9.7 g)  (6/4)  P25  z65  a4  Pol-2  B6  none  Sl/S2  (0.5 g)  (0.3 g)  (9.7 g)  (6/4)  P26  z5  a13  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P27  z5  a14  Pol-4  Bl  W-1  Sl/S2  (0.3 g)  (0.3 g)  (9.7 g)  (6/4)  P28  z5/z63  al/a3  Pol-4/ Pol-5  Bl  W-1  Sl/S2  (0.2 g/0.1 g)  (0.2 g/0.1 g)  (4.7 g/5.0 g)  (6/4) 