Jul. 30, 2020  66  US 2020/0241418 Al  salts, iodonium salts, sulfonyldiazomethane, N-sulfonyloxy› imide, and oxime-O-sulfonate acid generators. Suitable  PAGs are as exemplified in U.S. Pat. No.  7,537,880 (JP-A  2008-111103, paragraphs [0122]-[0142]).  [0112]  Also sulfonium salts having the formula  (1-1)  and  iodonium salts having the formula  (1-2) are useful PAGs.  [0113]  In formulae  (1-1)  and (1-2), R$^{101 }$to R$^{105 }$are each  independently a C$_{1 }$-C$_{20 }$ monovalent hydrocarbon group  which may contain a heteroatom. Any two of  R  101 ,  R  $^{102 }$and  R $^{103 }$may bond together to form a ring with the sulfur atom  to which they are attached. The monovalent hydrocarbon  group may be straight, branched or cyclic, and examples  thereof are as exemplified above for  R $^{21 }$to  R $^{28 }$in formulae  (dl) to (d3).  [0114]  Examples of the cation of the sulfonium salt having  formula  (1-1)  are shown below, but not limited thereto.  (1-1)  (1-2)  R104  I  +1  x- i  RIOS  -continued 