US 7,649,118 B2  93  94  -continued  -continued  (N-12)  (N-23)  (N-24)  (N-13)  (N-l 4 )  Fluoroalkyl onium salt having phosphorus atom as its cen- ter element:  (P-1)  (P-2)  (P-3)  (P-4)  (P-5)  (P-6)  (P-7)  (P-8)  (N-22)  (N-21)  (N-20) 45  (N-19)  (N-18)  (N-17)  (N-16)  (N-15)  I  x- ccF2J2CF3  ~  j  x- NC--o~-CF3  ~  j  x- Me  nN-CH2(CF2)4CF3  )--J  x- Me  Bu  Bu-!+-CH2CF3  I  Bu  x- Bu  Bu -!+-(CF2)sCFCF3  I  I  Bu  x- CF3  Et  Et-!+-(CF2JiCF3  I  Et  x- Me  Me-!+-CF2CF3  I  Me  x- Me  Me  CF3-!+-CH2CH2-!+-CF3  I  I  Me  Me  x- x- Bu  Bu-!+-CF3  I  Bu  x- Me  Me-!+-CF3  I  Me x-