449  US 9,323,150 B2  450  TABLE 4-continued  Resist com12osition  Evaluation result  Surfac- Solvent  Photoacid  Basic  tant  Sensi- Resin (Aa) Resin (Ab)  (mass  generator  compound  (0.01  tivity  Pattern  LER  (5 mass%) (58 mass%)  ratio)  (35 mass%)  (2 mass%) mass%)  (mJ/cm) 2  shape  (nm)  Ex.58  Aa-32  Ab-120  S-1/S-3  Y-5  N-8  W-3  11  Rectangle  3.6  (70/30)  Ex.59  Aa-37  Ab-14  S-1/S-2  B-119  N-10  W-4  11  Rectangle  3.5  (80/20)  * $^{1}$Ex. 60  Aa-37  Ab-14  S-1/S-2  B-119  N-10  W-4  14  Rectangle  4.1  (80/20)  * $^{2}$Ex. 61  Aa-37  Ab-14  S-1/S-2  B-119  N-10  W-4  18  Rectangle  4.6  (80/20)  * $^{5}$Ex. 62  Aa-40  Ab-232  S-2/S-4  N-4  W-2  17  Rectangle  4.5  (70/30)  * $^{5}$Ex. 63  Aa-40  Ab-233  S-2/S-4  N-4  W-2  13  Rectangle  4. 1  (70/30)  * $^{5}$Ex. 64  Aa-40  Ab-234  S-2/S-4  N-4  W-2  10  Rectangle  3.5  (70/30)  * $^{5}$Ex. 65  Aa-5  Ab-245  S-2/S-1  N-7  W-1  21  Rectangle  5.0  (90/10)  * $^{5}$Ex. 66  Aa-12  Ab-245  S-2/S-1  N-7  W-1  19  Rectangle  4.7  (90/10)  * $^{5}$Ex. 67  Aa-22  Ab-245  S-2/S-1  N-7  W-1  13  Rectangle  3.9  (90/10)  Ex. 68  Aa-20  Ab-143  S-4/S-1  B-118  N-9  W-3  26  Rectangle  5.7  (90/10)  Ex. 69  Aa-26  Ab-143  S-4/S-1  B-118  N-9  W-3  24  Rectangle  5.5  (90/10)  Ex. 70  Aa-38  Ab-73  S-1  B-131  N-3  W-1  17  Rectangle  4.5  Ex. 71  Aa-38  Ab-41  S-1  B-131  N-3  W-1  12  Rectangle  3.7  Ex. 72  Aa-15  Ab-37  S-3/S-2  Y-70  N-10  W-2  22  Rectangle  5.3  (90/10)  Ex. 73  Aa-15  Ab-21  S-3/S-2  Y-70  N-10  W-2  19  Rectangle  4.8  (90/10)  Ex. 74  Aa-13  Ab-97  S-1/S-2  B-149  N-5  W-4  18  Rectangle  4.6  (90/10)  Ex. 75  Aa-39  Ab-97  S-1/S-2  B-149  N-5  W-4  16  Rectangle  4.3  (90/10)  Ex. 76  Aa-28  Ab-97  S-1/S-2  B-149  N-5  W-4  13  Rectangle  3.9  (90/10)  Ex. 77  Aa-42  Ab-96  S-1/S-2  B-45  N-8  W-4  11  Rectangle  3.6  (50/50)  Ex. 78  Aa-44  Ab-167  S-1/S-4  Y-61  N-10  W-3  25  Rectangle  5.6  (80/20)  * $^{5}$Ex. 79  Aa-46  Ab-253  S-2/S-4  N-7  W-4  23  Rectangle  5.4  (90/10)  * $^{5}$Ex. 80  Aa-47  Ab-238  S-3/S-4  N-3  W-3  20  Rectangle  4.9  (80/20)  Ex. 81  Aa-65  Ab-120  S-1/S-3  Y-5  N-8  W-3  10  Rectangle  3.4  (70/30)  Ex. 82  Aa-66  Ab-120  S-1/S-3  Y-5  N-8  W-3  10  Rectangle  3.1  (70/30)  * $^{1}$Ex. 83  Aa-50  Ab-275  S-1/S-2  B-182  N-10  W-3  13  Rectangle  3.5  (80/20)  * $^{1}$Ex. 84  Aa-51  Ab-276  S-1/S-2  B-182  N-9  W-1  12  Rectangle  4.0  (70/30)  Ex. 85  Aa-52  Ab-276  S-1/S-2  B-181  N-7  W-2  16  Rectangle  3.8  (60/40)  Ex. 86  Aa-53  Ab-270  S-1/S-2  B-121  N-8  W-2  15  Rectangle  3.6  (90/10)  Ex. 87  Aa-54  Ab-273  S-1/S-2  B-179  N-4  W-4  14  Rectangle  4.1  (70/30)  Ex. 88  Aa-60  Ab-277  S-1/S-2  B-180  N-3  W-2  17  Rectangle  4.2  (50/50)  * $^{1}$Ex. 89  Aa-62  Ab-275  S-1/S-2  B-124  N-5  W-3  12  Rectangle  3.6  (80/20)  * $^{1}$Ex. 90  Aa-63  Ab-274  S-1/S-2  B-183  N-10  W-1  13  Rectangle  3.9  (90/10)  * $^{1}$Ex. 91  Aa-67  Ab-280  S-1/S-2  B-122  N-8  W-1  15  Rectangle  3.3  (70/30)  * $^{1}$Ex. 92  Aa-68  Ab-275  S-1/S-2  B-182  N-10  W-4  16  Rectangle  3.8  (80/20)  * $^{1}$Ex. 93  Aa-69  Ab-282  S-1/S-2  B-119  N-3  W-4  15  Rectangle  3.5  (60/40)  Ex.94  Aa-70  Ab-281  S-1/S-2  B-121  N-10  W-3  13  Rectangle  3.2  (80/20) 