24  US 9,052,590 B2  23  bivalent nitrogenous nonaromatic heterocyclic group or a  group composed of a combination of these.  zothiophene, benzofuran, benzopyrrole, triazine, imidazole,  benzimidazole, triazole, thiadiazole or thiazole.  Particular examples of the -NR- and bivalent nitrog› enous nonaromatic heterocyclic group as connecting groups  represented by L$_{21 }$ are the same as mentioned above in con- nection with X $_{11}$. Preferred examples are also the same.  Most preferably, L$_{21 }$is a single bond, an alkylene group, a  bivalent aliphatic hydrocarbon ring group, a bivalent aro› matic ring group, a group composed of a combination of two  or more of these (for example, -alkylene-bivalent aromatic  ring group-, -bivalent aliphatic hydrocarbon ring group-alky› lene- or the like), or a group composed of two or more of these  combined through---OCO-, --COO-,  ---0-or -S-as  a connecting group (for example, -alkylene-OCO-bivalent  aromatic ring group-, -alkylene-S-bivalent aromatic ring  group-, -alkylene-O-alkylene-bivalent aromatic ring group- or the like).  Preferably, L$_{22 }$is an alkylene group, bivalent aromatic ring  group or group composed of a combination of these whose  hydrogen atoms are partially or entirely substituted with a  fluorine atom or a fluoroalkyl group (more preferably a per› fluoroalkyl group). An alkylene group and bivalent aromatic  ring group at least partially or entirely substituted with a  fluorine atom are especially preferred. L$_{22 }$is most preferably  an alkylene group or bivalent aromatic ring group, 30 to 100%  of the hydrogen atoms of which are substituted with a fluorine  atom.  Particular examples of the alkylene group, alkenylene  group, bivalent aliphatic hydrocarbon ring group, bivalent  aromatic ring group or group composed of a combination of  two or more of these, represented by L$_{22 }$are the same as set  forth above with respect to L$_{12 }$of general formula  (I).  Particular examples of the -NR- and bivalent nitrog› enous nonaromatic heterocyclic group as connecting groups  represented by L$_{22 }$are the same as mentioned above in con› nection with X$_{11}$ . Preferred examples are also the same.  Z$_{2 }$represents a moiety that when exposed to actinic rays or  radiation, is converted to a sulfonate group. Particular  examples of the moiety represented by Z$_{2 }$ are the same as set  forth above with respect to Z$_{1 }$ of general formula  (I).  L$_{22 }$represents an alkylene group, an alkenylene group, a  bivalent aliphatic hydrocarbon ring group, a bivalent aro- matic ring group or a group composed of a combination of  two or more of these, provided that the hydrogen atoms of  these groups may be partially or entirely substituted with a  substituent selected from among a fluorine atom, a fluoro› alkyl group, a nitro group and a cyano group, and provided  that in the group composed of a combination, two or more  groups combined together may be identical to or different  from each other and may be linked to each other through, as  a connecting group, -0-, -S-, -CO-, -SO$_{2}$ -,  -NR- (R represents a hydrogen atom or an alkyl group), a  With respect to the polymerizable monomer units corre› sponding to the repeating units of general formula (II),  examples of the sulfonate units generated by the cleavage of  a cation upon exposure to actinic rays or radiation will be  shown below.  (11-1)  F  F  HO-~  ~____r\_  II  F  F II~-’\  0  F  0  (11-2)  F  F  HO-~  ~-O____r\_  IIF  FIi  ~- ’\  0  F  0  (11-3)  (11-4)  F  F  (11-5)  HO-~  ~-O_____r-\___l__O-(CH2)2-~-0____r\_  II  F  F II  ~- II  ~- ’\  0  F  O  0  (11-8)  (11-6)  F  F  HO-~  ~-0-Co’  II F  F II  _  \  0  F  0  (11-7) 