46  US 8,691,490 B2  45  RL01 and  RL02,  RL01 and  RL03,  and  RL02  and  RLo3  may be  bonded with each other to form a ring together with a carbon  atom or oxygen atom to which they are bonded. When they  form a ring, each RL 01 ,  RL 02  and  RL 03  related to the ring  formation represents a linear or a branched alkylene group  having 1 to 18, preferably 1 to 10 carbon atoms.  In the formula (L2),  RL $^{04 }$represents a tertiary alkyl group  having 4 to 20, preferably 4 to 15 carbon atoms, a trialkylsilyl  group whose each alkyl group has 1 to  6  carbon atoms, an  oxoalkyl group having 4 to 20 carbon atoms, or the group  represented by the foregoing general formula (Ll). As the  tertiary alkyl group, specifically, tert-butyl, tert-amyl, 1,1- diethylpropyl, 2-cyclopentylpropane-2-yl, 2-cyclohexylpro› pane-2-yl,  2-(bicyclo[2.2.l]heptane-2-yl)propane-2-yl,  2-(adamantane-l-yl)propane-2-yl, 1-ethylcyclopentyl, 1-bu› tylcyclopentyl,  1-ethylcyclohexyl,  1-butylcyclohexyl,  1-ethy 1-2-cyclopenteny 1, 1-ethy 1-2-cyclohexeny 1, 2-methy 1- 2-adamanty l, 2-ethyl-2-adamantyl and the like are exempli› fied. As the trialkylsilyl group, specifically, trimethylsilyl,  triethylsilyl, dimethyl-tert-butylsilyl and the like are exem› plified. As the oxoalkyl group, specifically, 3-oxocyclohexyl,  4-methy 1-2-oxooxane-4-yl, 5-methy 1-2-oxooxolane-5-y 1 and  the like are exemplified. "y" represents an integer of Oto 6.  In the formula (L2-2), A is the following groups, and  RL 04  represents the same as before.  As linear or branched one among the acid-labile groups  represented by the foregoing formula (Ll), specifically fol› lowing groups are exemplified.  In the formula (L4 ),  RL $^{06 }$represents a linear, a branched, or  a cyclic alkyl group having 1 to 8 carbon atoms, optionally  substituted, or aryl group having  6  to 20 carbon atoms,  optionally substituted, specifically the same as  RLos  and the  like. Each RL 07  to RL 16  independently represents a hydrogen  atom or a monovalent hydrocarbon group having 1 to 15  carbon atoms, specifically, a linear, a branched or a cyclic  alkyl group such as methyl, ethyl, propyl, isopropyl, n-butyl,  sec-butyl, tert-butyl, tert-amyl, n-pentyl, n-hexyl, n-octyl,  n-nonyl, n-decyl, cyclopentyl, cyclohexyl, cyclopentylm› ethyl, cyclopentylethyl, cyclopentylbutyl, cyclohexylmethyl,  cyclohexylethyl, and cyclohexylbutyl, and a group in which  part of hydrogen atoms thereof is substituted with hydroxyl,  alkoxy, carboxyl, alkoxycarbonyl, oxo, amino, alkylamino,  cyano, mercapto, alkylthio, sulfa and the like. Each two of  RLo 7  to RL 16  may be bonded with each other to form a ring  together with a carbon atom to which they are bonded (for  example, RLo7 and RLOs, RLo7 and  RLo9,  RLos and  RLio, RLo9  and  RLI 0 ,  RL 11  and RL 12 , RL 13  and RL 14 , etc.) In this case, a  group which is related to the bond represents a divalent hydro› carbon group having 1 to 15 carbon atoms, specifically, a  group that one hydrogen atom is removed from the above› mentioned examples of a monovalent hydrocarbon group and  $_{the like. In addition, each two ofRL}$07 to RL 16  in which carbon  atoms to be bonded with them are located adjacently may be  bonded without any groups between to form a double bond  (for example, RL 07  and  RL 09 , RL $^{09 }$and  RLI 5 ,  RL 13  and RL 15 ,  etc.).  (In the formula, the broken lines represent bonding hands.  W represents an oxygen atom or CH 2 , and M represents an  integer of 1 to 3.)  In the formula (L3 ),  RLos  represents a linear, a branched, or  a cyclic alkyl group having 1 to 8 carbon atoms, optionally  substituted, or an aryl group having  6  to 20 carbon atoms,  optionally substituted. As the optionally substituted alkyl  group, specifically, a linear, a branched or a cyclic alkyl group  such as methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl,  tert-butyl, tert-amyl, n-pentyl, n-hexyl, cyclopentyl, and  cyclohexyl, and a group in which part of hydrogen atoms  thereof is substituted with hydroxyl, alkoxy, carboxyl,  alkoxycarbonyl, oxo, amino, alkylamino, cyano, mercapto,  alkylthio, sulfa and the like are exemplified. As the optionally  substituted aryl group, specifically, phenyl, methylphenyl,  naphthyl, anthryl, phenanthryl, pyrenyl and the like are exem- plified. "m" represents O or 1 and "n" is any of 0, 1, 2 or 3,  which satisfy 2m+n=2 or 3.  .,,-yo)=o  ,,,-~OH _  l_  0  -continued 