Mar. 26, 2015  US 2015/0086912 Al  85  an integer of 2 or more, a group obtained by subtracting  arbitrary (m-1) hydrogen atom(s) from the above divalent  aromatic cyclic group is exemplified.  [0406]  m represents an integer of 1 or more, preferably an  integer of 1 to 5, more preferably represents 1 or 2, and most  preferably 1.  [0407]  In the repeating unit represented by formula (e),  whenAr$_{3 }$ represents a phenylene group, the bonding position  of-OH to the benzene ring of Ar$_{3 }$ may be the para-position,  meta-position, or ortho-position to the bonding position with  the polymer main chain of the benzene ring, but the para› position or meta-position is preferred, and the para-position is  most preferred.  [0408]  The repeating unit (C) is a repeating unit having an  alkali-soluble group, which has a function to control alkali  developability of the resist.  [0409]  The specific examples of the repeating unit (C) are  shown below, but the invention is not restricted thereto.  [0410]  Of the above specific examples, preferred examples  ~~~~~~~=~~~~=~~~~~  aromatic cyclic group represented by Ar$_{1 }$ or Ar$_{3 }$ is an unsub› stituted phenylene group, which are shown below.  [0411]  The content of the repeating unit (C) in the resin (P)  is preferably in the range of 3 mo! % to 98 mo! %, more  preferably in the range of 10 mo!% to 80 mo!%, and still  more preferably in the range of25 mo!% to 70 mo!%, based  on all the repeating units in the resin (P).  [0412]  It is also preferred for the resin (P) for use in the  invention to contain the following repeating unit as the repeat› ing unit other than the repeating units (A) to (C).  [0413]  For example, a repeating unit having a group  capable of decomposing by the action of an alkali developer  to increase solubility in an alkali developer is exemplified. As  such a group, a group having a lactone structure and a group  having a phenyl ester structure are exemplified. As the repeat› ing nnit having a group capable of decomposing by the action  of an alkali developer to increase solubility in an alkali devel› oper, a repeating unit represented by the following formula  (All) is more preferred.  OH  OH  OMe  OH  OH  OCOCH3  OH  Me  OH  OCOCH3  OH  OH  OH  HO  -continued 