42  41  US 9,513,547 B2  12 carbon atoms (for example, a cyclohexylene group, a  norbornylene group, and an adamantylene group), examples  of the alkenylene group of A include alkenylene groups  having 2 to 12 carbon atoms (for example, an ethenylene  group, a propenylene group, and a butenylene group), and  examples of the arylene group of A include arylene groups  having 6 to 10 carbon atoms (for example, a phenylene  group, a tolylene group, and a naphthylene group), respec› tively.  In the compounds generating acid upon decomposing  caused by irradiation with actinic rays or radiation, the acid  generator (B) is more preferably a compound represented by  the general formula  (ZIII)  to  (ZVI)  from the viewpoint of a  good solubility with respect to a developer containing the  organic solvent of the unexposed portions and the tendency  not to generate development defects, that is, preferably a  nonionic compound. Among these, the compound is more  preferably a compound represented by the general formula  (ZV)  or  (ZVI).  In addition, from the viewpoint of improving the acid  generating efficiency and the acid strength, the acid genera› tor (B) preferably has a structure generating an acid con› taining a fluorine atom.  Specific examples of the acid generator (B) are shown  below; however, the invention is not limited thereto.  Moreover, a compound having a plurality of structures  represented by the general formula  (ZVI)  is also preferred in  the invention. For example, either of R$_{209 }$ or R$_{210 }$ of the  compound represented by the general formula (ZVI) may be  a compound having a structure bonded with either ofR$_{209 }$or  R$_{210 }$ of another compound represented by the general for- mula (ZVI).  [Chem. 26]  (  Q-s+ CH3S03- (Bl)  (  Q-s+ CsH17S03- (B3)  (  Q-s+ C3H7S03- (B5)  (  Q-s+  C12H25S03- (B7)  (  Q-s+ -03S-o- (B9)  (  Q-s+ C4H9S03- (B2)  (  Q-s+ C2HsS03- (B4)  (  Q-s+ C6H13S03- (B6)  (  Q-s+  C16H33S03- (BS)  (BIO)  --0--s+  C16H33S03- (B12)  0-0-s+  C,oH;;SO;  b  (B14)  (Bll)  (B13) 