6  US 7,504,193 B2  5  present invention, contains a repeating unit represented by  formula (I) and a repeating unit represented by formula (II):  The cycloalkyl group of R$_{2 }$ is, for example, a cycloalkyl  group having from 3 to 15 carbon atoms and specific pre› ferred examples thereof include a cyclopentyl group, a cyclo- hexyl group, a norbornyl group and an adamantyl group.  The alkoxy group of R$_{2 }$ is, for example, an alkoxy group  having from  1  to 8 carbon atoms and examples thereof  include a methoxy group, an ethoxy group, a propoxy group,  a butoxy group, a pentyloxy group, a hexyloxy group and a  cyclohexyloxy group.  The aryl group ofR$_{2 }$ is, for example, an aryl group having  from 6 to 15 carbon atoms and specific preferred examples  thereof include a phenyl group, a tolyl group, a naphthyl  group and an anthryl group.  The acyl group ofR$_{2 }$ is, for example, an acyl group having  from 2 to 8 carbon atoms and specific preferred examples  thereof include a formyl group, an acetyl group, a propanoyl  group, a butanoyl group, a pivaloyl group and a benzoyl  group.  These groups each may have a substituent and preferred  examples of the substituent include a hydroxyl group, a car› boxyl group, a halogen atom (e.g., fluorine, chlorine, bro› mine, iodine) and an alkoxy group ( e.g., methoxy, ethoxy,  propoxy, butoxy ). In the case of a cyclic structure, examples  of the substituent further include an alkyl group (preferably  having from  1  to 8 carbon atoms).  The alkyl group, cycloalkyl group and aryl group of Ra and  Rb are the same as those described for R$_{2}$ .  The organic group of X is preferably an organic group  having from  1  to  40  carbon atoms and may be an acid› decomposable group or a non-acid-decomposable group.  In the case of anon-acid-decomposable group, examples of  the organic group include the same organic groups as those  for the non-acid-decomposable group ofR$_{2 }$ (since this is an  organic group, a halogen atom is not included).  Also, examples thereofinclude an alkyl group, a cycloalkyl  group, an alkenyl group, an aryl group, an alkyloxy group  (excluding -0-tertiary alkyl group), an acyl group, a  cycloalkyloxy group, an alkenyloxy group, an aryloxy group,  an alkylcarbonyloxy group, an alkylamidomethyloxy group,  an alkylamide group, an arylamidomethyl group and an ary› lamide group.  Of these non-acid-decomposable groups, preferred are an  acyl group, an alkylcarbonyloxy group, an alkyloxy group, a  cycloalkyloxy group, an aryloxy group, an alkylamideoxy  group and an alkylamide group, and more preferred are an  acyl group, an alkylcarbonyloxy group, an alkyloxy group, a  cycloalkyloxy group and an aryloxy group are.  In the non-acid-decomposable group, the alkyl group is  preferably an alkyl group having from  1  to  4  carbon atoms,  such as methyl group, ethyl group, propyl group, n-butyl  group, sec-butyl group and tert-butyl group; the cycloalkyl  group is preferably a cycloalkyl group having from 3 to  10  carbon atoms, such as cyclopropyl group, cyclobutyl group,  cyclohexyl group and adamantyl group; the alkenyl group is  preferably an alkenyl group having from 2 to  4  carbon atoms,  such as vinyl group, propenyl group, ally! group and butenyl  group; the aryl group is preferably an aryl group having from  6 to  14  carbon atoms, such as phenyl group, xylyl group,  toluyl group, cumenyl group, naphthyl group and anthracenyl  group; and the alkoxy group is preferably an alkoxy group  having from  1  to  4  carbon atoms, such as methoxy group,  ethoxy group, hydroxyethoxy group, propoxy group, hydrox› ypropoxy group, n-butoxy group, isobutoxy group and sec› butoxy group.  The alkyl group of R$_{2 }$ is, for example, an alkyl group  having from  1  to 8 carbon atoms and specific preferred  examples thereof include a methyl group, an ethyl group, a  propyl group, an n-butyl group, a sec-butyl group, a hexyl  group and an octyl group.  wherein  R$_{1 }$ represents a hydrogen atom, a methyl group, a cyano  group, a halogen atom or a perfluoro group,  whenn is an integer of2 to  4,  multiple R$_{2}$s may be the same  or different, and  R$_{1 }$ and X in formula (II) may be the same as or different  from R$_{1 }$ and X in formula (I), respectively.  The perfluoro group ofR$_{1 }$ is preferably a perfluoromethyl  group or a perfluoroethyl group. R$_{1 }$ is preferably a hydrogen  atom, a methyl group or a  CmF $_{2}$m+l  group (mis preferably  1  ),  more preferably a hydrogen atom or a methyl group.  R$_{2 }$ represents a non-acid-decomposable group. The non› acid-decomposable group means a group which is not an  acid-decomposable group ( a group of decomposing under the  action of an acid to generate an alkali-soluble group), that is,  a group which does not produce an alkali-soluble group such  as hydroxyl group and carboxyl group by decomposing under  the action of an acid generated from a photoacid generator or  the like upon exposure.  Examples of the non-acid-decomposable group of R$_{2 }$ include a halogen atom, an alkyl group, a cycloalkyl group, an  aryl group, an alkoxy group, an acyl group, ---OC(=O)Ra,  -OC(=O)ORa,  ----C(=O)ORa,  ----C(=O)N(Rb)Ra,  -N(Rb)C(=O)Ra, -N(Rb)C(=O)ORa, -N(Rb)S0$_{2}$Ra,  -SRa, -S0$_{2}$Ra, -S0$_{3}$Ra and-S0$_{2}$N(Rb)Ra. A hydro- gen atom is not included in the non-acid-decomposable  group.  Ra represents an alkyl group, a cycloalkyl group or an aryl  group.  Rb represents a hydrogen atom, an alkyl group, a  cycloalkyl group or an aryl group.  R$_{2 }$ represents a non-acid-decomposable group,  X represents a hydrogen atom or an organic group,  m represents an integer of  1  to  4,  n represents an integer of  1  to  4,  provided that 2~n+m~5,  p represents an integer of  1  to  4,  when m or p is an integer of 2 to  4,  multiple Xs may be the  same or different,  (I)  (II) 