TABLE 3-2-continued  TABLE3-2  TABLE4  272  271  US 9,052,590 B2  (EB ex12osure) resistance  Resolving  Config- Aging  Etching  Sensitivity  power  uration of  LER stability  resis- (µC/cm 2 )  (nm)  pattern  (nm)  of resist  tance  Ex.24  27.5  65  Rectangle  5.6  Ex. 25  24.1  60  Rectangle  5.2  Ex.26  23.6  55  Rectangle  4.3  Ex. 27  22.9  55  Rectangle  4.2  Ex.28  18.8  55  Rectangle  4.7  Ex.29  24.3  60  Rectangle  4.8  Ex.30  24.0  55  Rectangle  4.4  Ex.31  24.2  60  Rectangle  4.4  Ex.32  21.7  60  Rectangle  5.0  Ex. 33  24.2  60  Rectangle  4.3  Ex.34  25.1  60  Rectangle  4.3  Ex. 35  23.2  55  Rectangle  4.1  Ex.36  23.6  55  Rectangle  4.1  Ex.37  23.5  55  Rectangle  4.2  Comp.!  29.8  65  Taper  6.0  X  Comp. 2  29.9  80  Taper  7.5  Comp. 3  43.6  65  Rectangle  6.3  X  Comp. 4  51.0  60  Rectangle  6.1  X  Comp. 5  52.2  60  Rectangle  6.2  X  Comp. 6  63.4  60  Rectangle  6.0  X  Comp. 7  66.0  60  Rectangle  6.0  X  (EB ex12osure) resistance  Resolving  Config- Aging  Etching  Sensitivity  power  uration of  LER stability  resis- (µC/cm 2 )  (nm)  pattern  (nm)  of resist  tance  Ex.1  19.6  70  Rectangle  6.0  Ex.2  14.3  75  Rectangle  6.4  Ex. 3  20.5  70  Rectangle  6.1  Ex.4  19.2  65  Rectangle  5.8  Ex. 5  15.5  70  Rectangle  6.0  Ex. 6  17.9  70  Rectangle  5.9  Ex. 7  19.8  65  Rectangle  5.8  Ex. 8  19.1  65  Rectangle  5.9  Ex.9  17.4  70  Rectangle  6.0  Ex.10  18.6  60  Rectangle  5.1  Ex.11  17.9  60  Rectangle  5.0  Ex.12  13.7  60  Rectangle  5.5  Ex. 13  17.2  60  Rectangle  5.3  Ex.14  19.0  60  Rectangle  5.2  Ex. 15  19.3  65  Rectangle  5.4  Ex. 16  13.6  60  Rectangle  5.4  Ex.17  19.3  65  Rectangle  5.3  Ex. 18  20.1  65  Rectangle  5.3  Ex.19  18.2  60  Rectangle  4.9  Ex.20  18.5  60  Rectangle  4.8  Ex.21  18.6  60  Rectangle  4.9  Ex.22  19.0  60  Rectangle  5.1  Ex.23  20.4  60  Rectangle  5.2  (EUV exposure)  Organic  Basic  solvent  Total  Resin (P)  compound  (D)  Surfactant  solid  [99.85  [0.1  [mass  [0.05  cone.  Sensitivity Configuration  mass%]  mass%)]  ratio]  mass%]  (mass%)  (mJ/cm 2 )  of pattern  Ex.38  P-10  TBAH  Sl/S2  W-2  4.0  22.3  Rectangle  [40/60]  Ex.39  P-11  TOA  Sl/S2  W-1  4.0  20.8  Rectangle  [40/60]  Ex.40  P-12  TBAH  Sl/S2/S3  W-3  4.0  16.6  Rectangle  [30/60/10]  Ex.41  P-13  TOA  Sl/S2  W-1  4.0  21.9  Rectangle  [40/60]  Ex.42  P-14  TOA  Sl/S2  W-2  4.0  22.7  Rectangle  [40/60]  Ex. 43  P-15  TBAH  Sl/S2  W-3  4.0  23.2  Rectangle  [40/60]  Ex.44  P-16  TOA  Sl/S2/S3  W-1  4.0  16.5  Rectangle  [30/60/10]  Ex. 45  P-17  TOA  Sl/S2  W-2  4.0  24.0  Rectangle  [40/60]  Ex.46  P-18  TBAH  Sl/S2  W-1  4.0  25.6  Rectangle  [40/60]  Ex.47  P-19  TBAH  Sl/S2  W-3  4.0  21.9  Rectangle  [40/60]  Ex.48  P-20  TOA  Sl/S2/S3  W-1  4.0  22.7  Rectangle  [30/60/10]  Ex.49  P-21  TOA  Sl/S2  W-2  4.0  22.4  Rectangle  [40/60] 