TABLE 2-continued  TABLE2  TABLE3  *  Pattern  was  not formed.  Metal salt/polymer/acid  generator/basic  compound/crosslinker  Solvent  (pbw)  (pbw)  Comparative  magnesium stearate(30)  acetone(6,000)  Resist 1  Blending polymer 1 (100)  Comparative  magnesium stearate(30)  2-metboxyetbanol(5,000)  Resist 2  Blending polymer 1 (100)  Comparative  magnesium stearate(30)  metbylene chloride (5,000)  Resist 3  Blending polymer 1 (100)  Comparative  Blending polymer  PGMEA(4,000)  Resist 4  1(100)/PAG1(8)/Amine  1 (0.6)/Crosslinker(8.0)  Metal salt/polymer/acid  generator/basic  compound/ crosslinker  Solvent  (pbw)  (pbw)  Comparative  Hydrogensilsesquioxane(l00)  MEK(7,000)  Resist 5  Comparative  Blending silsesquioxane  PGEE(5,000)  Resist 6  resin 1(100)  Comparative  Blending silsesquioxane- PGEE(5,000)  Resist 7  titanium oxide resin 1(100)  Comparative  Blending silsesquioxane- PGEE(5,000)  Resist 8  zirconium oxide resin 1(100)  Comparative  Blending silsesquioxane- PGEE(5,000)  Resist 9  hafnium oxide resin 1(100)  42  US 9,164,383 B2  41  Coating  PEBtemp. Sensitivity  Resolution  LWR  Resist  uniformity  (" C.)  (µC/cm 2 )  (nm)  (nm)  Example  Example Resist 1  OK  110  80  75  3.2  2 Example Resist 2  OK  110  110  75  3.2  3 Example Resist 3  OK  90  75  75  3.2  4 Example Resist 4  OK  110  73  75  3.2  5 Example Resist 5  OK  110  68  70  3.4  6 Example Resist 6  OK  110  80  75  3.8  7 Example Resist 7  OK  110  82  70  3.8  8 Example Resist 8  OK  110  88  75  3.1  9 Example Resist 9  OK  110  68  70  3.1  10 Example Resist 10  OK  110  64  70  3.3  11 Example Resist 11  OK  130  88  70  3.6  12 Example Resist 12  OK  110  73  70  3.1  13 Example Resist 13  OK  140  79  70  3.6  14 Example Resist 14  OK  110  76  70  3.6  15 Example Resist 15  OK  100  89  70  3.2  16 Example Resist 16  OK  110  70  70  3.0  17 Example Resist 17  OK  150  82  70  3.7  18 Example Resist 18  OK  110  83  70  3.9  19 Example Resist 19  OK  110  84  70  3.2  20 Example Resist 20  OK  110  80  70  3.9  21 Example Resist 21  OK  110  70  3.9  22 Example Resist 22  OK  100  70  3.9  23 Example Resist 23  OK  110  160  70  3.5  24 Example Resist 24  OK  110  90  70  3.4  25 Example Resist 25  OK  110  80  70  3.4  26 Example Resist 26  OK  110  85  70  3.2  27 Example Resist 27  OK  110  150  70  3.8  28 Example Resist 28  OK  110  180  70  3.7  Comparative  Comparative Resist 1  NG  Example  2  Comparative Resist 2  NG  3  Comparative Resist 3  NG  4  Comparative Resist 4  OK  95  28.5  90  8.9  5  Comparative Resist 5  OK  110  300  70  3.9  6  Comparative Resist 6  OK  110  7  Comparative Resist 7  OK  110  8  Comparative Resist 8  OK  110  9  Comparative Resist 9  OK  110 