US 2019/0196326 Al  14  Jun.27,2019  -continued  -continued  Compound that Generates Acid Represented by  Formula (I) by Irradiation of Actinic Ray or  Radiation  Compound Having Ion Structure  [0093]  Two of R$_{201 }$ to R$_{203 }$ may be bonded to each other  to form a ring structure and may contain an oxygen atom, a  sulfur atom, an ester bond, an amide bond, or a carbonyl  group in the ring. Examples of the group formed by bonding  two ofR$_{201 }$to R$_{203 }$include an alkylene group (for example,  a butylene group and a pentylene group).  [0092]  The number of carbon atoms of the organic group  as R$_{201}$, R 202 , and R $_{203 }$is generally 1 to 30 and preferably  1 to 20.  [0090]  In Formula  (ZI),  [0091]  R$_{201}$ , R 202 , and R $_{203 }$each independently represent  organic groups.  [0089]  In Formula (I-A), examples of the monovalent  cation represented by  M+  include a cation represented by  Formulae  (ZI)  and  (ZII).  [0088]  In Formula (I-A), R 1 , R 2 , Rf, X, and n have the  same meaning as R 1 , R 2 , Rf,  X,  andn in Formula (I), and  M+  represents a monovalent cation.  (ZI)  (ZII)  [0087]  The compound that generates an acid represented  by Formula (I) due to the irradiation of an actinic ray or  radiation is preferably a compound represented by Formula  (I-A).  (I-A)  [0086]  A structure of a compound that generates an acid  represented by Formula (I) due to the irradiation of an  actinic ray or radiation is not particularly limited, but it is  preferable to have a compound having an ionic structure of  an onium salt such as a sulfonium salt and an iodonium salt  or a nonionic compound structure such as oxime ester and  imide ester. The onium salt is more preferably sulfonium  salt.  F3C,Y  (7  -03S~  0  0  F3C’--.J-- "’i(O  ~:><o 