In the "aliphatic cyclic group-containing acid dissociable  group", the "aliphatic cyclic group" may or may not have a  substituent. Examples of the substituent include an alkyl  group ofl to 5 carbon atoms, an alkoxy group ofl to 5 carbon  atoms, a fluorine atom, a fluorinated alkyl group of 1 to 5 60  carbon atoms, and an oxygen atom (=0).  polarity of the entire component (Al) is increased. When the  polarity of the component (Al) is increased, the solubility in  a developing solution is changed relatively. For example,  when the developing solution is an alkali developing solution,  the solubility of the component (Al) in the developing solu- tion is increased. On the other hand, when the developing  solution is an organic developing solution, the solubility of  the component (Al) in the developing solution is decreased.  The acid dissociable group is not particularly limited, and  any of the groups that have been conventionally proposed as  acid dissociable groups for the base resins of chemically  amplified resists can be used. Generally, groups that form  either a cyclic or chain-like tertiary alkyl ester with the car› boxyl group of the (meth)acrylic acid, and acetal-type acid  dissociable groups such as alkoxyalkyl groups are widely  known.  Here, a tertiary alkyl ester describes a structure in which an  ester is formed by substituting the hydrogen atom of a car› boxyl group with a chain-like or cyclic tertiary alkyl group,  and a tertiary carbon atom within the chain-like or cyclic  tertiary alkyl group is bonded to the oxygen atom at the  terminal of the carbonyloxy group (-C(=0)-0-). In this  tertiary alkyl ester, the action of acid causes cleavage of the  bond between the oxygen atom and the tertiary carbon atom,  thereby forming a carboxy group.  The chain-like or cyclic alkyl group may have a substitu› ent.  Hereafter, for the sake of simplicity, groups that exhibit  acid dissociability as a result of the formation of a tertiary  alkyl ester with a carboxyl group are referred to as "tertiary  alkyl ester-type acid dissociable groups".  Examples of tertiary alkyl ester-type acid dissociable  groups include aliphatic branched, acid dissociable groups  and aliphatic cyclic group-containing acid dissociable  groups.  The term "aliphatic branched" refers to a branched struc› ture having no aromaticity. The "aliphatic branched, acid  dissociable group" is not limited to be constituted of only  carbon atoms and hydrogen atoms (not limited to hydrocar- bon groups), but is preferably a hydrocarbon group. Further,  the "hydrocarbon group" may be either saturated or unsatur› ated, but is preferably saturated.  As an example of the aliphatic branched, acid dissociable  group, for example, a group represented by the formula  -C(R$^{71}$)(R$^{72}$)(R 73 ) can be given. In the formula, each ofR 7  to R$^{73 }$independently represents a linear alkyl group of 1 to 5  carbon atoms. The group represented by the formula  -C(R$^{71 }$)(R$^{72}$)(R 73 ) preferably has 4 to 8 carbon atoms, and  specific examples include a tert-butyl group, a 2-methyl-2- butyl group, a 2-methyl-2-pentyl group and a 3-methyl-3- pentyl group.  Among these, a tert-butyl group is particularly desirable.  The term "aliphatic cyclic group" refers to a monocyclic  group or polycyclic group that has no aromaticity.  The basic ring of the "aliphatic cyclic group" exclusive of  substituents is not limited to be constituted from only carbon  atom and hydrogen atom (not limited to hydrocarbon groups),  but is preferably a hydrocarbon group. Further, the "hydro- carbon group" may be either saturated or unsaturated, but is  preferably saturated.  [Chemical Formula 3]  Specific examples of the group (ii) include groups repre› sented by general formulas (2-1) to (2-6) shown below.  Specific examples of the group (i) include groups repre› sented by general formulas (1-1) to (1-9) shown below.  In the group (i), as the substituent bonded to the carbon  atom to which an atom adjacent to the acid dissociable group  on the ring skeleton of the aliphatic cyclic group is bonded, an  alkyl group can be mentioned. Examples of the alkyl group  include the same groups as those represented by R $^{14 }$in for- mulas (1-1) to (1-9) described later.  (ii) a group which has a branched alkylene group contain› ing a tertiary carbon atom, and a monovalent aliphatic cyclic  group to which the tertiary carbon atom is bonded.  (i) a monovalent aliphatic cyclic group in which a substitu› ent (a group or an atom other than hydrogen) is bonded to the  carbon atom on the ring skeleton to which an atom adjacent to  the acid dissociable group ( e.g.,  "---0-"  within "----C  (=0)-0- group") is bonded to form a tertiary carbon  atom; and  Examples of aliphatic cyclic group-containing acid disso- ciable groups include  As such aliphatic cyclic groups, groups in which one or  more hydrogen atoms have been removed from a monocy› cloalkane or a polycycloalkane such as a bicycloalkane, tri› cycloalkane or tetracycloalkane which may or may not be  substituted with a lower alkyl group, a fluorine atom or a  fluorinated alkyl group, may be used. Specific examples of  aliphatic cyclic hydrocarbon groups include groups in which  one or more hydrogen atoms have been removed from a  monocycloalkane such as cyclopentane or cyclohexane; and  groups in which one or more hydrogen atoms have been  removed from a polycycloalkane such as adamantane, nor› bornane, isobomane, tricyclodecane or tetracyclododecane.  In these aliphatic cyclic hydrocarbon groups, part of the car- bon atoms constituting the ring may be replaced with an  ethereal oxygen atom  (---0-).  The aliphatic cyclic group may be either a monocyclic  group or a polycyclic group.  US 9,063,416 B2  9  10  1g  (1-1)  6:H,l,  (1-2)  (1-3)  14  CH3  CH3  CH3  (1-4) 