Jul. 21, 2016  22  US 2016/0209749 Al  PAG-15  -continued  -continued  PAG-19  PAG-16  PAG-20  PAG-17  [0370]  [ Acid Diffusion Control Agent (C)]  [0371]  The active light-sensitive or radiation-sensitive  resin composition of the present invention preferably con› tains an acid diffusion control agent (C). The acid diffusion  control agent acts as a quencher which traps the acid gener› ated from an acid generator or the like at the time of exposure  and suppresses the reaction of an acid decomposable resin in  the unexposed portion, due to the excessively generated acid.  As the acid diffusion control agent, a basic compound, a low  molecular compound having a nitrogen atom and a group  leaving due to the action of an acid, a basic compound of  which the basicity is reduced or lost by irradiation with active  light or radiation, or an onium salt which becomes a relatively  weak acid with respect to an acid generator can be used.  [0372]  As the basic compound, a compound having a struc› ture represented by any one of the following Formulas (A) to  (E) can be preferably exemplified.  PAG-18  (A)  (B)  (C)  (D)  OBu  ~  ~  (5  0  F  0  0  11+11  0-"  "-~~  0  CO  ~  C  C  0  F  0  11-h  0-S  II  0  0  F  C  Q  0  F  0  11-h  0-S  (’Ys~  M  F  o  vV  0  0  F  0  11-h  0-S  II  0  0  F  0  R201  I  R2oo_N-R202  I I  -N-C=N- I  I  =c-N=C- I I  =c-N-