Jul.  17,  2014  129  US 2014/0199617 Al  [0855]  The specific examples of the groups represented by  formula (F4) include, e.g., -C(CF$_{3}$ ) $_{2}$OH, -C(C$_{2}$F$_{5}$ ) $_{2}$OH,  -C(CF $_{3}$)(CH$_{3}$)OH, and----CH(CF $_{3}$)OH are exemplified, and  -C(CF$_{3}$ ) $_{2}$OH is preferred.  [0856]  As preferred repeating unit having a fluorine atom,  the following are given.  group having 1 to 4 carbon atoms, and as an alkyl group  having a substituent, a fluorinated alkyl group can be exem› plified).  [0861]  However, at least one ofR$_{4 }$ to R$_{7 }$ represents a fluo› rine atom. R$_{4 }$ and R$_{5 }$ or R$_{6 }$ and R$_{7 }$ may form a ring.  [0862]  W  $_{2 }$represents an organic group containing at least  one fluorine atom. Specifically, atomic groups described  above in formulae (F2) to (F4) are given.  [0863]  Q represents an alicyclic structure. The alicyclic  structure may have a substituent, and may be a monocyclic  type or a polycyclic type. In the case of a polycyclic type, the  structure may be bridged. As the monocyclic type, a  cycloalkyl group having 3 to 8 carbon atoms is preferred and,  for example, a cyclopentyl group, a cyclohexyl group, a  cyclobutyl group and a cyclooctyl group can be exemplified.  As the polycyclic type, a group having a bicyclo-, tricyclo- or  tetracyclo-structure of 5 or more carbon atoms can be exem› plified, preferably a cycloalkyl group having 6 to 20 carbon  atoms, for example, an adamantyl group, a norbomyl group,  a dicyclopentyl group, a tricyclodecanyl group and a tetracy› clododecyl group are enumerated. Incidentally, a part of the  carbon atoms in the cycloalkyl group may be replaced by a  hetero atom such as an oxygen atom.  [0864]  L$_{2 }$ represents a single bond or a divalent linking  group. As the divalent linking group, a substituted or unsub› stituted arylene group, a substituted or unsubstituted alkylene  group, a substituted or unsubstituted cycloalkylene group,  ---0-, -SO$_{2}$ -,  -CO-, -N(R)-(wherein R represents  a hydrdogen atom or an alkyl group), -NHSO$_{2}$ -,  and a  divalent linking group obtained by combining these groups  are exemplified.  [0865]  Hydrophobic resin (HR) may contain a silicon  atom. As the partial structure containing a silicon atom, a  resin having an alkylsilyl structure (preferably a trialkylsilyl  group) or a cyclic siloxane structure is preferred.  [0866]  As the alkylsilyl structure or cyclic siloxane struc› ture, specifically the group represented by any of the follow› ing formulae (CS-1) to (CS-3) is exemplified.  [0857]  In the formulae, each ofR$_{10 }$and R$_{11 }$independently  represents a hydrogen atom, a fluorine atom or an alky 1 group  (preferably a straight chain or branched alkyl group having 1  to 4 carbon atoms, and as an alkyl group having a substituent,  a fluorinated alkyl group can be exemplified).  [0858]  Each of W$_{3 }$ to W$_{6 }$ independently represents an  organic group having at least one or more fluorine atoms.  Specifically the groups represented by any of formulae (F2) to  (F4) are exemplified.  [0859]  Other than the above, as repeating units having a  fluorine atom, repeating units shown below are exemplified.  [0860]  In formulae (C-II) and (C-III), each of R$_{4 }$ to R$_{7 }$ independently represents a hydrogen atom, a fluorine atom or  an alkyl group (preferably a straight chain or branched alkyl  (C-la)  (C-Ib)  (C-lc)  (C-Id)  (CS-1)  (CS-2)  (C-11)  ~  Rs  I  I  --+C-C+- 1  I  Rs  R7  (C-III) 