28  27  US 9,513,547 B2  hydrogen atom, a methyl group, a hydroxymethyl group, or  a trifluoromethyl group, and particularly preferably a hydro› gen atom or a methyl group.  The ring structure contained in Rs includes a monocyclic  hydrocarbon group and a polycyclic hydrocarbon group.  Examples of the monocyclic hydrocarbon group include a  cycloalkyl group having 3 to 12 carbon atoms, such as a  cyclopentyl group, a cyclohexyl group, a cycloheptyl group  or a cyclooctyl group, and a cycloalkenyl group having 3 to  12 carbon atoms, such as a cyclohexenyl group. The mono› cyclic hydrocarbon group is preferably a monocyclic hydro› carbon group having 3 to 7 carbon atoms, and more pref› erably a cyclopentyl group or a cyclohexyl group.  The polycyclic hydrocarbon group includes a ring system  hydrocarbon group and a cross-linked cyclic hydrocarbon  group. Examples of the ring system hydrocarbon group  include a bicyclohexyl group and a perhydronaphthalenyl  group. Examples of the cross-linked cyclic hydrocarbon ring  include a bicyclic hydrocarbon ring such as a pinane ring, a  bornane ring, a norpinane ring, a norbornane ring or a  bicyclooctane ring (for example, a bicyclo[2.2.2]octane  ring, or a bicyclo[3.2.l]octane ring), a tricyclic hydrocarbon  ring such as a homobrendane ring, an adamantane ring, a  $_{tricyclo[5.2.l.0}$2• $^{6}$]decane ring or a tricyclo[4.3.l.l 2•s]unde› cane ring, and a tetracyclic hydrocarbon ring such as a  tetracyclo[4.4.0.1 2 •s.1 7 • $^{10}$]dodecane ring and a perhydro-1,  4-methano-5,8-methanonaphthalene ring. Further, the cross- linked cyclic hydrocarbon ring also includes a condensed  cyclic hydrocarbon ring, for example, a condensed ring  formed by fusing a plurality of 5- to 8-membered cycloal- kane rings, such as a perhydronaphthalene ( decalin) ring, a  perhydroanthracene ring, a perhydrophenanthrene ring, a  perhydroacenaphthene ring, a perhydrofluorene ring, a per- hydroindene ring and a perhydrophenalene ring.  Preferred examples of the cross-linked cyclic hydrocar› bon ring include a norbornyl group, an adamantyl group, a  bicyclooctanyl  group  and a tricyclo[5.2.l.0 2 • $^{6}$]decanyl  group. More preferred examples of the cross-linked cyclic  hydrocarbon ring include a norbornyl group and an adaman› tyl group.  These alicyclic hydrocarbon groups may have a substitu› ent, and preferred examples of the substituent include a  halogen atom, an alkyl group, a hydroxyl group substituted  with a hydrogen atom, and an amino group substituted with  a hydrogen atom. The halogen atom is preferably a bromine  atom, a chlorine atom, or a fluorine atom, and the alkyl  group is preferably a methyl group, an ethyl group, a butyl  group, or at-butyl group. The alkyl group may further have  a substituent, and the substituent which the alkyl group may  further have includes a halogen atom, an alkyl group, a  hydroxyl group substituted with a hydrogen atom, and an  amino group substituted with a hydrogen atom.  Examples of the substituent for the hydrogen atom  include an alkyl group, a cycloalkyl group, an aralkyl group,  a substituted methyl group, a substituted ethyl group, an  alkoxycarbonyl group, and an aralkyloxycarbonyl group.  The alkyl group is preferably an alkyl group having  1  to  4  carbon atoms; the substituted methyl group is preferably a  methoxymethyl group, a methoxythiomethyl group, a ben› zyloxymethyl  group,  a  t-butoxymethyl  group,  or a  2-methoxyethoxymethyl group; the substituted ethyl group  is preferably a 1-ethoxyethyl group or a l-methyl-1- methoxyethyl group; the acyl group is preferably an ali› phatic acyl group having  1  to 6 carbon atoms, such as a  formyl group, an acetyl group, a propionyl group, a butyryl  group, an isobutyryl group, a valeryl group, and a pivaloyl  Ra represents a hydrogen atom, an alkyl group or a  -CH 2 ---0-Ra 2  group, wherein Ra 2  represents a hydrogen  atom, an alkyl group or an acyl group. Ra is preferably a  In the general formula (1-3), Rs represents a hydrocarbon  group having at least one ring structure and having no polar  group.  It  is possible for the resin (A) in the present invention to  have a repeating unit which does not exhibit acid decom› posability and which has an alicyclic hydrocarbon structure  which does not have a polar group (for example, the acid  group, hydroxyl group, or cyano group) as the repeating unit  which is represented by the general formula  (1  ).  In this  manner, the solubility of the resin may be suitably adjusted  when using the developer including the organic solvent.  Examples of the repeating unit include a repeating unit  represented by the general formula (1-3).  [Chem.18]  In a case where the resin (A) contains a repeating unit  which has a hydroxyl group, the content (in a case where a  plurality of types are contained, the total thereof) of the  repeating units is preferably  1  to  40  mo! % with respect to  all of the repeating units in the resin (A), more preferably  1  to 30 mo! %, and even more preferably 3 to 20 mo! %.  The resin (A) may include only one type ofrepeating unit  which has an alicyclic hydrocarbon having a hydroxyl  group, and may include two or more types.  OH  OH  (1-3)  Ra  •:t•  I  Rs 