Aug. 8, 2019  12  US 2019/0243238 Al  (Photosensitive Compound Including an Oxime Skeleton)  (Photosensitive Compound Including Other Skeleton)  (Embodiment of Photosensitive Compound)  [0115]  In addition, as discussed, the photosensitive com› pounds according to some embodiments of the present  invention can be a polymer. When the photosensitive com› pound is a polymer, the polymer can be a homopolymer  when it includes a unit which can function as a photosen› sitive compound, and can also be a copolymer including  another unit. The another unit when the polymer is a  copolymer can include a unit which can react as an acid- [0114]  The photosensitive compound according to some  embodiments of the present invention is suitably used as a  photoacid generator, a photodegradable base, a sensitizer  and the like.  It is especially preferable that the photosensi› tive compound according to some embodiments of the  present invention is used as a photoacid generator and a  photodegradable base.  [0109]  The substituent group which can be possessed by  Re can include; an alkyl group or an alkoxy group having  1  to  4  carbon atoms; an aryl group having 5 to 20 carbon  [  0108]  As Re, the ones similar to R  $^{6 }$of formula ( 6) can be  mentioned. Particularly, Re represents a linear, branched, or  substituted alkyl group; an alkenyl group; an alkoxyalkyl  group; an aryl group such as a phenyl group, a naphthyl  group or the like; and the like. A part of or all of the  hydrogen atoms of these groups can be substituted with a  substituent group.  [0107]  The substituent group which can be possessed by  Rd$^{1 }$and  Rd 2  can include an alkyl group or an alkoxy group  having  1  to  4  carbon atoms; an aryl group having 5 to 20  carbon atoms; an aromatic heterocyclic group having 3 to 5  carbon atoms; a nitro group; a halogen atom such as a  chlorine atom, a fluorine atom and the like; and the like.  Here, the substituent group can be a substituent group  similar to the substituent group of R  1 .  [0106]  Rd 1  and  Rd 2  are, independently from each other,  preferably a linear, branched, or cyclic alkyl group having  1  to 20 carbon atoms which can be substituted, an aryl group,  a cyano group and the like. A part of or all of the hydrogen  atoms of these groups can be substituted with a substituent  group. The alkyl group and the aryl group ofRd$^{1 }$and  Rd $^{2 }$can  include the alkyl group and the aryl group similar to those  ofR 1  of formula  (1).  [0105]  At least either one ofRd 1 ,  Rd 2 ,  and Re includes one  or more divalent Te atom. At least either one of R  dl  and R  d 2  preferably includes at least one electron withdrawing group  such as a cyano group, a fluorinated alkyl group and the like.  [0104]  The photosensitive compounds according to some  embodiments of the present invention can be a photosensi› tive compound including an oxime skeleton including the Te  atom containing group. The oxime skeleton can include the  ones represented by the following formula (7), and the  present invention is not limited so far as the oxime skeleton  includes the Te atom containing group directly or via a  bonding group.  [0113]  The photosensitive compound according to some  embodiments of the present invention is not particularly  limited so long as they include a Te atom containing group.  In addition to the ones mentioned above, the photosensitive  compound can be an onium salt such as a phosphonium salt,  an ammonium salt, a pyridinium salt and the like; a glyox› ime compound; a sulfone compound such as a bis-sulfonic  acid compound, a ~-keto sulfonic acid compound, a di› sulfonic acid compound and the like; a sulfonic acid ester  and the like. The photosensitive compound according to  some embodiments of the present invention can be used  alone or two or more can be used in combination as a  component of the resist composition.  [0112]  R 11  and R$^{12 }$can bond with each other to form a  ring.  [0111]  Regarding the aryl group, number of carbon atoms  of the aryl group is preferably  4  to 20, more preferably  4  to  10,  and most preferably 6 to  10.  As the aryl group, an aryl  group being partially or fully halogenated is especially  preferable. Here, the partially halogenated aryl group means  an aryl group having a part of hydrogen atoms substituted  with halogen atoms. The fully halogenated aryl group means  an aryl group having all of the hydrogen atoms substituted  with halogen atoms.  [0110]  As the alkyl group of Re, number of carbon atoms  of the alkyl group is preferably  1  to 20, more preferably  1  to  10,  further preferably  1  to 8, especially preferably  1  to 6,  and most preferably  1  to  4.  As the alkyl group, an alkyl  group being partially or fully halogenated is especially  preferable (hereinafter can be referred to as halogenated  alkyl group). Here, the partially halogenated alkyl group  means an alkyl group having a part of hydrogen atoms  substituted with halogen atoms. The fully halogenated alkyl  group means an alkyl group having all of the hydrogen  atoms substituted with halogen atoms. The halogen atom can  include a fluorine atom, a chlorine atom, a bromine atom, an  iodine atom and the like, and the fluorine atom is especially  preferable. That is, halogenated alkyl group is preferably a  fluorinated alkyl group.  atoms; an aromatic heterocyclic group having 3 to 5 carbon  atoms; a nitro group; a halogen atom such as a chlorine  atom, a fluorine atom and the like; and the like. Here, the  substituent group can be a substituent group similar to the  substituent group of R  1 .  [Chemical Formula 13]  (7)  -continued 