US 9,291,896 B2  113  114  substituted on the alkyl group includes a halogen atom, an  alkyl group, a hydroxyl group with a hydrogen atom being  substituted for, and an amino group with a hydrogen atom  being substituted for.  Examples of the substituent for the hydrogen atom include  an alkyl group, a cycloalkyl group, an aralkyl group, a sub› stituted methyl group, a substituted ethyl group, an alkoxy› carbonyl group, and an aralkyloxycarbonyl group. The alkyl  group is preferably an alkyl group having a carbon number of  1 to 4; the substituted methyl group is preferably a meth- oxymethyl group, a methoxythiomethyl group, a benzy› loxymethyl group, a tert-butoxymethyl group or a 2-meth› oxyethoxymethyl group; the substituted ethyl group is  preferably a 1-ethoxyethyl group or a l-methyl-1-methoxy› ethyl group; the acyl group is preferably an aliphatic acyl  group having a carbon number of 1 to 6, such as formyl group,  acetyl group, propionyl group, butyryl group, isobutyryl  group, valeryl group and pivaloyl group; and the alkoxycar› bonyl group includes, for example, an alkoxycarbonyl group  having a carbon number of 1 to 4.  The resin (P) may or may not contain a repeating unit  having an alicyclic hydrocarbon structure free from a polar  group and not exhibiting acid decomposability, but in the case  of containing this repeating unit, the content thereof is pref› erably from 1 to 20 mo!  %, more preferably from 5 to 15 mo! 25  %, based on all repeating units in the resin (P).  Specific examples of the repeating unit having an alicyclic  hydrocarbon structure free from a polar group and not exhib› iting acid decomposability are illustrated below, but the  present invention is not limited thereto. In the formulae, Ra  represents  H, CH$_{3}$ ,  CH$_{2}$0H  or  CFy  From the standpoint of elevating Tg, improving dry etching  resistance and producing an effect such as internal filter for  out-of-band-light, the resin (P) may contain the following  monomer component.  -continued  Ra  Ra  Ra  ~  :to~  Q  l  Ra  Ra  Ra  ~~~  Ra  Ra  ~~  Ra 