249  US 9,291,896 B2  250  TABLE4  Resist Com12osition  Photoacid  Evaluation Results  Resin  Hydro- Generator  Surfac- Sensi- Isolated  PEB  (mass%)  phobic  Solvent  (mass%)  Basic  tant  tivity  Pattern  Temperature  Etching  (mass  Resin  (mass  (mass  Compound  (0.01  (µC/  Pattern  Resolution Dependency  Resis- ratio)  (mass%)  ratio)  ratio)  (mass%)  mass%)  cm 2 )  Profile  (nm)  (nm/ 0  c.)  tance  Example 2-1  P-1  S-1/S-2  zll  N-3  W-4  16  rectangular  75.0  0.5  A  63  (80/20)  535  2  Example 2-2  P-2  S-1/S-2  zll  N-3  W-4  19  rectangular  87.5  0.8  A  63  (80/20)  535  2  Example 2-3  P-3  S-1/S-2  zll  N-3  W-4  22  rectangular  100.0  1.0  A  63  (80/20)  535  2  Example 2-4  P-4  S-1/S-2  zll  N-3  W-4  24  rectangular  112.5  1.4  A  63  (80/20)  535  2  Example 2-5  P-5  S-1/S-2  zll  N-3  W-4  27  rectangular  112.5  1.6  A  63  (80/20)  535  2  Example 2-6  P-6  S-1/S-2  z123  N-7  W-3  18  rectangular  75.0  0.7  A  63  (60/40)  35  2  Example 2-7  P-7  S-1/S-2  z114  N-9  W-4  17  rectangular  75.0  0.9  A  63  (70/30)  35  2  Example 2-8  P-8  S-1/S-2  z114  N-9  W-4  20  rectangular  87.5  1.2  A  63  (70/30)  35  2  Example 2-9  P-9  S-1/S-2  z114  N-9  W-4  25  rectangular  100.0  1.4  A  63  (70/30)  35  2  Example 2-10  P-10  S-1/S-2  z114  N-9  W-4  28  rectangular  112.5  1.6  A  63  (70/30)  35  2  Example2-11  P-11  S-1/S-2  z39  N-10  W-1  25  rectangular  100.0  1.5  A  63  (90/10)  35  2  Example 2-12  P-12  S-1/S-2  z39  N-10  W-1  20  rectangular  75.0  1.3  A  63  (90/10)  35  2  Example 2-13  P-13  S-1  z121  N-6  W-4  18  rectangular  87.5  1.1  A  63  35  2  Example 2-14  P-14  S-1/S-4  z32  N-8  none  22  rectangular  87.5  1.6  A  63  (80/20)  35  2  Example 2-15  P-15  S-1/S-3  z5  N-9  W-3  24  rectangular  87.5  1.2  A  63  (80/20)  35  2  Example 2-16  P-16  S-2/S-4  z33  N-6  W-1  20  rectangular  100.0  1.4  A  63  (50/50)  35  2  Example 2-17  P-17  S-1/S-4  z119  N-1  W-1  29  rectangular  100.0  1.6  A  63  (70/30)  35  2  Example 2-18  P-18  S-1/S-2  z118  N-5  W-3  26  rectangular  100.0  1.6  A  63  (80/20)  35  2  Example 2-19  P-19  S-3  zll  N-4  W-2  28  rectangular  100.0  1.5  A  63  35  2  Example 2-20  P-20  S-1/S-3  z69/z122  N-2  W-2  29  rectangular  100.0  1.3  A  63  (70/30)  35(20/80)  2  Example 2-21  P-21  S-1/S-2  z127  N-3  W-3  24  rectangular  75.0  0.7  A  63  (80/20)  35  2  Example 2-22  P-l/P-22  S-1/S-2  z67  N-7  W-4  25  rectangular  75.0  0.9  A  63(50/50)  (70/30)  35  2  Example 2-23  P-23  S-1/S-2  z108  N-8  W-4  20  rectangular  87.5  0.9  A  63  (80/20)  35  2  Example 2-24  P-24  HR-1  S-2/S-1  N-6  W-3  23  rectangular  125.0  1.5  A  88  10  (90/10)  2  Example 2-25  P-34  HR-24  S-1/S-2  z132  N-11  W-4  25  rectangular  100.0  1.5  A  86  3  (60/40)  10  Example 2-26  P-35  HR-29  S-1/S-2  z133  N-12  W-4  24  rectangular  87.5  1.3  A  62  5  (80/20)  30  3  Example 2-27  P-29  S-2/S-1  z130  N-11  W-2  28  rectangular  87.5  1.7  A  94  (70/30)  5  Example 2-28  P-26  S-2/S-1  N-12  W-3  26  rectangular  100.0  1.1  A  98  (80/20)  2  Example 2-29  P-31  S-2  N-11  W-3  29  rectangular  87.5  1.4  A  97  3  Example 2-30  P-38  S-1/S-2  z132  N-11  W-1  26  rectangular  87.5  1.5  A  78  (70/30)  20  2  Comparative  Ab’-1  S-1/S-4  z119  N-1  W-1  37  reverse  150.0  1.8  B  Example 2-1  63  (70/30)  35  2  tapered  Comparative  Ab’-2  S-1/S-2  z118  N-5  W-3  36  reverse  150.0  1.9  B  Example 2-2  63  (80/20)  35  2  tapered  Comparative  Ab’-3  S-3  zll  N-4  W-2  30  tapered  125.0  3.5  A  Example 2-3  63  35  2  Comparative  Ab’-4  S-1/S-3  z69/z122  N-2  W-2  31  tapered  125.0  3.3  A  Example 2-4  63  (70/30)  35(20/80)  2 