Dec. 27, 2018  US 2018/0373148 Al  56  [0113]  Examples of the anion moiety in the onium salts  having formulae (3-1) to (3-4) are given below, but not  limited thereto.  group, in which at least one hydrogen ( one or more or even  all hydrogen atoms) may be substituted by a hydroxyl,  carboxyl, halogen, cyano, oxo, amide, nitro, sultone, sulfone  or sulfonium salt-containing moiety, or in which at least one  carbon atom may be substituted by an ether, ester, carbonyl,  carbonate or sulfonic acid ester moiety, or R 402  and R 403  may bond together to form a ring with the sulfur atom to  which they are attached, r is an integer of 1 to 3, s is an  integer of 1 to 5, and t is an integer of Oto 3.  [0110]  Further useful PAGs are sulfonium and iodonium  salts of iodized benzene-containing fluorinated sulfonic acid  having the formulae (3-3) and (3-4), respectively.  [0111]  In formulae (3-3) and (3-4), R $^{411 }$is each indepen› dently a hydroxyl, C$_{1 }$-C$_{20 }$straight, branched or cyclic alkyl  or alkoxy group, C$_{2}$-C$_{20 }$straight, branched or cyclic acyl or  acyloxy group, fluorine, chlorine, bromine, amino, or  alkoxycarbonyl-substituted amino group. R$^{412 }$is each inde› pendently a single bond or alkylene group. R$^{413 }$is a single  bond or C$_{1}$-C$_{20 }$ divalent linking group when u=l, or a  C$_{1 }$-C$_{20 }$tri- or tetravalent linking group when u=2 or 3, the  linking group optionally containing an oxygen, sulfur or  nitrogen atom. Rf 21  to Rf$^{24 }$are each independently hydro› gen, fluorine or trifluoromethyl, at least one of Rf$^{21 }$to Rf2 4  being fluorine or trifluoromethyl, or Rf2 1  and Rf2 2 , taken  together, may form a carbonyl group. R 414 , R 415 , R 416 , R 417  and R$^{418 }$are each independently a C$_{1}$-C$_{12 }$straight, branched  or cyclic alkyl group, C$_{2}$-C$_{12 }$ straight, branched or cyclic  alkenyl group,  CcC$_{20 }$ aryl group, C$_{7}$ -C$_{12 }$ aralkyl group or  C$_{7}$ -C$_{12 }$aryloxyalkyl group, in which at least one hydrogen  ( one or more or even all hydrogen atoms) may be substituted  by a hydroxyl, carboxyl, halogen, cyano, oxo, amide, nitro,  sultone, sulfone, or sulfonium salt-containing moiety, or in  which at least one carbon atom may be substituted by an  ether, ester, carbonyl, carbonate or sulfonic acid ester moi› ety, or R$^{414 }$and R$^{415 }$may bond together to form a ring with  the sulfur atom to which they are attached, u is an integer of  1 to 3, v is an integer of 1 to 5, and w is an integer of O to  3.  [0112]  Suitable examples of the cation moiety in the  sulfonium salt having formulae (3-1) and (3-3) are as  exemplified above as the cation moiety in the sulfonium salt  having formula (1-1 ). Suitable examples of the cation moi› ety in the iodonium salt having formulae (3-2) and (3-4) are  as exemplified above as the cation moiety in the iodonium  salt having formula (1-2).  ~:-t  F2C-S03- •-0-<--<CC;  F2C-S03- Rf21  S03- R413  Rf23  Rf24  (3-3)  R414  I  +s-R415  I  R416  Rf21  S03- R413  Rf23  Rf24  (3-4)  R4!7 _  r+ _  R41s 