160  US 9,170,489 B2  159  -continued  HO~  I  \._a  o  ~I\;\;\  __h  ~N  O  O  Ov  rs~OH  /O~N~C~OH  0  ;-O  0  00~  \  H0\_ 0  ~;\;\;\--0  N  O  O  O  ’\.  j  ~  HO_/O  rO~OH  N~ 0 ~0H  rO~O~OH  HO~N~o~o~OH  rO~O~OH  HO~OH  N~o~ 0 ~oH  HO~N~OH  N  N)lN  Since the positive charge of conjugated acid is stably dis› tributed by three nitrogen atoms, the guanidine compound  shows strong basicity.  As the basicity of guanidine compound (A) of the inven- tion, pKa of conjugated acid is preferably 6.0 or more, when  pKa is 7 .0 to 20.0, neutral reactivity with an acid is high and  excellent roughness characteristics are obtained and so pre› ferred, and more preferably 8.0 to 16.0.  Due to such strong basicity, distribution of acid is  restrained and an excellent pattern form can be obtained.  Incidentally, "pKa" here means pKa in an aqueous solu› tion, which is, for example, described in Kagaku Binran (II)  As the specific examples, 2-[2-{ 2-(2,2-dimethoxyphe› noxyethoxy)ethyl }-bis-(2-methoxyethyl)]amine, and Com- More preferably, the compound is a compound having at  least one oxyalkylene chain between the phenoxy group and  the nitrogen atom. The number of oxyalkylene chains in one  molecule is preferably 3 to 9, and more preferably 4 to 6. Of  oxyalkylene chains, -CH$_{2}$CH$_{2}$0-is preferred.  A compound having two or more cyclic structures is also  preferably used. Specifically, 1,5-diazabicyclo[4.3.0]non-5- ene, 1,8-diazabicyclo[5.4.0]undeca-7-ene are exemplified.  (3) Amine Compound Having a Phenoxy Group  The composition according to the invention may further  contain a guanidine compound having a structure represented  by the following formula.  (5) Guanidine Compound  Ammonium salts are also arbitrarily used. Preferred com› pound is hydroxide or carboxylate. More specifically, tet› raalkylammonium hydroxide represented by tetrabutylam› monium hydroxide is  preferred. Besides the above,  ammonium salts deriving from the amines in the above (1) to  (3) can be used.  pounds (Cl-1) to (C3-3) disclosed in U.S. Patent Application  2007/0224539Al, paragraph [0066] are exemplified.  ( 4) Ammonium Salt  (2) Compound Having a Nitrogen-Containing Heterocyclic  Structure  As the heterocyclic structure, the compound may not have  an aromatic property. Further, a plurality of nitrogen atoms  may be contained, and hetero atoms other than a nitrogen  atom may be contained. Specifically, a compound having an  imidazole structure, (2-phenylbenzimidazole, 2,4,5-triph› enylimidazole ), a compound having a piperidine structure  (N-hydroxyethylpiperidine, bis(l ,2,2,6,6-pentamethyl-4-pi› peridyl)sebacate ), a compound having a pyridine structure  ( 4-dimethy !amino-pyridine), and a compound having an anti› pyrine structure (antipyrine, hydroxyl-antipyrine) are exem› plified. 