300 mm/s.  1.5.8 Micromachining parameters such as  pulse energy, pulse energy density,  the distance between pulses,   focusing conditions shall be able to optimized to  achieve cutting with tolerances  within 0-20 μm range of the  targeted value.  1.5.9 Opto-mechanical beam delivery unit  shall  be  designed  to  prevent  dust  entering from outside and deposition on  optical path components; optical paths  should be completely closed.  1.5.10 Operator panel (HMI) shall have 15  inches  (or  bigger)  colored-high  resolution screen. The operation should  be controlled either by the touch screen  and/or by using a keyboard and mouse.  1.5.11 Software functionality shall be; $_{●}$  Integrated laser control and  monitoring.  $_{●}$  Creation of algorithm for  the machining process.  $_{●}$  Pulse energy control, pulse  selection,  $_{●}$  Positioning stages control.  1.5.12 Shall  have  individual  input  programming  of  the  process- determining steps.  1.5.13 All micromachining parameters  repetition rate, August 2020 c4f_annexiitechspeciiitechoffer_en.doc  Page 23 of 49 