184  183  US 9,551,933 B2  -continued  F  O  O  F  0  F+~-~-~+~-0  II  II  II  F  O  O  F  0  -continued  (z138)  F  F  e  TI*~  0-S  ’/  ~  0  II  _  0  F  F  (z139)  (z140)  F  F  e  TI*~  0-S  ’/  ~  0  II  _  0  F  F  (z141)  F  F  e  TI*~  0-S  ’/  ~  0  II  _  0  F  F  One kind of an acid generator may be used alone, or two  or more kinds of acid generators may be used in combina› tion.  The content of the photoacid generator is preferably from  0.1 to 50 mass%, more preferably from 0.5 to 45 mass%,  still more preferably from 1 to 40 mass %, based on the total  solid content of the composition.  [ 4] Compound Capable of Decomposing by the Action of an  Acid to Generate an Acid  The actinic ray-sensitive or radiation-sensitive resin com› position of the present invention may further contain one  compound or two or more compounds capable of decom› posing by the action of an acid to generate an acid. The acid  generated from the compound capable of decomposing by  the action of an acid to generate an acid is preferably a  sulfonic acid, a methide acid or an imide acid.  Examples of the compound capable of decomposing by  the action of an acid to generate an acid, which can be used  in the present invention, are illustrated below, but the present  invention is not limited thereto. 