121  US 9,221,742 B2  122  Comparative Quenchers  Q-A: 2-morpholinoethyl laurate  -continued  a:(b+b’):(c+c’)=l:4-7:0.01-1 (molar ratio)  Mw=l,500  Surfactant A: 3-methyl-3-(2,2,2-trifluoroethoxymethyl)-ox- etane/tetrahydrofuran/2,2-dimethyl-1,3-propanediol  copolymer (Omnova Solutions, Inc.) of the structural for- mula shown below  (Q-B)  Q  Mc~  (Q-C)  Q  CF3CF2CO2- usu  (Q-D)  Q  HO(CF3)2CO2- (Q-E)  Q  O;S~  0  (Q-F)  ~  o,sJ  \______;w__/\  )  0  (Q-G)  ~  C(H  \______;w__/\  )  CO2- (CF3  0  a<+-’fo+  F3CI  JoTot  +ot  ~01-.---tH)  TABLE 5  Resin  PAG  Quencher  Surfactant Solvent 1  Solvent 2  Resist (p bw)  (pbw)  (pbw)  (pbw)  (pbw)  (pbw)  Example  1-1  R-1  P-1(80) PAG-X(7.6)  Q-1(4.6)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-2  R-2  P-1(80) PAG-X(7.6)  Q-2(5.0)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-3  R-3  P-1(80) PAG-X(7.6)  Q-3(4.9)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-4  R-4  P-1(80) PAG-X(7.6)  Q-4(5.3)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-5  R-5  P-1(80) PAG-X(7.6)  Q-5(3.9)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-6  R-6  P-1(80) PAG-X(7.6)  Q-6(4.1)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-7  R-7  P-1(80) PAG-X(7.6)  Q-7(4.2)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-8  R-8  P-2(80) PAG-X(7.6)  Q-1(4.6)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-9  R-9  P-3(80) PAG-X(7.6)  Q-1(4.6)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-10  R-10  P-4(80) PAG-X(7.6)  Q-1(4.6)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-11  R-11  P-5(80) PAG-Y(13.3)  Q-1(4.6)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-12  R-12  P-6(80) PAG-Y(13.3)  Q-1(4.6)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-13  R-13  P-7(80) PAG-Y(13.3)  Q-1(4.6)  SF-1(3.0)  PGMEA(l,728) GBL(192)  1-14  R-14 P-8(80) PAG-Y(13.3)  Q-1(4.6)  SF-1(3.0)  PGMEA(l,728) GBL(192) 