US 10,054,853 B2  17  18  -continued  0  0  F  o-~-N--~+co Et  II  II  2  0  0  F  0  O~  o  o  F  o-~-N--~+co Me  II  II  2  0  0  F  R 1  O  O  O  F  CF3  \_J  r-0-~-N--~_J__J  I/  \_/  II  111\ 0  0  0  F  0  ~  0  0  F  R 1 O-~-N--~+<CF 3  O  II  II  OM  0  O  F  e  0  0  F  O-~-N--~+<CF3  II  II  OH  0  0  F  0  0  F  O-~-N--~+<CF3  II  II  0  O  F  OH  0 