22  US 8,962,233 B2  21  phenanthrene ring, an anthracene ring, a naphthacene ring, a  chrysene ring, a triphenylene ring, a fluorene ring, a biphenyl  ring, a pyrrole ring, a furan ring, a thiophene ring, an imida› zole ring, an oxazole ring, a thiazole ring, a pyridine ring, a  pyrazine ring, a pyrimidine ring, a pyridazine ring, an iodoliz› ine ring, an indole ring, a benzofuran ring, a benzothiophene  ring, an isobenzofuran ring, a quinolizine ring, a quinoline  ring, a phthalazine ring, a naphthyridine ring, a quinoxaline  ring, a quinoxazoline ring, an isoquinoline ring, a carbazole  ring, a phenanthridine ring, an acridine ring, a phenanthroline  ring, a thianthrene ring, a chromene ring, a xanthene ring, a  phenoxathiin ring, a phenothiazine ring, a phenazine ring and  the like. Of these, a benzene ring, a naphthalene ring and an  anthracene ring are preferred from the viewpoint of simulta- neous attainment of roughness enhancement and sensitivity  increase. A benzene ring is more preferred.  When a substituent other than -(A-B) groups is further  introduced in the aromatic ring, as such a substituent, there  can be mentioned, for example, a halogen group such as a  fluorine atom, a chlorine atom, a bromine atom or an iodine  atom; a methoxy group or an ethoxy group; an aryloxy group  such as a phenoxy group or a p-tolyloxy group; a methylth› ioxy group or an ethylthioxy group; an arylthioxy group such  as a phenylthioxy group or a p-tolylthioxy group; a methoxy- carbonyl group or an ethoxycarbonyl group; an aryloxycar› bonyl group such as a phenoxycarbonyl group; an acetoxy  group; a methyl group or an ethyl group; a vinyl group; an  acetylene group; an aryl group such as a phenyl group or a  tolyl group; a non-acetyl acyl group such as a benzoyl group  or a toluoyl group; a hydroxyl group; a carboxyl group; a  sulfonate group and the like. Of these, a methyl group, an  ethyl group and a hydroxyl group are preferred from the  viewpoint of roughness improvement.  It  is preferred for A to be constituted of fewer atoms from  the viewpoint of resolution and roughness. Preferably, A rep› resents a single bond,  ---0-, -S- or --CO$_{2}$ -.  A single  bond is most preferred.  As the aliphatic group having 3 or more carbon atoms  represented by B, there can be mentioned a noncyclic hydro› carbon group or a cycloaliphatic group.  As the noncyclic hydrocarbon group having 3 or more  carbon atoms, there can be mentioned an isopropyl group, a  t-butyl group, a t-pentyl group, a neopentyl group, ans-butyl  group, an isobutyl group, an isohexyl group, a 3,3-dimethyl- pentyl group, a 2-ethylhexyl group and the like. The noncyc› lic hydrocarbon group more preferably has 3 to 20 carbon  atoms. A substituent may be introduced in the noncyclic  hydrocarbon group.  As the cycloaliphatic group having 3 or more carbon  atoms, there can be mentioned a cycloalkyl group such as a  cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a  cycloheptyl group or a cyclooctyl group, anadamantyl group,  a norbomyl group, a bomyl group, a camphenyl group, a  decahydronaphthyl group, a tricyclodecanyl group, a tetracy- clodecanyl group, a camphoroyl group, a dicyclohexyl group,  a pinenyl group and the like. The cycloaliphatic group pref› erably has 5 to 20 carbon atoms. A substituent may be intro› duced in the cycloaliphatic group.  When a substituent is introduced in the noncyclic hydro- carbon group or cycloaliphatic group, as such a substituent,  there can be mentioned, for example, a halogen group such as  a fluorine atom, a chlorine atom, a bromine atom or an iodine  atom; an alkoxy group such as a methoxy group, an ethoxy  group or a tert-butoxy group; an aryloxy group such as a  phenoxy group or a p-tolyloxy group; an alkylthioxy group  such as a methylthioxy group, an ethylthioxy group or a  tert-butylthioxy group; an arylthioxy group such as a phe- As the aromatic ring, there can be mentioned, for example,  a benzene ring, a naphthalene ring, a pentalene ring, an indene  ring, an azulene ring, a heptalene ring, an indecene ring, a  perylene ring, a pentacene ring, an acenaphthalene ring, a  The aromatic ring represented by Ar $^{2 }$preferably has 6 to 30  carbon atoms, and may contain a heteroatom. A substituent  other than -(A-B) groups may further be introduced in the  aromatic ring represented by  Ar.  * represents a site of connection to L of general formula  (II).  When pis 2 or greater, a plurality of -(A-B) groups may be  identical to or different from each other.  A represents a single bond or any one, or a combination of  two or more members selected from among an alkylene  group,  ---0-,  -S-, ----C(=O)-,  ----C(=O)O-,  -S(=O)-, -S(=O)$_{2}$ - and---OS(=O)$_{2}$-.  p is an integer of 1 or greater.  B represents a group containing an aliphatic group having  3 or more carbon atoms.  Ar  represents an aromatic ring, in which a substituent  other than -(A-B) groups may further be introduced, and  In the formula,  It  is preferred for the optionally substituted aromatic group  represented by D to be any of groups of general formula (V)  below.  As the optionally substituted organic group represented by  D, there can be mentioned an optionally substituted aromatic  group or aliphatic group. The aromatic group or aliphatic  group may contain a heteroatom. The organic group repre› sented by D preferably has 1 to 50 carbon atoms, more pref› erably 1 to 30 carbon atoms.  In the formula, y is preferably an integer of 0 to 4, more  preferably 0 to 2.  As the bivalent connecting group represented by L, there  can be mentioned, for example, --COO-, ---OCO-,  -CO-, -0-, -S-, -SO-, -SO$_{2}$-, -SO 3 -,  -NH-, an alkylene group, a cycloalkylene group or an  alkenylene group. Of these, -COO-, -OCO-, --CO-,  -0-, -S-, -SO-, -SO$_{2}$ - and -SO$_{3}$ - are pre› ferred. -COO-, ---OCO-, -SO$_{2}$ - and -SO$_{3}$ - are  more preferred.  G represents a single bond, an alkylene group (including a  cycloalkylene group) or arylene group optionally containing  an ether oxygen, or a group constituted of a combination  thereof. The combined groups may be connected to each  other through an oxygen atom. When G is a group other than  a single bond, the group preferably has 1 to 10 carbon atoms,  more preferably 1 to 5 carbon atoms.  z is preferably an integer of0 to 5, more preferably Oto 3.  each ofXf s independently represents a fluorine atom or an  alkyl group substituted with at least one fluorine atom, and  In the formula,  Xf  I  -c- l  Xf  (V)