Mar. 26, 2015  39  US 2015/0086912 Al  [0258]  The examples of group Y capable of leaving by the  action of an acid include the groups represented by ----C(R 36 )  (R 37 )(R 38 ),  ----C(=O)-O----C(R 36 )(R 37 )(R 33 ),  ----C(R 0 i)  (Ro2)(OR39),  -C(Roi)(Ro2)----C(=O)----C-(R36)(R37)  (R 38 ), and -CH(R 36 )(Ar).  [0259]  In the above formulae, each ofR 36  to R 39  indepen› dently represents an alkyl group, a cycloalkyl group, an aryl  group, an aralkyl group, or an alkenyl group. R 36  and R 37  may  be bonded to each other to form a ring structure.  [0260]  Each of Roi and R 02  independently represents a  hydrogen atom, an alkyl group, a cycloalkyl group, an aryl  group, an aralkyl group, or an alkenyl group.  [0261]  Ar represents an aryl group.  [0262]  The alkyl group represented by R 36  to R 39 , Roi or  R 02  is preferably an alkyl group having  1  to  8  carbon atoms,  for example, a methyl group, an ethyl group, a propyl group,  an n-butyl group, a sec-butyl group, a hexyl group, and an  octyl group, are exemplified.  [0263]  The cycloalkyl group represented by R 36  to R 39 , Roi  or R 02  may be a monocyclic cycloalkyl group or may be a  polycyclic cycloalkyl group. The monocyclic cycloalkyl  group is preferably a cycloalkyl group having  3 to 8 carbon  atoms and, for example, a cyclopropyl group, a cyclobutyl  group, a cyclopentyl group, a cyclohexyl group and a  cyclooctyl group are exemplified. The polycyclic cycloalkyl  group is preferably a cycloalkyl group having 6 to 20 carbon  atoms and, for example, an adamantyl group, a norbomyl  group, an isoboronyl group, a camphanyl group, a dicyclo› pentyl group, an a-pine! group, a tricyclodecanyl group, a  tetracyclododecyl group, and an androstanyl group are exem› plified. Incidentally, a part of the carbon atoms in the  cycloalkyl group may be substituted with a heteroatom such  as an oxygen atom and the like.  [0264]  The aryl group represented by R 36  to R 39 , Roi, R 02  or Ar is preferably an aryl group having 6 to  10  carbon atoms  and, for example, a phenyl group, a naphthyl group, and an  anthryl group are exemplified.  [0265]  The aralkyl group represented by R 36  to R 39 , Roi or  R 02  is preferably an aralkyl group having 7 to 12 carbon atoms  and, for example, a benzyl group, a phenethyl group, and a  naphthylmethyl group are preferably exemplified.  [0266]  The alkenyl group represented by R 36  to R 39 , Roi or  R 02  is preferably an alkenyl group having 2 to 8 carbon atoms  and, for example, a vinyl group, an ally! group, a butenyl  group, and a cyclohexenyl group are exemplified.  [0267]  The ring which can be formed by bonding R 36  to R 37  to each other may be monocyclic or polycyclic. As the mono› cyclic ring, a cycloalkane structure having  3 to 8 carbon  atoms is preferred and, for example, a cyclopropane structure,  a cyclobutane structure, a cyclopentane structure, a cyclohex› ane structure, a cycloheptane structure, and a cyclooctane  structure are exemplified. As the polycyclic ring, a cycloal› kane structure having 6 to 20 carbon atoms is preferred and,  for example, an adamantane structure, a norbomane struc› ture, a dicyclopentane structure, a tricyclodecane structure,  and a tetracyclododecane structure are exemplified. Inciden› tally, a part of the carbon atoms in the structure may be  substituted with a heteroatom such as an oxygen atom and the  like.  [0268]  The above each group may have a substituent. The  examples of the substituents include, for example, an alkyl  [0280]  The divalent linking group as M $^{4}$i is, for example,  an alkylene group (preferably an alkylene group having  1  to  8  carbon atoms, e.g., a methylene group, an ethylene group, a  propylene group, a butylene group, a hexylene group, or an  octylene group), a cycloalkylene group (preferably a  cycloalkylene group having  3  to 15 carbon atoms, e.g., a  cyclopentylene group or a cyclohexylene group), -S-,  ---0-, -CO-, -CS-, -SO 2 -, -N(Ro )-, or a group  formed by combining two or more of these groups, and the  total carbon atom number is preferably 20 or less. Here, Ro is  [0279]  R $^{4}$i is preferably a hydrogen atom, a methyl group,  an isopropyl group, a tert-butyl group, a cyclohexyl group, an  adamantyl group, a phenyl group, or a benzyl group, and  more preferably a methyl group or an adamantyl group.  [0278]  The aralkyl group as R $^{4}$i is, for example, an aralkyl  group having 6 to 20 carbon atoms, and preferably a benzyl  group and a phenethyl group are exemplified as the examples  thereof.  [0277]  The aryl group as R $^{4}$i is, for example, an aryl group  having 6 to 15 carbon atoms, and preferably a phenyl group,  a tolyl group, a naphthyl group, and an anthryl group are  exemplified as the examples thereof.  [0276]  The cycloalkyl group as R $^{4}$i is, for example, a  cycloalkyl group having  3  to 15 carbon atoms, and preferably  a cyclohexyl group, a norbornyl group, and an adamantyl  group are exemplified as the examples thereof.  [0275]  The alkyl group as R $^{4}$i may have a substituent and,  for example, a cyano group, a halogen atom, a hydroxyl  group, an alkoxy group, a carboxyl group, an alkoxycarbonyl  group, and a cycloalkyl group are exemplified as the  examples thereof  [0274]  The alkyl group as R $^{4}$i is, for example, an alkyl  group having  1  to  8  carbon atoms, and preferably a methyl  group, an ethyl group, a propyl group, an isopropyl group, an  n-butyl group, a sec-butyl group, a tert-butyl group, a hexyl  group, and an octyl group are exemplified as the examples  thereof.  [0273]  Incidentally, at least two ofR $^{4}$i, M$^{4}$i and Q may be  bonded to each other to form a ring, and the ring is preferably  a 5- or 6-membered ring.  [0272]  Q represents an alkyl group, an alicyclic group  which may contain a heteroatom, or an aromatic cyclic group  which may contain a heteroatom.  [0271]  M $^{4}$i represents a single bond or a divalent linking  group.  [0270]  In formula (c), R $^{4}$i represents a hydrogen atom, an  alkyl group, a cycloalkyl group, an aryl group, or an aralkyl  group.  group, a cycloalkyl group, an aryl group, an amino group, an  amido group, a ureido group, a urethane group, a hydroxyl  group, a carboxyl group, a halogen atom, an alkoxy group, a  thioether group, an acyl group, an acyloxy group, an alkoxy› carbonyl group, a cyano group, and a nitro group. These  substituents preferably have  8  or less carbon atoms.  [0269]  As group Y capable of leaving by the action of an  acid, the structure represented by the following formula ( c) is  more preferred.  (c)  R41  I  41  -~-0-M  -Q 