US 2020/0133122 Al  111  Apr. 30, 2020  from being leached out of the resist film for minimizing any  damage to the exposure tool. The surfactant becomes solu› bilized during alkaline development following exposure and  PEB, and thus forms few or no foreign particles which  become defects. The preferred surfactant is a polymeric  surfactant which is insoluble or substantially insoluble in  water, but soluble in alkaline developer, also referred to as  "hydrophobic resin" in this sense, and especially which is  water repellent and enhances water sliding.  [0201]  Suitable polymeric surfactants include those con› taining recurring units of at least one type selected from the  formulae (7 A) to (7E).  (7A)  (7B)  (7C)  (7D)  -continued  (7E)  [0202]  Herein,  RB  is hydrogen, fluorine, methyl or trifluo› romethyl. W 1  is ----CH$_{2}$-, ----CH$_{2}$CH$_{2}$ - or ---0-, or two  separate -H. R5 1  is each independently hydrogen or a  C$_{1 }$-C$_{10 }$monovalent hydrocarbon group. Rs 2  is a single bond  or a C$_{1 }$-C$_{5 }$ straight or branched divalent hydrocarbon group.  Rs 3  is each independently hydrogen, a C$_{1 }$-C$_{15 }$ monovalent  hydrocarbon or fluorinated hydrocarbon group, or an acid  labile group. When  Rs 3  is a monovalent hydrocarbon or  fluorinated hydrocarbon group, an ether bond (-0-) or  carbonyl moiety (----C(=0)-) may intervene in a carbon› carbon bond.  Rs 4  is a C$_{1}$-C$_{20 }$ (u+l)-valent hydrocarbon or  fluorinated hydrocarbon group, and u is an integer of 1 to 3.  Rs 5  is each independently hydrogen or a group having the  formula:  -----C(=0)---0-R’ 7  wherein Rs 7  is a C$_{1 }$-C$_{20 }$fluorinated hydrocarbon group. Rs 6  is a C$_{1 }$-C$_{15 }$ monovalent hydrocarbon or fluorinated hydro› carbon group in which an ether bond (-0-) or carbonyl  moiety (-C(=0)-) may intervene in a carbon-carbon  bond.  [0203]  The monovalent hydrocarbon group represented by  Rs $^{1 }$may be straight, branched or cyclic and examples thereof  include methyl, ethyl, n-propyl, isopropyl, cyclopropyl,  n-butyl, isobutyl, sec-butyl, tert-butyl, cyclobutyl, n-pentyl,  cyclopentyl, n-hexyl, cyclohexyl, n-heptyl, n-octyl, n-nonyl,  n-decyl, adamantyl, and norbornyl. Inter alia, C$_{1 }$-C$_{6 }$ hydro› carbon groups are preferred.  [0204]  The divalent hydrocarbon group represented by R5 2  may be straight, branched or cyclic and examples thereof  include methylene, ethylene, propylene, butylene, and pen› tylene.  [0205]  The monovalent hydrocarbon group represented by  Rs 3  or Rs$^{6 }$may be straight, branched or cyclic and examples  thereof include alkyl, alkenyl, and alkynyl groups, with the  alkyl groups being preferred. Suitable alkyl groups include  those exemplified for the monovalent hydrocarbon group  represented by  Rs $^{1 }$as well as n-undecyl, n-dodecyl, tridecyl,  tetradecyl, and pentadecyl. Examples of the monovalent  fluorinated hydrocarbon group represented by Rs 3  or Rs 6  include the foregoing monovalent hydrocarbon groups in  which some or all carbon-bonded hydrogen atoms are sub› stituted by fluorine atoms. In these groups, an ether bond  (-0-) or carbonyl moiety (----C(=0)-) may intervene in  a carbon-carbon bond as mentioned above.  [0206]  Examples of the acid labile group represented by  R5 3  include groups of the above formulae (Ll) to (L4),  C$_{4}$-C$_{20}$ , preferably C $_{4}$-C$_{15 }$ tertiary alkyl groups, trialkylsilyl  groups in which each alkyl moiety has 1 to 6 carbon atoms,  and C$_{4}$ -C$_{20 }$oxoalkyl groups.  [0207]  The  (u+ 1 )-valent  hydrocarbon  or fluorinated  hydrocarbon group represented by  Rs 4  may be straight,  branched or cyclic and examples thereof include the fore-