wherein R:t4 and Rf’ are the same or different and each is a  fluorine-containing alkyl group having 1 to 10 carbon atoms  or a fluorine-containing alkyl group which has 1 to 10 carbon  atoms and ether bond;  The functional group Y in those norbomene derivatives  having a fluorine-containing tertiary alcohol structure is H, F,  Cl, an alky 1 group or fluorine-containing alky 1 group having 1  to 10 carbon atoms or a fluorine-containing alkyl group hav› ing 1 to 10 carbon atoms and ether bond, and it is particularly  preferable that the functional group Y is F, a fluorine-contain› ing alkyl group or a fluorine-containing alkyl group having  ether bond because transparency is enhanced when the nor- bomene derivative is used for a resist.  It  is particularly pref› erable that at least one ofY is For  CFy  For example, there are preferably norbomene derivatives  having fluorine-containing alcohol structure represented by  the formula (12):  wherein R:t4 and Rf’ are the same or different and each is a 40  fluorine-containing alkyl group having 1 to 10 carbon atoms  or a fluorine-containing alkyl group which has 1 to 10 carbon  atoms and ether bond;  In the above examples of the norbornene derivative, R:t4  and Rf’ may be the same or different, and are selected from  fluorine-containing alkyl groups having 1 to 10 carbon atoms  or fluorine-containing alkyl groups having 1 to 10 carbon  atoms and ether bond.  and the like.  R:t4 and Rf’ are those obtained by replacing a part or the  whole of hydrogen atoms of an alkyl group or an alkyl group  having ether bond with fluorine atoms and may have partly  halogen atoms other than F such as Cl and Br.  It  is particularly preferable that R:t4 and Rf’ are perfluoro› alkyl groups or perfluoroalkyl groups having ether bond from  the point that acidity of OH group can be enhanced and  transparency can be imparted. Preferred examples thereof  are:  In the formula (12), itis preferablethatY$^{1 }$andY$^{2 }$are Hand  Y$^{3 }$is For CF 3, andY$^{1 }$andY$^{2 }$areF andY$^{3 }$is For CF 3, because  transparency can be improved more.  Examples of the preferred norbomene derivative having  fluorine-containing tertiary alcohol structure are:  Y 1 , Y $^{2 }$and Y$^{3 }$are the same or different and each is H, F, Cl, an  alkyl group having 1 to 10 carbon atoms or a fluorine- containing alkyl group which has 1 to 10 carbon atoms and  may have ether bond; R is the same or different and each is  H or an alky 1 group having 1 to 10 carbon atoms;  n is  O  or an integer of from 1 to 5; at least one ofY1, Y$^{2 }$andY is For a fluorine-containing alkyl group which has 1 to 10  carbon atoms and may have ether bond.  C-OH  ilrs  ,  CH3 C-OH,  CH3 C-OH,  ilrs  ilrs  RAf  1H  HO-C  C-OH,  I  I  I  Rf5  Rf 5  Rf 5  q,  q,  g,  F  C-OH,  CF3 C-OH, F F cp 3 C-OH,  ilrs  !r  ilrs  Rf  g,  I  ~t~oH  F F F C-OH,  F  C-OH  F  C-OH  I  I  ,  I  Rf 5  Rf 5  Rf5  Rf  Rf  ~t~OH  ,Ht~OH  CF3 C-OH HO-C  C-OH  ilrs  !r  !r  -continued  Y is the same or different and each is H, F, Cl, an alkyl group  having 1 to 10 carbon atoms or a fluorine-containing alky 1  group which has 1 to 10 carbon atoms and may have ether  bond; R is the same or different and each is H or an alkyl  group having 1 to 10 carbon atoms; n is  O  or an integer of 10  from 1 to 5.  33  US 7,649,118 B2  34 