US 9,703,193 B2  190  189  PAG-K: compound described in JP-A 2008-268744  Alkali-Soluble Surfactant (SF-1):  Mw=7,700  Mw/Mn=l.82  poly(2,2,3,3,4,4,4-heptafluoro- l-isobutyl-1-butyl metha› orylate/9-(2,2,2-trifluoro-l-trifluoroethyloxy-carbo- nyl)-4-oxatricyclo[ 4.2. l .0 $^{3}$-7Jnonan-5-on-2-yl  meth- acrylate)  3-methy 1-3-(2,2,2-trifluoroethoxymethy l)oxetane/tetra› hydrofuran/2,2-dimethyl-1, 3-propanediol copolymer  (Onmova Solutions, Inc.)  Surfactant A:  a:(b+b’):(c+c’)=l:4-7:0.01-1 (molar ratio)  Mw=l,500  TABLE 4  (PAG-K)  (SF-1)  Example  1-1  1-2  1-3  1-4  1-5  1-6  1-7  1-8  1-9  1-10  1-11  1-12  1-13  1-14  Resist  composition  R-1  R-2  R-3  R-4  R-5  R-6  R-7  R-8  R-9  R-10  R-11  R-12  R-13  R-14  Acid  Resin generator  Quencher  Surfactant  Solvent 1  Solvent 2  (pbw) (pbw)  (pbw)  (pbw)  (pbw)  (pbw)  P-1  PAG-1 (5.7)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-1  PAG-2 (5.7)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-1  PAG-3 (5.7)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-2  PAG-4 (5.7)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-3  PAG-5 (6.0)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-4  PAG-6 (6.0)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-4  PAG-7 (5.7)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-5  PAG-7 (5.7)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-1  PAG-1 (7)  Q-1  SF-1  PGMEA  GBL  (80)  (1.5)  (3.0)  (1,536)  (384)  P-4  PAG-1 (7)  Q-1  SF-1  PGMEA  GBL  (80)  (1.5)  (3.0)  (1,536)  (384)  P-1  PAG-2 (7)  Q-1  SF-1  PGMEA  GBL  (80)  (1.5)  (3.0)  (1,536)  (384)  P-1  PAG-8 (6.0)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-1  PAG-9 (5.7)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384)  P-1  PAG-10 (5.7)  SF-1  PGMEA  GBL  (80)  PAG-C (3.2)  (3.0)  (1,536)  (384) 