Apr. 18,  2019  88  US 2019/0113844 Al  EXAMPLES AND COMPARATIVE EXAMPLES  Organic Solvents:  Acid Generators: PAG 1 to PAG 6 of the Following  Structural Formulae  [0165]  Resist compositions were prepared by dissolving  the polymer and selected components in a solvent in accor› dance with the recipe shown in Tables 1 and 2, and filtering  through a filter having a pore size of 0.2 µm. The solvent  contained 100 ppm of surfactant FC-4430 (3M). The com› ponents in Tables 1 and 2 are as identified below.  [0166]  PGMEA (propylene glycol monomethyl ether  acetate)  [0167]  GBL (y-butyrolactone)  [0168]  CyH (cyclohexanone)  [0169]  PGME (propylene glycol monomethyl ether)  Mw~7,600  Mw/Mn~ 1.73  Mw~ 8,900  Mw/Mn~ 1.89  Mw~ 6,900  Mw/Mn~ 1.62  [0170]  -continued  r  0  0  F2  0  C  Y’s03- 0  CF3  OH  -continued  OH  Polymer4  Polymer 3  PAGl  \-j  s  -0-o)--cc,  -03S-CF2  PAG2  0 