c19)  United States  c12)  Patent Application Publication  NAKAMURA et al.  c10)  Pub. No.: US 2019/0235380 Al  (43)  Pub. Date:  Aug. 1, 2019  (54)  NEGATIVE TYPE PHOTOSENSITIVE RESIN  COMPOSITION, PHOTOSENSITIVE RESIST  FILM, PATTERN FORMING METHOD,  CURED FILM, AND METHOD OF  PRODUCING CURED FILM  (71)  Applicant:  TOKYO OHKA KOGYO CO., LTD.,  kawasaki-shi (JP)  (72)  Inventors:  Ryosuke NAKAMURA,  Kawasaki-shi  (JP);  Tomoyuki ANDO,  Kawasaki-shi  (JP);  Tokunori YAMADAYA,  Kawasaki-shi (JP)  (21)  Appl. No.:  16/326,865  (22)  PCT Filed:  Aug. 28, 2017  (86)  PCT No.:  PCT/JP2017/030721  § 371 (c)(l),  (2) Date:  Feb. 20, 2019  (51)  Int. Cl.  (52)  U.S. Cl.  CPC ............  G03F 71038  (2013.01);  G03F 710385  (2013.01);  C09D 163/00  (2013.01);  C09D  163/04  (2013.01);  G03F  7111  (2013.01);  G03F  7140  (2013.01);  G03F 71168  (2013.01);  G03F  712004  (2013.01);  G03F  7138  (2013.01);  G03F  71325  (2013.01);  G03F  7116  (2013.01)  US 20190235380Al  G03F  7138  G03F  7132  G03F  7140  (2006.01)  (2006.01)  (2006.01)  G03F 71038  C09D 163/00  C09D 163/04  G03F  7111  G03F  7116  G03F  7120  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  A negative type photosensitive resin composition containing  an epoxy group-containing resin; a metal oxide; and a  cationic polymerization initiator  (I).  The cationic polymer› ization initiator  (I)  contains one or more of a compound  represented by Formula (Il) and a compound represented by  Formula (I2). In Formula (Il ), R$^{601 }$to R$^{604 }$represent an aryl  group which may have a substituent or a fluorine atom. In  Formula (I2), R$^{605}$represents a fluorinated alkyl group which  may have a substituent or a fluorine atom. A plurality of  R$^{605}$’s may be the same as or different from one another. q  represents an integer of 1 or greater, and  Q $^{1}$+’s each inde› pendently represent a q-valent organic cation.  Aug. 31, 2016  (JP) ................................. 2016-170206  (57)  ABSTRACT  (30)  Foreign Application Priority Data  Publication Classification  (11)  RbOI  10  Rb04_B-Rb02  I  (12) 