US 2014/0199617 Al  166  Jul.  17,  2014  (11-1)  (11-2)  (11-3)  0  0  e  II  X  O-S-+-+-+-+-+--+-+L1-rzr-Cy1  II  0  (11-4)  0  0  0  11  e  II  X  Rf -S  - N -S--+--+--+-+-+---+-+-L2  Tz2  CY2  II  II  0  0  (11-5)  each of  R$_{6}$d  and  Ru  independently represents a hydrogen  atom or a monovalent organic group, and  R$_{6}$d  and  Ru  may be bonded to each other to form a ring;  B$_{3 }$ represents a site (X) capable of decomposing by an  action of an acid to generate a hydroxyl group or a  carboxyl group;  zd- represents a non-nucleophilic counter anion having X  number of groups represented by (B$_{3}$ -Q$_{3}$);  each of  Rdx  and  Rdy  independently represents an alkyl  group, and R<hc and  Rdy  may be bonded to each other to  form a ring;  Q$_{3 }$ represents a single bond or a divalent linking group;  each 1$_{3 }$ independently represents an integer ofO to 5;  each m$_{3 }$ independently represents an integer ofO to 5; and  X represents an integer ofO to 3, provided that at least one  of m$_{3 }$ and X represents an integer of 1 or more.  8.  The pattern-forming method according to claim  4,  wherein the site (X) is a site (X’) capable of decomposing  by an action of an acid to generate an alcoholic hydroxyl  group.  9.  The pattern-forming method according to claim  1,  wherein the low molecular weight compound (B) is a com› pound represented by the following formula (II-4) or  (II-5):  wherein in formula (II-1), each R$_{1}$d independently repre› sents a hydrogen atom or a monovalent organic group,  and two R$_{1}$d’s may be bonded to each other to form a  ring;  Q$_{1 }$ represents a single bond or a divalent linking group;  B$_{1 }$ represents a site (X) capable of decomposing by an  action of an acid to generate a hydroxyl group or a  carboxyl group;  zd- represents a non-nucleophilic counter anion having X  number of groups represented by (B$_{1 }$-Q$_{1}$);  each 1$_{1 }$ independently represents an integer ofO to 5;  each m$_{1 }$ independently represents an integer ofO to 5;  X represents an integer ofO to 3, provided that at least one  of a plurality of m/s and X represents an integer of 1 or  more;  in formula (II-2), each  R2d  independently represents a  hydrogen atom or a monovalent organic group, and two  R2d’s may be bonded to each other to form a ring;  each R $_{1 }$ sd  independently represents an alky I group, and two  R$_{15}$d’s may be bonded to each other to form a ring;  Q$_{2 }$ represents a single bond or a divalent linking group;  B$_{2 }$ represents a site (X) capable of decomposing by an  action of an acid to generate a hydroxyl group or a  carboxyl group;  zd- represents a non-nucleophilic counter anion having X  number of groups represented by (B$_{2}$ -Q$_{2}$ );  n represents an integer of O or 1;  each 1$_{2 }$ independently represents an integer ofO to 5;  each m$_{2 }$ independently represents an integer ofO to 5;  X represents an integer ofO to 3, provided that at least one  of m$_{2 }$ and X represents an integer of 1 or more;  in formula (II-3), each  R$_{3}$ d  independently represents a  hydrogen atom or a monovalent organic group, and two  R$_{3}$d’s may be bonded to each other to form a ring;  wherein each  x+  independently represents a counter cat- 10n;  Rf represents an alkyl group having at least one fluorine  atom, a cycloalkyl group having at least one fluorine  atom, or an aryl group having at least one fluorine atom;  each of Xf$_{1 }$ and Xf$_{2 }$ independently represents a fluorine  atom or an alkyl group substituted with at least one  fluorine atom;  each ofR$_{11}$ , R 12 , R $_{21 }$and R$_{22 }$independently represents a  hydrogen atom, a fluorine atom or an alkyl group, and  each ofR$_{11}$ , R 12 , R $_{21 }$and R$_{22}$ , when two or more of them  are present, may be the same with or different from each  other;  each ofL$_{1 }$and L$_{2 }$ independently represents a divalent link› ing group, and each ofL$_{1 }$ and L$_{2}$ ,  when two or more of  them are present, may be the same with or different from  each other;  each of Cy  1  and Cy  2  independently represents a cyclic  organic group;  provided that  at least one ofXf$_{1}$ ,  Ru, R$_{12}$, L$_{1 }$andCy$_{1 }$is substituted with  a group having a structure that a polar group is protected  with a leaving group capable of decomposing and leav› ing by an action of an acid, and at least one ofXf$_{2}$ , R 21 ,  R$_{22}$, L 2 ,  Cy $_{2 }$and Rf is substituted with a group having a 