Jul.  18,  2019  57  US 2019/0219920 Al  [0472]  -Cation Moiety  [0473]  In formula ( dl-3),  Mm+  is an organic cation having  a valency of m, and is the same as defined for  Mm+  in the  aforementioned formula ( dl -1).  [0474]  As the component (dl-3), one type of compound  may be used, or two or more types of compounds may be  used in combination.  [0475]  As the component (Dl), one type of the aforemen› tioned components (dl-1) to (dl-3), or at least two types of  the aforementioned components (dl-1) to (dl-3) can be used  in combination.  [0476]  When the resist composition contains the compo› nent (D 1 ), the amount of the component (D 1) relative to 100  parts by weight of the component (A) is preferably within a  range from 0.5 to 10 parts by weight, more preferably from  0.5 to 8 parts by weight, and still more preferably from 1 to  8 parts by weight.  [0477]  When the amount of the component (Dl) is at least  as large as the lower limit of the above-mentioned range,  excellent lithography properties and excellent resist pattern  shape can be more reliably obtained. On the other hand,  when the amount of the component (D 1) is no more than the  upper limit of the above-mentioned range, sensitivity can be  maintained at a satisfactory level, and through-put becomes  excellent.  [0478]  Production method of component (D 1):  [0479]  The production methods of the components (dl-1)  and (dl-2) are not particularly limited, and the components  ( dl-1) and ( dl-2) can be produced by conventional methods.  [0480]  Further, the production method of the component  (dl-3) is not particularly limited, and the component (dl-3)  can be produced in the same manner as disclosed in  US2012-0149916.  [0481]  -Component (D2)  [0482]  The acid diffusion control component may contain  a nitrogen-containing organic compound (D2) (hereafter,  referred to as component (D2)) which does not fall under the  definition of component (D 1 ).  [0483]  The component (D2) is not particularly limited, as  long as it functions as an acid diffusion control agent, and  does not fall under the definition of the component (Dl). As  the component (D2), any of the conventionally known  compounds may be selected for use. Among these, an  aliphatic amine is preferable, and a secondary aliphatic  amine or tertiary aliphatic amine is more preferable.  [0484]  An aliphatic amine is an amine having one or more  aliphatic groups, and the aliphatic groups preferably have 1  to 12 carbon atoms.  [0485]  Examples of these aliphatic amines include amines  in which at least one hydrogen atom of ammonia (NH$_{3}$ )  has  been substituted with an alkyl group or hydroxyalkyl group  [0496]  In the resist composition of the present embodi› ment, for preventing any deterioration in sensitivity, and  improving the resist pattern shape and the post exposure  stability of the latent image formed by the pattern-wise  exposure of the resist layer, at least one compound (E)  (hereafter referred to as the component (E)) selected from  [0495]  <<At Least One Compound (E) Selected from the  Group Consisting of an Organic Carboxylic Acid, or a  Phosphorus Oxo Acid or Derivative Thereof>>  [0494]  When the resist composition contains the compo› nent (D2), the amount of the component (D2) is typically  used in an amount within a range from 0.01 to 5 parts by  weight, relative to 100 parts by weight of the component  (A). When the amount of the component (D) is within the  above-mentioned range, the shape of the resist pattern and  the post exposure stability of the latent image formed by the  pattern-wise exposure of the resist layer are improved.  [0493]  As the component (D2), one type of compound  may be used alone, or two or more types may be used in  combination.  [0492]  Examples of aromatic amines include 4-dimethyl› aminopyridine, pyrrole, indole, pyrazole, imidazole and  derivatives thereof, as well as tribenzylamine, 2,6-diisopro› pylaniline and N-tert-butoxycarbonylpyrrolidine.  [0491]  Further, as the component (D2), an aromatic amine  may be used.  [0490]  Examples of other aliphatic amines include tris(2- methoxymethoxyethyl)amine, tris  { 2-(2-methoxyethoxy)  ethyl }amine,  tris  { 2-(2-methoxyethoxymethoxy)  ethyl }amine, tris { 2-(1-methoxyethoxy)ethyl }amine, tris  { 2-(1-ethoxyethoxy)ethyl }amine, tris { 2-(1-ethoxypropoxy)  ethyl }amine,  tris[2-{ 2-(2-hydroxyethoxy)ethoxy }ethyl]  amine and triethanolamine triacetate, and triethanolamine  triacetate is preferable.  [0489]  The aliphatic polycyclic amine preferably has 6 to  10 carbon atoms, and specific examples thereof include  1,5-diazabicyclo[4.3.0]-5-nonene, 1,8-diazabicyclo[5.4.0]- 7-undecene, hexamethylenetetramine, and 1,4-diazabicyclo  [2.2.2]octane.  [0488]  Specific examples of the aliphatic monocyclic  amine include piperidine, and piperazine.  [0487]  Examples of the cyclic amine include heterocyclic  compounds containing a nitrogen atom as a hetero atom. The  heterocyclic compound may be a monocyclic compound  (aliphatic monocyclic amine), or a polycyclic compound  (aliphatic polycyclic amine).  [0486]  Specific examples of alkylamines and alkylalcoho› lamines include monoalkylamines such as n-hexylamine,  n-heptylamine,  n-octylamine,  n-nonylamine,  and  n-decylamine; dialkylamines such as diethylamine, di-n› propylamine, di-n-heptylamine, di-n-octylamine, and dicy› clohexylamine; trialkylamines such as trimethylamine, tri› ethylamine,  tri-n-propylamine,  tri-n-butylamine,  tri-n› hexylamine,  tri-n-pentylamine,  tri-n-heptylamine,  tri-n› octylamine, tri-n-nonylamine, tri-n-decylamine, and tri-n› dodecylamine;  and  alkyl  alcohol  amines  such  as  diethanolamine, triethanolamine, diisopropanolamine, tri› isopropanolamine,  di-n-octanolamine,  and  tri-n-oc› tanolamine. Among these, trialkylamines of 5 to 10 carbon  atoms are preferable, and tri-n-pentylamine and tri-n-oc› tylamine are particularly desirable.  of no more than 12 carbon atoms (i.e., alkylamines or  alkylalcoholamines ), and cyclic amines. 