US 2012/0003590 Al  17  Jan. 5, 2012  group, a divalent aromatic ring group, or a group formed by a  combination of two or more thereof. In the group formed by  a combination, two or more groups combined may be the  same as or different from each other. Also, these groups may  be connected through -0-, -S-, -CO-, -S0$_{2}$ -,  -NR- (Risa hydrogen atom or an alkyl group), a divalent  nitrogen-containing non-aromatic heterocyclic group, a diva› lent aromatic ring group, or a group formed by a combination  thereof.  [0186]  Examples of the alkylene group, alkenylene group  and divalent aliphatic hydrocarbon ring group of L$_{21 }$ are the  same as those described above for respective groups in Lu.  [0187]  The divalent aromatic ring group ofL$_{21 }$ may be an  arylene group or a heteroarylene group. This divalent aro› matic ring group preferably has a carbon number of 6 to 14.  [0188]  Examples of -NR- and divalent nitrogen-con› taining non-aromatic heterocyclic group in L$_{21 }$ are the same  as those described above for X $_{11}$.  [0189]  L$_{21 }$is preferably a single bond, an alkylene group, a  divalent aliphatic hydrocarbon ring group, a divalent aro› matic ring group, or a group formed by a combination of two  or more thereof (for example, -alkylene group-divalent aro› matic ring group- or -divalent aliphatic hydrocarbon ring  group-alkylene group-), or a group formed by combining two  or more of these groups through a linking group such as  -OCO-, -COO-, ---0- and -S-(for example, -alky› lene group-OCO-divalent aromatic ring group-, -alkylene  group-5-divalent aromatic ring group-, or -alkylene group-0- alkylene group-divalent aromatic ring group).  [0190]  L$_{22 }$ represents an alkylene group, an alkenylene  group, a divalent aliphatic hydrocarbon ring group, a divalent  aromatic ring group, or a group formed by a combination of  two or more thereof, and in these groups, hydrogen atoms  may be partially or entirely substituted for by a substituent  selected from a fluorine atom, an alkyl fluoride group, a nitro  group and a cyano group. In the group formed by a combina› tion, two or more groups combined may be the same as or  different from each other. Also, these groups may be con› nected through  ---0-, -S-, -CO-, -S0$_{2}$ -,  -NR› (R is a hydrogen atom or an alkyl group), a divalent nitrogen› containing non-aromatic heterocyclic group, a divalent aro› matic ring group, or a group formed by a combination thereof.  [0191]  L$_{22 }$is preferably an alkylene group or divalent aro› matic ring group with hydrogen atoms being partially or  entirely substituted for by a fluorine atom or an alkyl fluoride  group (more preferably a perfluoroalkyl group), or a group  formed by a combination thereof, more preferably an alky› lene group or divalent aromatic ring group with hydrogen  atoms being partially or entirely substituted for by a fluorine  atom.  [0192]  Specific examples of the alkylene group, alkenylene  group, aliphatic hydrocarbon ring group, divalent aromatic  ring group and group formed by a combination of two or more  thereof, represented by L$_{22}$, are the same as the groups exem› plified above as L$_{12 }$in formula (Ll ).  [0193]  Specific examples of -NR- and divalent nitro› gen-containing non-aromatic heterocyclic group as the link› ing group in L$_{22 }$are the same as those of respective groups in  X$_{11 }$above, and preferred examples are also the same.  [0194]  Z$_{2 }$ represents a moiety working out to a sulfonic acid  group upon irradiation with an actinic ray or radiation. Spe› cific examples of Z$_{2 }$ are the same described above for Z$_{1}$ .  [0195]  The moiety represented by formula (L3) is  described below.  [0196]  Each of X$_{31 }$ and X$_{32 }$ independently represents a  single bond,  ---0-, -S-, -CO-, -S0$_{2}$-,  -NR- (R  is a hydrogen atom or an alkyl group), a divalent nitrogen› containing non-aromatic heterocyclic group, or a group  formed by a combination thereof.  [0197]  Examples of -NR- and divalent nitrogen-con› taining non-aromatic heterocyclic group in each ofX$_{31 }$ and  X$_{32 }$are the same as those described above for Xu.  [0198]  X$_{31 }$ is preferably a single bond, ---0-, -CO-,  -NR- (Risa hydrogen atom or an alkyl group) or a group  formed by a combination thereof, more preferably a single  bond, -COO- or ----CONR- (R is a hydrogen atom or an  alkyl group).  [0199]  X$_{32 }$ is  preferably  -0-, -S-, -CO-,  -S0$_{2}$ -,  a divalent nitrogen-containing non-aromatic het› erocyclic group or a group formed by a combination thereof,  more preferably -0-, ---OCO- or ---OS0$_{2}$ -.  [0200]  L$_{31 }$represents a single bond, an alkylene group, an  alkenylene group, a divalent aliphatic hydrocarbon ring  group, a divalent aromatic ring group, or a group formed by a  combination of two or more thereof. In the group formed by  a combination, two or more groups combined may be the  same as or different from each other. Also, these groups may  be connected through -0-, -S-, -CO-, -S0$_{2}$ -,  -NR- (Risa hydrogen atom or an alkyl group), a divalent  nitrogen-containing non-aromatic heterocyclic group, a diva› lent aromatic ring group, or a group formed by a combination  thereof.  [0201]  Examples of the alkylene group, alkenylene group,  divalent aliphatic hydrocarbon ring group and divalent aro› matic ring group ofL$_{31 }$are the same as those described above  forL$_{21}$ .  [0202]  Specific examples of -NR- and divalent nitro› gen-containing non-aromatic heterocyclic group as the link› ing group in L$_{31 }$are the same as those of respective groups in  Xu above, and preferred examples are also the same.  [0203]  L$_{32 }$ represents an alkylene group, an alkenylene  group, a divalent aliphatic hydrocarbon ring group, a divalent  aromatic ring group, or a group formed by a combination of  two or more thereof. In the group formed by a combination,  two or more groups combined may be the same as or different  from each other. Also, these groups may be connected  through  ---0-, -S-, -CO-, -S0$_{2}$ -,  -NR- (R is a  hydrogen atom or an alkyl group), a divalent nitrogen-con› taining non-aromatic heterocyclic group, a divalent aromatic  ring group, or a group formed by a combination thereof.  [0204]  In the alkylene group, alkenylene group, divalent  aliphatic hydrocarbon ring group, divalent aromatic ring  group and group formed by a combination of two or more  thereof, represented by L$_{32}$, part or all of hydrogen atoms are  preferably substituted for by a substituent selected from a  fluorine atom, an alkyl fluoride group, a nitro group and a  cyano group.  [0205]  L$_{32 }$is preferably an alkylene group or divalent aro› matic ring group with hydrogen atoms being partially or  entirely substituted for by a fluorine atom or an alkyl fluoride  group (more preferably a perfluoroalkyl group), or a group  formed by a combination thereof, more preferably an alky› lene group or divalent aromatic ring group with hydrogen  atoms being partially or entirely substituted for by a fluorine  atom.  [0206]  Examples of the alkylene group, alkenylene group,  divalent aliphatic hydrocarbon ring group and divalent aro› matic ring group and group formed by a combination of two 