US 2012/0003590 Al  74  Jan. 5, 2012  [0359]  Specific examples of the compound represented by  formula (BS-1) include tri-n-butylamine, tri-n-pentylamine,  tri-n-octylamine, tri-n-decylamine, triisodecylamine, dicy› clohexy lmethy !amine, tetradecy !amine, pentadecy !amine,  hexadecylamine, octadecylamine, didecylamine, methyloc› tadecy !amine, dimethy lundecy !amine, N,N-dimethy ldode› cy lamine, methyldioctadecylamine, N,N-dihexylaniline, 2,6- diisopropylaniline and 2,4,6-tri(tert-butyl)aniline.  [0360]  Also, the basic compound represented by formula  (BS-1) is preferably a basic compound where at least one of  three R’s is an alkyl group having a hydrophilic group.  Thanks to this configuration, the resolution can be enhanced  and at the same time, a good pattern profile can be formed.  [0361]  The alkyl group having a hydrophilic group prefer› ably has a carbon number of 1 to 8, more preferably from 1 to  6.  [0362]  Examples of the alkyl group having a hydrophilic  group include an alkyl group having a hydroxy group or a  mercapto group. Specific examples of the basic compound  having such an alkyl group include triethanolamine and N,N› dihydroxyethylaniline.  [0363]  The alkyl group having a hydrophilic group also  includes an alkyl group having an oxygen atom, a sulfur atom  or a carbonyl group in the alkyl chain. That is, the alkyl group  as R may be an oxyalkylene chain, a thioalkylene chain or a  ketoalkylene chain. The oxyalkylene chain is preferably  ----CH$_{2}$CH$_{2}$0-. Specific examples thereofinclude tris(meth› oxyethoxyethyl)amine and compounds illustrated in U.S.  Pat. No. 6,040,112, colunm 3, line 60 et seq.  [0364]  The alkyl group having a hydrophilic group may be  also an alkyl group having a hydroxy group or a mercapto  group as a substituent and having an oxygen atom, a sulfur  atom or a carbonyl group in the alkyl chain.  [0365]  The alkyl group having a hydrophilic group may  further have a substituent, and examples of the further sub› stituent include a substituted or unsubstituted aryl group. In  the case where the aryl group is a substituted aryl group,  examples of the substituent in the substituted aryl group  include an alkyl group, an alkoxy group and an aryl group.  [0366]  Specific examples of the basic compound where in  formula (BS-1 ), at least one of three R’s is an alkyl group  having a hydrophilic group, are illustrated below, but the  present invention is not limited thereto.  rO~OH  rO~OH  /O~N~o~OH  HO~O~N~o~OH  rO~OH  rO~  /O~N~O~OH  /O~N~ 0 ~  rO~OH  /’---._/0~  N  ~O~  rO~OH  /O~N~$_{0}$ rO~OH  rO~OH  /O~N~O~OH  ""-o~N~o~OH  rO~O~OH  rs~S"’--.  /O~N~o~o~OH  /S~N~s~s""- rs~SH  rs~SH  /S~N~s~SH  HO~S~N~s~SH  HO~  I  \._a  o  ~I\;\;\  __I’\  rN  O  O  Ov  ~o  o  00~  \  rs~OH  /O~N~C~OH  0 