24  US 9,423,690 B2  23  a cycloalkylene group, a divalent aromatic ring group, and  a group in combination of an alkylene group and a divalent  aromatic ring group.  The alkylene group of L$_{1 }$ and Lu includes an alkylene  group having 1 to 8 carbon atoms such as a methylene group,  an ethylene group, a propylene group, a butylenes group, a  hexylene group, and octylene group.  An  alkylene group  having 1 to 4 carbon atoms is preferred, and an alkylene  group having 1 or 2 carbon atoms is particularly preferred.  The cycloalkylene group of Lu is preferably a cycloalky› lene group having 3 to 20 carbon atoms, and examples  thereof may include a cyclopropylene group, a cyclobuty› lene group, a cyclopentylene group, a cyclohexylene group,  a cycloheptylene group, a cyclooctylene group, a norbo- nylene group or an adamantylene group.  From the viewpoint that, in the case of forming a fine  isolated space pattern by achieving the higher contrast (y  value is high), the resolution and the space width roughness  may be further improved, and in the case of forming a fine  hole pattern, high resolution, good EL, and uniformity of  local pattern dimension may be achieved for sure, the  repeating unit represented by Formula (1-0) may be prefer› ably the repeating unit represented by the following Formula  (1-1).  In the cycloalkylene group of Lu, the carbon constituting  the ring (the carbon contributing to ring formation) may be  carbonyl carbon, a heteroatom such as an oxygen atom, and  a group having an ester bond to form a lactone ring.  The divalent aromatic ring group of L$_{1 }$ and Lu is pref› erably a phenylene group such as 1,4-phenylene group,  1,3-phenylene group, and 1,2-phenylene group, preferably  1,4-naphtylene group, and more preferably 1,4-phenylene  group.  L$_{1 }$ is preferably a single bond, a divalent aromatic ring  group, a divalent group having a norbomylene group or a  divalent group having an adamatylene group, and particu- larly preferably a single bond.  Specific examples of the divalent linking group of L$_{1 }$ are  shown below, but the present invention is not limited  thereto.  In Formula (1-1),  X represents an alicyclic group.  R$_{1}$ ,  R$_{2}$ ,  Ra and L$_{1 }$ each have the same meaning as R$_{1}$ ,  R$_{2}$ ,  Ra and L$_{1 }$ in Formula (1-0), and the specific examples and  preferred examples thereof are the same as Ri, R$_{2}$ ,  Ra and  L$_{1 }$ in Formula (1-0).  An  alicyclic group as X may represent a monocyclic, a  polycyclic and a bridged group, and preferably the alicyclic  group having 3 to 25 carbon atoms.  In addition, an alicyclic group may have a substituent,  examples of the substituent may include the same substitu› ent which may be possessed by the alkyl group of Ri, R$_{2}$ ,  Ru to R$_{13}$, and the ring formed by Ru and R$_{12 }$(or Ru and  R$_{13}$) being bound with each other, and the alkyl group (a  methyl group, an ethyl group, a propyl group, a butyl group,  a perfluoroalkyl group (for example, a trifluoromethyl  group) and the like) and the like.  X represents preferably an alicyclic group having 3 to 25  carbon atoms, more preferably an alicyclic group having 5  to 20 carbon atoms, and particularly preferably a cycloalkyl  group having 5 to 15 carbon atoms.  In addition, X is preferably an alicyclic group as a 3- to  8-membered ring or the condensed ring group, more pref› erably, 5- or 6-membered ring or the condensed ring group.  Hereinafter, the structure examples of an alicyclic group  as X are shown.  (1)  D>  ¢  o’-._/  (1-1)  -continued  0 