Jan. 10, 2019  17  US 2019/0010119 Al  [0086]  In the general formula (A2), Z represents a mon› ovalent anion. Illustrative examples thereof include a sul› fonate anion, an arylsulfonate anion, and an alkanesulfonate  anion, and is preferably an arylsulfonate anion, although z› is not particularly limited. Specifically, the compounds hav› ing sulfonium anions with the following structures are more  preferable, but the anion of the sulfonium salt used for the  inventive resist composition is not limited thereto.  -continued  ¢ 0~::p3  CF2CF3  #  ~OH  c¢ o  l"-cF 2 CF 3  CF2CF3  #  0  0  o]  o]  ¢  01  o¢~ 01  F3C+CF3  ~  I  /7  F3C+CF3  OH  OH  0  0  0  MeO  0  -continued  0 ~CF3  ~  0 XCF 3 0Me  vy  0  lp;lp  oyoy  ¢ O~cp$_{3 }$ CF3  #  0  oyoy  c¢ O~cp$_{3 }$ CF3  # 