Jan. 10, 2019  4  US 2019/0010119 Al  optionally substituted with a halogen atom; A 2  represents a  single bond or a linear, branched, or cyclic alkylene group  having 1 to 10 carbon atoms optionally having an ether bond  between a carbon-carbon bond thereof; "s" is 0 or 1; "t" is  an integer of0 to 2; "c" is an integer satisfying 0scs5+2t-e;  "d" is 0 or 1; "e" is an integer of 1 to 3; Xis an acid-liable  group when "e" is 1, and is a hydrogen atom or an acid-liable  group when "e" is 2 or more with the proviso that at least one  of X is an acid-liable group.  [0038]  When the component (B) contains the repeating  unit (B2) as described above, it is possible to increase the  solubility of the component (B) to an alkaline developer.  [0039]  It  is preferable that the resist composition be a  chemically amplified negative resist composition, and the  component (B) further contain a repeating unit shown by the  following general formula (BN2) in addition to the repeating  unit (Bl)  [0042]  When the inventive resist composition contains a  crosslinking agent as described above, it is possible to form  or enhance the crosslinking structure of the component (B)  in preparation as a chemically amplified negative resist  composition.  [0043]  It  is preferable that the component (B) further  contain any one or more of repeating units shown by the  following general formulae (B3), (B4), and (B5)  wherein  RA  has the same meaning as defined above; each  R 12  independently represents a halogen atom, a linear,  branched, or cyclic acyloxy group having 2 to 8 carbon  atoms optionally substituted with a halogen atom, a linear,  branched, or cyclic alkyl group having 1 to 6 carbon atoms  optionally substituted with a halogen atom, or a linear,  branched, or cyclic alkoxy group having 1 to 6 carbon atoms  optionally substituted with a halogen atom; A 2  represents a  single bond or a linear, branched, or cyclic alkylene group  having 1 to 10 carbon atoms optionally having an ether bond  between a carbon-carbon bond thereof; W represents a  hydrogen atom, a linear, branched, or cyclic monovalent  aliphatic hydrocarbon group having 1 to 10 carbon atoms  optionally having an ether group, a carbonyl group, or a  carbonyloxy group between a carbon-carbon bond thereof,  or a monovalent aromatic ring group optionally having a  substituent; Rx and Ry each independently represent a  hydrogen atom, an alkyl group having 1 to 15 carbon atoms  optionally substituted with a hydroxy group or an alkoxy  group, or a monovalent aromatic ring group optionally  having a substituent, with the proviso that Rx and Ry do not  both represent hydrogen atoms, and Rx and Ry are option› ally bonded with each other to form a ring together with the  carbon atom to which Rx and Ry are bonded; "y" is an  integer of 0 to 2; "u" is 0 or 1; "l" is an integer satisfying  0sls5+2y-m; and "m" is an integer of 1 to 3.  [0040]  When the component (B) contains the repeating  unit (BN2),  the inventive resist composition further  improves the resolution performance when it is prepared as  a chemically amplified negative resist composition.  [0041]  It  is preferable that the resist composition further  contain a crosslinking agent.  wherein  RA  has the same meaning as defined above; R$^{13 }$and  R $^{14 }$each independently represents a hydroxy group, a halo› gen atom, an acetoxy group, a linear, branched, or cyclic  acyloxy group having 2 to 8 carbon atoms optionally sub› stituted with a halogen atom, a linear, branched, or cyclic  alkyl group having 1 to 8 carbon atoms optionally substi› tuted with a halogen atom, a linear, branched, or cyclic  alkoxy group having 1 to 8 carbon atoms optionally substi› tuted with a halogen atom, or a linear, branched, or cyclic  alkylcarbonyloxy group having 2 to 8 carbon atoms option› ally substituted with a halogen atom; R 15  represents an  acetyl group, an acetoxy group, a halogen atom, a nitro  group, a cyano group, a sulfinyl group, a sulfonyl group, a  linear, branched, or cyclic alkyl group having 1 to 20 carbon  atoms, a linear, branched, or cyclic alkoxy group having 1 to  20 carbon atoms, a linear, branched, or cyclic acyloxy group  having 2 to 20 carbon atoms, a linear, branched, or cyclic  alkoxyalkyl group having 2 to 20 carbon atoms, or an  alkylthioalkyl group having 2 to 20 carbon atoms; A 3  represents a single bond or a linear, branched, or cyclic  alkylene group having 1 to 10 carbon atoms optionally  having an ether bond between a carbon-carbon bond thereof;  "f’  and "g" each independently represent an integer of 0 to  4; "h" is an integer of 0 or 1;  ’T’  is an integer of 0 to 5; and  "k" is an integer of 0 to 2.  (BN2)  (B5)  -tto1  \  h  A3  R1s.mfl  J  I  k  (B4)  (B3) 