US 9,423,690 B2  83  84  If  the resin (A) contains the repeating unit represented by  Formula ( 4), the content is preferably 1 mo! % to 40 mo! %,  more preferably 2 mo! % to 30 mo! %, and particularly  preferably 5 mo!  % to 25 mo! %, base on the whole repeating  unit in the resin (A).  The resin (A) may contain the repeating unit (b) having a  polar group other than the repeating unit represented by  Formula (1-2). Because of containing the repeating unit (b’),  for example, the sensitivity of the composition having the  resin may be improved. The repeating unit (b) is preferably  a non acid-decomposable repeating unit (that is, the unit not  having acid-decomposable group).  A "polar group" which may be contained in the repeating  unit (b) includes, for example, the following (1) to ( 4 ).  Further, hereinafter, "electronegativity" means the value by  Pauling.  (1) A functional group containing a structure in which an  oxygen atom and an atom having an electronegativity dif› ference of 1.1 or more from an oxygen atom are bound by  a single bond.  This polar group includes for example, a group containing  the structure represented by O-H such as a hydroxyl group.  (2) A functional group containing a structure in which a  nitrogen atom and an atom having an electronegativity  difference of0.6 or more from a nitrogen atom are bound by  a single bond.  This polar group includes for example, a group containing  the structure represented by N-H such as an amino group.  (3) A functional group containing a structure in which two  atoms having an electronegativity difference of 0.5 or more  from each other are bound by a double bond or triple bond.  This polar group includes, for example, a group contain› ing the structure represented by C  N, C=O, N=O, S=O  or C  N.  ( 4) A functional group having an ionic moiety  This polar group includes, for example, a group having a  moiety represented by N+ ors+.  The specific examples of the partial structure which may  be contained in the "polar group" are shown below.  -OH -COOR  -e- -c-o- ll  11  0  0  I  -o-c-o- 11  -CN -NC -C=N  0  -continued  I  I  I  ;  -C-N  -O-C-N  II  \  0  II  \  0  -N-C-N  II  \  0  0  H  II  -C-N-C- -N- -NO$_{2 }$ -NO -S- Ii  0  11  I II  0  0  0  II  II  0  II  /  0  II  0  -S- -S-N  -S-O- -S-N-S- Ii  0  II  \  0  0  II  Ii  0  -S-N-C- 11  I II  0  0  11  I  II  0  0  Ifi  0  -N- X  I  [  0  I@  0  I@ l  -COO -,- -S03 -,- 0 $_{X }$ 0  X  [  0\@  0\@  -COO /- -S03 /- The polar group which may be contained in the repeating  unit (b) is preferably selected from the group consisting of  a hydroxyl group, a cyano group, a lactone group, a sultone  group, a carboxylic acid group, a sulphonic acid group, an  amide group, a sulpone amide group, an ammonium group,  a sulphonium group, a carbonate group (---O-CO---0-)  (for example, a cyclic carbonate ester structure, and the like)  and a combination of two or more thereof, and particularly  preferably a group containing an alcoholic hydroxy group, a  cyano group, a lactone group, a sultone group, or a cyano› lactone structure.  If  the resin further contains the repeating unit having an  alcoholic hydroxy group, the exposure latitude (EL) of the  composition containing the resin may be improved.  If  the resin further contains a repeating unit having a  cyano group, the sensitivity of the composition containing  the resin may be improved.  If  the resin further contains a repeating unit having a  lactone group, a dissolution contrast against the developer  containing an organic solvent may be further improved. In  addition, in this way, the dry etching resistance, the coating  property, and the adhesion property on the substrate of the  composition containing the resin may be improved.  If  the resin contains a repeating unit with a group con› taining a lactone structure having a cyano group, a dissolu- tion contrast against the development containing an organic  solvent may be improved. In addition, in this way, the dry  etching resistance, the sensitivity, the coating property, and  the adhesion property on the substrate of the composition  containing the resin may be improved. Further, in this way,  it is possible to charge the function caused by each of a  cyano group and a lactone group to a single repeating unit,  and to increase the degree of freedom of designing the resin.  The repeating unit having a polar group is preferably a  repeating unit having a lactone structure as a polar group.  The repeating unit having a lactone structure is more pref› erably a repeating unit represented by the following Formula  (2).  -continued 