251  US 9,423,690 B2  252  TABLE 6-continued  TABLE 7  Isolated  Photo-acid  Basic  Hydro- space  Space width  Resin  generator  compound  phobic  Solvent  Surfactant  Rinse  Sensitivity  resolution  roughness  Ex  (mass%)  (mass%)  (mass%)  resin  (mass%)  (mass%)  Developer  solution  (µC/cm 2 )  (nm)  (nm)  Ex. 2-20  P-28  z121  N-8  Sl/S2  W-4  SG-3  11.4  26.0  3.5  77.99  20  2  80/20  0.01  Ex. 2-21  P-29  z114  N-4  Sl/S2  W-3  SG-3  SR-2  18.6  31.0  4.4  75.99  20  4  80/20  0.01  Ex. 2-22  P-30  z117  N-1  Sl/S2  W-4  SG-2  18.9  31.0  4.4  77.99  20  2  50/50  0.01  Ex. 2-23  P-31  z124  N-6  S3  W-4  SG-3  17.2  31.0  4.4  77.99  20  2  100  0.01  Ex. 2-24  P-32  z124  N-6  Sl/S2  W-4  SG-3  13.0  28.0  3.9  77.99  20  2  80/20  0.01  Ex. 2-25  P-33  z125  N-8  Sl/S2  W-4  SG-3  13.4  29.0  4.0  67.99  30  2  80/20  0.01  Ex. 2-26  P-34  z108  N-8  Sl/S2  None  SG-3  18.2  31.0  4.3  78.00  20  2  80/20  Ex. 2-27  P-35  z108  N-8  Sl/S2  W-4  SG-3  12.8  28.0  3.9  77.99  20  2  80/20  0.01  Ex. 2-28  P-36  z108  N-8  Sl/S2  W-4  SG-3  13.2  29.0  4.0  77.99  20  2  80/20  0.01  Ex. 2-29  P-37  z4/z10 - 1/1  N-5  Sl/S2  W-2  SG-3  SR-3  23.6  35.0  5.2  77.99  (mass ratio)  2  50/50  0.01  20  Ex. 2-30  P-38  z94  N-10  Sl/S2  W-4  SG-2  SR-1  17.8  30.0  4.5  75.99  20  4  80/20  0.01  Ex. 2-31  P-42  z119  N-8  Sl/S2  W-1  SG-1  17.7  32.0  4.5  77.99  20  2  50/50  0.01  Ex. 2-32  P-43  z127  N-9  Sl/S2  W-4  SG-3  13.8  30.0  4.2  77.99  20  2  80/20  0.01  Ex. 2-33  P-44  z127  N-9  Sl/S2  W-4  SG-3  13.5  29.0  4.0  77.99  20  2  80/20  0.01  Isolated  Photo-acid  Basic  Hydro- space  Space width  Resin  generator  compound  phobic  Solvent  Surfactant  Rinse  Sensitivity  resolution  roughness  Ex  (mass%)  (mass%)  (mass%)  resin  (mass%)  (mass%)  Developer liquid  (µC/cm 2 )  (nm)  (nm)  Ex. 2-34  P-47  zll  N-4  Sl/S2  W-4  SG-2  20.5  33.0  4.7  77.99  20  2  60/40  0.01  Ex. 2-35  P-51  z120  N-7  Sl/S2  W-4  SG-3  14.0  29.0  3.9  76.99  20  3  80/20  0.01  Ex. 2-36  P-53  z19  N-6  Sl/S2  W-3  SG-3  SR-3  18.2  32.0  4.5  77.99  20  2  80/20  0.01  Ex. 2-37  P-57  z123  N-6  Sl/S2  W-4  SG-3  15.0  29.0  4.0  77.99  20  2  80/20  0.01  Ex. 2-38  P-61  z112  N-6  Sl/S4  W-4  SG-3  24.1  38.0  6.1  77.99  20  2  80/20  0.01  Ex. 2-39  P-62  z123  N-6  Sl/S2  W-4  SG-3  12.2  27.0  3.7  77.99  20  2  80/20  0.01  Ex. 2-40  P-63  z125  N-6  Sl/S2  W-4  SG-3  12.5  27.0  3.7  77.99  20  2  80/20  0.01  Ex. 2-41  P-64  z122  N-6  Sl/S2  W-4  SG-3  15.4  29.0  4.2  77.99  20  2  60/40  0.01  Ex. 2- 42  P-71  z120  N-7  Sl/S2  W-4  SG-2  15.1  29.0  4.2  76.99  20  3  80/20  0.01  Ex. 2-43  P-72  N-8  Sl/S2  W-4  SG-3  12.8  28.0  3.9  97.99  2  80/20  0.01  Ex. 2-44  P-73  N-3  Sl/S2  W-1  SG-3  12.7  28.0  3.9  97.99  2  80/20  0.01  Ex. 2-45  P-77  N-9  Sl/S2  W-4  SG-3  17.5  31.0  4.3  97.99  2  80/20  0.01  Ex. 2-46  P-66  z132  N-11  Sl/S2  W-1  SG-3  11.0  26.0  3.5  66.99  30  3  80/20  0.01  Ex. 2-47  P-78  z132  N-11  Sl/S2  W-4  SG-3  11.3  26.0  3.6  66.99  30  3  80/20  0.01  Ex. 2-48  P-79  z133  N-6  Sl/S2  W-4  SG-3  11.3  26.0  3.6  72.99  25  2  80/20  0.01  Ex. 2-49  P-80  z108  N-3  Sl/S2  W-4  SG-3  14.2  29.0  4.2  77.99  20  2  60/40  0.01  Ex. 2-50  P-81  z133  N-4  Sl/S2  W-4  SG-3  SR-1  14.1  29.0  4.1  66.99  30  3  80/20  0.01 