US 2012/0003590 Al  71  Jan. 5, 2012  B-117  OD  ¢o  ,,Jl ,o  r1I  u"!lf’"M  0  0  B-119  C-1  0-s+  -OOC-CH3  C-2  0-s+  -OOC-C2Hs  0  F  0  F  F  0  -o-~  ~  I  ~  ~_,,N  u" !  T  !  "11  0  F  0  B-118  Q  (Ys~  ~  B-120  -continued  p  -t-0-s,  -OOC-CH;  C-3  [0345]  The composition of the present invention may fur› ther contain, as a photo-acid generator, a compound capable  of generating a carboxylic acid upon irradiation with an  actinic ray or radiation. Examples of such a compound  include the followings.  C-4  H3CO-O-S+  -OOC-C3H7  C-5  -continued 