US 2020/0050106 Al  29  Feb. 13, 2020  -continued  350A 3  311A 3  250A 3  535A F F F  HO§  I I I  F F F  290A 3  315A 3  HO-~---+--FI Flt----+--FI ~-N-Ol  II  II  H  0  F F F  0  [0291]  Among those, the photoacid generator is preferably  a photoacid generator including an anionic moiety and a  cationic moiety from the viewpoint that the effect of the  present invention is more excellent.  [0292]  More specifically, the photoacid generator is pref› erably a compound represented by General Formula  (ZI)  or  General Formula  (ZII).  (ZI)  (ZII)  [0293]  In General Formula  (ZI),  [0294]  R$_{201}$, R 202 , and R $_{203 }$each independently represent  an organic group.  [0295]  The number of carbon atoms of the organic group  as each of R$_{201}$, R 202 , and R 203  is preferably  1  to 30, and  more preferably  1  to 20.  [0296]  Furthermore, two ofR$_{201 }$to R$_{203 }$may be bonded to  each other to form a ring structure, and the ring may include  an oxygen atom, a sulfur atom, an ester bond, an amide  bond, or a carbonyl group, and examples of the group  formed by the bonding of two of R$_{201 }$ to R$_{203 }$ include an  alkylene group (for example, a butylene group and a pen› tylene group).  [0297]  z- represents a non-nucleophilic anion (anion hav› ing a remarkably low ability of causing a nucleophilic  reaction).  [0298]  Examples of the non-nucleophilic anion include a  sulfonate anion (such as an aliphatic sulfonate anion, an  aromatic sulfonate anion, and a camphor sulfonate anion), a  carboxylate anion (such as an aliphatic carboxylate anion, an  aromatic carboxylate anion, and an aralkyl carboxylate  anion), a sulfonylimide anion, a bis(alkylsulfonyl)imide  anion, and a tris(alkylsulfonyl)methide anion.  [0299]  The aliphatic moiety in the aliphatic sulfonate  anion and the aliphatic carboxylate anion may be an alkyl  group or a cycloalkyl group, and is preferably a linear or  branched alkyl group having  1  to 30 carbon atoms or a  cycloalkyl group having 3 to 30 carbon atoms.  [0300]  As the aromatic ring group in the aromatic sul› fonate anion and the aromatic carboxylate anion, an aryl  group having 6 to  14  carbon atoms is preferable, and  examples thereof include a phenyl group, a tolyl group, and  a naphthyl group.  [0301]  Specific examples of the substituent which may be  contained in the alkyl group, the cycloalkyl group, and the  aryl group exemplified above include a nitro group, a  halogen atom such as fluorine atom, a carboxyl group, a  hydroxyl group, an amino group, a cyano group, an alkoxy  group (preferably having  1  to 15 carbon atoms), a cycloalkyl  group (preferably having 3 to 15 carbon atoms), an aryl  group (preferably having 6 to  14  carbon atoms), an alkoxy› carbonyl group (preferably having 2 to 7 carbon atoms), an  acyl group (preferably having 2 to 12 carbon atoms), an  alkoxycarbonyloxy group (preferably having 2 to 7 carbon  atoms), an alkylthio group (preferably having  1  to 15 carbon  atoms), an alkylsulfonyl group (preferably having  1  to 15  carbon atoms), an alkyliminosulfonyl group (preferably  having  1  to 15 carbon atoms), an aryloxysulfonyl group  (preferably having 6 to 20 carbon atoms), an alkyl aryloxy› sulfonyl group (preferably having 7 to 20 carbon atoms), a  cycloalkylaryloxysulfonyl group (preferably having  10  to 20  carbon atoms), an alkyloxyalkyloxy group (preferably hav› ing 5 to 20 carbon atoms), and a cycloalkylalkyloxyalkyloxy  group (preferably having 8 to 20 carbon atoms). 