US 2020/0050106 Al  57  Feb. 13, 2020  TABLE 3-1  Condition for application of resist  Com- posi› tion  Example 1  R-1  Example 2  R-2  Example 3  R-3  Example 4  R-4  Example 5  R-5  Example 6  R-6  Example 7  R-7  Example 8  R-8  Example 9  R-9  Example 10  R-10  Example 11  R-11  Example 12  R-12  Example 13  R-13  Example 14  R-14  Example 15  R-15  Example 16  R-16  Example 17  R-17  Example 18  R-18  Example 19  R-19  Example 20  R-20  Example 21  R-21  Example 22  R-22  Example 23  R-23  Example 24  R-24  Example 25  R-25  Example 26  R-26  Example 27  R-27  Example 28  R-28  Example 29  R-29  Example 30  R-30  Example 31  R-31  Example 32  R-32  Comparative  R-33  Example 1  Comparative  R-34  Example 2  Comparative  R-35  Example 3  Comparative  R-36  Example 4  Comparative  R-37  Example 5  Comparative  R-38  Example 6  Comparative  R-39  Example 7  Base  UL-1  UL-1  UL-1  UL-1  UL-2  UL-2  UL-1  UL-1  UL-1  UL-1  UL-1  UL-2  UL-2  UL-1  UL-1  UL-1  UL-1  UL-2  UL-1  UL-1  UL-1  UL-2  UL-1  UL-1  UL-1  UL-1  UL-1  UL-1  UL-2  UL-1  UL-1  UL-1  UL-1  UL-2  UL-1  UL-1  UL-1  UL-1  UL-2  Film  thick- ness  (nm)  30  35  25  30  35  30  35  30  35  35  30  35  30  30  25  40  35  30  30  30  35  30  30  50  45  35  30  40  40  30  30  35  30  35  35  35  61  61  65  PEE-Development condition  Baking  PEB  100°  C./60 seconds  120°  C./60 seconds  120°  C./60 seconds  90°  C./60 seconds  100°  C./60 seconds  90°  C./60 seconds  90°  C./60 seconds  105°  C./30 seconds  100°  C./60 seconds  100°  C./50 seconds  100°  C./45 seconds  120°  C./60 seconds  120°  C./60 seconds  120°  C./60 seconds  100°  C./60 seconds  110°  C./60 seconds  90°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  120°  C./45 seconds  100°  C./60 seconds  100°  C./60 seconds  120°  C./60 seconds  100°  C./60 seconds  100°  C./50 seconds  120°  C./60 seconds  90°  C./60 seconds  90°  C./60 seconds  100°  C./60 seconds  105°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  120°  C./60 seconds  90°  C./60 seconds  100°  C./60 seconds  110°  C./60 seconds  90°  C./60 seconds  105°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  90°  C./60 seconds  120°  C./30 seconds  105°  C./30 seconds  100°  C./60 seconds  100°  C./60 seconds  90°  C./60 seconds  90°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  60°  C./60 seconds  120°  C./60 seconds  120°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  90°  C./90 seconds  90°  C./90 seconds  100°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  120°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  100°  C./60 seconds  90°  C./60 seconds  90°  C./60 seconds  100°  C./60 seconds  90°  C./90 seconds  100°  C./60 seconds  110°  C./60 seconds  90°  C./60 seconds  105°  C./60 seconds  100°  C./60 seconds  105°  C./60 seconds  100°  C./60 seconds  105°  C./60 seconds  Devel- Rinsing  oper  liquid  D-2  D-2  D-2  D-4  D-2  D-1  D-2  D-2  D-2  D-3  D-2  D-2  D-5  D-2  D-2  D-2  D-3  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-2  D-6  D-6  D-7  D-6  D-6  D-6  D-6  D-7  D-6  D-7  D-6  D-7  D-6  D-6  D-6  D-6  D-6  D-6  D-7  D-6  D-7  D-6  D-6  D-6  D-6  D-6  D-6  D-7  D-6  D-6  D-7  D-6  D-7  D-6  D-6  D-6  D-6  D-6  D-6  Characteristic value of resist  Concentration  (% by mass)  A  of solid  content  Value  L\.LUMO  1.4  1.6  1.2  1.3  1.6  1.4  1.4  1.4  1.6  1.5  1.4  1.6  1.6  1.4  1.3  1.9  1.5  1.4  1.5  1.5  1.6  1.3  1.4  2.3  2.1  1.5  1.5  2.1  1.8  1.3  1.4  1.5  1.4  1.6  1.5  1.6  2.7  2.8  2.8  0.15  0.18  0.14  0.17  0.17  0.20  0.22  0.14  0.16  0.18  0.20  0.21  0.14  0.17  0.17  0.20  0.22  0.17  0.17  0.16  0.18  0.20  0.16  0.16  0.16  0.17  0.23  0.16  0.24  0.20  0.16  0.18  0.11  0.12  0.11  0.11  0.17  0.19  0.20  1.19  0.61  1.18  1.36  0.62  0.94  0.42  1.18  1.30  0.49  0.69  0.42  1.65  1.86  0.98  1.51  0.42  1.94  0.48  0.13  0.06  0.29  0.79  0.98  0.49  0.62  0.42  1.86  0.42  0.53  0.89  0.90  1.14  1.18  1.57  0.13  0.28  0.90  0.46  Example 1  Example 2  Example 3  Example 4  Example 5  Example 6  Example 7  Example 8  Example 9  Example 10  Example 11  Example 12  Example 13  Example 14  Example 15  Acid  value  (mmol/g)  2.00  1.62  3.24  2.67  1.90  0.94  0.94  3.31  1.62  2.02  1.00  1.37  3.03  1.04  1.00  Acid  diffusion  length  6  8  12  9  15  10  11  7  6  5  13  14  10  11  7  Characteristic value of resist  Size  (A 3 )  of acid  generated  437/257  271  257  252  257/270  347  585/270  437/257  585  437  585  257  437  257  585  Amount (content:  % by mass) of  photoacid generator  25.0  20.0  15.0  26.0  16.0  20.0  16.0  21.0  14.0  12.0  20.0  14.0  20.0  20.0  18.0  Tg  (" c.)  102  105  108  99  126  92  107  124  101  114  99  118  124  98  101  Sensitivity  (mJ/cm 2 )  9.8  9.4  19.9  20.0  21.0  20.0  20.0  33.0  34.0  33.6  35.0  33.6  36.0  42.0  41.6  Evaluation result  LER  (nm)  4.1  3.9  3.0  2.6  2.7  2.2  2.2  2.3  2.1  2.0  1.9  1.6  2.2  1.9  1.7  Z-Factor  (mJ  *  nm 3 )  1.32E-0.8  1.14E-0.8  1.37E-08  1.08E-08  1.22E-08  7.74E-09  7.74E-09  1.40E-08  1.20E-08  1.08E-08  1.0lE-08  6.88E-09  1.39E-08  1.21E-08  9.62E-09  Collapse  (nm)  17  16  17  15  16  17  17  17  16  17  16  17  17  16  13 