US 9,423,690 B2  Page 2  (52)  U.S. Cl.  CPC .......  H0JL  2110273  (2013.01);  H0JL  2110274  (2013.01)  FOREIGN PATENT DOCUMENTS  OTHER PUBLICATIONS  Written Opinion dated Nov. 12, 2013, issued by the International  Searching Authority in counterpart International Application No.  PCT/JP2013/072485.  Notification of Reasons for Refusal from the Japanese Patent Office  dated May 12, 2015 in a counterpart Japanese application No.  2013-054401.  Notice of Submission of Opinion dated Jun. 10, 2016, issued by the  Korean Intellectual Property Office in corresponding KR Applica› tion No. 10-2015-7004408.  * cited by examiner  (56)  References Cited  (51)  Int. Cl.  C0SF  220126  C0SF  220120  H0JL  211027  C0SF  14118  C0SF  16110  C0SF  24100  G03F  7120  G03F  71039  G03F  7132  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  (2006.01)  8,795,948 B2 *  8,802,352 B2 *  8,841,060 B2 *  8,883,396 B2 *  9,017,924 B2 *  2005/0064327 Al  2010/0055608 Al*  2010/0136485 Al *  2011/0236826 Al *  2011/0236831 Al *  2011/0300485 Al  8/2014 Dazai et al. ............... 430/270.1  8/2014 Ichikawa et al. .......... 430/270.1  9/2014 Kataoka et al. ........... 430/270.1  11/2014 Yahagi et al. ............. 430/270.1  4/2015 Takaki et al. .............. 430/270.1  3/2005 Yasunami et al.  3/2010 Ohashi et al. ............. 430/270.1  6/2010 Hasegawa et al. ........... 430/296  9/2011 Hatakeyama et al. ..... 430/270.1  9/2011 Hasegawa et al. ........ 430/285.1  12/2011 Tsubaki et al.  U.S. PATENT DOCUMENTS  2012/0208124 Al*  2012/0328987 Al*  2013/0022911 Al *  2013/0084523 Al*  2013/0189619 Al*  2013/0209936 Al *  2013/0260312 Al *  2014/0186769 Al*  8/2012 Iwashita et al. ........... 430/270.1  12/2012 Hatakeyama et al. ..... 430/285.1  1/2013 Utsumi et al. ............. 430/270.1  4/2013 Nakamura et al ......... 430/270.1  7/2013 Komuro et al. ........... 430/270.1  8/2013 Hatakeyama et al. ..... 430/285 .1  10/2013 Suzuki et al. ............. 430/270.1  7/2014 Kaiho et al. ............... 430/285.1  JP  JP  JP  JP  WO  2005-275282  A  2010-217884 A  2012-073398  A  2013-174715 A  2013/047092  Al  10/2005  9/2010  4/2012  9/2013  4/2013 