(19) (12) EUROPEAN PATENT SPECIFICATION (11) EP 2 000 008 B1 (86) International application number:  PCT/US2007/064961 (87) International publication number:  WO 2007/112370 (04.10.2007 Gazette 2007/40) (22) Date of filing:  26.03.2007 (21) Application number:  07759411.7 (45) Date of publication and mention  of the grant of the patent:  27.04.2011 Bulletin 2011/17 (84) Designated Contracting States:  AT BE BG CH CY CZ DE DK EE ES FI FR GB GR  HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE  SI SK TR (30) Priority: 26.03.2006 US 743786 P (43) Date of publication of application:  10.12.2008 Bulletin 2008/50 (73) Proprietor:  Lotus Applied Technology, Llc Beaverton, OR 97006-1997 (US) (72) Inventors:  • DICKEY, Eric R. Beaverton, Oregon 97006 (US) (74) Representative:  Hoarton, Lloyd Douglas Charles Forrester & Boehmert  Pettenkoferstrasse 20-22 80336 Munich (DE) • BARROW, William A. Beaverton, Oregon 97006 (US) (54) ATOMIC LAYER DEPOSITION SYSTEM AND METHOD FOR COATING FLEXIBLE SUBSTRATES ATOMLAGENABSCHEIDUNGSSYSTEM UND VERFAHREN ZUR BESCHICHTUNG VON  FLEXIBLEN SUBSTRATEN DISPOSITIF ET PROCEDE DE DEPOT EN COUCHES ATOMIQUES POUR REVETEMENT DE  SUBSTRATS FLEXIBLES EP-A1- 1 795 625 WO-A2-2008/057625 JP-A- 04 187 772 KR-A- 20040 035 083 US-A1- 2005 172 897 US-B1- 6 174 377 US-B2- 6 888 172 (56) References cited:  C23C16/455 (2006.01) H05B33/10 (2006.01) C23C16/54 (2006.01) (51) Int Cl.: EP 000 008 B1 Note: Within nine months of the publication of the mention of the grant of the European patent in the European Patent Bulletin, any person may give notice to the European Patent Office of opposition to that patent, in accordance with the Implementing Regulations. Notice of opposition shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention). Printed by Jouve, 75001 PARIS (FR)