EP 2 000 008 B1 REFERENCES CITED IN THE DESCRIPTION Patent documents cited in the description Non-patent literature cited in the description This list of references cited bytheapplicant is forthe reader’s convenience only.Itdoes notform part of the European patent document. Even though great care has been taken in compiling the references, errorsor omissions cannot be excluded and the EPOdisclaims all liability in this regard. • US 4058430 A, Suntola  [0002] • US 20040208994 A1, Härkönen  [0002] • US 20040124131 A1, Aitchison  [0002] • US 20050011555 A1, Maula-  [0002] • US 6888172 B2  [0006] • Atomic Layer Epitaxy. Blackie and Son Ltd, 1990 [0002] 19