US 2012/0003590 Al  16  Jan. 5, 2012  a divalent nitrogen-containing non-aromatic heterocyclic  group, a divalent aromatic ring group, or a group formed by a  combination thereof.  [0159]  The alkylene group of L$_{11 }$ may be linear or  branched. The alkylene group is preferably an alkylene hav› ing a carbon number of 1 to 8, more preferably an alkylene  group having a carbon number of 1 to 6, still more preferably  an alkylene group having a carbon number of 1 to 4.  [0160]  The alkenylene group ofL$_{11 }$includes, for example,  a group having a double bond at an arbitrary position of the  above-described alkylene group.  [0161]  The divalent aliphatic hydrocarbon ring group as  L$_{11 }$ may be either monocyclic or polycyclic. The divalent  aliphatic hydrocarbon ring group is preferably a divalent ali› phatic hydrocarbon ring group having a carbon number of 5 to  12, more preferably a divalent aliphatic hydrocarbon ring  group having a carbon number of 6 to 10.  [0162]  The divalent aromatic ring group as the linking  group may be an arylene group or a heteroarylene group. The  aromatic ring group preferably has a carbon number of 6 to  14. This aromatic ring group may further have a substituent.  [0163]  Examples of -NR- and divalent nitrogen-con› taining non-aromatic heterocyclic group as the linking group  are the same as those of respective groups in X$_{11 }$above.  [0164]  L$_{11 }$ is preferably an alkylene group, a divalent ali› phatic hydrocarbon ring group, or a group formed by com› bining an alkylene group and a divalent aliphatic hydrocarbon  ring group through -OCO-,  ---0- or ----CONH- (for  example, -alkylene group-O-alkylene group-, -alkylene  group-OCO-alkylene group-, or -divalent aliphatic hydrocar› bon ring group-O-alkylene group-, or -alkylene group› CONH-alkylene group-).  [0165]  Specific examples of -NR- and divalent nitro› gen-containing non-aromatic heterocyclic group in X$_{12 }$and  X$_{13 }$are the same as those of respective groups in X$_{11 }$ above,  and preferred examples are also the same.  [0166]  X$_{12 }$ is preferably a single bond, -S-, ---0-,  -CO-, -SO$_{2}$ - or a group formed by a combination  thereof, more preferably a single bond, -S-, -OCO- or  -OSO$_{2}$ -.  [0167]  X$_{13 }$ is preferably -0-, -CO-, -SO$_{2}$ - or a  group formed by a combination thereof, more preferably  -OSO$_{2}$ -.  [  0168]  Ar $_{1 }$represents a divalent aromatic ring. The divalent  aromatic ring group may be an arylene group or a het› eroarylene group. This divalent aromatic ring group may  further have a substituent. Examples of the substituent  include an alkyl group, an alkoxy group and an aryl group.  [0169]  Ar$_{1 }$ is preferably an arylene group having a carbon  number of 6 to 18, which may have a substituent, or an  aralkylene group formed by combining an arylene group  having a carbon number of 6 to 18 and an alkylene group  having a carbon number of 1 to 4, more preferably a phe› nylene group, a naphthylene group, a biphenylene group, or a  phenylene group substituted with a phenyl group.  [0170]  L$_{12 }$ represents an alkylene group, an alkenylene  group, a divalent aliphatic hydrocarbon ring group, a divalent  aromatic ring group, or a group formed by a combination of  two or more thereof, and in these groups, hydrogen atoms are  partially or entirely substituted for by a substituent selected  from a fluorine atom, an alkyl fluoride group, a nitro group  and a cyano group. In the group formed by a combination, two  or more groups combined may be the same as or different  from each other. Also, these groups may be connected  through ---0-, -S-, -CO-, -SO$_{2}$-, -NR- (R is a  hydrogen atom or an alkyl group), a divalent nitrogen-con› taining non-aromatic heterocyclic group, a divalent aromatic  ring group, or a group formed by a combination thereof.  [0171]  L$_{12 }$is preferably an alkylene group or divalent aro› matic ring group with hydrogen atoms being partially or  entirely substituted for by a fluorine atom or an alkyl fluoride  group (more preferably a perfluoroalkyl group), or a group  formed by a combination thereof, more preferably an alky› lene group or divalent aromatic ring group with hydrogen  atoms being partially or entirely substituted for by a fluorine  atom. L$_{12 }$is still more preferably an alkylene group or diva› lent aromatic ring group where from 30 to 100% by number of  hydrogen atoms are substituted for by a fluorine atom.  [0172]  The alkylene group of L$_{12 }$ may be linear or  branched. This alkylene group preferably has a carbon num› ber of 1 to 6, more preferably from 1 to 4.  [0173]  Examples of the alkenylene group ofL$_{12 }$include a  group having a double bond at an arbitrary position of the  above-described alkylene group.  [0174]  The divalent aliphatic hydrocarbon ring group of  L$_{12 }$may be monocyclic or polycyclic. This divalent aliphatic  hydrocarbon ring group is preferably a divalent aliphatic  hydrocarbon ring group having a carbon number of 3 to 17.  [0175]  Examples of the divalent aromatic ring group as L$_{12 }$ are the same as those described above as the linking group in  L11.  [0176]  Specific examples of -NR- and divalent nitro› gen-containing non-aromatic heterocyclic group as the link› ing group in L$_{12 }$are the same as those of respective groups in  X$_{11 }$above, and preferred examples are also the same.  [0177]  Z$_{1 }$ represents a moiety working out to a sulfonic acid  group upon irradiation with an actinic ray or radiation, and  specific examples thereof include a structure represented by  formula  (ZI).  [0178]  The moiety represented by formula  (L2) is  described below.  [0179]  Ar$_{2 }$ represents a divalent aromatic ring group. The  divalent aromatic ring group may be an arylene group or a  heteroarylene group. The divalent aromatic ring group pref› erably has a carbon number of 6 to 18. This divalent aromatic  ring group may further have a substituent.  [0180]  X$_{21 }$ represents ---0-, -S-, -CO-, -SO$_{2}$ -,  -NR- (Risa hydrogen atom or an alkyl group), a divalent  nitrogen-containing non-aromatic heterocyclic group, or a  group formed by a combination thereof.  [0181]  Examples of -NR- and divalent nitrogen-con› taining non-aromatic heterocyclic group in X$_{21 }$ are the same  as those described above for X $_{11}$ .  [0182]  X$_{21 }$is preferably-O-, -S-, -CO-, -SO$_{2}$ - or a group formed by a combination thereof, more preferably  ---0-, ---OCO- or -OSO$_{2}$ -.  [0183]  X$_{22 }$ represents a single bond, -0-, -S-,  -CO-, -SO$_{2}$ -,  -NR- (R is a hydrogen atom or an  alkyl group), a divalent nitrogen-containing non-aromatic  heterocyclic group, or a group formed by a combination  thereof. Examples of-NR-and divalent nitrogen-contain› ing non-aromatic heterocyclic group in X$_{22 }$are the same as  those described above for X$_{11}$.  [0184]  X$_{22 }$is preferably -0-,  -S-, -CO-, -SO$_{2}$ - or a group formed by a combination thereof, more preferably  ---0-, ---OCO- or -OSO$_{2}$ -.  [0185]  L$_{21 }$represents a single bond, an alkylene group, an  alkenylene group, a divalent aliphatic hydrocarbon ring 