X-ray pushing of a mechanical microswing
  Nanoelectromechanical Systems (NEMS) are among the best candidates to measure interactions at nanoscale [1-6], especially when resonating oscillators are used with high quality factor [7, 8]. Despite many efforts [9, 10], efficient and easy actuation in NEMS remains an issue [11]. The mechanism that we propose, thermally mediated Center Of Mass (COM) displacements, represents a new actuation scheme for NEMS and MEMS. To demonstrate this scheme efficiency we show how mechanical nanodis- placements of a MEMS is triggered using modulated X-ray microbeams. The MEMS is a microswing constituted by a Ge microcrystal attached to a Si microcantilever. The interaction is mediated by the Ge absorption of the intensity modulated X-ray microbeam impinging on the microcrystal. The small but finite thermal expansion of the Ge microcrystal is large enough to force a nanodisplacement of the Ge microcrystal COM glued on a Si microlever. The inverse mechanism can be envisaged: MEMS can be used to shape X-ray beams. A Si microlever can be a high frequency X-ray beam chopper for time studies in biology and chemistry. 
A. Siria, M. S. Rodrigues, O. Dhez, W. Schwartz, G. Torricelli, S. Le   Denmat, N. Rochat, G. Auvert, O. Bikondoa, T. H. Met...