A New Four States High Deflection Low Actuation Voltage Electrostatic   Mems Switch for RF Applications
  This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$\mu$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated. 
Renaud Robin, Salim Touati, Karim Segueni, Olivier Millet, Lionel   Buchaillot (IEMN)