Design and Fabrication of a Novel Micro Electromagnetic Actuator
  The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure. 
C.-Y. Lee, Zgen-Hui Chen, Hsien-Tseng Chang, Chiang-Ho Cheng,   Chih-Yung Wen