Electron Optic Design of Arrayed E-Beam Microcolumns Based Systems for   Wafer Defects Inspection
  In this paper is considered a matter of the system for wafer defect inspection (WDIS) practical realization. Such systems are on the agenda as the next generation and substitution for light optics and single $e$-beam based WDISs. 
V.V. Kazmiruk, T.N. Savitskaja