Development and Application of a Diaphragm Micro-Pump with Piezoelectric   Device
  In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 5mm x 8mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system is designed and implemented. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz. 
H.K. Ma, B.R. Hou, H.Y. Wu, C.Y. Lin, J.J. Gao, M.C. Kou