Sub-$\mu$ structured Lotus Surfaces Manufacturing
  Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 micrometers high. 
M. Worgull, M. Heckele, T. Mappes, B. Matthis, G. Tosello, T. Metz, J.   Gavillet (LETI), P. Koltay, H. N. Hansen