Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical   Study and Design of a Parametric Device
  Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results. 
L. Grasser (IEF), H. Mathias (IEF), F. Parrain (IEF), X. Le Roux   (IEF), J.-P. Gilles (IEF)