Fabrication of thin diamond membranes for photonic applications
  High quality, thin diamond membranes containing nitrogen-vacancy centers provide critical advantages in the fabrication of diamond-based structures for a variety of applications, including wide field magnetometry, photonics and bio-sensing. In this work we describe, in detail, the generation of thin, optically-active diamond membranes by means of ion implantation and overgrowth. To establish the suitability of our method for photonic applications, photonic crystal cavities with quality factor of 1000 are fabricated. 
Jonathan C. Lee, Andrew P. Magyar, David O. Bracher, Igor Aharonovich   and Evelyn L. Hu
cond-mat.mtrl-sci physics.optics