Geant4 Simulation of a filtered X-ray Source for Radiation Damage   Studies
  Geant4 low energy extensions have been used to simulate the X-ray spectra of industrial X-ray tubes with filters for removing the uncertain low energy part of the spectrum in a controlled way. The results are compared with precisely measured X-ray spectra using a silicon drift detector. Furthermore, this paper shows how the different dose rates in silicon and silicon dioxide layers of an electronic device can be deduced from the simulations. 
M. Guthoff, O. Brovchenko, W. de Boer, A. Dierlamm, T. M\"uller, A.   Ritter, M. Schmanau, H.-J. Simonis
physics.ins-det