Periodically patterned columnar thin films as Blazed gratings
  Periodically patterned columnar thin films (PP-CTFs) were made by evaporating CaF2 and directing the vapor flux obliquely towards lithographically fabricated micrometer/sub-micrometer gratings. The growth of the PP-CTFs was controlled by the deposition rate to form prismatic air cavities within them and they function like blazed diffraction gratings with asymmetric diffraction patterns and diffraction efficiencies upto 52% in transmission at visible wavelengths. Scalar diffraction theory qualitatively explained the measured diffraction efficiencies. 
Jhuma Dutta, S. Anantha Ramakrishna, Akhlesh Lakhtakia
physics.optics