A combination of capillary assembly and dielectrophoresis for wafer   scale integration of carbon nanotubes-based electrical and mechanical devices
  The wafer scale integration of carbon nanotubes (CNT) remains a challenge for electronic and electromechanical applications. We propose a novel CNT integration process relying on the combination of controlled capillary assembly and buried electrode dielectrophoresis (DEP). This process enables to monitor the precise spatial localization of a high density of CNTs and their alignment in a pre-defined direction. Large arrays of independent and low resistivity (4.4 x 10^-5 {\Omega}.m) interconnections were achieved using this hybrid assembly with double-walled carbon nanotubes (DWNT). Finally, arrays of suspended individual CNT carpets have been realized and we demonstrate their potential use as functional nano-electromechanical systems (NEMS) by monitoring their resonance frequencies (ranging between 1.7 MHz to 10.5MHz) using a Fabry-Perot interferometer. 
Florent Seichepine, Sven Salomon, Ma\'eva Collet, Samuel Guillon,   Liviu Nicu, Guilhem Larrieu, Emmanuel Flahaut, Christoph...
cond-mat.mtrl-sci