Mid-IR-laser microscopy as a tool for defect investigation in bulk   semiconductors
  A non-destructive optical technique described in this paper is an effective new tool for the investigation of defects in semiconductors. The basic instrument for this technique---a mid-IR-laser microscope---being sensitive to accumulations of free carriers enables the study of both accumulations of electrically-active defects or impurities in bulk semiconductors and doped domains in semiconductor structures. The optical beam induced scattering mode of this microscope is designed for the investigation of recombination-active defects but unlike EBIC it requires neither Schottky barrier or p--n junction nor special preparation of samples 
O. V. Astafiev, V. P. Kalinushkin and V. A. Yuryev
cond-mat.mtrl-sci cond-mat.mes-hall physics.optics