Fabrication of surface-patterned ZnO thin films using sol-gel methods   and nanoimprint lithography
  Surface-patterned ZnO thin films were fabricated by direct imprinting on ZnO sol and subsequent annealing process. The polymer-based ZnO sols were deposited on various substrates for the nanoimprint lithography and converted to surface-patterned ZnO gel films during the thermal curing nanoimprint process. Finally, crystalline ZnO films were obtained by subsequent annealing of the patterned ZnO gel films. The optical characterization indicates that the surface patterning of ZnO thin films can lead to an enhanced transmittance. Large-scale ZnO thin films with different patterns can be fabricated by various easy-made ordered templates using this combination of sol-gel and nanoimprint lithography techniques. 
Shuxi Dai, Yang Wang, Dianbo Zhang, Xiao Han, Qing Shi, Shujie Wang,   Zuliang Du
cond-mat.mtrl-sci cond-mat.mes-hall cond-mat.soft physics.chem-ph