Effects of Lithographic Stitching Errors on the Performance of Waveguide   Bragg Gratings
  We investigate the performance of waveguide Bragg gratings as a function of imperfections introduced in the fabrication process. Effects of stitching errors introduced in the electron-beam and UV-lithography are discussed in details. 
Steve Zamek, Mercedeh Khajavikhan, Dawn T.H. Tan, Maurice Ayache,   Boris Slutsky, and Yeshaiahu Fainman
physics.optics