Etching suspended superconducting hybrid junctions from a multilayer
  A novel method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor - insulator - normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated. 
Hung Q. Nguyen (NEEL), Laetitia Pascal (NEEL), Z. H. Peng (NEEL),   Olivier Buisson (NEEL), B. Gilles (SIMAP), Clemens Winke...
cond-mat.supr-con