Efficient on-chip source of microwave photon pairs in superconducting   circuit QED
  We describe a scheme for the efficient generation of microwave photon pairs by parametric downconversion in a superconducting transmission line resonator coupled to a Cooper pair box serving as an artificial atom. By properly tuning the first three levels with respect to the cavity modes, the down-conversion probability may become higher than in the most efficient schemes for optical photons. We show this by numerically simulating the dissipative quantum dynamics of the coupled cavity-box system and discuss the effects of dephasing and relaxation. The setup analyzed here might form the basis for a future on-chip source of entangled microwave photons. 
Florian Marquardt