Fabrication of alignment structures for a fiber resonator by use of   deep-ultraviolet lithography
  We present a novel method to mount and align an optical-fiber-based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed.   From the measured finesses we calculate the coupling loss of the SU-8 structures acting as a kind of fiber splice to be smaller than 0.013 dB. 
X. Liu, K.-H. Brenner, M. Wilzbach, M. Schwarz, T. Fernholz, J.   Schmiedmayer