Integrated Cell Manipulation Systems
  A new type of microfluidic system for biological cell manipulation, a CMOS/microfluidic hybrid, is demonstrated. The hybrid system starts with a custom-designed CMOS (complementary metal-oxide semiconductor) chip fabricated in a semiconductor foundry using standard integration circuit technology. A microfluidic channel is post-fabricated on top of the CMOS chip to provide biocompatible environment. The motion of individual biological cells that are tagged with magnetic beads is directly controlled by the CMOS chip that generates localized magnetic filed patterns using an on-chip array of micro-electromagnets. The speed and the programmability of the CMOS chip further allow for the dynamic reconfiguration of the magnetic fields, substantially increasing the manipulation capability of the hybrid system. The concept of a hybrid system is verified by simultaneously manipulating individual biological cells with microscopic resolution. A new operation protocol that exploits the fast speed of electronics to trap and move a large number of cells with less power consumption is also demonstrated. Combining the advantages of microelectronics, the CMOS/microfluidic hybrid approach presents a new model for a multifunctional lab-on-a chip for biological and medical applications. 
Hakho Lee, Yong Liu, Donhee Ham, Robert M. Westervelt