Integrated silicon optomechanical transducers and their application in   atomic force microscopy
  This chapter describes the basic design, simulation, and fabrication for fully Si integrated, waveguide coupled, optomechanical force and displacement sensors. The approach of full Si integration of all stationary nanophotonic components with mechanically separated movable components creates the opportunity to independently engineer these two parts for a variety of MEMS and NEMS sensing applications that require high precision, high bandwidth, and small footprint. Further integration of actuators for static and dynamic actuation is also possible. 
Jie Zou, Marcelo Davanco, Yuxiang Liu, Thomas Michels, Kartik   Srinivasan, Vladimir Aksyuk
cond-mat.mes-hall cond-mat.mtrl-sci