Physical limitations to the spatial resolution of solid-state detectors
  In this paper we explore the effect of $\delta$-ray emission, fluctuations in th e signal deposition on the detection of charged particles in silicon-based detec tors. We show that these two effects ultimately limit the resolution that can be achieved by interpolation of the signal in finely segmented position-sensitive solid-state devices. 
M. Boronat, C. Marinas, A. Frey, I. Garcia, B. Schwenker, M. Vos, F.   Wilk
physics.ins-det hep-ex