Measurements of Spatial Resolution of ATLAS Pixel Detectors
  Standard as well as irradiated silicon pixel detectors developed for the ATLAS experiment were tested in a beam. Digital and analog resolutions were determined comparing the positions measured by a microstrip telescope and by the pixel detector. Digital resolutions of 10 um and analog resolutions of 6 um (before irradiation) and 10 um (after irradiation) are obtained without subtracting the error on the position determined by the telescope. 
T. Lari