Mechanical Dissipation in Silicon Flexures
  The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92um thick <110> single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to phi = 4.4E-7. 
S. Reid, G. Cagnoli, D.R.M. Crooks, J. Hough, P. Murray, S. Rowan,   M.M. Fejer, R. Route, S. Zappe