High-Quality Planar high-Tc Josephson Junctions
  Reproducible high-Tc Josephson junctions have been made in a rather simple two-step process using ion irradiation. A microbridge (1 to 5 ?m wide) is firstly designed by ion irradiating a c-axis-oriented YBa2Cu3O7-? film through a gold mask such as the non-protected part becomes insulating. A lower Tc part is then defined within the bridge by irradiating with a much lower fluence through a narrow slit (20 nm) opened in a standard electronic photoresist. These planar junctions, whose settings can be finely tuned, exhibit reproducible and nearly ideal Josephson characteristics. This process can be used to produce complex Josephson circuits. 
N. Bergeal, X. Grison, J. Lesueur, G. Faini, M. Aprili, J. P. Contour