Epitaxial growth and transport properties of Nb-doped SrTiO$_{3}$ thin   films
  Nb-doped SrTiO$_{3}$ epitaxial thin films have been prepared on (001) SrTiO$_{3}$ substrates using pulsed laser deposition. A high substrate temperature ($>1000^{\circ}{C}$) was found to be necessary to achieve 2-dimensional growth. Atomic force microscopy reveals atomically flat surfaces with 3.9 \AA $ $ steps. The films show a metallic behavior, residual resistivity ratios between 10 and 100, and low residual resistivity of the order of 10$^{-4}$$\Omega$cm. At 0.3 K, a sharp superconducting transition, reaching zero resistance, is observed. 
K. S. Takahashi, D. Jaccard, K. Shibuya, T. Ohnishi, M. Lippmaa, J.-M.   Triscone