Island, pit and groove formation in strained heteroepitaxy
  We study the morphological evolution of strained heteroepitaxial films using a kinetic Monte Carlo method in three dimensions. The elastic part of the problem uses a Green's function method. Isolated islands are observed under deposition conditions for deposition rates slow compared with intrinsic surface roughening rates. They are semi-spherical and truncated conical for high and low temperature cases respectively. Annealing of films at high temperature leads to the formation of closely packed islands consistent with an instability theory. At low temperature, pits form via a layer-by-layer nucleation mechanism and subsequently develop into grooves. 
M.T. Lung, Chi-Hang Lam, and Leonard M. Sander