Extreme ultraviolet spectrometer based on a transmission electron   microscopy grid
  We performed extreme ultraviolet spectroscopy using an 80 lines/mm TEM mesh as dispersive element. We present the usefulness of this instrument for dispersing a high harmonic spectrum from the 13th to the 29th harmonic of a Ti:Sapph laser, corresponding to a wavelength range from 60 to 27 nm. The resolution of the instrument is limited by the image size of the high harmonic generation region on the detector. The best resolution in first order diffraction is under 2 nm over the entire spectral range. 
Emily Sistrunk and Markus G\"uhr
physics.optics