A new cantilever beam-rigid-body MEMS gyroscope: mathematical model and   linear dynamics
  A new microbeam-rigid-body gyroscope is introduced and its static and dynamic behaviours are studied. The main structure includes a microbeam and an eccentric end-rigid-body influencing the dynamic and static characteristics of the sensor. The sensitivity of the device and the effect of system parameters on the microsystem's response are investigated. 
Seyed Amir Mousavi Lajimi, Glenn Heppler, Eihab Abdel-Rahman
physics.class-ph math.AP