Magnetic Resonance Force Detection using a Membrane Resonator
  The availability of compact, low-cost magnetic resonance imaging instruments would further broaden the substantial impact of this technology. We report highly sensitive detection of magnetic resonance using low-stress silicon nitride (SiN$_x$) membranes. We use these membranes as low-loss, high-frequency mechanical oscillators and find they are able to mechanically detect spin-dependent forces with high sensitivity enabling ultrasensitive magnetic resonance detection. The high force detection sensitivity stems from their high mechanical quality factor $Q\sim10^6$ combined with the low mass of the resonator. We use this excellent mechanical force sensitivity to detect the electron spin magnetic resonance using a SiN$_x$ membrane as a force detector. The demonstrated force sensitivity at 300 K is 4 fN/$\sqrt{\mathrm{Hz}}$, indicating a potential low temperature (4 K) sensitivity of 25 aN/$\sqrt{\mathrm{Hz}}$. Given their sensitivity, robust construction, large surface area and low cost, SiN$_x$ membranes can potentially serve as the central component of a compact room-temperature ESR and NMR instrument that has superior spatial resolution to conventional approaches. 
Nicolas Scozzaro, Will Ruchotzke, Amanda Belding, Jeremy D.   Cardellino, Erick C. Blomberg, Brendan A. McCullian, Vidya P. ...
cond-mat.mes-hall