Smart packaging of electronics and integrated MEMS devices using LTCC
  Low Temperature Cofired Ceramics (LTCC) has been a popular multi layer ceramic (MCM) packaging material for many electronic applications. The main advantage with LTCC would be its ability to embed a major part of the electronic circuit within itself, apart from its enhanced RF functionality as against many lossy materials used. The advantages of LTCC in terms of frequency response, cost, ease of fabrication, etc over many other packaging materials are presented. The applicability of LTCC as a packaging material, circuit mounting material, substrate material or a base material for micro devices is discussed. Switches and filters fabricated on LTCC as a substrate are presented and their enhanced functionality is shown. Planar switches and RF MEMS switches on LTCC are discussed with regard to their isolation, insertion losses, return losses, repeatability, quality factor, parasitic effects and frequency response. Concern is also shown to parameters like actuation voltages, actuation times and complexity of fabrication. The parameters studied with design and fabrication of filters is also discussed, like Q factor, dispersive effects, limits on frequencies, etc. Discussion is also done with regard to LTCC as a base material for MEMS sensors and actuators and the performance variables of the same. Fabrication process parameters are presented. The important issue of feasibility of integration with microelectronic integrated circuitry is discussed and its effects are shown. 
Suhas Kumar and A. M. Vadiraj
cond-mat.mtrl-sci