Calibration of higher eigenmodes of cantilevers
  A method is presented for calibrating the higher eigenmodes (resonance modes) of atomic force microscopy cantilevers that can be performed prior to any tip-sample interaction. The method leverages recent efforts in accurately calibrating the first eigenmode by providing the higher-mode stiffness as a ratio to the first mode stiffness. A one-time calibration routine must be performed for every cantilever type to determine the power-law relationship between stiffness and frequency, which is then stored for future use on similar cantilevers. Then, future calibrations only require a measurement of the ratio of resonance frequencies and the stiffness of the first mode. This method is verified through stiffness measurements using three independent approaches: interferometric measurement, AC approach-curve calibration, and finite element analysis simulation. Power-law values for calibrating higher-mode stiffnesses are reported for three popular multifrequency cantilevers. Once the higher-mode stiffnesses are known, the amplitude of each mode can also be calibrated from the thermal spectrum by application of the equipartition theorem. 
Aleksander Labuda, Marta Kocun, Tim Walsh, Jieh Meinhold, Tania   Proksch, Waiman Meinhold, Martin Lysy and Roger Proksch
cond-mat.mes-hall