One-dimensional Modelling of Electrostatic Generation and Detection of   Bulk Acoustic Waves in layered structures
  This paper is devoted to the unidimensional analysis of a 2-ports silicon resonator vibrating in thickness--extensional mode. Both excitation and detection ports are capacitive transducers used to control the system of longitudinal elastic waves established along the thickness of a layered structure. The analysis consists of integrating the capacitive transduction of longitudinal elastic waves within a specific implementation of the general scheme of impedance methods largely used as standard tools for the modelling of RF-MEMS. 
Lilia Arapan, Mihaela Ivan and Bernard Dulmet
physics.ins-det cond-mat.mes-hall