Travel to Attend:  32nd International Symposium on Electron,Ion and Photon Beams, Fort Lauderdale, Florida              May 31 - June 2, 1988
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This grant will facilitate increased University participation in the            32nd International Symposium on Electron, Ion and Photon Beams, to be           held May 31 -June 3, 1988 in Fort Lauderdale, Florida.  This is the             outstanding conference on microfabrication; it is a cross-disciplinary          conference that focuses in a way that few other conferences do on the           complement of high resolution lithography, dry etch transfer,                   materials science, surface chemistry and innovative devices of reduced          dimension.  There are other conferences that address each of the                subject areas separately, and to some extent, but not with the                  emphasis on microfabrication for the advancement of the science of              microstructures.  An important feature that distinguishes this                  conference is the archival publication of all accepted papers in the            Journal of Vacuum Science and Technology; we may thus disseminate the           important results of this conference to a wide audience.
{'FirstName': 'Evelyn', 'LastName': 'Hu', 'PI_MID_INIT': 'L', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Evelyn L Hu', 'EmailAddress': 'ehu@seas.harvard.edu', 'NSF_ID': '000159522', 'StartDate': '05/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of California-Santa Barbara', 'CityName': 'SANTA BARBARA', 'ZipCode': '931060001', 'PhoneNumber': '8058934188', 'StreetAddress': '3227 CHEADLE HALL', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '24', 'CONGRESS_DISTRICT_ORG': 'CA24', 'ORG_UEI_NUM': 'G9QBQDH39DF4', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF CALIFORNIA, SANTA BARBARA', 'ORG_PRNT_UEI_NUM': None}
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[{'Code': '145600', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}, {'Code': '151700', 'Text': 'EPMD-ElectrnPhoton&MagnDevices'}]
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