Investigation and Modeling of Processes for VLSI
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Cassandra Queen', 'PO_EMAI': 'cqueen@nsf.gov', 'PO_PHON': '7032925383'}
Efforts are underway to model critical elements of silicon and other            semiconductor fabrication technologies.  In particular, optical                 lithographic techniques in the submicron range will be studied, and the         oxidation procedures in silicon technology as they pertain to VLSI and          submicron features will be examined.
[{'FirstName': 'A.', 'LastName': 'Neureuther', 'PI_MID_INIT': 'R', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'A. R Neureuther', 'EmailAddress': None, 'NSF_ID': '000316968', 'StartDate': '04/01/1985', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'William', 'LastName': 'Oldham', 'PI_MID_INIT': 'G', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'William G Oldham', 'EmailAddress': None, 'NSF_ID': '000327029', 'StartDate': '04/01/1985', 'EndDate': None, 'RoleCode': 'Principal Investigator'}]
{'Name': 'University of California-Berkeley', 'CityName': 'BERKELEY', 'ZipCode': '947101749', 'PhoneNumber': '5106433891', 'StreetAddress': '1608 4TH ST STE 201', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '12', 'CONGRESS_DISTRICT_ORG': 'CA12', 'ORG_UEI_NUM': 'GS3YEVSS12N6', 'ORG_LGL_BUS_NAME': 'REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '145600', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1984&All=true', 'xml': '8420688.xml'}