Engineering Research Equipment Grant:  Suss MJB3 Deep UV    Mask Aligner
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Cassandra Queen', 'PO_EMAI': 'cqueen@nsf.gov', 'PO_PHON': '7032925383'}
This grant is for a deep UV photolithography system to support the              many research projects of the Semiconductor Device Laboratory at the            University of Virginia.  This laboratory is a world leader in the               development of solid-state devices for low-noise, high frequency                receiver applications.  Although we have had great success with our             current standard UV system, our ambitious plans for the next                    generation of high freuqency devices require feature sizes far beyond           it's capability.  Deep UV lithogrpahy is the most feasible technology           for this work because it can achieve the required resolution (<0.5 um)          at a modest cost in terms of both capital investment and maintenance.           The new devices that will be developed with this system will help to            revolutionize high frequency receiver technology in terms of both               sensitivity and maximum operating frequency.  This will benefit many            researchers who rely on these receivers for work in such areas as               radio astronomy, chemical spectroscopy, plasma diagnostics,                     atmospheric research and high frequency communications and imaging              systems.
[{'FirstName': 'Thomas', 'LastName': 'Crowe', 'PI_MID_INIT': 'W', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Thomas W Crowe', 'EmailAddress': 'crowe@vadiodes.com', 'NSF_ID': '000202977', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Robert', 'LastName': 'Mattauch', 'PI_MID_INIT': 'J', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Robert J Mattauch', 'EmailAddress': 'rjmattau@vcu.edu', 'NSF_ID': '000223489', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}, {'FirstName': 'Arthur', 'LastName': 'Lichtenberger', 'PI_MID_INIT': 'W', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Arthur W Lichtenberger', 'EmailAddress': 'awl1l@virginia.edu', 'NSF_ID': '000106823', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}]
{'Name': 'University of Virginia Main Campus', 'CityName': 'CHARLOTTESVILLE', 'ZipCode': '229034833', 'PhoneNumber': '4349244270', 'StreetAddress': '1001 EMMET ST N', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Virginia', 'StateCode': 'VA', 'CONGRESSDISTRICT': '05', 'CONGRESS_DISTRICT_ORG': 'VA05', 'ORG_UEI_NUM': 'JJG6HU8PA4S5', 'ORG_LGL_BUS_NAME': 'RECTOR & VISITORS OF THE UNIVERSITY OF VIRGINIA', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '145600', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1988&All=true', 'xml': '8807680.xml'}