Heat Transfer Analysis of Transient Thermal Processing of   Multilayer Thin Film Structures
{'Code': '07030000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CMMI', 'LongName': 'Div Of Civil, Mechanical, & Manufact Inn'}}
{'SignBlockName': 'George F. Keyser', 'PO_EMAI': None, 'PO_PHON': None}
Transient thermal processing is an essential step in multilayer                 thin film fabrication for electronic devices. Major hurdles in                  current thermal processing techniques are the material defects,                 such as warpage and slip, caused by thermal stresses due to                     temperature gradients in the thin-film structures.  During the                  proposed investigation, a numerical technique will be developed                 to predict the temperature distribution in a multilayer thin film               structure at all times during thermal processing.  The technique                will simulate complex geometries of films with variable optical                 and thermal properties, will allow for phase change, and will                   include stationary and variable heat sources.  Parametric study                 following the development will focus on two emerging transient                  thermal processing technologies, Zone Melting Recrystallization                 (ZMR) and Rapid Thermal Annealing (RTA), where there is immediate               need for thermal analysis.  The technique will be tested                        experimentally on "large scale" models of the thin film                         structure.
{'FirstName': 'Ioannis', 'LastName': 'Miaoulis', 'PI_MID_INIT': 'N', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Ioannis N Miaoulis', 'EmailAddress': 'imiaoulis@mos.org', 'NSF_ID': '000092896', 'StartDate': '01/15/1989', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Tufts University', 'CityName': 'SOMERVILLE', 'ZipCode': '021442401', 'PhoneNumber': '6176273696', 'StreetAddress': '169 HOLLAND ST', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Massachusetts', 'StateCode': 'MA', 'CONGRESSDISTRICT': '07', 'CONGRESS_DISTRICT_ORG': 'MA07', 'ORG_UEI_NUM': 'WL9FLBRVPJJ7', 'ORG_LGL_BUS_NAME': 'TRUSTEES OF TUFTS COLLEGE', 'ORG_PRNT_UEI_NUM': 'S6ZWCYHRQQB3'}
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