Study of Atomic and Molecular Processes Associated with the Fragmentation of Etchant Gas Plasma Constituents
{'Code': '07020000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CBET', 'LongName': 'Div Of Chem, Bioeng, Env, & Transp Sys'}}
{'SignBlockName': 'MILTON J LINEVSKY', 'PO_EMAI': None, 'PO_PHON': None}
The etching of silicon compounds by electron beams releases a                   plasma cloud of etchant gases such as NF3, CF4, and SF6.  These                 gases interfere with the electron beam, as they get further                     excited and broken up by the incoming electrons.  Such process is               complicated by the radiative interactions, ionization, and the                  participation of admixed gases or substrate atoms.  This grant                  aims at the elucidation of these overlapping processes by such                  combined diagnostics approaches of time-of-flight spectroscopy,                 mass spectrometry, and, if necessary, laser induced fluorescence.               The evolvement of a reliable interaction model would be extremely               useful to the silicon processing industries.
{'FirstName': 'Kurt', 'LastName': 'Becker', 'PI_MID_INIT': 'H', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Kurt H Becker', 'EmailAddress': 'kurt.becker@nyu.edu', 'NSF_ID': '000222031', 'StartDate': '02/15/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Lehigh University', 'CityName': 'BETHLEHEM', 'ZipCode': '180153008', 'PhoneNumber': '6107583021', 'StreetAddress': '526 BRODHEAD AVE', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Pennsylvania', 'StateCode': 'PA', 'CONGRESSDISTRICT': '07', 'CONGRESS_DISTRICT_ORG': 'PA07', 'ORG_UEI_NUM': 'E13MDBKHLDB5', 'ORG_LGL_BUS_NAME': 'LEHIGH UNIVERSITY', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
[{'Code': '140700', 'Text': 'CFS-Combustion & Fire Systems'}, {'Code': '912000', 'Text': 'CROSS-DIRECTORATE PROGRAMS'}]
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1986&All=true', 'xml': '8614513.xml'}