Engineering Research Equipment Grant:  Reactive-Ion Etching System
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Cassandra Queen', 'PO_EMAI': 'cqueen@nsf.gov', 'PO_PHON': '7032925383'}
The Semiconductor Device Laboratory at the University of Virginia will          purchase a Reactive-Ion Etching system to support continuing advances           in the technology of devices for use at sub-millimeter radio                    wavelengths.  This laboratory has fabricated Schottky diodes which have         been used successfully as radio-frequency mixers at frequencies as high         as 2500 Gigahertz.  Devices for use at these frequencies and beyond             require dimensions of less than one micron.  Such dimensions are                achieved only with difficulty and imperfectly by current methods of             chemical "wet" etching.  Further advances in increasing maximum                 operating frequency, reducing noise, and reducing conversion loss in            sub-millimeter wave devices require alternatives to wet chemical                etching.  The widely acknowledged feasible and necessary alternative is         Reactive-Ion (Dry) Etching.
{'FirstName': 'Robert', 'LastName': 'Mattauch', 'PI_MID_INIT': 'J', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Robert J Mattauch', 'EmailAddress': 'rjmattau@vcu.edu', 'NSF_ID': '000223489', 'StartDate': '08/01/1985', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of Virginia Main Campus', 'CityName': 'CHARLOTTESVILLE', 'ZipCode': '229034833', 'PhoneNumber': '4349244270', 'StreetAddress': '1001 EMMET ST N', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Virginia', 'StateCode': 'VA', 'CONGRESSDISTRICT': '05', 'CONGRESS_DISTRICT_ORG': 'VA05', 'ORG_UEI_NUM': 'JJG6HU8PA4S5', 'ORG_LGL_BUS_NAME': 'RECTOR & VISITORS OF THE UNIVERSITY OF VIRGINIA', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '145600', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1985&All=true', 'xml': '8506241.xml'}