Semiconductor Processing By Electron Beam Pulse - Induced Surface Reactions
{'Code': '07030000', 'Directorate': {'LongName': 'Directorate For Engineering'}, 'Division': {'LongName': 'Div Of Civil, Mechanical, & Manufact Inn'}}
{'SignBlockName': 'name not available'}
None
{'FirstName': 'Allen', 'LastName': 'Kirkpatrick', 'EmailAddress': 'allenk@epion.com', 'StartDate': '10/01/1979', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Spire Corporation', 'CityName': 'BEDFORD', 'ZipCode': '017302396', 'PhoneNumber': '7812756000', 'StreetAddress': '1 PATRIOTS PARK', 'CountryName': 'United States', 'StateName': 'Massachusetts', 'StateCode': 'MA'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1979&All=true', 'xml': '7917715.xml'}