Industry/University Cooperative Research:  Collisional and  Optical Phenomena in Plasmas Used in Microelectronic        Processes
{'Code': '03090105', 'Directorate': {'Abbreviation': 'MPS', 'LongName': 'Direct For Mathematical & Physical Scien'}, 'Division': {'Abbreviation': 'CHE', 'LongName': 'Division Of Chemistry'}}
{'SignBlockName': 'Alfons Weber', 'PO_EMAI': None, 'PO_PHON': None}
This research involves a collaborative theoretical and experimental             study relevant to microelectronics processing.  The results are                 expected to have significant applications to an important area of               technology and to contribute to basic knowledge about fundamental               atomic and molecular processes in a plasma environment.  The widespread         use of plasmas in the dry processing of electronic devices has renewed          interest in the chemistry and physics of low pressure, low temperature          glow discharges.  Anistropic etching can be achieved by a synergism of          ion and neutral heterogeneous chemistry.  It is of crucial importance           to investigate the plasma electric fields and collisional phenomena             which govern the anistropy of ion transport and influence the                   plasma-surface chemistry.
{'FirstName': 'Millard', 'LastName': 'Alexander', 'PI_MID_INIT': 'H', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Millard H Alexander', 'EmailAddress': 'mha@umd.edu', 'NSF_ID': '000108259', 'StartDate': '08/01/1985', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of Maryland, College Park', 'CityName': 'COLLEGE PARK', 'ZipCode': '207425100', 'PhoneNumber': '3014056269', 'StreetAddress': '3112 LEE BUILDING', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Maryland', 'StateCode': 'MD', 'CONGRESSDISTRICT': '04', 'CONGRESS_DISTRICT_ORG': 'MD04', 'ORG_UEI_NUM': 'NPU8ULVAAS23', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF MARYLAND, COLLEGE PARK', 'ORG_PRNT_UEI_NUM': 'NPU8ULVAAS23'}
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[{'Code': '1917', 'Text': 'THEORETICAL CHEMICAL PHYSICS'}, {'Code': '1954', 'Text': 'QUANTUM CALCULATIONS'}, {'Code': '9110', 'Text': 'INDUSTRY/UNIV COOP RESEAR'}]
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