Engineering Creativity Award:  Microwave Plasma Induced     Oxidation of Semiconductor
{'Code': '07050000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'EEC', 'LongName': 'Div Of Engineering Education and Centers'}}
{'SignBlockName': 'Sue Kemnitzer', 'PO_EMAI': None, 'PO_PHON': None}
The objective of the research is to develop the means to                        obtain micro-scale thermal/energy measurements during the CVD                   oxidation processes in order to establish a quantum-based                       transport model.  This model is used over a broad spectrum of                   conditions and materials.  The model is applied to process                      related problems with fine architecture VHSIC type devices.                                                                                                     This project is one supported under the Creativity Awards for                   Undergraduate Engineering Students.
{'FirstName': 'Dennis', 'LastName': 'Hess', 'PI_MID_INIT': 'W', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Dennis W Hess', 'EmailAddress': 'dennis.hess@chbe.gatech.edu', 'NSF_ID': '000207917', 'StartDate': '10/15/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of California-Berkeley', 'CityName': 'BERKELEY', 'ZipCode': '947101749', 'PhoneNumber': '5106433891', 'StreetAddress': '1608 4TH ST STE 201', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '12', 'CONGRESS_DISTRICT_ORG': 'CA12', 'ORG_UEI_NUM': 'GS3YEVSS12N6', 'ORG_LGL_BUS_NAME': 'REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE', 'ORG_PRNT_UEI_NUM': None}
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{'Code': '1360', 'Text': 'EWFD-Eng Workforce Development'}
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