Workshop - Application of Plasma and Lasers in Electronics, Chemical, and Material Processing (San Diego State          University; February 23-24, 1987)
{'Code': '07020000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CBET', 'LongName': 'Div Of Chem, Bioeng, Env, & Transp Sys'}}
{'SignBlockName': 'Robert M. Wellek', 'PO_EMAI': None, 'PO_PHON': None}
This project is a workshop on the use of plasmas and lasers in                  electronic material processing.  The workshop is to be held at San              Diego State University on February 23 and 24, 1987.  The topics covered         relate to dry processing methods and include:  plasma etching                   mechanisms, molecule-surface-interactions, application of molecular             spectroscopy to diagnostics of etching and chemical vapor deposition,           and applications of laser to microelectronics fabrication.  The                 workshop includes a panel discussion focusing on critical scientific            and technical issues that need further extensive research and on new            methods to be developed for material processing in the future.
[{'FirstName': 'Jay', 'LastName': 'Harris', 'PI_MID_INIT': 'H', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Jay H Harris', 'EmailAddress': None, 'NSF_ID': '000165368', 'StartDate': '07/01/1986', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Tung', 'LastName': 'Chuang', 'PI_MID_INIT': 'J', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Tung J Chuang', 'EmailAddress': None, 'NSF_ID': '000296140', 'StartDate': '07/01/1986', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Long', 'LastName': 'Lee', 'PI_MID_INIT': 'C', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Long C Lee', 'EmailAddress': 'llee@mail.sdsu.edu', 'NSF_ID': '000468692', 'StartDate': '07/01/1986', 'EndDate': None, 'RoleCode': 'Principal Investigator'}]
{'Name': 'San Diego State University Foundation', 'CityName': 'SAN DIEGO', 'ZipCode': '921821901', 'PhoneNumber': '6195945731', 'StreetAddress': '5250 CAMPANILE DR', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '51', 'CONGRESS_DISTRICT_ORG': 'CA51', 'ORG_UEI_NUM': 'H59JKGFZKHL7', 'ORG_LGL_BUS_NAME': 'SAN DIEGO STATE UNIVERSITY FOUNDATION', 'ORG_PRNT_UEI_NUM': 'H59JKGFZKHL7'}
{'Name': 'San Diego State University', 'CityName': 'San Diego', 'StateCode': 'CA', 'ZipCode': '921151338', 'StreetAddress': '5300 Campanile Drive', 'CountryCode': 'US', 'CountryName': 'United States', 'StateName': 'California', 'CountryFlag': '1', 'CONGRESSDISTRICT': '51', 'CONGRESS_DISTRICT_PERF': 'CA51'}
[{'Code': '140300', 'Text': 'Proc Sys, Reac Eng & Mol Therm'}, {'Code': '141400', 'Text': 'INTERFAC PROCESSES & THERMODYN'}, {'Code': '151700', 'Text': 'EPMD-ElectrnPhoton&MagnDevices'}]
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