X-Ray Nanolithography (REU and Women, Minority and          Handicapped Engineering Research Assistants)
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Kristen M. Biggar, N-BioS', 'PO_EMAI': None, 'PO_PHON': None}
This extremely innovative research proposes to develop an               integrated system for X-ray lithography for features less than 100nm            in width.  This is a factor of 10 smaller than currently obtainable on          a reproducible basis.  This system concept involves both the                    development of an appropriate mask technology using electron beam               exposure, and ultra-precise techniques to expose photo resist on                substrates using these masks in a proximity mode with an X-ray photon           source.  Nothing like this on this size scale has been done before,             and the availability of this kind of technology would constitute a              significant breakthrough with certain implications for the study of             physics, biological scale structures, and new electronic device                 concepts.
{'FirstName': 'Henry', 'LastName': 'Smith', 'PI_MID_INIT': 'I', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Henry I Smith', 'EmailAddress': 'hismith@mit.edu', 'NSF_ID': '000194593', 'StartDate': '09/15/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Massachusetts Institute of Technology', 'CityName': 'CAMBRIDGE', 'ZipCode': '021394301', 'PhoneNumber': '6172531000', 'StreetAddress': '77 MASSACHUSETTS AVE', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Massachusetts', 'StateCode': 'MA', 'CONGRESSDISTRICT': '07', 'CONGRESS_DISTRICT_ORG': 'MA07', 'ORG_UEI_NUM': 'E2NYLCDML6V1', 'ORG_LGL_BUS_NAME': 'MASSACHUSETTS INSTITUTE OF TECHNOLOGY', 'ORG_PRNT_UEI_NUM': 'E2NYLCDML6V1'}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
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{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1987&All=true', 'xml': '8709806.xml'}