Equipment:  A Study of the Effect of Pulse Modulation on    Microwave Plasma Etching
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Lawrence Goldberg', 'PO_EMAI': None, 'PO_PHON': None}
The objective of the Research Initiation Award is to investigate the            use of variably pulsed microwave plasma sources for the anisotropic             etching of silicon.  We plan to show that the modulation of pulse               length and duty cycle can effect etching characteristics such as etch           selectivity between Si and Si02 and vertical and lateral etch rates.            We plan to show that a pulsed discharge can maintain an etch rate               similar to that of a continuous discharge with the resulting benefit            of a reduced average power consumption.  the proposed research is               intended to improve the etching characteristics of microwave plasma             sources and improve the understanding of the surface chemistry that             takes place within these devices.
{'FirstName': 'John', 'LastName': 'Gahl', 'PI_MID_INIT': None, 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'John Gahl', 'EmailAddress': None, 'NSF_ID': '000269851', 'StartDate': '07/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of New Mexico', 'CityName': 'ALBUQUERQUE', 'ZipCode': '87131', 'PhoneNumber': '5052774186', 'StreetAddress': '1700 LOMAS BLVD NE STE 2200', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'New Mexico', 'StateCode': 'NM', 'CONGRESSDISTRICT': '01', 'CONGRESS_DISTRICT_ORG': 'NM01', 'ORG_UEI_NUM': 'F6XLTRUQJEN4', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF NEW MEXICO', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
[{'Code': '151700', 'Text': 'EPMD-ElectrnPhoton&MagnDevices'}, {'Code': '912000', 'Text': 'CROSS-DIRECTORATE PROGRAMS'}]
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1988&All=true', 'xml': '8811786.xml'}