Engineering Research Equipment Grant:  In-Situ              Characterization During CVD
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Cassandra Queen', 'PO_EMAI': 'cqueen@nsf.gov', 'PO_PHON': '7032925383'}
The PI will acquire equipment to be used for characterizing the growth          of dielectric layers during chemical vapor deposition.  This requested          equipment will be used in conjunction with a research CVD reactor at            CSU devoted to the study of dielectric deposition on a variety of III-V         compounds and on Si.  Such low temperature insulators are of critical           importance in the development of sub-micron devices on Si and in the            fabrication of high performance devices and integrated circuits on the          compound semiconductors.  Such components offer considerable potential          for fulfilling next generation electronics requirements and the                 requested equipment will support current research at CSU (NASA/AF-RADC)         as well as proposed research (SDIO-IST) in this area.
{'FirstName': 'Derek', 'LastName': 'Lile', 'PI_MID_INIT': 'L', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Derek L Lile', 'EmailAddress': None, 'NSF_ID': '000463970', 'StartDate': '07/15/1986', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Colorado State University', 'CityName': 'FORT COLLINS', 'ZipCode': '805212807', 'PhoneNumber': '9704916355', 'StreetAddress': '601 S HOWES ST', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Colorado', 'StateCode': 'CO', 'CONGRESSDISTRICT': '02', 'CONGRESS_DISTRICT_ORG': 'CO02', 'ORG_UEI_NUM': 'LT9CXX8L19G1', 'ORG_LGL_BUS_NAME': 'COLORADO STATE UNIVERSITY', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '145600', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1986&All=true', 'xml': '8604879.xml'}