Microelectromechanical Engineering Research Program
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'george hazelrigg', 'PO_EMAI': None, 'PO_PHON': None}
The Electrical, Mechanical and Chemical Engineering Departments and             the Materials Science and Physics Departments will participate in this          research activity to gain a fundamental understanding of the                    properties of microelectromechanical devices and systems so as to be            able to carry out experimental research.  In addition, this group will          conduct research to develop improved process technology for                     fabrication of three dimensional microcomponents and the design of a            demonstrative micro-control system.  This research program is                   organized into three components:                                                                                                                                          o    mechanical characterization of micro-components made of                         semiconductors, metal and ceramics, including static,                           dynamic fatigue, and tribological properties;                                                                                                              o    development of improved dry etching and multiple layer                          fabrication processes and studies of assembly                                   techniques of microsystems and;                                                                                                                            o    study and design of a one dimensional displacement                              control system for biomedical and applications to probe                         neural activities or as a tool for microsurgery in the                          brain.
[{'FirstName': 'Richard', 'LastName': 'Hoffman', 'PI_MID_INIT': 'W', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Richard W Hoffman', 'EmailAddress': None, 'NSF_ID': '000278088', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Joseph', 'LastName': 'Lee', 'PI_MID_INIT': None, 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Joseph Lee', 'EmailAddress': None, 'NSF_ID': '000236795', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Wen', 'LastName': 'Ko', 'PI_MID_INIT': 'H', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Wen H Ko', 'EmailAddress': 'whk@cwru.edu', 'NSF_ID': '000285840', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}, {'FirstName': 'Joseph', 'LastName': 'Mansour', 'PI_MID_INIT': 'M', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Joseph M Mansour', 'EmailAddress': 'jmm12@po.cwru.edu', 'NSF_ID': '000161253', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Massood', 'LastName': 'Tabib-Azar', 'PI_MID_INIT': None, 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Massood Tabib-Azar', 'EmailAddress': 'M.Tabib-Azar@utah.edu', 'NSF_ID': '000170962', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}]
{'Name': 'Case Western Reserve University', 'CityName': 'CLEVELAND', 'ZipCode': '441061712', 'PhoneNumber': '2163684510', 'StreetAddress': '10900 EUCLID AVE', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Ohio', 'StateCode': 'OH', 'CONGRESSDISTRICT': '11', 'CONGRESS_DISTRICT_ORG': 'OH11', 'ORG_UEI_NUM': 'HJMKEF7EJW69', 'ORG_LGL_BUS_NAME': 'CASE WESTERN RESERVE UNIVERSITY', 'ORG_PRNT_UEI_NUM': None}
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