Microwave Plasma Generation and Applications
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Lawrence Goldberg', 'PO_EMAI': None, 'PO_PHON': None}
This research program is on microwave production of a hot plasma in a           magnetic-mirror trap, and the application of this plasma as an x-ray or         ion source.  The areas of application to be studied are x-ray                   lithography in solid-state circuit production and multiply-charged ion          production for ion beams.  The plasma is produced and heated by                 electron cyclotron resonance heating.  The generation of a non-                 Maxwellian electron velocity distribution by cyclotron heating will be          studied experimentally and by computer simulation.  Electron cyclotron          emission will be used as a diagnostic.  The average energy and flux of          x-ray radiation from the plasma will be evaluated for lithography               applications.  The confinement properties and behavior of the plasma in         a minimum-B magnetic field will be correlated with its performance as           an ion source.
{'FirstName': 'Ward', 'LastName': 'Getty', 'PI_MID_INIT': 'D', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Ward D Getty', 'EmailAddress': None, 'NSF_ID': '000319672', 'StartDate': '02/01/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Regents of the University of Michigan - Ann Arbor', 'CityName': 'ANN ARBOR', 'ZipCode': '481091079', 'PhoneNumber': '7347636438', 'StreetAddress': '1109 GEDDES AVE, SUITE 3300', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Michigan', 'StateCode': 'MI', 'CONGRESSDISTRICT': '06', 'CONGRESS_DISTRICT_ORG': 'MI06', 'ORG_UEI_NUM': 'GNJ7BBP73WE9', 'ORG_LGL_BUS_NAME': 'REGENTS OF THE UNIVERSITY OF MICHIGAN', 'ORG_PRNT_UEI_NUM': None}
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{'Code': '1517', 'Text': 'EPMD-ElectrnPhoton&MagnDevices'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1986&All=true', 'xml': '8612912.xml'}