Large Area Electron Beam Etching of Microelectronic Films
{'Code': '07020000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CBET', 'LongName': 'Div Of Chem, Bioeng, Env, & Transp Sys'}}
{'SignBlockName': 'mary chen', 'PO_EMAI': None, 'PO_PHON': None}
Researchers will study and demonstrate large area electron beam                 assisted etching of theconventional insulators, semiconductors, and             metals used in circuit fabrication.  Large area electron beam etching           of SiO2, Si3N4 polysilicon, and crystalline silicon will be explored.           The films with various test patterns defined in single layer resist             will be etched with an electron beam etching reactordesigned and built          for this purpose.  Etch rates will be measured usingellipsometry                measurement of the film thickness in prematurely interrupted runs.              Once end point detection techniques are developed for the electron beam         plasma, they will also be used to determine etch rates.  The etch               profiles will be categorized with a profilometer and scanning electron          microscopy.  The electron beam etched structures will be categorized            with respect to possible radiation damage using both high frequency             capacitance voltage measurements and avalanche electron injection               techniques.  The effects of a post etching low temperature annel will           also be studied.
[{'FirstName': 'Jorge', 'LastName': 'Rocca', 'PI_MID_INIT': 'J', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Jorge J Rocca', 'EmailAddress': 'rocca@engr.colostate.edu', 'NSF_ID': '000416288', 'StartDate': '12/01/1984', 'EndDate': None, 'RoleCode': 'Principal Investigator'}, {'FirstName': 'George', 'LastName': 'Collins', 'PI_MID_INIT': 'J', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'George J Collins', 'EmailAddress': 'gcollins@engr.colostate.edu', 'NSF_ID': '000116832', 'StartDate': '12/01/1984', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}]
{'Name': 'Colorado State University', 'CityName': 'FORT COLLINS', 'ZipCode': '805212807', 'PhoneNumber': '9704916355', 'StreetAddress': '601 S HOWES ST', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Colorado', 'StateCode': 'CO', 'CONGRESSDISTRICT': '02', 'CONGRESS_DISTRICT_ORG': 'CO02', 'ORG_UEI_NUM': 'LT9CXX8L19G1', 'ORG_LGL_BUS_NAME': 'COLORADO STATE UNIVERSITY', 'ORG_PRNT_UEI_NUM': None}
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{'Code': '1407', 'Text': 'CFS-Combustion & Fire Systems'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1984&All=true', 'xml': '8408304.xml'}