PYI:  Growth and Applications of Thin Epitaxial             Semiconductor Layer for VLSI
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Brian J. Clifton', 'PO_EMAI': None, 'PO_PHON': None}
The growth and device applications of ultra-thin epitaxial              semiconductor layers will be investigated.  Growth experiments will             involve the application of the Limited Reaction Processing technique to         minimize the thermal exposure of strained layers.  The technique also           allows for the in-situ growth of multiple layers of different                   composition.  Such in-situ processing could be a crucial step in meeting        the uniformity and yield requirements of future generations of VLSI             technology.  The use of vapor phase source gases also gives a process           that has the potential to be easily scaled up for industry.  The device         experiments will exploit the material properties of these layers to             develop new kinds of electronic and opto-electronic devices.                    Fundamental studies of the electronic properties of these layers, and           their dependence on growth techniques, as well as actual device                 fabrication are planned.  Initial experiments will be designed to               explore the SiGe system and other silicon-based heterostructures.
{'FirstName': 'James', 'LastName': 'Sturm', 'PI_MID_INIT': 'C', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'James C Sturm', 'EmailAddress': 'sturm@Princeton.EDU', 'NSF_ID': '000201010', 'StartDate': '06/01/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Princeton University', 'CityName': 'PRINCETON', 'ZipCode': '085442001', 'PhoneNumber': '6092583090', 'StreetAddress': '1 NASSAU HALL', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'New Jersey', 'StateCode': 'NJ', 'CONGRESSDISTRICT': '12', 'CONGRESS_DISTRICT_ORG': 'NJ12', 'ORG_UEI_NUM': 'NJ1YPQXQG7U5', 'ORG_LGL_BUS_NAME': 'THE TRUSTEES OF PRINCETON UNIVERSITY', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '1456', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1986&All=true', 'xml': '8657227.xml'}