ROW: (Research Initiation) Characterization and Optimization of Ultrathin Silicon Oxynitrides Formed by Ion Implantation
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Arthur R. Bergen', 'PO_EMAI': None, 'PO_PHON': None}
The objective of the proposed research is characterization of                   ultrathin (&lt;150A) silicon nitride and oxynitride insulators formed by           high dosage, low energy (&lt;5 keV) implantation of nitrogen or nitrogen           and oxygen into single crystal silicon.  Samples will be evaluated              with measurements of junction capacitance and conductance (as                   functions of voltage and frequency), current vs. voltage,                       ellipsometry, Auger electron spectroscopy (AES), accelerated life               testing, and electrical stressing and breakdown.  Use of a temporary            mercury contact will permit evaluation of the insulator alone,                  including variations of implantation and annealing conditions; and              evaluation of films with various metals as gate contacts.  Computer             controlled measurements will permit extensive data acquisition and              analysis.
{'FirstName': 'Tina', 'LastName': 'Stacy', 'PI_MID_INIT': 'E', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Tina E Stacy', 'EmailAddress': None, 'NSF_ID': '000394139', 'StartDate': '07/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Villanova University', 'CityName': 'VILLANOVA', 'ZipCode': '190851603', 'PhoneNumber': '6105194220', 'StreetAddress': '800 E LANCASTER AVE', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Pennsylvania', 'StateCode': 'PA', 'CONGRESSDISTRICT': '05', 'CONGRESS_DISTRICT_ORG': 'PA05', 'ORG_UEI_NUM': 'EYNYSU6L8ZX6', 'ORG_LGL_BUS_NAME': 'VILLANOVA UNIVERSITY IN THE STATE OF PENNSYLVANIA', 'ORG_PRNT_UEI_NUM': 'HJEPRMTQMMR4'}
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[{'Code': '1456', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}, {'Code': '9120', 'Text': 'CROSS-DIRECTORATE PROGRAMS'}]
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1988&All=true', 'xml': '8810579.xml'}