X-Ray Instrumentation for Improved Semiconductor            Manufacturing Productivity
{'Code': '15030000', 'Directorate': {'Abbreviation': 'TIP', 'LongName': 'Dir for Tech, Innovation, & Partnerships'}, 'Division': {'Abbreviation': 'TI', 'LongName': 'Translational Impacts'}}
{'SignBlockName': 'Ritchie B. Coryell', 'PO_EMAI': None, 'PO_PHON': None}
Research on unique soft x-ray wave-length dispersive instrumentation            is proposed to fulfill important process monitor needs in the                   semiconductor industry.  ARACOR experience in designing and                     successfully applying multilayer synthetic microstructures to obtain            both wave-length discrimination and focusing of soft x-rays is                  utilized as a key parat of this work.                                                                                                                           This proposal details how the novel x-ray optic elements provide large          solid-angle collection efficiency and focusing of fluorescent soft x-           rays to yield quantitative, non-destructive measurement of elemental            materials within measurement times of one to two seconds instead of             minutes as for x-ray energy-dispersive instruments.  The rapidity of            measurement allows application as a process line monitor with the               capability of unambiguously determining the elemental concentrations            across the wafer surface. A unique and extremely significant                    application which comes directly from high flux counting is the                 ability to determine the projected range of ion implanted species.                                                                                              The proposed research in Phase I is primarily theoretical, with major           emphasis on determining the parameters characterizing the multilayer            synthetic microstructures.  The final result to be obtained in Phase I          is the design of a characterized prototype instrument.
{'FirstName': 'A.', 'LastName': 'Milgram', 'PI_MID_INIT': 'A', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'A. A Milgram', 'EmailAddress': None, 'PI_PHON': None, 'NSF_ID': '000139892', 'StartDate': '02/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Advanced Research and Applications Corporation (ARACOR)', 'CityName': 'Sunnyvale', 'ZipCode': '940864704', 'PhoneNumber': '4087337780', 'StreetAddress': '425 Lakeside Drive', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '15', 'CONGRESS_DISTRICT_ORG': 'CA15', 'ORG_UEI_NUM': None, 'ORG_LGL_BUS_NAME': None, 'ORG_PRNT_UEI_NUM': None}
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{'Code': '5371', 'Text': 'SBIR Phase I'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1987&All=true', 'xml': '8761125.xml'}