Electronic Processing Techniques for Scanning Optical       Microscopy
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'george hazelrigg', 'PO_EMAI': None, 'PO_PHON': None}
The purpose of this research is to investigate new techniques           for scanning optical microscopy.  Specifically, this research involves a        Type II mechanically scanned optical microscope and a separate                  electronically scanned Type II microscope using a Bragg cell for                scanning.  The latter device gives direct measurements of optical phase         and amplitude.  Fourier transform techniques will be used to improve the        transverse resolution of the microscope and to measure the widths of            films in the low submicron range while measuring film thicknesses with          accuracies targeted at 5-10 nm.  If successful, this microscope would           provide an order of magnitude improvement in the capability of scanning         optical microscopy, and it could contribute significantly to materials          research and to research and quality control in microelectronic devices         and emerging micromechanical devices.
{'FirstName': 'Gordon', 'LastName': 'Kino', 'PI_MID_INIT': 'S', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Gordon S Kino', 'EmailAddress': 'kino@stanford.edu', 'NSF_ID': '000454632', 'StartDate': '07/01/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Stanford University', 'CityName': 'STANFORD', 'ZipCode': '943052004', 'PhoneNumber': '6507232300', 'StreetAddress': '450 JANE STANFORD WAY', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '16', 'CONGRESS_DISTRICT_ORG': 'CA16', 'ORG_UEI_NUM': 'HJD6G4D6TJY5', 'ORG_LGL_BUS_NAME': 'THE LELAND STANFORD JUNIOR UNIVERSITY', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '1459', 'Text': 'COMMUNICATIONS SYSTEMS'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1986&All=true', 'xml': '8611638.xml'}