Fluid Dynamics and Heat/Mass Transfer in Rotating CVD       Reactors
{'Code': '07020000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CBET', 'LongName': 'Div Of Chem, Bioeng, Env, & Transp Sys'}}
{'SignBlockName': 'Maria Burka', 'PO_EMAI': None, 'PO_PHON': None}
This project is an experimental and theoretical study of fluid dynamics         and heat/mass transfer problems in rotating chemical vapor deposition           (CVD) reactors run at atmospheric pressure.  The complex geometries             make analysis of these transport phenomena very difficult.                      Conventional velocity and temperature measurement techniques are                inadequate for rotating reactors.  Temperature is measured using                miniature thermocouples, and velocity using fiber-optics laser                  velocimeters.  The theoretical analysis consists of correlating this            data for various reactor configurations.  The results could not only be         used to design new and more efficient reactors for the larger diameter          (~6 inches) wafers needed for VLSI, but will also increase basic                knowledge of the fluid dynamics of rotating flows.  The ultimate                utility of the research will be in developing industrially viable               techniques to grow highly uniform, large-size semiconductor wafers              using CVD at atmospheric pressure.
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{'Name': 'University of Utah', 'CityName': 'SALT LAKE CITY', 'ZipCode': '841129049', 'PhoneNumber': '8015816903', 'StreetAddress': '201 PRESIDENTS CIR', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Utah', 'StateCode': 'UT', 'CONGRESSDISTRICT': '01', 'CONGRESS_DISTRICT_ORG': 'UT01', 'ORG_UEI_NUM': 'LL8GLEVH6MG3', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF UTAH', 'ORG_PRNT_UEI_NUM': None}
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[{'Code': '1403', 'Text': 'Proc Sys, Reac Eng & Mol Therm'}, {'Code': '1414', 'Text': 'INTERFAC PROCESSES & THERMODYN'}]
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1985&All=true', 'xml': '8509311.xml'}