Micromechanical Component Production VIA X-Ray Lithography  and Precision Metal Plating
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'george hazelrigg', 'PO_EMAI': None, 'PO_PHON': None}
An interdisciplinary research team consisting of electrical and                 mechanical engineers will carry out fundamental research directed               toward an improved understanding of processing technology for the               fabrication of microelectromechanical devices.  This research will use          synchrotron based x-ray lithography in connection with 25 micron PMMA           (poly methyl methacrylate) photoresist layers and fine-grained                  polysilicon mask blanks with optically defined absorber patterns made           from one micron thick electroplated gold layers.  The thick                     photoresist will be exposed on Aladdin, the Wisconsin synchrotron, and          subsequent developing will produce vertical flank PMMA profiles with            one micron minimum feature sizes.  These structures will then be                electroplated to provide micromechanical devices made from the                  materials used to electroplate the silicon.                                                                                                                     Additionally, research in plating will be aimed at creating deposits            with repeatable and controlled mechanical properties and will focus on          nickel, gold, cobalt-nickel, and silver-palladium alloys.  The nickel-          cobalt alloys are intended for bearing surfaces in microelectro-                mechanical devices.  The silver alloys address contact welding                  problems in microswitch applications.                                                                                                                           The proposed process is fundamental to micromechanics and, in                   particular, lends itself to actuator construction such as miniature             gears and acceleration driven switches, in addition to numerous other           potential applications.
[{'FirstName': 'Denice', 'LastName': 'Denton', 'PI_MID_INIT': 'D', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Denice D Denton', 'EmailAddress': 'denton@ucsc.edu', 'NSF_ID': '000368579', 'StartDate': '08/15/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Edward', 'LastName': 'Lovell', 'PI_MID_INIT': 'G', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Edward G Lovell', 'EmailAddress': None, 'NSF_ID': '000325265', 'StartDate': '08/15/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Thomas', 'LastName': 'Chapman', 'PI_MID_INIT': 'W', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Thomas W Chapman', 'EmailAddress': None, 'NSF_ID': '000208264', 'StartDate': '08/15/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Henry', 'LastName': 'Guckel', 'PI_MID_INIT': None, 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Henry Guckel', 'EmailAddress': 'guckel@engr.wisc.edu', 'NSF_ID': '000182137', 'StartDate': '08/15/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}]
{'Name': 'University of Wisconsin-Madison', 'CityName': 'MADISON', 'ZipCode': '537151218', 'PhoneNumber': '6082623822', 'StreetAddress': '21 North Park Street', 'StreetAddress2': 'Suite 6301', 'CountryName': 'United States', 'StateName': 'Wisconsin', 'StateCode': 'WI', 'CONGRESSDISTRICT': '02', 'CONGRESS_DISTRICT_ORG': 'WI02', 'ORG_DUNS_NUM': '161202122', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF WISCONSIN SYSTEM', 'ORG_PRNT_DUNS_NUM': '041188822'}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
[{'Code': '1456', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}, {'Code': '1459', 'Text': 'COMMUNICATIONS SYSTEMS'}, {'Code': '1492', 'Text': 'EMERGING TECHNOLOGIES INITIAT'}, {'Code': '9120', 'Text': 'CROSS-DIRECTORATE PROGRAMS'}, {'Code': '9145', 'Text': 'SPECIAL PROGRAMS-RESERVE'}]
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1988&All=true', 'xml': '8815285.xml'}