Engineering Research Equipment Grant:  Suss MJB 3 UV 300    High Performance Aligner
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Cassandra Queen', 'PO_EMAI': 'cqueen@nsf.gov', 'PO_PHON': '7032925383'}
The equipment that we are requesting will aid us in evaluation of               processed semiconductor material.  A high performance mask-aligner is           requested to support research in microwave plasma etching of sub-               micron structures and microwave plasma thin-film deposition of oxides           and diamond.  The aligner is necessary to allow our microwave etching           work to proceed into the sub-micron feature size regime.
[{'FirstName': 'Donnie', 'LastName': 'Reinhard', 'PI_MID_INIT': 'K', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Donnie K Reinhard', 'EmailAddress': 'reinhard@egr.msu.edu', 'NSF_ID': '000291031', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Jes', 'LastName': 'Asmussen', 'PI_MID_INIT': None, 'PI_SUFX_NAME': 'Jr.', 'PI_FULL_NAME': 'Jes Asmussen', 'EmailAddress': 'asmussen@egr.msu.edu', 'NSF_ID': '000333426', 'StartDate': '09/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}]
{'Name': 'Michigan State University', 'CityName': 'EAST LANSING', 'ZipCode': '488242600', 'PhoneNumber': '5173555040', 'StreetAddress': '426 AUDITORIUM RD RM 2', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Michigan', 'StateCode': 'MI', 'CONGRESSDISTRICT': '07', 'CONGRESS_DISTRICT_ORG': 'MI07', 'ORG_UEI_NUM': 'R28EKN92ZTZ9', 'ORG_LGL_BUS_NAME': 'MICHIGAN STATE UNIVERSITY', 'ORG_PRNT_UEI_NUM': 'VJKZC4D1JN36'}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '145600', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1988&All=true', 'xml': '8806324.xml'}