Expedited Award for Novel Research:  Fabrication of Micro   Electro Mechanical Actuators and Motors
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'george hazelrigg'}
The integration of micromechanical devices on silicon chips is an               emerging technology.  Micromechanical devices, including actuators,             motors, and sensors, are projected to have applications in robotics,            instrumentation, medical probes, space-based systems, and sensor                arrays.  Recent research results have shown that moving parts, such as          gears, linkages, and motors, can be fabricated using modified silicon           processing techniques.  The proposed research seeks to develop a CVD            tungsten-on-silicon technology to fabricate fully released, movable             microstructures for actuators and motors.  Specifically, the goals of           this research include: (1) to develop a tungsten-silicon technology to          produce stress-free, movable microstructures, (2) to fabricate a                linear, electrostatic actuator with 10 micron travel using the                  tungsten-silicon technology, (3) to fabricate test structures to                measure and characterize friction and stress for tungsten-silicon               microstructure systems, (4) to fabricate a linear micromotor, and (5)           to identify the key science and technology issues for future research           and development of microelectromechanical systems.
{'FirstName': 'Noel', 'LastName': 'MacDonald', 'EmailAddress': 'nmacd@engineering.ucsb.edu', 'StartDate': '02/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Cornell University', 'CityName': 'Ithaca', 'ZipCode': '148502820', 'PhoneNumber': '6072555014', 'StreetAddress': '373 Pine Tree Road', 'CountryName': 'United States', 'StateName': 'New York', 'StateCode': 'NY'}
{'Code': '1459', 'Text': 'COMMUNICATIONS SYSTEMS'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1988&All=true', 'xml': '8805866.xml'}