Establishment of an Electron Beam Lithography Facility
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Sarah A. Clark', 'PO_EMAI': None, 'PO_PHON': None}
Electron beam writing capabilities are becoming increasingly important          for research in a wide variety of fields.  Because such electron beams          can be focussed to small dimensions, they are capable of drawing lines          which have widths which are a fraction  of the wavelength of light; that        is less than .00001 centimeters.  For engineering applications, such            widths are important in optical device and holographic design and will          become increasingly so as the field develops further.  Such e-beam              writing machines are also seeing increased use in electronic and                microwave device and systems design.                                                                                                                            The present proposed effort is for the purchase of such a machine, to be        used as a shared facility, for applications to engineering research in          emerging technologies.
{'FirstName': 'Sing', 'LastName': 'Lee', 'PI_MID_INIT': 'H', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Sing H Lee', 'EmailAddress': 'lee@ece.ucsd.edu', 'NSF_ID': '000223501', 'StartDate': '08/15/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of California-San Diego', 'CityName': 'LA JOLLA', 'ZipCode': '920930021', 'PhoneNumber': '8585344896', 'StreetAddress': '9500 GILMAN DR', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '50', 'CONGRESS_DISTRICT_ORG': 'CA50', 'ORG_UEI_NUM': 'UYTTZT6G9DT1', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF CALIFORNIA, SAN DIEGO', 'ORG_PRNT_UEI_NUM': None}
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{'Code': '1517', 'Text': 'EPMD-ElectrnPhoton&MagnDevices'}
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