Engineering Research Equipment Grant:  Surface Profiler
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Cassandra Queen', 'PO_EMAI': 'cqueen@nsf.gov', 'PO_PHON': '7032925383'}
This proposal request will assist in the purchase of surface profile            and thin film thickness measurement equipment which costs $35,135.              This equipment will be used for the accurate measurement of thin                deposited films or a thin etched layer of semiconductor material and            assist in the electrical and chemical characterization of silicon               carbide films currently grown on silicon wafers by a CVD process, but           proposed to be grown using rapid thermal annealing techniques in this           laboratory.  The equipment will significantly enhance the scope and             quality of research at the Solid State Laboratory of the Department of          Electrical Engineering, the Department of Metallurgy and the College of         Engineering Surface Analysis Laboratory.  It will contribute                    immediately to research currently being conducted, which is supported           by the Semiconductor Research Corp. and NASA, and will open future new          research avenues.
[{'FirstName': 'Richard', 'LastName': 'Kwor', 'PI_MID_INIT': 'V', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Richard V Kwor', 'EmailAddress': None, 'NSF_ID': '000085374', 'StartDate': '07/15/1986', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'William', 'LastName': 'Berry', 'PI_MID_INIT': 'B', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'William B Berry', 'EmailAddress': None, 'NSF_ID': '000276525', 'StartDate': '07/15/1986', 'EndDate': None, 'RoleCode': 'Principal Investigator'}]
{'Name': 'University of Notre Dame', 'CityName': 'NOTRE DAME', 'ZipCode': '465565708', 'PhoneNumber': '5746317432', 'StreetAddress': '940 GRACE HALL', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Indiana', 'StateCode': 'IN', 'CONGRESSDISTRICT': '02', 'CONGRESS_DISTRICT_ORG': 'IN02', 'ORG_UEI_NUM': 'FPU6XGFXMBE9', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF NOTRE DAME DU LAC', 'ORG_PRNT_UEI_NUM': 'FPU6XGFXMBE9'}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '145600', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1986&All=true', 'xml': '8604866.xml'}