Laser Based Studies of (I) Primary Dissociation Reaction Ki-netics of Chlorinated Monosilanes and Disilanes, and of (II)Absolute Trapping Reaction Kinetics of Chlorinated Silylenes
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This renewal grant, funded jointly by the Special Projects and                  Inorganic Chemistry programs, provides for the support of                       Professors O'Neal, Ring and Tong at San Diego State University, a               predominantely undergraduate institution.  The research is                      directed at providing fundamental kinetic data for the                          decomposition of chlorinated silanes, which is the basis for the                production of epitaxial silicon films, useful in the production of              microelectronic devices.                                                                                                                                        The Principal Investigators propose kinetic techniques which                    circumvent handling difficulties of chlorosilanes by integrating                two laser-based techniques: Laser Powered Homogeneous Pyrolysis to              induce reaction under wall-less conditions, and Laser Excited                   Fluoresence to monitor in-situ the reactions of the intermediates               produced in the pyrolysis.  Downstream chromatographic and mass                 spectroscopic analysis of the product gases will provide complete               kinetic and thermodynamic data.  Three co-principal investigators               with complementary backgrounds applicable to the proposed research              (gas phase kinetics and thermodynamics, inorganic synthesis and                 mechanisms and laser diagnostics and spectroscopy) will                         collaborate in directing this integrated research program.  Two                 undergraduate students will participate in the research.
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