Experimental and Theoretical Studies of Chemical            Vapor Deposition Process
{'Code': '03070004', 'Directorate': {'Abbreviation': 'MPS', 'LongName': 'Direct For Mathematical & Physical Scien'}, 'Division': {'Abbreviation': 'DMR', 'LongName': 'Division Of Materials Research'}}
{'SignBlockName': 'John C. Hurt', 'PO_EMAI': None, 'PO_PHON': None}
The research combines modelling and experiment for studying                metallorganic chemical vapor deposition of gallium aluminum                     arsenide.  The models will utilize advances made under the                      previous grant, DMR-8351249.  The following chemical vapor                      deposition reactors will be modelled:  1) three dimensional                     models of horizontal reactors, 2) optimization of the shape of                  vertical reactors, 3) optimal operating conditions and shapes for               rotating disk flow reactors, 4) time dependent simulations of                   growth of superlattice structures, 5) three dimensional flow                    structures in vertical reactors.  The modelling will be coupled                 with the experimental research which includes growth of the                     materials in existing reaction chambers for processing of                       integrated electronic materials, determination of gas phase and                 surface diffusion chemical kinetics using molecular beam sampled                mass spectrometer and thermogravimetric measurements, and                       measurement of the rate and uniformity of deposition.                                                                                                                The research will allow improvement in design of reactors                  used to process integrated electronics, improved control of the                 operation of the reactors, assurance that the components will be                uniform (thereby increasing yield and quality).
{'FirstName': 'Klavs', 'LastName': 'Jensen', 'PI_MID_INIT': 'F', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Klavs F Jensen', 'EmailAddress': 'kfjensen@mit.edu', 'PI_PHON': '6172534589', 'NSF_ID': '000339653', 'StartDate': '06/15/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of Minnesota Saint Paul', 'CityName': 'Minneapolis', 'ZipCode': '554552000', 'PhoneNumber': '6126252435', 'StreetAddress': '450 University Gateway', 'StreetAddress2': '200 Oak Street SE', 'CountryName': 'United States', 'StateName': 'Minnesota', 'StateCode': 'MN', 'CONGRESSDISTRICT': '05', 'CONGRESS_DISTRICT_ORG': 'MN05', 'ORG_UEI_NUM': None, 'ORG_LGL_BUS_NAME': None, 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '1772', 'Text': 'CERAMICS & ELECTRONIC MATERIAL'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1987&All=true', 'xml': '8704355.xml'}