Towards a Global Plasma Etching Reactor Model
{'Code': '07020000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CBET', 'LongName': 'Div Of Chem, Bioeng, Env, & Transp Sys'}}
{'SignBlockName': 'MILTON J LINEVSKY', 'PO_EMAI': None, 'PO_PHON': None}
A joint theoretical and experimental study will explore the                     etching potential of a plasma reactor.  The study will focus on                 ion transport in the context of an active chemical medium.                      Advanced diagnostics (Langmuir probes, emission spectroscopy)                   will map concentration profiles and allow for an accurate                       knowledge of non-symmetrical situations.  Chlorinated gases and                 silicon surfaces have been chosen as an example.                                                                                                                Such an approach should help understand the fine points of the                  etching process.  Ultimately it will help decide on the optimum                 etching process when the required accuracy approaches the                       molecular level.
{'FirstName': 'Demetre', 'LastName': 'Economou', 'PI_MID_INIT': 'J', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Demetre J Economou', 'EmailAddress': 'economou@uh.edu', 'NSF_ID': '000311005', 'StartDate': '07/01/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of Houston', 'CityName': 'HOUSTON', 'ZipCode': '772043067', 'PhoneNumber': '7137435773', 'StreetAddress': '4300 MARTIN LUTHER KING BLVD', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Texas', 'StateCode': 'TX', 'CONGRESSDISTRICT': '18', 'CONGRESS_DISTRICT_ORG': 'TX18', 'ORG_UEI_NUM': 'QKWEF8XLMTT3', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF HOUSTON SYSTEM', 'ORG_PRNT_UEI_NUM': None}
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{'Code': '140700', 'Text': 'CFS-Combustion & Fire Systems'}
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