Fundamental Studies of Radiofrequency Gas Discharges for    Plasma Processing
{'Code': '07020000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CBET', 'LongName': 'Div Of Chem, Bioeng, Env, & Transp Sys'}}
{'SignBlockName': 'MILTON J LINEVSKY', 'PO_EMAI': None, 'PO_PHON': None}
The fundamentals of plasma etching are not understood in general,               as so many different processes occur simultaneously, including                  substantial electrical interactions.  This study will use                       powerful diagnostics resources (spectroscopy of emission,                       fluorescence, optogalvanic methods) to elucidate the role of                    negative charges, of the rf discharge geometry and of the                       operating variables.                                                                                                                                            With such knowledge, it will become practical to devise                         predictive, quantitative methods for use in the development of                  new plasma processes.
{'FirstName': 'David', 'LastName': 'Graves', 'PI_MID_INIT': 'B', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'David B Graves', 'EmailAddress': 'dgraves@princeton.edu', 'NSF_ID': '000263653', 'StartDate': '06/15/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of California-Berkeley', 'CityName': 'BERKELEY', 'ZipCode': '947101749', 'PhoneNumber': '5106433891', 'StreetAddress': '1608 4TH ST STE 201', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '12', 'CONGRESS_DISTRICT_ORG': 'CA12', 'ORG_UEI_NUM': 'GS3YEVSS12N6', 'ORG_LGL_BUS_NAME': 'REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '1407', 'Text': 'CFS-Combustion & Fire Systems'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1987&All=true', 'xml': '8707782.xml'}