Laser Produced Plasma Soft X-Ray Lithography and Microscopy
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'Lawrence Goldberg', 'PO_EMAI': None, 'PO_PHON': None}
High peak power laser radiation focused onto a solid target can                 generate soft x-rays from the laser-produced plasma with high                   conversion efficiency.  These x-ray sources are an attractive                   laboratory-scale alternative to synchrotron radiation sources,                  stationary anodes, and pinch plasmas for the 0.3keV to 1KeV region.             The goal of this research program is to investigate the laser-produced          plasma as a source for x-ray lithography and microscopy.  The Stanford          group estimates that with 200 watts average power from their compact            solid-state slab laser which is currently under development in this             project, they should generate sufficient soft-x-ray radiation for               production-level integrated circuit wafer exposure.  They also seek to          demonstrate that the plasma source will allow soft x-ray microscopy             with resolution below 1000 Angstroms.
{'FirstName': 'Robert', 'LastName': 'Byer', 'PI_MID_INIT': 'L', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Robert L Byer', 'EmailAddress': 'byer@stanford.edu', 'NSF_ID': '000470699', 'StartDate': '01/15/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Stanford University', 'CityName': 'STANFORD', 'ZipCode': '943052004', 'PhoneNumber': '6507232300', 'StreetAddress': '450 JANE STANFORD WAY', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '16', 'CONGRESS_DISTRICT_ORG': 'CA16', 'ORG_UEI_NUM': 'HJD6G4D6TJY5', 'ORG_LGL_BUS_NAME': 'THE LELAND STANFORD JUNIOR UNIVERSITY', 'ORG_PRNT_UEI_NUM': None}
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[{'Code': '145600', 'Text': 'SOLID-STATE&MICROSTRUCTURE RES'}, {'Code': '151700', 'Text': 'EPMD-ElectrnPhoton&MagnDevices'}]
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