Design and Fabrication of Micromechanical Structures and    Microactuators
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'george hazelrigg', 'PO_EMAI': None, 'PO_PHON': None}
This project will investigate micromechanical structures based on               silicon processing technology.  These micromechanical components,               which are typically less than 1 mm2 in area and are fabricated by               integrated circuit-type manufacturing techniques, include cantilever            beams, movable elements, and suspended structures.  Research emphasis           is directed toward 1) investigation of active materials for                     micromechanical actuators, 2) the development of suitable                       microstructure processing technologies for making microactuators, 3)            the design and fabrication of piezoelectric (ZnO, AIN) microactuators,          4) the design and fabrication of microactuators based on                        magnetostrictive thin films, and 5) the implementation of several test          vehicle microactuators.  These test vehicles include piezoelectric              actuators based on surface-micromachined beam technology and movable            elements based on thin film magnetic materials.
[{'FirstName': 'Dennis', 'LastName': 'Polla', 'PI_MID_INIT': 'L', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Dennis L Polla', 'EmailAddress': 'polla@ece.umn.edu', 'NSF_ID': '000385427', 'StartDate': '02/15/1989', 'EndDate': None, 'RoleCode': 'Principal Investigator'}, {'FirstName': 'William', 'LastName': 'Robbins', 'PI_MID_INIT': 'P', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'William P Robbins', 'EmailAddress': 'robbins@umn.edu', 'NSF_ID': '000432333', 'StartDate': '02/15/1989', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}]
{'Name': 'University of Minnesota-Twin Cities', 'CityName': 'MINNEAPOLIS', 'ZipCode': '554552009', 'PhoneNumber': '6126245599', 'StreetAddress': '200 OAK ST SE', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Minnesota', 'StateCode': 'MN', 'CONGRESSDISTRICT': '05', 'CONGRESS_DISTRICT_ORG': 'MN05', 'ORG_UEI_NUM': 'KABJZBBJ4B54', 'ORG_LGL_BUS_NAME': 'REGENTS OF THE UNIVERSITY OF MINNESOTA', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
[{'Code': '1459', 'Text': 'COMMUNICATIONS SYSTEMS'}, {'Code': '1517', 'Text': 'EPMD-ElectrnPhoton&MagnDevices'}, {'Code': '9120', 'Text': 'CROSS-DIRECTORATE PROGRAMS'}]
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1988&All=true', 'xml': '8821103.xml'}