The Structure and Reactivity of Semiconductor Surfaces in   Etching and Deposition
{'Code': '03070004', 'Directorate': {'Abbreviation': 'MPS', 'LongName': 'Direct For Mathematical & Physical Scien'}, 'Division': {'Abbreviation': 'DMR', 'LongName': 'Division Of Materials Research'}}
{'SignBlockName': 'John C. Hurt', 'PO_EMAI': None, 'PO_PHON': None}
The major theme of this research is to understand and                      control atomic structure and chemical reactivity of semiconductor               surfaces, kinetics of reactions involved in etching, surface                    preparation and epitaxial deposition of crystalline                             semiconductors.  The experimental aspects of the work will                      emphasize investigation of the structure and structural changes                 of silicon surfaces exposed to various reactive chemical                        environments (e.g., adsorption site geometries, reconstruction                  and stabilization of the silicon 100 surface exposed to halogen                 atoms).  Techniques used in this portion of the work include:                   low energy electron diffraction impact collision ion scattering                 spectroscopy.  The second category of experiments will focus on                 the thermal reactions that occur on semiconductor surfaces,                     measuring the rates and energetics of the reactions.  The                       influence of surface structure on chemical reactions will be                    studied using temperature programmed desorption.
{'FirstName': 'Thomas', 'LastName': 'Mayer', 'PI_MID_INIT': 'M', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Thomas M Mayer', 'EmailAddress': None, 'NSF_ID': '000271201', 'StartDate': '01/01/1989', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of North Carolina at Chapel Hill', 'CityName': 'CHAPEL HILL', 'ZipCode': '275995023', 'PhoneNumber': '9199663411', 'StreetAddress': '104 AIRPORT DR STE 2200', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'North Carolina', 'StateCode': 'NC', 'CONGRESSDISTRICT': '04', 'CONGRESS_DISTRICT_ORG': 'NC04', 'ORG_UEI_NUM': 'D3LHU66KBLD5', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL', 'ORG_PRNT_UEI_NUM': 'N8DMK1K4C2K5'}
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{'Code': '1772', 'Text': 'CERAMICS & ELECTRONIC MATERIAL'}
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