Atomic Chlorine Source for Semiconductor Etching Studies
{'Code': '15030000', 'Directorate': {'Abbreviation': 'TIP', 'LongName': 'Dir for Tech, Innovation, & Partnerships'}, 'Division': {'Abbreviation': 'TI', 'LongName': 'Translational Impacts'}}
{'SignBlockName': 'Ritchie B. Coryell', 'PO_EMAI': None, 'PO_PHON': None}
Clean sources of atomic chlorine are required for mechanistic studies           of semiconductor etching processes.  In this proposal, we describe              modifications to an existing ultrahigh vacuum compatible, effusive              beam, microwave discharge fluorine atom source which would alow its use         as a source of chlorine atoms, and we define measurements to                    characterize and demonstrate its operation.  The modifications are              aimed primarily at reducing heterogeneous recombination of chlorine             atoms on the source walls.  The measurement techniques include                  modulated beam mass spectrometry and x-ray photoelectron spectroscopy.
{'FirstName': 'Charter', 'LastName': 'Stinespring', 'PI_MID_INIT': 'D', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Charter D Stinespring', 'EmailAddress': 'charter.stinespring@mail.wvu.edu', 'NSF_ID': '000248457', 'StartDate': '02/01/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'Aerodyne Research Inc', 'CityName': 'BILLERICA', 'ZipCode': '018213934', 'PhoneNumber': '9789320231', 'StreetAddress': '45 MANNING RD', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Massachusetts', 'StateCode': 'MA', 'CONGRESSDISTRICT': '06', 'CONGRESS_DISTRICT_ORG': 'MA06', 'ORG_UEI_NUM': 'HTMHV7AL9A86', 'ORG_LGL_BUS_NAME': 'AERODYNE RESEARCH INC', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '5371', 'Text': 'SBIR Phase I'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1986&All=true', 'xml': '8660557.xml'}