In-Situ Characterization of Solid/Solid Interfaces in       High Technology Materials by Spectroscopic Ellipsometry
{'Code': '07020000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CBET', 'LongName': 'Div Of Chem, Bioeng, Env, & Transp Sys'}}
{'SignBlockName': 'Charles Alexander Garris, Jr.', 'PO_EMAI': None, 'PO_PHON': None}
This research aims to study solid/solid interfaces of                           ion-implementation procedures in high-technology materials processing.          This nondestructive, nonperturbing technique produces results which are         in agreement with the completely independent results obtained on the            same specimens using cross-section Transmission Electron Microscopy.            The study seeks to obtain the following information:  the depth profile         of multilayer structures; the thickness of each layer; the structure            (whether crystalline or amorphous) as well as the degree of                     crystallinity in the region; characterization of the oxide layer if             present on the specimen; and characterization of the microroughness of          the surface.
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