New Routes to Thin Films of Metal Nitrides
{'Code': '03090007', 'Directorate': {'Abbreviation': 'MPS', 'LongName': 'Direct For Mathematical & Physical Scien'}, 'Division': {'Abbreviation': 'CHE', 'LongName': 'Division Of Chemistry'}}
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This project is in the area of the Materials Chemistry                          Initiative.  The investigators will examine the chemical vapor                  deposition of thin films of metal nitrides of Al, Ga, In, Mo,                   and Nb using new organometallic precursors.  Unlike previous                    routes, which employed Nitrogen or Ammonia as the source of the                 nitrogen, the precursors will make use of reactive nitrogen                     moieties such as azide.  For instance, preliminary results have                 shown that diethylaluminum azide deposits an aluminum nitride                   thin film at 400 degrees C.  It is intended that such species                   will lead to the nitride films at lower temperatures with                       greater selectivity, and their plans include the use of                         laser-and plasma-induced depositions along with the thermally                   activated processes.  The relationship between the structure of                 the precursor and the structure and properties of the film will                 be explored in detail.  A specially designed reactor will be                    used to detect reactive intermediates in the gas phase by mass                  spectrometry.  These studies along with the evaluation of the                   overall rate of deposition will lead to a better understanding                  of the relationship between the mechanism of reaction and the                   properties of the thin film.
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{'Name': 'University of Minnesota-Twin Cities', 'CityName': 'MINNEAPOLIS', 'ZipCode': '554552009', 'PhoneNumber': '6126245599', 'StreetAddress': '200 OAK ST SE', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Minnesota', 'StateCode': 'MN', 'CONGRESSDISTRICT': '05', 'CONGRESS_DISTRICT_ORG': 'MN05', 'ORG_UEI_NUM': 'KABJZBBJ4B54', 'ORG_LGL_BUS_NAME': 'REGENTS OF THE UNIVERSITY OF MINNESOTA', 'ORG_PRNT_UEI_NUM': None}
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