Engineering Research Equipment Grant:  Plasma-Enhanced      Chemical Vapor Deposition Reactor
{'Code': '07020000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CBET', 'LongName': 'Div Of Chem, Bioeng, Env, & Transp Sys'}}
{'SignBlockName': 'MILTON J LINEVSKY', 'PO_EMAI': None, 'PO_PHON': None}
Molecular-beam mass spectrometry through the wafer surface is                   used for the first time in plasma-enhanced chemical vapor                       deposition (PECVD), giving identification and measurement of                    stable species, free radicals, and ions.  The PECVD reactor                     effectively resembles commercial reactors used to fabricate                     microelectronic films, but it must be specially designed to                     accommodate this unique instrumentation.                                                                                                                        Such measurements will identify and quantify key reactive                       species, information that is critically needed to determine the                 chemical mechanisms of PECVD.  Currently, mechanisms are being                  developed from sparse literature data and from theoretical                      predictions. Data from this apparatus then will contribute to                   more accurate models.  Initial systems of interest are SiH4                     plasmas  depositing amorphous Si, and SiH4/O2 plasmas depositing                SiO2.
{'FirstName': 'Phillip', 'LastName': 'Westmoreland', 'PI_MID_INIT': 'R', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Phillip R Westmoreland', 'EmailAddress': 'phil.westmoreland@ncsu.edu', 'NSF_ID': '000252030', 'StartDate': '05/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of Massachusetts Amherst', 'CityName': 'AMHERST', 'ZipCode': '010039252', 'PhoneNumber': '4135450698', 'StreetAddress': '101 COMMONWEALTH AVE', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Massachusetts', 'StateCode': 'MA', 'CONGRESSDISTRICT': '02', 'CONGRESS_DISTRICT_ORG': 'MA02', 'ORG_UEI_NUM': 'VGJHK59NMPK9', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF MASSACHUSETTS', 'ORG_PRNT_UEI_NUM': 'VGJHK59NMPK9'}
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{'Code': '1407', 'Text': 'CFS-Combustion & Fire Systems'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1988&All=true', 'xml': '8805703.xml'}