Industry/University Cooperative Research Activity:  ChemicalKinetic and Surface Studies in Support of the Plasma EtchingMechanism
{'Code': '07020000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CBET', 'LongName': 'Div Of Chem, Bioeng, Env, & Transp Sys'}}
{'SignBlockName': 'mary chen', 'PO_EMAI': None, 'PO_PHON': None}
None
[{'FirstName': 'Peter', 'LastName': 'Gaspar', 'PI_MID_INIT': 'P', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Peter P Gaspar', 'EmailAddress': 'Gaspar@wustl.edu', 'NSF_ID': '000450827', 'StartDate': '12/01/1983', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}, {'FirstName': 'Joda', 'LastName': 'Wormhoudt', 'PI_MID_INIT': 'C', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Joda C Wormhoudt', 'EmailAddress': 'jody@aerodyne.com', 'NSF_ID': '000390047', 'StartDate': '12/01/1983', 'EndDate': None, 'RoleCode': 'Principal Investigator'}]
{'Name': 'Aerodyne Research Inc', 'CityName': 'BILLERICA', 'ZipCode': '018213934', 'PhoneNumber': '9789320231', 'StreetAddress': '45 MANNING RD', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Massachusetts', 'StateCode': 'MA', 'CONGRESSDISTRICT': '06', 'CONGRESS_DISTRICT_ORG': 'MA06', 'ORG_UEI_NUM': 'HTMHV7AL9A86', 'ORG_LGL_BUS_NAME': 'AERODYNE RESEARCH INC', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
[{'Code': '1407', 'Text': 'CFS-Combustion & Fire Systems'}, {'Code': '9110', 'Text': 'INDUSTRY/UNIV COOP RESEAR'}]
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1983&All=true', 'xml': '8306198.xml'}