Morphology, Structure, and Adhesion of Plasma-Deposited ThinFilms
{'Code': '07030000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'CMMI', 'LongName': 'Div Of Civil, Mechanical, & Manufact Inn'}}
{'SignBlockName': 'Jorn Larsen-Basse', 'PO_EMAI': None, 'PO_PHON': None}
Plasma-enhanced Chemical Vapor Deposition (PECVD) techniques are                used to deposit thin films as passivation coatings and for                      electronic and optical device structures.  The PI proposes a                    fundamental study of correlating deposition parameters with                     morphology, structure, and adhesion of the films to the                         substrate.  Si3N4 will be used as substrate in view of its wide                 application base.                                                                                                                                               The PI is a competent researcher and the proposed study has                     potential for advancing the fundamental knowledge and the                       technology base.  This project will be jointly funded by the                    Thermodynamics and Transport Phenomena Program and the Materials                Engineering and Processing Program.
{'FirstName': 'Dennis', 'LastName': 'Hess', 'PI_MID_INIT': 'W', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Dennis W Hess', 'EmailAddress': 'dennis.hess@chbe.gatech.edu', 'NSF_ID': '000207917', 'StartDate': '01/01/1987', 'EndDate': None, 'RoleCode': 'Principal Investigator'}
{'Name': 'University of California-Berkeley', 'CityName': 'BERKELEY', 'ZipCode': '947101749', 'PhoneNumber': '5106433891', 'StreetAddress': '1608 4TH ST STE 201', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'California', 'StateCode': 'CA', 'CONGRESSDISTRICT': '12', 'CONGRESS_DISTRICT_ORG': 'CA12', 'ORG_UEI_NUM': 'GS3YEVSS12N6', 'ORG_LGL_BUS_NAME': 'REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE', 'ORG_PRNT_UEI_NUM': None}
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[{'Code': '1414', 'Text': 'INTERFAC PROCESSES & THERMODYN'}, {'Code': '1446', 'Text': 'MATERIALS'}, {'Code': '9120', 'Text': 'CROSS-DIRECTORATE PROGRAMS'}]
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