Engineering Research Equipment Grant:  Reactive-Ion-Etcher/ PECVD/RF-Sputtering Equipment for Fabrication of Micro      Electro-Mechanical Systems"
{'Code': '07010000', 'Directorate': {'Abbreviation': 'ENG', 'LongName': 'Directorate For Engineering'}, 'Division': {'Abbreviation': 'ECCS', 'LongName': 'Div Of Electrical, Commun & Cyber Sys'}}
{'SignBlockName': 'george hazelrigg', 'PO_EMAI': None, 'PO_PHON': None}
This is a Research Equipment Grant for reactive-ion-etcher/PECVD/RF-            sputtering equipment to be used in research on microelectromechanical           devices.  This research project focuses on the design, analysis, and            fabrication of devices with single or numerous micron-scale internal            components forming either moveable mechanical elements, which are               actuated by strong fields, or sensor elements, which infer relative             positions of components based on local fields.  Devices to be produced          using this equipment include sensors -- such as strain gauges,                  micropositioners, and multi-axis tactile sensors -- spatial light               modulators, and actuators.  Crucial to the design of these devices is           the ability to build deep or complete cut-outs into the structure, and          to pattern metals, insulator and magnetic materials.  This equipment            will allow the on-site generation of microelectromechanical devices             requiring vertical etching principally in silicon-based materials, and          the generation of such devices requiring deposition of conductors,              insulators, and magnetic films.
[{'FirstName': 'John', 'LastName': 'Wood', 'PI_MID_INIT': 'E', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'John E Wood', 'EmailAddress': 'jw@unm.edu', 'NSF_ID': '000240064', 'StartDate': '07/01/1988', 'EndDate': None, 'RoleCode': 'Principal Investigator'}, {'FirstName': 'Stephen', 'LastName': 'Jacobsen', 'PI_MID_INIT': 'C', 'PI_SUFX_NAME': None, 'PI_FULL_NAME': 'Stephen C Jacobsen', 'EmailAddress': 's.jacobsen@sarcos.com', 'NSF_ID': '000425396', 'StartDate': '07/01/1988', 'EndDate': None, 'RoleCode': 'Co-Principal Investigator'}]
{'Name': 'University of Utah', 'CityName': 'SALT LAKE CITY', 'ZipCode': '841129049', 'PhoneNumber': '8015816903', 'StreetAddress': '201 PRESIDENTS CIR', 'StreetAddress2': None, 'CountryName': 'United States', 'StateName': 'Utah', 'StateCode': 'UT', 'CONGRESSDISTRICT': '01', 'CONGRESS_DISTRICT_ORG': 'UT01', 'ORG_UEI_NUM': 'LL8GLEVH6MG3', 'ORG_LGL_BUS_NAME': 'UNIVERSITY OF UTAH', 'ORG_PRNT_UEI_NUM': None}
{'Name': None, 'CityName': None, 'StateCode': None, 'ZipCode': None, 'StreetAddress': None, 'CountryCode': None, 'CountryName': None, 'StateName': None, 'CountryFlag': None, 'CONGRESSDISTRICT': None, 'CONGRESS_DISTRICT_PERF': '""'}
{'Code': '1459', 'Text': 'COMMUNICATIONS SYSTEMS'}
{'url': 'https://www.nsf.gov/awardsearch/download?DownloadFileName=1988&All=true', 'xml': '8806449.xml'}