Octafluorocyclobutane, or perfluorocyclobutane, C 4 F 8, is a compound of carbon and fluorine used in the production and processing of semiconductor materials and devices, for example as a deposition gas and etchant.
Octafluorocyclobutane is a compound of carbon and fluorine. Perfluorocyclobutane, C 4 F 8, is a compound of carbon and fluorine. These carbon and fluorine are used in the production and processing of semiconductor materials and devices as a deposition gas. This was for example. These carbon and fluorine are used in the production and processing of semiconductor materials and devices as etchant. This was for example.