It has a low dielectric constant (k) and is now widely adopted by semiconductor foundries on geometries sub 0.25u, also Intel started using Cu metal layers and FSG on its 1.2 GHz Pentium processor at 130 nm CMOS.
It has a low dielectric constant (k) and is now widely adopted by semiconductor foundries on geometries sub 0.25μ. Also, Intel started using Cu metal layers and FSG on its 1.2 GHz Pentium processor at 130 nm CMOS.