Octafluorocyclobutane, or perfluorocyclobutane, C 4 F 8, is a compound of carbon and fluorine used in the production and processing of semiconductor materials and devices, for example as a deposition gas and etchant.
Octafluorocyclobutane, or perfluorocyclobutane, C 4 F 8, is a compound of carbon and fluorine. Octafluorocyclobutane is used in the production and processing of semiconductor materials and devices, for example as a deposition gas and etchant.