To grow the polysilicon gate layer, which of the following chemical is used for chemical vapor deposition?
A. Silicon Nitride(Si3N4)
B. Silane gas(SiH4)
C. Silicon oxide
D. None of the mentioned
Answer:B
To grow the polysilicon gate layer, which of the following chemical is used for chemical vapor deposition?
A. Silicon Nitride(Si3N4) B. Silane gas(SiH4) C. Silicon oxide D. None of the mentioned